Seminet provides engineering design and manufacturing services including vacuum chamber design and build, precision air handling systems, enclosures, and electro-mechanical assembly and integration. Located in San Jose, CA, Seminet has 65,000 square feet of facilities for engineering analysis, custom manufacturing, and vertically integrated system integration and testing. Seminet specializes in semiconductor and environmental equipment and has patents for precise environmental control and nitrogen purging systems.

1. Capabilities Overview
Vacuum Chamber Design & Build
Engineering Design / Analysis
Process Automation Tools
Precision Air Handlers and Sensor Systems
Enclosures
Power Distribution Boxes
Electro-Mechanical Assembly and Integration
Precision Metal Fabrication
150 Great Oaks Blvd, San Jose, CA 95119 TEL 408-414-5928 www.seminet.com

2. 2
About Seminet
 AES (Est 2004) merged with Seminet (est 1998)
 65K ft2 facility in San Jose, CA
 Engineering Analysis, Design & Build and Build-To-Print services.
 Semiconductor Environmental Equip. and Enclosures.
 System Integration, Custom Mfg
 Patents for Precise Environmental control & N2 Purging.
 Vertically Integrated Facility:
 Eng: Mech, Elect, Thermal, Mfg, Software (PLC, GUI, Robot)
 In House Precision Sheetmetal, Machining, Frame Weldments
 Electrical-Mechanical Assembly and Integration
 System Level Test: Mech, Elect, Seismic, Noise, Vibration, Environ.

3.  Should Costing
 Supplier &
Component MGMT
 MFG Process MGMT
 Prototype Support
 DFA and DFM
 DFMEA
 FEA
– Structural
– Electro Magnetic
– Thermal
– Acoustic
– Shock / Vibration
– Design Optimization
 CFD
– Laminar & Turbulent
– Compressible /
Incompressible
– Heat Transfer
– Rotor Dynamics
– Multi Phase
– Reaction & Combustion
– FSI - Fluid Structure
Interaction
 Product Data
Mgmt (PDM)
 Product Life Cycle
Mgmt (PLM)
 Configuration
Mgmt
 Value Engineering
 Design
Automation
 Problem or
Compliance
MGMT
 Concurrent Eng.
 3D Models & ASSYs
 MFG DWGs
 GD&T
 Tolerance Analysis
 Part Spec Creation
 BOM Structuring
 Tech Manuals
 Installation Manuals
 ASSYs Animation
 Conceptual
 3D Skeletons
 Systems Eng.
 Mechanical
 Electrical
 Electronics
 Product Upgrades
 CIP Programs
 Reliability Eng.
Overview of Seminet Eng. Services

4. CAD Design & Legacy Conversion
Competency in design & analysis tools such as,
• CAD Tools
– Mechanical - Unigraphics, Inventor, Solid Works, Pro/Engineer, CATIA,
Inventor AutoCAD
• Electrical – ECAD layout & Schematic tools
• CAE Tools
– FEA - Abacus, Ansys & Nastran
– CFD – Fluent, CFX & Star CD
• Engineering Calculators
– MathCAD & Custom tools
 Data Migration/Legacy Conversion
• 2D CAD drawings to 3D Parametric models
• Design intent incorporation on existing CAD models
• CAD switch (migration of one software to other)
4

5. Coupled
Physics
Design
Optimization
• Static/Transient
• Dynamics
• Multi-Body
• Crash/Impact
• Non-Linear
• Fatigue
• Fracture Mechanics
Structural
Electro
Magnetic
Thermal
Acoustic
• Conduction
• Convection
• Radiation
• Thermo-Structural
• Creep
• FSI
• Vibro Acoustic • Design Optimization
• Size, Shape, Topology
Optimization
• FFT
• Transfer Matrices Coefficients
Calculation
• Acoustic radiation
• Fully-coupled Vibro-acoustics
FEA Capabilities
5

6. Laminar &
Turbulent
Compressible/
Incompressible
Heat
Transfer
Rotor Dynamics/
Turbo Machinery
Multi Phase
Reaction &
Combustion
FSI (Fluid Structure
Interaction)
CFD Capabilities
6

