1. Capabilities Overview
Vacuum Chamber Design & Build
Engineering Design / Analysis
Process Automation Tools
Precision Air Handlers and Sensor Systems
Enclosures
Power Distribution Boxes
Electro-Mechanical Assembly and Integration
Precision Metal Fabrication
150 Great Oaks Blvd, San Jose, CA 95119 TEL 408-414-5928 www.seminet.com
2. 2
About Seminet
AES (Est 2004) merged with Seminet (est 1998)
65K ft2 facility in San Jose, CA
Engineering Analysis, Design & Build and Build-To-Print services.
Semiconductor Environmental Equip. and Enclosures.
System Integration, Custom Mfg
Patents for Precise Environmental control & N2 Purging.
Vertically Integrated Facility:
Eng: Mech, Elect, Thermal, Mfg, Software (PLC, GUI, Robot)
In House Precision Sheetmetal, Machining, Frame Weldments
Electrical-Mechanical Assembly and Integration
System Level Test: Mech, Elect, Seismic, Noise, Vibration, Environ.
3. Should Costing
Supplier &
Component MGMT
MFG Process MGMT
Prototype Support
DFA and DFM
DFMEA
FEA
– Structural
– Electro Magnetic
– Thermal
– Acoustic
– Shock / Vibration
– Design Optimization
CFD
– Laminar & Turbulent
– Compressible /
Incompressible
– Heat Transfer
– Rotor Dynamics
– Multi Phase
– Reaction & Combustion
– FSI - Fluid Structure
Interaction
Product Data
Mgmt (PDM)
Product Life Cycle
Mgmt (PLM)
Configuration
Mgmt
Value Engineering
Design
Automation
Problem or
Compliance
MGMT
Concurrent Eng.
3D Models & ASSYs
MFG DWGs
GD&T
Tolerance Analysis
Part Spec Creation
BOM Structuring
Tech Manuals
Installation Manuals
ASSYs Animation
Conceptual
3D Skeletons
Systems Eng.
Mechanical
Electrical
Electronics
Product Upgrades
CIP Programs
Reliability Eng.
Overview of Seminet Eng. Services
4. CAD Design & Legacy Conversion
Competency in design & analysis tools such as,
• CAD Tools
– Mechanical - Unigraphics, Inventor, Solid Works, Pro/Engineer, CATIA,
Inventor AutoCAD
• Electrical – ECAD layout & Schematic tools
• CAE Tools
– FEA - Abacus, Ansys & Nastran
– CFD – Fluent, CFX & Star CD
• Engineering Calculators
– MathCAD & Custom tools
Data Migration/Legacy Conversion
• 2D CAD drawings to 3D Parametric models
• Design intent incorporation on existing CAD models
• CAD switch (migration of one software to other)
4
7. 7
Automation Systems
Reticle Transfer Solutions
Fully automated tools, ready to
install on fab floor
Clean Room Robot,
6 axis Staubli
Integrated Enclosure
Barcode reader
RFID for SMIF Pod ID
Reticle management software
Buffering and storage for input
& output of reticles
Temperature and humidity
controlled environment
N2 Purged Environment
optional
Host communication interface
9. 9
System Control & Software
Touchscreen
User, supervisor,
maintenance screens
Real time system status
Recipe creation
Host communication
HMI for system
operation
PC for process data
collection and tracking
Constant error checking
with redundant sensors
10. Vacuum Chamber + RF Match box + RPSC
- Use Ceramic, Teflon:
Between Chamber and
Susceptor, Diffuser to
prevent from Arcing
(Due to high RF
source)
- Use RF Ground strap
with different
thickness, width on
Susceptor:
Improve grounding
- Use silver plating
inside RF Match:
Improve RF efficiency
11. 11
Design & Build Wafer Processor & Conveyor
Silicon wafer
conveyor
High
throughput,
50mm/sec
Runs
24hrs/day
Design, build,
test & install
to customer
specifications.
13. 13
Environmental Control Systems
Mature Products: CD-E & RAM-E
beginning 1990.
High reliability, units run 24/7 for 10 yrs
Patented temp and humidity control
Temperature control of +/- .05° C
Humidity control of +/- .3% RH
Units from 100 CFM to 4000 CFM
Single or multiple air outlets
Class 1 air with appropriate filter
Customization for specific applications
14. 14
Semifab
Large ECU
750-4000 CFM
Watlow PID controller
Power dist panel
Refrigeration
All in-house
CE Certified
SEM S2, S8 Certified
Custom versions per
specifications
Ethernet comm.
optional
15. 15
Semifab Large
ECU E-panel
Electrical panel
for ECU
Size: 4ft x 3ft
Power and Signal
PLC control
CE certified
SEMI S2, S8
certified
16. 16
Fiber Optic Temperature Sensors
High Accuracy, High Reliability
Model Name 9-0105-03 9-0105-02 9-0105-01
Number of Channels 3 2 1
Analog Output 16 Bit, 4-20mA, Loop Powered 12-24 VDC
Measurement Range -45°C to +425°C
Resolution 0.01°C
Accuracy* ±0.025°C - .1°C
Update rate 10 Hz to 1000 Hz (Dynamic)
USB 2.0 Protocol Modbus RTU
RS-485 Protocol Modbus RTU, Half Duplex
Status Indication 3 color Flashing and Solid LEDs
Operating Temp. -20°C to +55°C
Operating Humidity 0 to 90% RH (Non-Condensing)
Dimensions 114mm Tall x 22.5mm Wide x 102mm Long
Power 12-24 VDC (2.5W max)
Mounting 35mm DIN Rail
Software Seminet Proprietary
* Measurement accuracy depends on Probe Accuracy and Transmitter
configuration
17. 17
Tool-Specific Enclosures
Industrial design,
ergonomics, maintenance
& safety
OEM identity
enhancements
Engineered air flow
dynamics
Integration of temperature
and humidity environment
control
Exterior finish: Painted,
Mirror, Grained, etc.
20. 20
AMAT DPS II: 200+ units
CRS Frame & Skins, Paint, Assembly
21. 21
Our Advantage
Vertically integrated company for system solution
Engineering, Build, Assemble, Test, Integration, Installation
Custom Manufacturing & System Integration
reduces cost and leadtime, increases flexibility, and insures
form, fit and function.
Environmental Control Solutions
integrated enclosures for process specific requirements.
Complete Automation Systems
for semiconductor, biotech, industrial applications.
