The document summarizes the design of a pneumatic force load system for testing the lifting mechanism of a chamber lid. The system uses four pneumatic actuators applying a total force of 5200N each to simulate a load of 1390kg or 2080kg on the lid. ANSYS strength analysis was performed to verify the design. Safety features include a maximum air pressure of 6bar and an emergency air pressure release to prevent hazards. The total cost of the system is estimated at $5500.

1. PDR: Pneumatic Force Load for Lid lifting system testing Alexei Even February 2008

2. Agenda Load testing weight calculations Motivation Key specification General views Strength analysis Pneumatic actuator Accessories Safety BOM Cost

3. SEMI S2 0706 requirements

4. Motivation Design jig alternative to Weight Testing loads The jig will provide the same load on the Chamber cover with only 114 kg mass of the Jig (on the Chamber lid) The Jig may used at subcontractor site during Chamber T/K assembly Weight loads Jig 2080 kg load

5. Key Specification Color represent specification confidence level Working air pressure max. - 6 bar Force load on the Chamber lid: 1390 kg, 2080 kg Force per cylinder (x4) ~5200N The force load to be adjustable. The Jig should provide movement to max height position of the Lid The force load to be constant (~1390 kg) while Lid movement up and down during dynamic testing

6. General view Lid (upper) Frame Chamber (lower) beams Pneumatic actuators Ø125, 650 mm stroke

7. General view - modules Lid frame assembly (114 kg) Chamber beam (18 kg x2) Intermediate hinge mounting

8. General view - section Teflon clean pad Eye bolts for lifting with a crane

9. General view - top

10. Strength analysis – ANSYS. Cover Beam

11. Strength analysis – ANSYS. Chamber Beam

12. Pneumatic actuator Cylinder ISO 15552 (6431) Ø125x650 mm, double acting (Metalwork) Force (traction) at 6 bar: 6880N (theoretical) Intermediate hinge clamp Counter hinge Cylinder Rod eye Ø30

13. Accessories Valve MAV 46 LES CC (Metalwork) High-Relief Regulator HR600-04 (Koganei)

14. Safety Moving parts – Chamber Lid opening Air pressure – 6 bar Ergonomics – max weight of assembly 114 kg – lifting by tool’s Lifting device or a crane at T/K vendor site . Worse case scenario: loss of air pressure will not cause hazard use condition – the load will be canceled Audit & certifications: Design verification by SII – mechanical structure strength First Jig testing by SII Periodical testing by certified tester

15. BOM Cost Pneumatic elements kit - $4000 Metal frames ~ $1500 Total: ~$5500 (Weight loads jig ~ $7500) Safety audit and certification: requested $7150