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Static Force Curve Activity in
   Nanofluidic Channels
   How various treatments effect the behavior of
   nanofluidic devices




Jon Zickermann                  University of Wisconsin-Platteville
Agenda
 Background
 AFM basics
     Surface Topography
     Force Measurement

 Procedure
 Goals of Project
 Results
     Surface Roughness
     Force Curves

 Analysis and Discussion
 Conclusions
Background
Background
 Research a part of the Microsystems and
  Nanotechnology Minor offered by UW-
  Platteville
     GE4000 Research in Microsystems and
      Nanotechnology
     The “capstone” for the minor

 Worked with Dr. Yan Wu
 Nanochannel samples were fabricated by
  Shaurya Prakash at Ohio State
 Selected this project to do research on an
  Atomic Force Microscope and interest in
  micro/nanofluidics
Background
Project Members
 Dr. Yan Wu                                                                    Dr. Yan Wu

    Ph.D., University of Illinois at Urbana-Champaign, M.S. The University
     of Alabama, B.E., Tsinghua University, China
    Joined UW-Platteville staff in 2009

 Shaurya Prakash
    Assistant Professor, Mechanical & Aerospace Engineering at the           Shaurya Prakash
     Ohio State University

 Jon Zickermann
    B.S. Mechanical Engineering, Microsystems & Nanotechnology;
     University of Wisconsin-Platteville (Expected)
    Transferred to UW-Platteville in Spring 2010 after receiving
     Associate’s in Arts and Science at UW-Washington County                  Jon Zickermann
Project Goals
 Understand the operation principle of dynamic AFM imaging and static force
  curve measurements
 Learn the impact of surface treatment of micro-nanofluidic channel wall on
  slip flow and electrokinectic flow
 Perform surface topography measurements and surface roughness
  measurements using AFM inside nanofluidic channels
 Calculate charge density distributions
Atomic Force Microscopy Basics
Surface Topography
 Atomic Force Microscopes (AFMs) can
  allow imaging at the nanoscale – beyond
  limits of optical imaging
 Analog to a finger feeling the surface
 Two basic modes: Contact Mode and
  Tapping Mode




                                                                         “In touch with atoms,” G. Binnig, and H. Rohrer,
http://www.tut.fi/en/units/departments/physics/research/computational-   Reviews of Modern Physics, Vol. 71, No. 2, 1999
physics/surfaces-and-interfaces-at-the-nanoscale/research/
How it works




      “AFM and Combined Optical Techniques” Nicholas Geisse, Asylum Research
Basic Contact vs. Tapping Mode




               “Advanced AFM,” Dr. Yan Wu, 2011
Basic Contact vs. Tapping Mode




  “Fiber optic atomic force microscope,” http://physics-animations.com/Physics/English/afm_txt.htm
Detailed Contact vs. Tapping
CONTACT MODE                               TAPPING MODE
 The probe (cantilever and tip) is     The probe moves with a small vertical
  scanned over the surface (or the       (z) oscillation (modulation) which is
                                         significantly faster than the raster
  sample is scanned under the            scan rate.
  probe) in an x-y raster pattern. The     This means the force on the sample is
  feedback loop maintains a constant          modulated such that the average force on
                                              the sample is equal to that in contact
  cantilever deflection, and                  mode.
  consequently a substantial,           When the tip is in contact with a
  constant force on the sample           sample, the sample surface resists
                                               the oscillation and the cantilever
                                               bends
                                            The variation in cantilever deflection
                                             amplitude at the frequency of
                                             modulation is a measure of the
                                             relative stiffness of the surface
Interacting Forces
Summary of Interacting Forces
Force Calculation
Force Calculation
 Determining spring rate from F = ks:
     Sader Method:



where:



                                               *All equations and constants courtesy of
                                                           Asylum Research

                                         http://www.asylumresearch.com/Applications/EquationCard.pdf
Equipment - iDrive
 The iDrive NbFeB magnet is fully
  enclosed and sealed within the
  cantilever holder which allows for
  unobstructed bottom view of
  samples and prevents sample
  contamination.                                    iDrive cantilever holder (left) and schematic
                                                     diagram of the cantilever which shows the
 iDrive allows auto tuning of the                Lorentz Force exerted onto the cantilever (right).
  cantilever in fluid.
     The cantilever tune with iDrive actuation
      closely resembles the thermal tune.

