Emerging MEMSPatent Investigation 2014 Report by Yole Developpement

© 2014• 1
Cambridge CMOS Sensors Kaiam
Emerging MEMS
Patent Investigation
75 cours Emile Zola, F-69001 Lyon-Villeurbanne, France
Tel : +33 472 83 01 80 - Fax : +33 472 83 01 83
Web: http://www.yole.fr
2405 route des Dolines, 06902 Sophia Antipolis, France
Tel: +33 489 89 16 20
Web: http://www.knowmade.com
Patent and Scientific Information
Wavelens/CEA STMicroelectronics Saipon Sensirion Texas Instrument

© 2014•2
Copyrights © KnowMade SARL All rights reserved.–Emerging MEMS Report
A New Type of Report Providing a Clear Link between IP Situation and Market Evolutions
MorethandescribingthestatusoftheIPsituation,thisreportprovidesamissinglinkbetweenpatentedtechnologicalsolutionsandmarket,technologicalandbusinesstrends
–Knowmadehasdevelopedauniquemethodologytodefineatechnicalsegmentationofpatentlandscapeandidentifykeypatents.
–Bycombiningtheirtechnicalknowledge,businessunderstandingandpatentsearch,YoleandKnowmadeareabletoprovideuniqueanalysisandaddedvalueinthisreport.
–In-depthtechnologicalanalysisofpatentsprovidedinthisreportwillleadtounderstandingofstrategicdecisionsandpositioningofkeyplayerswithinthevaluechain.
Emerging MEMS Technology Analysis and Forecast
Emerging MEMS
IP Landscape
Yole’sStandard Reports:
•Market Analysis
•Technology Analysis
•Tear down and reverse costing analysis
Yole& Knowmade’sNew Reports:
•Patent analysis
•Technological segmentations
•Identification of key patents
•Market implication of IP landscape
•Full searchable patent database

© 2014•3
Introductionp4
TheAuthorsp5
ScopeOftheReportp6
KeyFeaturesoftheReportp7
ObjectivesoftheReportp9
Assigneementionedp10
TerminologyforPatentAnalysisp11
Methodologyp13
Rationalesforchoicep15
PatentSearchStrategyp16
PatentSelectedp19
ExecutiveSummaryp20
Overviewp21
TimeEvolutionofPatentPublicationsp22
eMEMSHistoryp23
eMEMSMarketp26
AOCMEMSp28
Autofocusp29
ChemicalSensorsp30
Micro-Speakersp31
ScanningMicro-Mirrorsp32
SiMicrofluidicp33
UltrasonicMEMSp34
eMEMSPatentInvestigationp35
AOCMEMSp36
Autofocusp62
ChemicalSensorsp87
Micro-Speakersp114
ScanningMicro-Mirrorsp136
SiMicrofluidicp163
UltrasonicMEMSp194
ForeachemergingMEMS:
TechnologyOverview
RelevantandRelatedPatents
TimeEvolutionofPatentPublications
GeographicBreakdownofPatentFilings
MainPatentAssigneesRanking
RelevantPatents
TimeEvolutionbyCountryofPublication
TimeEvolutionofTop-15PatentAssignees
CountryofPublicationforTop-15PatentAssignees
MappingofcurrentIPholders
PatentAssigneeIPNetwork
SummaryofMainAssigneePatentPortfolios
DegreeofSpecialization
LeadershipofMainPatentAssignee
ImpactFactorofMainAssigneePatentPortfolios
KeyPatentFamilies
MainPatentedTechnologiesofApplicants
Table of Contents

© 2014•4
Scope of the Report
•ThisreportprovidesadetailedpictureofthepatentlandscapeforEmergingMEMS(eMEMS).OnlypatentsrelatedtoaselectionofemergingMEMSwereconsidered:
AOCMEMS
Autofocus
ChemicalSensors
Micro-Speakers
ScanningMicro-Mirrors
SiMicrofluidic
UltrasonicMEMS
ThisreportdoesnotincludepatentsrelatedtootheremergingMEMSsuchasSwitches,IDMEMS,TouchScreen,EnergyHarvesting,Microdisplay,MicroFuelCellsorJoysticks.
•ThisreportcoverspatentspublishedworldwideuptoJune2014.Morethan1,300patentfamiliesrelevanttothescopeofthisreporthavebeenselectedandanalyzed.ThosehavebeenmanuallycategorizedbytypeofemergingMEMS.
•MarketdatafromYoleDéveloppementarealsoprovidedtoaddsomecontextregardingbusinesstrendsandmetrics.

