This document discusses the key considerations for designing a cleanroom for nanotechnology applications. It begins by defining nanotechnology and the nanoscale. It then discusses the importance of cleanrooms for controlling contamination at the nanoscale and outlines cleanroom classification standards. The document reviews case studies of existing nanotechnology cleanrooms at various universities and research laboratories. It concludes by outlining the important steps for defining user requirements which will guide the cleanroom design, such as specifying the desired processes, control parameters, room layout, mechanical and HVAC systems, vibration and EMI criteria.

1. Nanotechnology Cleanroom Design
Considerations
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2. Outline
• How to Define the User Requirements?
• Basic Contaminate Control
• Design Concepts?
• Case Studies?
• Outline Requirements?
First- Tell us about your level of expertise and understanding.
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3. What is Nanotechnology?
•Research and technology development at the
atomic, molecular or macromolecular levels
•Ability to control or manipulate on the atomic scale
•Creating and using structures, devices and systems
that have novel properties due to their small and/or
intermediate sizes
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4. Size of Nanometer
•1 Nanometer = One-Billionth of a Meter
•Nanometer sized particles are smaller than a living
cell and can be seen only with the most powerful
microscopes
•Width of human hair is approx. 80,000 nanometers
•The average human can see in the 80,000
nanometer range
•One small dust particle seen in a ray of sun equates
to approx. 60,000 nanometers
•DNA is in the 2.5 nanometer range
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5. The Scale of Things
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6. Nanotechnology Applications
•Creation of new materials w/ superior strength,
electrical conductivity, resistance to heat and other
properties
•Microscopic machines, including probes that could
be injected into the body for medical diagnosis and
repair
•Creation of “bio-chips” that detect food-borne
contamination, dangerous substances in the blood
or chemical warfare agents in the air
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7. Defining a Cleanroom
• Designed, built, and operated to provide cleanliness, control, and/or
isolation
• Built with smooth, hard, cleanable surfaces
• Air filtration system is critical – HEPA filters (High Efficiency
Particulate Air)
• Strict procedures control operation, personnel, process and materials
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8. Why have a Cleanroom?
• To protect the product or process from contamination
• To restrict access to the product or process
• To contain hazards located within the cleanroom
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9. What is Contamination?
• Contamination is anything (material, substance, or energy) which
corrupts the process or makes the product impure by either touching
or mixing with it
• Solid / Liquid / Gas
• Organic / Non-Organic
• Airborne / Surface
• Chemical Makeup
• Size and Shape
• Static Charge + / -
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10. How is Cleanroom Contamination Measured?
• Measured in microns or micrometers
• 1 micron = One millionth of a meter
• There are 25,400 microns in an inch
• A human hair is approx. 75 microns in diameter
• Human eye can see particles down to about 50 microns
• Bacteria is approx. 2 to 10 microns in size
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11. How is Cleanroom Contamination Measured?
• Cleanrooms are measured in the amount of ½ micron size particles in
one cubic foot of sampled air. (½ micron particle = .00001968”)
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12. What Creates Contamination?
• Personnel activity within the cleanroom generates and transports
contamination
•Moving
•Talking
•Breathing
•Scratching
•Sneezing
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13. What Creates Contamination?
People Contaminate!
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Activity PPM
Motionless 100,000 PPM
Walking @ 2mph 5,000,000 PPM
Walking @
3.5mph
7,000,000 PPM
Walking @ 5mph 10,000,000 PPM
Horseplay 100,000,000 PPM

14. What Creates Contamination?
• People generate contamination
•Skin flakes and oil
•Spittle (smokers especially)
•Hair
•Perspiration
•Clothing debris (lint, fibers, etc.)
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15. What Creates Contamination?
•Materials generate contamination
• Wood products
• Construction materials (drywall, concrete dust, etc.)
• Pencils
• Duct tape
• Cardboard and paper
• Paint and coatings
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16. What Creates Contamination?
• Equipment generates contamination
•Electric motors
•Scaffolds
•Ladders
•Gang boxes
•Brooms, mops and dusters
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17. What are Cleanroom Classifications?
•All cleanrooms are not built or operated to the
same cleanliness standard due to the size of the
devices that are being built or handled at each
customers location.
•ISO 14644-1, which replaces Federal Standard 209E,
is the basis of Cleanroom Classification.
•ISO 14644 classifies a Cleanroom based on the size
and number of airborne particles
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18. What are Cleanroom Classifications?
Chart of ISO-14644 & FED-STD-209E classifications
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ISO 14644-
1 Class
FED-STD-
209E Class
0.5µm
particles
per meter
cubed
0.5µ
particles
per foot
cubed
8 100,000 3,520,000 100,000
7 10,000 352,000 10,000
6 1,000 35,200 1,000
5 100 3,520 100
4 10 352 10
3 1 35 1

