The document describes simulations of DC hollow cathode discharges using hybrid and fluid models. Two cases are examined with different cathode voltages, dimensions and pressures. Results shown include electron density, ion density, electric potential, electron temperature, ion production rate, electric field and ion temperature distributions for each case and model. Current-voltage characteristics are also presented.

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Plasma Enhanced materials processing and
rarefied GAS dynamics Unified Simulation tools
P E G A S U S

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Simulation of
DC hollow cathode discharge
Module ： TTBEQ (for fluid model)
PHM
(hybrid model, fluid model)

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Computational model and conditions
H
W
D Unit ： mm
Gas : Ar
30, 10, 2 4.5,1.6,0.5
133 1) 1330
2) 6650
1) -230 -300
2) -280
0.05 0.04
Hybrid model
Cathode
Case-1 Case-2
・ H, D, W :
・ Pressure
[Pa]
・ Cathode
voltage [V]
・ γ+
・ PHM Fluid model

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Anode（GND）
5
32
2
Cathode
-230 [V]
-280 [V]
γ+= 0.05
Ar : 133 [Pa]
Anode（GND）
0.8
5
0.5
Cathode
-300 [V]
γ+= 0.04
Ar : 1330 [Pa]
6650 [Pa]
Hybrid model Fluid model
Unit:[mm]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Electron
density [/m3]
Electron
density [/m3]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Ar+
density [/m3]
Ar+
density [/m3]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Electric
potential [V]
Electric
potential [V]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Electron
Temp. [eV]
Electron
Temp. [eV]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Ar+
source rate [/m3 /s]
Ar+
source rate [/m3 /s]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Reduced electric field
[Td]
換算電界[Td]Reduced electric field
[Td]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Ar+
Temp. [eV]
Ar+
Temp. [eV]

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Ar : 133 [Pa]
2.8 [mA]
9.5 [mA]
0
0.03

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Ar : 133 [Pa]
-230[V] Mid.
-230[V] Bottom
-280[V] Bottom
-280[V] Mid.
×
×
Mid.
Bottom
yield=0.406
yield=0.086
yield=0.011

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Electron
density [/m3]
Electron
density [/m3]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
density [/m3]
Ar+
density [/m3]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Electron
Temp. [eV]
Electron
Temp. [eV]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Electric
potential [V]
Electric
potential [V]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
source rate [/m3 /s]
Ar+
source rate [/m3 /s]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
換算電界[Td] 換算電界[Td]Reduced electric field
[Td]
Reduced electric field
[Td]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
Temp. [eV]
Ar+
Temp. [eV]