© 2014•5
•The 2013 “Emerging MEMS” Yolereport focused on 12 different devices.
•Out the 12 devices, we have selected 7 of them as we believe they are devices that will find their marketplace:
–AOC MEMS after the telecom burst in the 2000s, photonics is the solution for future generation of data centers which are nowadays power-hungry with ever-increasing bandwidth.
–Auto Focus the market is requiring for thinner camera modules and MEMS could allow wafer level AF. Moreover, PZT thin films for actuation is gaining more interest for many MEMS applications including AF.
–Chemical sensorsenvironmental / health applications are driving the developments of low cost MEMS sensors for gas sensing.
–Micro speakers R&D is very active at the moment with new partnerships with foundry partners from fabless companies developing micro speakers.
–Scanning micro mirrors after the “hype” in the 2008-2010 time period, many companies are pursuing development again for different applications, including HUDs for cars.
–Si microfluidics gene sequencing could be the next killer application.
–Ultra-sonic MEMS we estimate first products are close to be on the market (2016)
•We did not analyzed:
–ID MEMS we believe it will be for niche markets only.
–Energy Harvesting it is unlikely MEMS will be used for energy harvesters as power generation will be very low
–Microdisplaysfirst MEMS-based displays have very low market success
–Switchesvery tiny market with only one player
–Touch Screens very early stage of development for MEMS
–Micro fuel cellsit seems MEMS is definitively out of this business
Rationales for Choice

© 2014•6
Key Features of the Report (1/2)
•Thereportprovidesessentialpatentdata,technologyanalysisandforecastforeachtypeofselectedEmergingMEMS(AOCMEMS,Autofocus,ChemicalSensors,Micro-Speakers,ScanningMicro-Mirrors,SiMicrofluidicandUltrasonicMEMS)
•Itidentifiesmorethan250patentholdersofEmergingMEMSrelatedintellectualproperty.Itprovidesin-depthanalysisofkeytechnologysegmentsandkeyplayersincluding:
–Timeevolutionofpatentpublicationsandcountriesofpatentfilings.
–Rankingofmainpatentapplicants.
–IPcollaborationnetworkofmainpatentapplicants.
–Keypatents.
–RelativestrengthofmaincompaniesIPportfolio.
–Mainpatentedtechnologiesofsomecompanies.
•ItprovidesanoverviewoftheeMEMStechnologyandmarkettrends.
•Itpresentsthepatentsrelatedtomarketedproductsforsomecompanies.

© 2014•7
Key Features of the Report (2/2)
•ThereportalsoprovidesanextensiveExceldatabasewithallpatentsanalyzedinthereportwithtechnologysegmentation.
Thisdatabaseallowsmulti-criteriasearches:
Patentinformation
Patentpublicationnumber
Hyperlinkstotheoriginaldocuments
Prioritydate
Title
Abstract
PatentAssignees
Relevant/Related
Legalstatusforeachmemberofthepatentfamily
•Thisreportdoesnotprovideanyinsightanalysesorcounselregardinglegalaspectsorthevalidityofanyindividualpatent:KnowmadeandYoleDéveloppementareresearchfirmsthatprovidemarketandtechnicalanalysisandopinions.Theresearch,technicalanalysisand/orworkcontainedhereinisnotalegalopinionandshouldnotbeconstruedassuch.