 Clean cantilever tunes allow for the
  implementation of Q-control and
  other techniques in fluid.
Equipment - iDrive
Equipment - AFM
 Asylum Research MFP-3D-BIO AFM
 Specs:
    Most accurate and sensitive AFM available with inverted
     optical microscope
    Inverted microscope allows for fluorescence microscopy
     and many other types of optical investigation including
     Raman, ANSOM, and most other optical microscopy
     techniques (DIC, TIRF, etc.)
    90 x 90 µm maximum window (0.5 nm resolution)
    5 µm Z axis range (0.25 nm resolution)
    Fully-enclosed in an acoustic chamber and placed on top
     of an active vibration-damping table
    Voltage noise <70μV in a bandwidth of 1Hz to 10kHz.
Equipment – Tips for Force Curve
SiNi Triangle Tip                                     Spherical Tip
     Lever Shape                   Triangular          0.05N/m Cantilever
     Lever Thickness                  0.4µm
     Lever Width
     Lever Length
                                     13.4µm
                                     100µm
                                                       5µm SiO2 Glass
     Spring constant (N/m)             0.09
     Resonant freq. (kHz)               32               Au surface
     Tip shape                  4-sided pyramid
     Tip height                        3µm
     Tip radius                      <40nm
     Tip angle                     <35° front
                                    <35° side
     Coating                  40nm Au on tip side
                             50nm Au on reflex side
Nanofludics
Nanofluidics Basics
 Definition: any liquid system where you have
  the movement and control over liquids in or
  around objects with one dimension at most
  100 nm
     Dimensions can be typically 10-50nm (Mukhopadhyay
      2006)
     Applies to fluids inside nanoscale channels, porous
      alumina and nanoscale conduits
     “As long as a hollow structure has a dimension on the
                                                              http://www.nano.org.uk/news/914/
      nanoscale and can handle fluids, it qualifies for
      nanofluidics”
Nanofluidics Applications
 Primary applications: separation and
  analysis of DNA strands
 Other uses:
     Diodes
     Field effect transistors
     Lab-on-a-chip for nanoscale


                                                                            Bhushan, Wang (2010)




             Critical dimensionless parameters as specified in Oosterbroek (1999)
Nanofluidics
Nanofluidic Dynamics
Nanofluidic Dynamics
Fabrication
 Top-down methods
    Photolithography methods on a substrate silicon wafer
    Can be integrated on a MEMS chip on one wafer
    Traditional top-down methods offer an economical method to nanofluidic device
     fabrication

 Bottom-up methods
    Self-Assembled Monolayers can be used with biological materials to form a molecular
     monolayer on the substrate
    Carbon Nanotubes offer a future option
    Bottom-up methods can precise shapes at the nanoscale
Nanofluidics Advantages and Disadvantages
ADVANTAGES                           DISADVANTAGES

 Offers the possibility to confine   Harder to fabricate
  molecules to very small spaces and
                                      Higher tendency for channels to get
  subject them to controlled forces.
                                       clogged
 Potential for precise control of
                                      Lower signal quality when trying to
  liquid flow and molecular behavior
                                       send voltages
  at the nanoscale
                                      Relatively unexplored area of
                                       nanotechnology
Procedure
Procedure
 Surface topography of 3 samples using AC
  mode
     Measured in the three segments

