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Process Integration Asad Mohammed Process Integration Intern – Photolithography Rich Berger - ATDF
Outline ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Process Integration Layout Mask(Reticle) Preparation Recipe Wafer Fabrication Testing Specifications
3 mask Capacitor Reticle– 871AZ Dielectric constant   PolyGate SiO 2 Si Substrate Area A -Q E Separation d Area A +Q V
861    871 Changes oxide Floating gate Control gate N-Si Substrate ,[object Object],[object Object],More structures Dummy Fill Novel structures ,[object Object]
871AZ Layout and Fabrication Underlap Structures Overlap Structures MultiDot Structures Transistors CV structures Dummy Fill Transistors CV structures FG Caps with sub FG Caps w/o sub Underlap Structures Overlap Structures MultiDot Structures Transistors CV structures Overlap Structures MultiDot Structures Transistors CV structures Large Caps UHFs Exposure Etch Deposition
Test Wafers 7082901-7082904 7082902-02; Scratch probably due to wanding Close up without flash 7082904-01; Backside scratch
Electrical Testing Results
3D Reticle Multiple Wafer to Wafer Direct  Copper Bonding  Donor wafer aligned to substrate wafer
3D Die Layout ,[object Object],[object Object],[object Object],[object Object],[object Object]
3D Reticle Fab
Other Reticles Worked on ,[object Object],[object Object],[object Object],[object Object]
Acknowledgements ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

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Nano scholar february08_presentation

  • 1. Process Integration Asad Mohammed Process Integration Intern – Photolithography Rich Berger - ATDF
  • 2.
  • 3. Process Integration Layout Mask(Reticle) Preparation Recipe Wafer Fabrication Testing Specifications
  • 4. 3 mask Capacitor Reticle– 871AZ Dielectric constant  PolyGate SiO 2 Si Substrate Area A -Q E Separation d Area A +Q V
  • 5.
  • 6. 871AZ Layout and Fabrication Underlap Structures Overlap Structures MultiDot Structures Transistors CV structures Dummy Fill Transistors CV structures FG Caps with sub FG Caps w/o sub Underlap Structures Overlap Structures MultiDot Structures Transistors CV structures Overlap Structures MultiDot Structures Transistors CV structures Large Caps UHFs Exposure Etch Deposition
  • 7. Test Wafers 7082901-7082904 7082902-02; Scratch probably due to wanding Close up without flash 7082904-01; Backside scratch
  • 9. 3D Reticle Multiple Wafer to Wafer Direct Copper Bonding Donor wafer aligned to substrate wafer
  • 10.
  • 12.
  • 13.