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AFM - atomic force microscopy
A 'new' view of structure (1986)
AlGaN/GaN quantum well waveguide
CD stamper
polymer growth
surface atoms on Si single crystal
See Vocabulary of Surface Crystallography,
Journal of Applied Physics 35, 1306 (1964),
by Elizabeth A. Wood
AFM - atomic force microscopy
How does the microscope work?
Si3N4
tip
laser
diode
photodiode
sample
mirror
Tip scans sample
Up and down movement of tip
recorded by position sensing
photodiode
AFM - atomic force microscopy
How does the microscope work?
Si3N4
tip
laser
diode
photodiode
sample
mirror
Tip scans sample
Up and down movement of tip
recorded by position sensing
photodiode
AFM - atomic force microscopy
How does the microscope work?
Si3N4
tip
laser
diode
photodiode
sample
mirror
Two modes of operation
AFM - atomic force microscopy
How does the microscope work?
Contact mode - short-range interactions (Å) - interatomic forces
Tip: 5-20 nm radius, 10-25 m
high, on 50-400 m
cantilever beam
AFM - atomic force microscopy
How does the microscope work?
Detector system can measure
deflections in nm range
Tip: 5-20 nm radius, 10-25 m
high, on 50-400 m
cantilever beam
Cantilever: low stiffness -
can't deform surface
Tip contacts surface
Tip scans surface: either tip or
specimen moved by
piezoelectric positioning
system over x and y
Contact mode - short-range interactions (Å) - interatomic forces
AFM - atomic force microscopy
How does the microscope work?
Contact mode - short-range interactions (Å) - interatomic forces
Two ways - 'constant force' ……. feedback system
moves tip in z direction to keep force
constant
'constant height'……. no feedback system -
usually used when surface roughness small
higher scan speeds possible
AFM - atomic force microscopy
How does the microscope work?
Tapping mode - long-range forces - van der Waals,
electrostatic, magnetic
Tip vibrates (105 Hz) close to
specimen surface (50-150 Å)
with amplitude 10-100 nm
May at times lightly contact
surface
Suitable for soft materials
AFM - atomic force microscopy
How does the microscope work?
Tapping mode
Tip vibrates (105 Hz) close to
specimen surface (50-150 Å)
with amplitude 10-100 nm
May at times lightly contact
surface
When near or on surface,
oscillation is damped - tip z
position corrected so that
vibration amplitude stays
constant Tip height
Amplitude
AFM - atomic force microscopy
From force-distance plot, can get:
range & magnitude of attractive & repulsive forces
elastic modulus & adhesion energy

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AFM.ppt

  • 2. AFM - atomic force microscopy A 'new' view of structure (1986) AlGaN/GaN quantum well waveguide CD stamper polymer growth surface atoms on Si single crystal See Vocabulary of Surface Crystallography, Journal of Applied Physics 35, 1306 (1964), by Elizabeth A. Wood
  • 3. AFM - atomic force microscopy How does the microscope work? Si3N4 tip laser diode photodiode sample mirror Tip scans sample Up and down movement of tip recorded by position sensing photodiode
  • 4. AFM - atomic force microscopy How does the microscope work? Si3N4 tip laser diode photodiode sample mirror Tip scans sample Up and down movement of tip recorded by position sensing photodiode
  • 5. AFM - atomic force microscopy How does the microscope work? Si3N4 tip laser diode photodiode sample mirror Two modes of operation
  • 6. AFM - atomic force microscopy How does the microscope work? Contact mode - short-range interactions (Å) - interatomic forces Tip: 5-20 nm radius, 10-25 m high, on 50-400 m cantilever beam
  • 7. AFM - atomic force microscopy How does the microscope work? Detector system can measure deflections in nm range Tip: 5-20 nm radius, 10-25 m high, on 50-400 m cantilever beam Cantilever: low stiffness - can't deform surface Tip contacts surface Tip scans surface: either tip or specimen moved by piezoelectric positioning system over x and y Contact mode - short-range interactions (Å) - interatomic forces
  • 8. AFM - atomic force microscopy How does the microscope work? Contact mode - short-range interactions (Å) - interatomic forces Two ways - 'constant force' ……. feedback system moves tip in z direction to keep force constant 'constant height'……. no feedback system - usually used when surface roughness small higher scan speeds possible
  • 9. AFM - atomic force microscopy How does the microscope work? Tapping mode - long-range forces - van der Waals, electrostatic, magnetic Tip vibrates (105 Hz) close to specimen surface (50-150 Å) with amplitude 10-100 nm May at times lightly contact surface Suitable for soft materials
  • 10. AFM - atomic force microscopy How does the microscope work? Tapping mode Tip vibrates (105 Hz) close to specimen surface (50-150 Å) with amplitude 10-100 nm May at times lightly contact surface When near or on surface, oscillation is damped - tip z position corrected so that vibration amplitude stays constant Tip height Amplitude
  • 11. AFM - atomic force microscopy From force-distance plot, can get: range & magnitude of attractive & repulsive forces elastic modulus & adhesion energy