 Force curve analysis in air and water
     Using iDrive cantilever tips and

 Electrolyte solution creation
 Force curve analyses in electrolyte
  solutions of various pH levels
Results
Results – Surface RMS
 Plain Glass
     80nm: 950pm
     250nm: 1.549nm, 1.421nm, 972pm
     450nm: 589pm, 1.113nm

 Bromine Treated
     80nm: 2.11nm, 1.103nm
     250nm: 1.549nm, 1.421nm
     450nm: 1.91nm

 Fluoride Treated
     80nm: 4.926nm                    Fluoride Treated Sample from AFM
     250nm: 3.912nm, 5.318nm
     450nm: 3.422nm
SiNi Tip

Force Curve Analysis
Calculated Results – Force Curves - SiNi
 Calibration
 Plain Glass Sample:
     k = 83.32mN/m
     Q = 15.2
     freq = 31.267kHz

 Bromine Sample:
     k = 87.26mN/m
     Q = 15.2
     freq = 30.947kHz

 Fluorine Sample:
     k = 85.29 mN/m
     Q = 14.7
     freq = 30.733kHz
Calculated Results – Force Curves: SiNi Tip
 In Water
 Plain Glass Sample:
    Adhesion Data:
     µ = 6.30nN
     σ = 0.078nN

 Bromine Sample:
    Adhesion Data:
     µ = 21.97nN
     σ = 0.405nN

 Fluorine Sample:
                             iDrive Cantilever Tip from Asylum Research’s website
    Adhesion Data:
     µ = 1.06nN
     σ = 0.144nN
Calculated Results – Force Curves
               PLAIN GLASS FORCE CURVE
Calculated Results – Force Curves
               BROMINE FORCE CURVE
Calculated Results – Force Curves
                FLORO FORCE CURVE
Spherical Tip

Force Curve Results
Calculated Results – Force Curves: Spherical
 Calibration
 Plain Glass Sample:
     k = 87.34 mN/m
     Q = 25.0
     freq = 21.336kHz

 Bromine Sample:
     k = 84.82 mN/m
     Q = 25.1
     freq = 21.319kHz

 Fluorine Sample:
     k = 89.85 mN/m
     Q = 24.9
     freq = 21.568kHz
Calculated Results – Force Curves: Spherical
 Plain Glass Sample:
    Adhesion Data:
     µ = 27.60nN
     σ = 0.024917nN

 Bromine Sample:
    Adhesion Data:
     µ = 18.05nN
     σ = 0.001897nN

 Fluorine Sample:
    Adhesion Data:
     µ = 15.33nN
     σ = 2.750`nN
Calculated Results – Force Curves
                PLAIN FORCE CURVE
Calculated Results – Force Curves
               BROMINE FORCE CURVE
Calculated Results – Force Curves
                FLORO FORCE CURVE
Charge Density
Charge Density – Plain Glass
       Charge Distribution     Charge Values
Charge Density – Br Treated
       Charge Distribution    Charge Values
Charge Density – Fluorine Treated
       Charge Distribution    Charge Values
Charge Density – Gold Surface
       Charge Distribution      Charge Values
Analysis and Discussion
 Surface Roughness
    The untreated samples were the smoothest – around 1nm RMS – followed by the Bromine
     and Fluorine samples
        •   Untreated nanochannels favors flow by pressure gradients
        •   Fluorine nanochannels favors flow by electric differentials

 Force Curves Data
    Bromine treatment produces a positive charge buildup that strongly attracts electrical charges,
     whereas fluorine treatment produces a repulsive force that resisted the cantilever tip
    Stronger attraction forces from spherical tip compared to triangular tips
Analysis and Discussion
 The bromine treated surface reach far from the substrate surface as indicated
  by the large Debye lengths
     Consistent to the force curves generated by the AFM software, where the cantilever probe
      “jumped in” to the surface substrate at a faster rate than any other surface treatments
     Fluorine surface has a large concentration of charges near the surface, however, compared to
      the plain and bromine treated surfaces, the charges are repelling them
Acknowledgements
 Dr. Yan Wu for working with me and helping me out
 Peers doing research in the cleanroom from helping me in the first
  week
 You, the audience, for listening
Any Questions?

