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MEMS Gyroscope 
ANKUSH WAWOO (33)
WHAT ARE MEMS GYROSCOPE 
• Your Description Goes Here 
A gyroscope is 
a device for 
measuring or 
maintaining 
orientatio...
FEW TERMS
THE CORIOLIS EFFECT
Vibrating structure gyroscope 
• Piezoelectric gyroscopes 
• Wine-glass resonator 
• Cylindrical resonator gyroscope 
(CRG...
APPLICATIONS
Disc Resonating Gyro Basics
Operation Principle of the DRG 
A vibrating object tends to continue vibrating in the 
same plane as its support rotates. ...
Coriolis Effect 
• Coriolis acceleration (a) 
occurs if a resonating 
disc is perturbed 
• Depends on velocities on 
the d...
How Does the DRG Work? 
• DC Source creates an electrostatic force that 
moves the disc 
• Proper control of these electro...
Ideal Gyro 
• High-Q (energy dissipation) 
• Large S/N ratio 
• Low-cost 
• Small (1 cm3) 
• Reliable 
• Requiring low pow...
Advantages 
• GRG has large sensing area compared to 
other gyros 
• Easy to package 
• Multiple sensing and driving elect...
THANK YOU !!!
Mems gyroscope working, principle of operation of disc resonator gyroscope
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Mems gyroscope working, principle of operation of disc resonator gyroscope

  1. 1. MEMS Gyroscope ANKUSH WAWOO (33)
  2. 2. WHAT ARE MEMS GYROSCOPE • Your Description Goes Here A gyroscope is a device for measuring or maintaining orientation.
  3. 3. FEW TERMS
  4. 4. THE CORIOLIS EFFECT
  5. 5. Vibrating structure gyroscope • Piezoelectric gyroscopes • Wine-glass resonator • Cylindrical resonator gyroscope (CRG) • Tuning fork gyroscope • Vibrating wheel gyroscope or Disc resonator gyroscope (DRG) TYPES
  6. 6. APPLICATIONS
  7. 7. Disc Resonating Gyro Basics
  8. 8. Operation Principle of the DRG A vibrating object tends to continue vibrating in the same plane as its support rotates. • Gyroscope is driven to resonate in-plane • Electrodes sense deflection in outer ring sockets • Electrodes actuate in inner ring sockets • Circuits process the signal and feedback into the system
  9. 9. Coriolis Effect • Coriolis acceleration (a) occurs if a resonating disc is perturbed • Depends on velocities on the disc  higher frequencies allow Coriolis acceleration to dominate centrifugal acceleration • Coriolis acceleration is what the electrodes sense through change in capacitance
  10. 10. How Does the DRG Work? • DC Source creates an electrostatic force that moves the disc • Proper control of these electrodes can put the system into resonance • Similarly, the sensing electrodes use gap changes to gauge system changes
  11. 11. Ideal Gyro • High-Q (energy dissipation) • Large S/N ratio • Low-cost • Small (1 cm3) • Reliable • Requiring low power
  12. 12. Advantages • GRG has large sensing area compared to other gyros • Easy to package • Multiple sensing and driving electrodes can make it easier to operate and read • MEMS gyroscopes desirable because they are lightweight and cheaper to produce
  13. 13. THANK YOU !!!
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MEMS gyroscope, working, principle of operation, example, applications, description of disc resonator gyroscope, mechatronics

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