7. 7
Automation Systems
Reticle Transfer Solutions
 Fully automated tools, ready to
install on fab floor
 Clean Room Robot,
6 axis Staubli
 Integrated Enclosure
 Barcode reader
 RFID for SMIF Pod ID
 Reticle management software
 Buffering and storage for input
& output of reticles
 Temperature and humidity
controlled environment
 N2 Purged Environment
optional
 Host communication interface

8. 8
Automation Systems
Reticle Handling, Inspection, Cleaning

9. 9
System Control & Software
 Touchscreen
 User, supervisor,
maintenance screens
 Real time system status
 Recipe creation
 Host communication
 HMI for system
operation
 PC for process data
collection and tracking
 Constant error checking
with redundant sensors

10. Vacuum Chamber + RF Match box + RPSC
- Use Ceramic, Teflon:
Between Chamber and
Susceptor, Diffuser to
prevent from Arcing
(Due to high RF
source)
- Use RF Ground strap
with different
thickness, width on
Susceptor:
Improve grounding
- Use silver plating
inside RF Match:
Improve RF efficiency

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Design & Build Wafer Processor & Conveyor
 Silicon wafer
conveyor
 High
throughput,
50mm/sec
 Runs
24hrs/day
 Design, build,
test & install
to customer
specifications.

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E-Box for
Conveyor
 Design & Build
in-house
 Electrical
control box
 Power
Distribution
 S2, S8, CE
compliant

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Environmental Control Systems
 Mature Products: CD-E & RAM-E
beginning 1990.
 High reliability, units run 24/7 for 10 yrs
 Patented temp and humidity control
 Temperature control of +/- .05° C
 Humidity control of +/- .3% RH
 Units from 100 CFM to 4000 CFM
 Single or multiple air outlets
 Class 1 air with appropriate filter
 Customization for specific applications

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Semifab
Large ECU
 750-4000 CFM
 Watlow PID controller
 Power dist panel
 Refrigeration
 All in-house
 CE Certified
 SEM S2, S8 Certified
 Custom versions per
specifications
 Ethernet comm.
optional

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Semifab Large
ECU E-panel
 Electrical panel
for ECU
 Size: 4ft x 3ft
 Power and Signal
 PLC control
 CE certified
 SEMI S2, S8
certified

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Fiber Optic Temperature Sensors
High Accuracy, High Reliability
Model Name 9-0105-03 9-0105-02 9-0105-01
Number of Channels 3 2 1
Analog Output 16 Bit, 4-20mA, Loop Powered 12-24 VDC
Measurement Range -45°C to +425°C
Resolution 0.01°C
Accuracy* ±0.025°C - .1°C
Update rate 10 Hz to 1000 Hz (Dynamic)
USB 2.0 Protocol Modbus RTU
RS-485 Protocol Modbus RTU, Half Duplex
Status Indication 3 color Flashing and Solid LEDs
Operating Temp. -20°C to +55°C
Operating Humidity 0 to 90% RH (Non-Condensing)
Dimensions 114mm Tall x 22.5mm Wide x 102mm Long
Power 12-24 VDC (2.5W max)
Mounting 35mm DIN Rail
Software Seminet Proprietary
* Measurement accuracy depends on Probe Accuracy and Transmitter
configuration

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Tool-Specific Enclosures
 Industrial design,
ergonomics, maintenance
& safety
 OEM identity
enhancements
 Engineered air flow
dynamics
 Integration of temperature
and humidity environment
control
 Exterior finish: Painted,
Mirror, Grained, etc.

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AMAT PDC: 180+
SST & commercial parts, electro-mech assy

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KLA Dual SMIF: 100+
CRS Frame, Skins, Machined Parts, Mech Assy

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AMAT DPS II: 200+ units
CRS Frame & Skins, Paint, Assembly

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Our Advantage
 Vertically integrated company for system solution
Engineering, Build, Assemble, Test, Integration, Installation
 Custom Manufacturing & System Integration
reduces cost and leadtime, increases flexibility, and insures
form, fit and function.
 Environmental Control Solutions
integrated enclosures for process specific requirements.
 Complete Automation Systems
for semiconductor, biotech, industrial applications.