Thank You!

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Static force curve activity in nanofluidic channels

  • 1. Static Force Curve Activity in Nanofluidic Channels How various treatments effect the behavior of nanofluidic devices Jon Zickermann University of Wisconsin-Platteville
  • 2. Agenda  Background  AFM basics  Surface Topography  Force Measurement  Procedure  Goals of Project  Results  Surface Roughness  Force Curves  Analysis and Discussion  Conclusions
  • 4. Background  Research a part of the Microsystems and Nanotechnology Minor offered by UW- Platteville  GE4000 Research in Microsystems and Nanotechnology  The “capstone” for the minor  Worked with Dr. Yan Wu  Nanochannel samples were fabricated by Shaurya Prakash at Ohio State  Selected this project to do research on an Atomic Force Microscope and interest in micro/nanofluidics
  • 5. Background Project Members  Dr. Yan Wu Dr. Yan Wu  Ph.D., University of Illinois at Urbana-Champaign, M.S. The University of Alabama, B.E., Tsinghua University, China  Joined UW-Platteville staff in 2009  Shaurya Prakash  Assistant Professor, Mechanical & Aerospace Engineering at the Shaurya Prakash Ohio State University  Jon Zickermann  B.S. Mechanical Engineering, Microsystems & Nanotechnology; University of Wisconsin-Platteville (Expected)  Transferred to UW-Platteville in Spring 2010 after receiving Associate’s in Arts and Science at UW-Washington County Jon Zickermann
  • 6. Project Goals  Understand the operation principle of dynamic AFM imaging and static force curve measurements  Learn the impact of surface treatment of micro-nanofluidic channel wall on slip flow and electrokinectic flow  Perform surface topography measurements and surface roughness measurements using AFM inside nanofluidic channels  Calculate charge density distributions
  • 8. Surface Topography  Atomic Force Microscopes (AFMs) can allow imaging at the nanoscale – beyond limits of optical imaging  Analog to a finger feeling the surface  Two basic modes: Contact Mode and Tapping Mode “In touch with atoms,” G. Binnig, and H. Rohrer, http://www.tut.fi/en/units/departments/physics/research/computational- Reviews of Modern Physics, Vol. 71, No. 2, 1999 physics/surfaces-and-interfaces-at-the-nanoscale/research/
  • 9. How it works “AFM and Combined Optical Techniques” Nicholas Geisse, Asylum Research
  • 10. Basic Contact vs. Tapping Mode “Advanced AFM,” Dr. Yan Wu, 2011
  • 11. Basic Contact vs. Tapping Mode “Fiber optic atomic force microscope,” http://physics-animations.com/Physics/English/afm_txt.htm
  • 12. Detailed Contact vs. Tapping CONTACT MODE TAPPING MODE  The probe (cantilever and tip) is  The probe moves with a small vertical scanned over the surface (or the (z) oscillation (modulation) which is significantly faster than the raster sample is scanned under the scan rate. probe) in an x-y raster pattern. The  This means the force on the sample is feedback loop maintains a constant modulated such that the average force on the sample is equal to that in contact cantilever deflection, and mode. consequently a substantial,  When the tip is in contact with a constant force on the sample sample, the sample surface resists the oscillation and the cantilever bends  The variation in cantilever deflection amplitude at the frequency of modulation is a measure of the relative stiffness of the surface
  • 15.
  • 17. Force Calculation  Determining spring rate from F = ks:  Sader Method: where: *All equations and constants courtesy of Asylum Research http://www.asylumresearch.com/Applications/EquationCard.pdf