© 2014•8
Methodology (1/2)
•ThedatawereextractedfromtheFamPatworldwidedatabase(Questel-ORBIT)whichprovides80+millionpatentdocumentsfrom95offices.
•ThepatentssearchwasperformedinearlyJune2014,hencepatentspublishedafterthisdatewillnotbeavailableinthisreport.
•Thepatentselectionisdonebothautomaticallyandmanually(searchstrategydetailedinnextslides).
•ThestatisticalanalysiswasperformedwithQuestelIPBusinessIntelligencesoftware.
•Thepatentswerecategorizedusingkeywordanalysisofpatenttitle,abstractandclaims,inconjunctionwithexpertreviewofthesubject-matterofinventions(detailsinnextslides).
•ThepatentswereorganizedaccordingtoFamPat’sfamilyrules(variationofEPOstrictfamily):APatentFamilycomprisespatentslinkedbyexactlysameprioritynumbers(strictfamily),pluscomparisonofpriorityandapplicationnumbers, specificrulesbycountryandinformationgatheredfromothersources(nationalfiles,legalstatus…).
Disclaimer:KnowmadeandYoleDéveloppementareresearchfirmsthatprovidestechnicalanalysisandtechnicalopinions. Theresearch,technicalanalysisand/orworkcontainedhereinisnotalegalopinionandshouldnotbeconstruedassuch.
Number of selected patent families for the Emerging MEMS IP Investigation:
1,300 over a number of returned results > 8,000

© 2014•9
Methodology (2/2)

© 2014•10
Emerging MEMS market(Munits)
•The market for emerging MEMS covered in this report will grow from XXMunitsin 2013 to XXMunitsin 2019.
•It is a XX% CAGR in volume.

© 2014•11
MEMS AutoFocusOverview
MEMS CAM fromDOC

© 2014•12
Challenges for MEMS Micro-Speakers
Company X miniature speaker with 1W power handling, 94 dB maximum sound pressure and 11x15 mm dimensions
Source: Company X

© 2014•13
MEMS Micro-Mirrors(DLP, LBS) vs LCOS for Pico Projection

© 2014•14
2013-2019 MarketforMEMS ChemicalSensors
YoleDéveloppementcopyright September 2014c
YoleDéveloppementcopyright September 2014c

© 2014•15
Time Evolution of Patent PublicationsAOC MEMS
•Mid-1990s,HewlettPackardandAvagoTechnologiesfiledfirstpatentsonswitchingdeviceforfiberoptictransmissionsystem(USXXXXXX)andopticalfiberalignment(USXXXXXX).Sincethen,morethan100relevantpatentfamilieshavebeenpublished.
•Morethan50%ofpatentfamilieswerepublishedbetween2001and2005,andthenumberofnewpatentapplicationsisstablesincethen.

© 2014•16
Time Evolution of Patent ApplicantsMEMS Chemical Sensors
•ThepatentingactivityofSensirionbeganinearly-2000sanditincreasedtheselast2years.
•EarlyplayersarenotactiveanymoreexceptCompanyXandCompanyY.
•XXXXXXXXemergedintheMEMS-basedChemicalSensorspatentlandscapesincetheend-2000s.

© 2014•17
Country of Filing for Patent ApplicantsMEMS Scanning Micro-Mirrors

© 2014•18
Mapping of current IP HoldersUltrasonic MEMS

© 2014•19
Patent Applicant IP NetworkUltrasonic MEMS
•Numberinblackoneachlinkbetweenapplicantsisthenumberofco-assignedpatentfamilies.
•Numberuprighttoeachboxisthenumberofpatentfamiliesforthisapplicantinthedataset.
•Blue=grantedpatents/Green=pendingpatent/Orange=deadpatents.

