1. MEMS Accelerometer Structure using FIB
Jurgen Daniel - research performed while at University of Cambridge,UK (coll. with FEI Europe and Matsushita Research Institute)
FIB milled readout gap
FIB deposited platinum
Under-etched SOI cross-section (different materials)
Accelerometer structure in Silicon-
on-Insulator (SOI) material
using FIB processing
Tunneling readout mode
(alternative: tapping mode readout)
1st mechanical resonance mode
Goal: determine if FIB is a viable process
for MEMS devices
(Focused Ion Beam)
J.H. Daniel, D.F. Moore "A microaccelerometer structure fabricated in
silicon-on-insulator using a focused ion beam process'', Sensors and
Actuators A 73 (1999) 201-209

2. MEMS Micro-PCR System
Jurgen Daniel – research performed while at University of Cambridge,UK (coll. With Institute of Biotechnology and DERA,Malvern)
PCR test system Gel-electrophoresis
to analyze PCR products
Rapid thermal cycling
enabled by miniaturization
Polymerase Chain Reaction
(PCR) cycle
Micro-PCR chamber concept
Silicon chamber with SiN window
Goal: Portable PCR system for rapid
pathogen detection
J.H. Daniel, et al., "Silicon microchambers for DNA amplification'', Sensors and Actuators A 71, (1998) 81-88