  • 18. Equipment - iDrive  The iDrive NbFeB magnet is fully enclosed and sealed within the cantilever holder which allows for unobstructed bottom view of samples and prevents sample contamination. iDrive cantilever holder (left) and schematic diagram of the cantilever which shows the  iDrive allows auto tuning of the Lorentz Force exerted onto the cantilever (right). cantilever in fluid.  The cantilever tune with iDrive actuation closely resembles the thermal tune.  Clean cantilever tunes allow for the implementation of Q-control and other techniques in fluid.
  • 20. Equipment - AFM  Asylum Research MFP-3D-BIO AFM  Specs:  Most accurate and sensitive AFM available with inverted optical microscope  Inverted microscope allows for fluorescence microscopy and many other types of optical investigation including Raman, ANSOM, and most other optical microscopy techniques (DIC, TIRF, etc.)  90 x 90 µm maximum window (0.5 nm resolution)  5 µm Z axis range (0.25 nm resolution)  Fully-enclosed in an acoustic chamber and placed on top of an active vibration-damping table  Voltage noise <70μV in a bandwidth of 1Hz to 10kHz.
  • 21. Equipment – Tips for Force Curve SiNi Triangle Tip Spherical Tip Lever Shape Triangular  0.05N/m Cantilever Lever Thickness 0.4µm Lever Width Lever Length 13.4µm 100µm  5µm SiO2 Glass Spring constant (N/m) 0.09 Resonant freq. (kHz) 32  Au surface Tip shape 4-sided pyramid Tip height 3µm Tip radius <40nm Tip angle <35° front <35° side Coating 40nm Au on tip side 50nm Au on reflex side
  • 23. Nanofluidics Basics  Definition: any liquid system where you have the movement and control over liquids in or around objects with one dimension at most 100 nm  Dimensions can be typically 10-50nm (Mukhopadhyay 2006)  Applies to fluids inside nanoscale channels, porous alumina and nanoscale conduits  “As long as a hollow structure has a dimension on the http://www.nano.org.uk/news/914/ nanoscale and can handle fluids, it qualifies for nanofluidics”
  • 24. Nanofluidics Applications  Primary applications: separation and analysis of DNA strands  Other uses:  Diodes  Field effect transistors  Lab-on-a-chip for nanoscale Bhushan, Wang (2010) Critical dimensionless parameters as specified in Oosterbroek (1999)
  • 28. Fabrication  Top-down methods  Photolithography methods on a substrate silicon wafer  Can be integrated on a MEMS chip on one wafer  Traditional top-down methods offer an economical method to nanofluidic device fabrication  Bottom-up methods  Self-Assembled Monolayers can be used with biological materials to form a molecular monolayer on the substrate  Carbon Nanotubes offer a future option  Bottom-up methods can precise shapes at the nanoscale
  • 29. Nanofluidics Advantages and Disadvantages ADVANTAGES DISADVANTAGES  Offers the possibility to confine  Harder to fabricate molecules to very small spaces and  Higher tendency for channels to get subject them to controlled forces. clogged  Potential for precise control of  Lower signal quality when trying to liquid flow and molecular behavior send voltages at the nanoscale  Relatively unexplored area of nanotechnology
  • 31. Procedure  Surface topography of 3 samples using AC mode  Measured in the three segments  Force curve analysis in air and water  Using iDrive cantilever tips and  Electrolyte solution creation  Force curve analyses in electrolyte solutions of various pH levels
  • 33. Results – Surface RMS  Plain Glass  80nm: 950pm  250nm: 1.549nm, 1.421nm, 972pm  450nm: 589pm, 1.113nm  Bromine Treated  80nm: 2.11nm, 1.103nm  250nm: 1.549nm, 1.421nm  450nm: 1.91nm  Fluoride Treated  80nm: 4.926nm Fluoride Treated Sample from AFM  250nm: 3.912nm, 5.318nm  450nm: 3.422nm