© 2014•20
Summary of Applicant’s Patent PortfolioMEMS Auto-Focus
: highest value in column
: lowest value in column
Patent Applicants
No. of patent families
Oldest priority date of the patent portfolio
No. of patent families filed / yr
No. of patents documents
No. of patents / Patent family
Patents average age
% granted
% pending
% dead
No. of alive patents / family
No. of granted patents by country
(average)
(average)
(Y)
revoked
(granted, pending)
lapsed
expired
US
EP
JP
CN/TW/ HK
KR
Company1
37
15/05/2008
6.0
77
2
1
14%
83%
3%
2.0
1
9
Company2
29
01/09/2005
3.3
116
4
1
31%
51%
18%
3.3
32
1
1
2
Company3
23
15/03/2004
2.2
67
3
3
43%
24%
33%
2.0
8
5
4
1
Company4
12
25/02/2009
2.2
18
2
2
0%
89%
11%
1.3
Company5
8
19/02/2004
0.8
35
4
5
34%
20%
46%
2.4
2
1
1
6
Company6
7
01/09/2005
0.8
7
1
5
14%
14%
71%
0.3
Company7
6
19/07/2007
0.9
28
5
3
61%
39%
0%
4.7
4
3
3
Company8
5
05/10/2007
0.7
14
3
2
57%
43%
0%
2.8
2
1
2
2
Company9
3
29/09/2006
0.4
21
7
5
43%
10%
48%
3.7
2
1
1

© 2014•21
Degree of SpecializationMEMS Auto-Focus
•Morethan60%ofCompanyX’spatentsfocusonMEMSAutofocus,reflectingahighdegreeofIPspecializationinthisfield.
•CompanyYandCompanyZ(acquiredbyXXXXXXin2010)showanon-negligibledegreeofspecializationinMEMSAutofocus.

© 2014•22
Leadership of Patent ApplicantsUltrasonic MEMS
•CompanyXisthemainestablishedpatentholderinUltrasonicMEMSwith45grantedpatentsandonly4pendingpatents.Ithasbeenlessactivesince2010.
•CompanyYandCompanyZownahighnumberofgrantedpatentsrelatedtoUltrasonicMEMS(43and41patentsrespectively),mainlyinforceinJapanandUSA,andtheyarestillactivewith18and16pendingpatentapplicationsrespectively.
•CompanyA,CompanyB,CompanyCandNationalInstitutesofHealth(NIH) arebecomingmajorforcesintheUltrasonicMEMSIPlandscapewithalreadyalotofgrantedpatentsandasignificantnumberofpendingpatents. CompanyDfollowsthemcloselybehind.

© 2014•23
Key Patent FamiliesAOC MEMS
Theselectionofkeypatentfamiliesisbasedonthefamilysize,currentlegalstatusofpatents,citationsanalysisandimpactonAOCMEMStechnologies.

© 2014•24
MEMS AutoFocusWavelens/ CEA (FR)
•Wavelensautofocusisavariablefocuslens,manufacturedwithacombinationofMEMS&LCDtechnologies.Thelensismadeofaflexiblemembranethatencasesopticaloilinacavitycreatedonaglasswafer.MEMSactuatorslocatedatthemembraneperipherypushtheliquidtowardsthecenterofthelenschangingthecurvatureofthemembrane, resultinginachangedfocallength.
•Itisadriver-lessarchitecture(lowVactuation),verycompact/lowcostandlowpowerconsumption.
MEMS Actuators
Flexible membrane
Glass substrate
Source Wavelens
Optical oil

© 2014•25
MEMS-based Scanning Micro-MirrorsTexas Instruments (USA)
In early 2011, Texas Instruments launched its 3rdgeneration of DMD chipset for pico projection systems : DLP Pico HD (nHD)
•2 specifications are proposed
-VGA devices optimized for digital camera & camcorder formats (640x480, 4x3 aspect ratio,)
-WVGA devices optimized for mobile phone displayed formats (854x480, 16x9 aspect ratio)
•Higher integration is achieved
DLP Pico Gen 1 & 2
Source TI
DLP Pico Gen 3
Pico HD Chipset compare to long rice
Source TI

© 2014•26
Excel Databasewith all patents analyzed in the report with technology segmentation
Thisdatabaseallowsmulti-criteriasearchesandincludespatentpublicationnumber, hyperlinkstotheoriginaldocuments,prioritydate,title,abstract,patentassignees, technologicalsegmentsandlegalstatusforeachmemberofthepatentfamily.