19. Clean-Build Goals and Methods
• Minimize and remove contaminants from the environment
• Don’t allow contaminate into the cleanroom
• Control behaviors in the clean room
• Continual clean-up and removal of debris
• Vacuuming, wet mopping, wipe downs
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20. Clean-Build Goals and Methods
• Neutralize the threat within the environment
• Grounding (Electro-Static Discharge control)
• Safety
• Immediate spill cleanup
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21. Case Studies
• Purdue University- Birck Nanotechnology Center
• Brookhaven National Laboratory (BNL)- Center for Functional
Nanomaterials
• University of North Carolina and North Carolina AT&T- Joint
School of Nanoscience and Nanoengineering (JSNN)
• Iberian National Laboratory (INL)- Brage Portugal
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22. Purdue University
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23. Purdue Birck Nanotechnology Center
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24. Purdue Birck Nanotechnology Center
Cleanroom Floor Plan
C2 C2
C2
C2
C2
C2 C2
C2
C2
C2
C2
C2
C2
(4 SIDES) (4 SIDES) (4 SIDES) (4 SIDES) (4 SIDES)
(4 SIDES)
(4 SIDES) (4 SIDES) (4 SIDES)
(4 SIDES) (4 SIDES)
C2
(4 WALLS)
(3 WALLS) (3 WALLS)
(3 WALLS)
C2
AIRLOCK
CL2015
DIFFUSION / IMPLANT
CLASS 100
CL2013
CHASE
CL2014
CHASE
CL2012
OXIDATION WET CHEM
CLASS 100
CL2011
CHASE
CL2010
DEPOSITION
CLASS 1000
CL2009
CHASE
CL2008
GOWNING
CLASS 1000
CL2003
CLEAN HOUSKEEPING
CLASS 1000
CL2007
AIR
SHOWER
CL2004
AIR
LOCK
CL2005
CLEAN
HOUSEKEEPING
CLASS
1000
CL2039
AIR
SHOWER
CL2001
VESTIBULE
CL2000
AIR
LOCK
CL2002
CHASE
CL2038
BAY
CLASS 1000
CL2037
CHASE
CL2036
WET CHEM
CLASS 1000
CL2035
CHASE
CL2034
CHASE
CL2016
LITHOGRAPHY
CLASS 10
CL2017
CHASE
CL2018
LITHOGRAPHY
CLASS 10
CL2019
CHASE
CL2020
CLUSTER
CLASS 1000
CL2021
CHASE
CL2022
DEPOSITION
CLASS 1000
CL2023
CHASE
CL2024
DRY ETCH
CLASS 1000
CL2025
CHASE
CL2026
BAY
CLASS 1000
CL2027
CHASE
CL2028 BAY
CLASS 1000
CL2029
CHASE
CL2030
QUARTZ CLEAN
CLASS 1000
CL2031
CENTER AISLE
CLASS 1000
CL2006
CENTER AISLE
CLASS 1000
CL2006
CHEM BIO
CLASS 1000
CL2033
BACTERIA
CLASS 1000
CL2033H
MAMALLIAN
CLASS 1000
CL2033J
HSKP
CLASS 1000
CL2033B
CL SUPPLY
CLASS 1000
CL2033C
CHEM BIO GOWNING
CLASS 1000
CL2033A
AIR SHOWER
CLASS 1000
CL2033D
DEGOWN
CLASS 1000
CL2033E
CHEMISTRY
CLASS 1000
CL2033G
CLASS B
CLASS 1000
CL2033F
CENTER AISLE
CLASS 1000
CL2006
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25. Brookhaven National Laboratories
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26. BNL Center for Functional Nanomaterials
Cleanroom
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27. BNL Center for Functional Nanomaterials
Cleanroom Floor Plan
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28. UNC and NC A&T
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29. UNC and NC A&T Joint School of Nanoscience and
Nanoengineering (JSNN) Cleanroom
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30. UNC and NC A&T Joint School of Nanoscience and
Nanoengineering (JSNN) Cleanroom
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31. Iberian National Laboratory
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32. Iberian National Laboratory (INL)Cleanroom
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33. Iberian National Laboratory (INL) Cleanroom
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34. Define Requirements
• Functions/Processes
• Control Parameters
• Type of Room- Bay Chase vs. Ballroom
• Type of Systems- Air Delivery
• Vibration Criteria
• EMI Requirements
• Nano Bio Functions and Interface
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35. Define Requirements
Functional Processes:
• Wet Process/Etch
• Dry Etch
• Photolithography
• Thermal
• Deposition
• MBE
• Inspection
• Characterization
• Nano Bio
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36. Define Requirements
Control Parameters:
• ISO Class
• Temperature/RH
• Process Services
• Exhaust Streams
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37. Define Requirements
Type of Rooms:
• Bay/Chase
• Ballroom
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38. Define Requirements
Type of Systems- Air Delivery:
• Fan Filters
• Duct Supply/Open Return
• Ducted Supply/Ducted Return
• Make Up Air Introduction
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39. Define Requirements
Vibration Criteria:
• Equipment Requirements
• Location within building
• Adjacent spaces
• Parameters (Millimeters per Second):
• 125 MPS Areas
• 200 to 500 MPS Areas
• Over 500 MPS Areas
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40. Define Requirements
EMI Requirements:
• Equipment Requirements
• Fields AC and/or DC (milliGAUSS)
• 0.1 mG peak-to-peak
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41. Define Requirements
Nano Bio Functions
• What is different?
• How does it interface with the function fab?
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42. Conclusion
Questions
Stated Design Parameters
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