  • 35. Calculated Results – Force Curves - SiNi Calibration  Plain Glass Sample:  k = 83.32mN/m  Q = 15.2  freq = 31.267kHz  Bromine Sample:  k = 87.26mN/m  Q = 15.2  freq = 30.947kHz  Fluorine Sample:  k = 85.29 mN/m  Q = 14.7  freq = 30.733kHz
  • 36. Calculated Results – Force Curves: SiNi Tip In Water  Plain Glass Sample: Adhesion Data:  µ = 6.30nN  σ = 0.078nN  Bromine Sample: Adhesion Data:  µ = 21.97nN  σ = 0.405nN  Fluorine Sample: iDrive Cantilever Tip from Asylum Research’s website Adhesion Data:  µ = 1.06nN  σ = 0.144nN
  • 37. Calculated Results – Force Curves PLAIN GLASS FORCE CURVE
  • 38. Calculated Results – Force Curves BROMINE FORCE CURVE
  • 39. Calculated Results – Force Curves FLORO FORCE CURVE
  • 41. Calculated Results – Force Curves: Spherical Calibration  Plain Glass Sample:  k = 87.34 mN/m  Q = 25.0  freq = 21.336kHz  Bromine Sample:  k = 84.82 mN/m  Q = 25.1  freq = 21.319kHz  Fluorine Sample:  k = 89.85 mN/m  Q = 24.9  freq = 21.568kHz
  • 42. Calculated Results – Force Curves: Spherical  Plain Glass Sample: Adhesion Data:  µ = 27.60nN  σ = 0.024917nN  Bromine Sample: Adhesion Data:  µ = 18.05nN  σ = 0.001897nN  Fluorine Sample: Adhesion Data:  µ = 15.33nN  σ = 2.750`nN
  • 43. Calculated Results – Force Curves PLAIN FORCE CURVE
  • 44. Calculated Results – Force Curves BROMINE FORCE CURVE
  • 45. Calculated Results – Force Curves FLORO FORCE CURVE
  • 47. Charge Density – Plain Glass Charge Distribution Charge Values
  • 48. Charge Density – Br Treated Charge Distribution Charge Values
  • 49. Charge Density – Fluorine Treated Charge Distribution Charge Values
  • 50. Charge Density – Gold Surface Charge Distribution Charge Values
  • 51. Analysis and Discussion  Surface Roughness  The untreated samples were the smoothest – around 1nm RMS – followed by the Bromine and Fluorine samples • Untreated nanochannels favors flow by pressure gradients • Fluorine nanochannels favors flow by electric differentials  Force Curves Data  Bromine treatment produces a positive charge buildup that strongly attracts electrical charges, whereas fluorine treatment produces a repulsive force that resisted the cantilever tip  Stronger attraction forces from spherical tip compared to triangular tips
  • 52. Analysis and Discussion  The bromine treated surface reach far from the substrate surface as indicated by the large Debye lengths  Consistent to the force curves generated by the AFM software, where the cantilever probe “jumped in” to the surface substrate at a faster rate than any other surface treatments  Fluorine surface has a large concentration of charges near the surface, however, compared to the plain and bromine treated surfaces, the charges are repelling them
  • 53. Acknowledgements  Dr. Yan Wu for working with me and helping me out  Peers doing research in the cleanroom from helping me in the first week  You, the audience, for listening

Editor's Notes

  1. Image shown: Nanopump
  2. AFM works by bringing an atomically sharp tip close to a surface. There is an attractive force between the tip and the surface and this force is kept the same throughout the experiment. As the probe tip scans back and forth over the surface, the tip will rise and fall with the different features on the surface. A laser is pointed at the tip and is reflected to a sensor. As the tip goes up and down the laser hits different parts of the sensor. With the information the sensor collects, an image of the surface can be recreated.
  3. InVOLS= Inverse Optical Lever Sensitivity
  4. http://www.mpip-mainz.mpg.de/documents/akbu/pages/particles.htm
  5. http://prlo.aps.org/story/v23/st9
  6. Critical dimensions: http://doc.utwente.nl/13884/