ORDER FORM
Emerging MEMS Patent Investigation 2014
PAYMENT
BY CREDIT CARD
Visa Mastercard Amex
Name of the Card Holder:
Credit Card Number:
Card Verification
Value (3 digits except AMEX: 4 digits):
Expiration date:
BY BANK TRANSFER
BANK INFO: HSBC, 1 place de la Bourse,
F-69002 Lyon, France,
Bank code: 30056, Branch code : 00170
Account No: 0170 200 1565 87,
SWIFT or BIC code: CCFRFRPP,
IBAN: FR76 3005 6001 7001 7020 0156 587
RETURN ORDER BY
• FAX: +33 (0)472 83 01 83
• MAIL: YOLE DÉVELOPPEMENT, Le Quartz,
75 Cours Emile Zola, 69100 Villeurbanne/Lyon - France
SALES CONTACTS
• North America: David Jourdan - jourdan@yole.fr
• Asia: Takashi Onozawa - onozawa@yole.fr
• Europe & RoW: Jean-Christophe Eloy - eloy@yole.fr
• Korea: Hailey Yang - yang@yole.fr
• General: info@yole.fr
(1) Our Terms and Conditions of Sale are available at
www.yole.fr/Terms_and_Conditions_of_Sale.aspx
The present document is valid 24 months after its publishing date: October 2nd, 2014
/
ABOUT YOLE DEVELOPPEMENT
ABOUT KNOWMADE
BILL TO
Name (Mr/Ms/Dr/Pr):
Job Title:
Company:
Address:
City:
State:
Postcode/Zip:
Country*:
*VAT ID Number for EU members:
Tel:
Email:
Date:
PRODUCT ORDER
Please enter my order for above named report :
One user license*: Euro 3,990
Multi user license: Euro 5,990
For price in dollars, please use the day’s exchange rate. All reports are delivered electronically at payment reception. For French customers, add 20% for VAT. Buy more than 3 reports and get significant discount. Do not hesitate to contact us.
I hereby accept Yole Développement’s Terms and Conditions of Sale(1)
Signature:
*One user license means only one person at the company can use the report. Please be aware that our publication will be watermarked on each page with the name of the recipient and of the organization (the name mentioned on the PO). This watermark will also mention that the report sharing is not allowed.
KnowMade
Founded in 1998, Yole Développement has grown to become a group of companies providing marketing, technology and strategy consulting, media in addition to corporate finance services. With a strong focus on emerging applications using silicon and/or micro manufacturing (technology or process), Yole Développement group has expanded to include more than 50 associates worldwide covering MEMS, Compound Semiconductors, LED, Image Sensors, Optoelectronics, Microfluidics & Medical, Photovoltaics, Advanced Packaging, Manufacturing, Nanomaterials and Power Electronics. The group supports industrial companies, investors and R&D organizations worldwide to help them understand markets and follow technology trends to develop their business.
CONTACTS
For more information about :
• Consulting: -HDQKULVWRSKH(ORHOR#ROHIU

• Financial Services:
Géraldine Andrieux-Gustin (andrieux@yole.fr)
• Reports: David Jourdan (jourdan@yole.fr)
• Media Communication: Sandrine Leroy (leroy@yole.fr)
Knowmade is specialized in analysis of patents and scientific research findings. We provide patent search, IP landscape, patent valuation, IP due diligence, FTO search, scientific literature landscape, identification of technologies available for transfer/licensing/sale, alerts and updates. Our service offer consists of custom studies, analysis reports, on-demand tracking and strategy consulting.
Knowmade combines information search services, scientific expertise, powerful analytics and visualization tools, and proprietary methodologies for analyzing patents and scientific information. With a solid focus on Compound Semiconductors, LED, MEMS, Nanotechnology and Biotechnology, Knowmade supports research laboratories, industrial companies and investors in their business development.
CONTACTS
• Nicolas Baron: nicolas.baron@knowmade.fr
SHIPPING CONTACT
First Name:
Email:
Last Name:
Phone:

Emerging MEMS Patent Investigation 2014 Report by Yole Developpement

More Related Content

What's hot

Similar to Emerging MEMS Patent Investigation 2014 Report by Yole Developpement

More from Yole Developpement

Recently uploaded