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Atmospheric Microwave Plasma Torches for Advanced Cleaning Giovanni Terenziani FabrizioStivanello Antonio Alessandro Rossi
Outline Plasma Introduction ,[object Object],Our Configuration ,[object Object]
Cleaning Experiments
ResultsImprovements ,[object Object]
Cut Off
Plasma BendingFinal Considerations
Plasma’s Pressure Regimes PlasmasNon in Local Thermodynamic Equilibrium (Non-LTE plasma) Plasmas in Local Thermodynamic Equilibrium (LTE plasma) ,[object Object]
Electron density: 1021 – 1026 m-3
Inelastic collision create reactive species
(elastic one heat heavy particle)
 Te >> Th
 Electron density: <1019 m-3
Inelastic collision induce the plasma chemistry
 (elastic slightly raise heavy particle kinetic energy),[object Object]
Types of Atmospheric Plasmas DC and low frequency discharge RF waves Microwaves discharge Industrial sources Arc torch Corona and DBD  (pulsed DC) ICP (Inductivelycoupled plasma) IST (pulsed) Laboratorydevelopment Microplasma APPJ, cold plasma torch, hollow cathode, microplasma CCμP TIA (torche à injection axiale),  MTD (Microwave torch discharge),  MPJ (Microwave plasma jet),  MPT (Microwave plasma torch)
Types of Atmospheric Plasmas DC and low frequency discharge RF waves Microwaves discharge Industrial sources Arc torch Corona and DBD  (pulsed DC) ICP (Inductivelycoupled plasma) IST (pulsed) Laboratorydevelopment Microplasma APPJ, cold plasma torch, hollow cathode, microplasma CCμP TIA (torche à injection axiale),  MTD (Microwave torch discharge),  MPJ (Microwave plasma jet),  MPT (Microwave plasma torch)
Semi Metallic Plasma Torch
General Structure of a Plasma Torch ,[object Object]
Microwave equipment (wave guide, tuning system, circulator)
 An ignition system
 A gas nozzle (a quartz tube with flowing gas),[object Object]
Plasma Flame Compressed Air gas is used Plasma flame: 15 cm long Wave Guide 3 cm thick
Cleaning Trials – Metallized Alumina BEFORE AFTER
Ultra-Cleaning Results on Copper Po210 Before AP After AP
Improvements – Vapor Added Vapor Generator characterized by: Operative pressure from 4 to 6 bar / from 58 to 87 psi   Vapor temperature from 155 to 160° C  Vapor capacity 62 g/min. max.   
Improvements – Vapor Added A narrowing it’s been created in the glass injector Analumina capillary it’s been placed at the end of the vapor injector Vapor Inlet a b Air Inlet Alumina Capillary

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