Wireless power transmission project is used to transfer the power from the power source to electrical loads using high frequency resonating air core transformers.
RF Energy Harvesting for Wireless DevicesIJERD Editor
Radio Frequency (RF) energy transfer and harvesting techniques have recently become alternative methods to empower the next generation wireless networks. As this emerging technology enables proactive energy replenishment of wireless devices, it is advantageous in supporting applications with quality of service requirements. In this paper, some wireless power transfer methods, RF energy harvesting networks, various receiver architectures and existing applications are presented. Finally, some open research directions are envisioned.
Today large number of new technologies depends on electrical supply system, so complexity of
wires is very high. In this project, as requirement of wireless electrical power system, project
team present an analysis the concept of cable less transmission i.e. Power without the usage of
any kind of the electrical conductor or wires. Transmission or distribution of 50 or 60 Hz
electrical energy from the generation point to the consumers end without any physical wire has
yet to mature as a familiar and viable technology.
Our team chose to project the feasibility of wireless power transmission through
inductive coupling. This consists of using a transmission and receiving coils as the coupling
antennas. Although the coils do not have to be solenoid they must be in the form of closed loops
to both transmit and receive power. To transmit power an alternating current must be passed
through a closed loop coil. The alternating current will create a time varying magnetic field. The
flux generated by the time varying magnetic field will then induce a voltage on a receiving coil
closed loop system. This seemingly simple system outlines the major principle that our research
investigated. The primary benefits to using inductive coupling are the simplicity of the
transmission and receiving antennas, additionally for small power transmission this is a much
safer means of conveyance. To demonstrate the success of our the teams we created a receiving
circuit to maximize the amount of received power and light an LED at a distance up to two feet.
We were able to create both transmission and receiving circuits capable of transmitting the
necessary power to light an LED in a pulsed mode. On average with transmitting one watt of
power the receiving circuit was able to receive 100 micro-watts of power. While the efficiency of
the system is extremely low, approximately 0.01% with some improvements we feel certain the
efficiency could be greatly improved. Furthermore, as the transmission distance is decreased the
efficiency of any system using inductive coupling improves exponentially.
Wireless power transmission project is used to transfer the power from the power source to electrical loads using high frequency resonating air core transformers.
RF Energy Harvesting for Wireless DevicesIJERD Editor
Radio Frequency (RF) energy transfer and harvesting techniques have recently become alternative methods to empower the next generation wireless networks. As this emerging technology enables proactive energy replenishment of wireless devices, it is advantageous in supporting applications with quality of service requirements. In this paper, some wireless power transfer methods, RF energy harvesting networks, various receiver architectures and existing applications are presented. Finally, some open research directions are envisioned.
Today large number of new technologies depends on electrical supply system, so complexity of
wires is very high. In this project, as requirement of wireless electrical power system, project
team present an analysis the concept of cable less transmission i.e. Power without the usage of
any kind of the electrical conductor or wires. Transmission or distribution of 50 or 60 Hz
electrical energy from the generation point to the consumers end without any physical wire has
yet to mature as a familiar and viable technology.
Our team chose to project the feasibility of wireless power transmission through
inductive coupling. This consists of using a transmission and receiving coils as the coupling
antennas. Although the coils do not have to be solenoid they must be in the form of closed loops
to both transmit and receive power. To transmit power an alternating current must be passed
through a closed loop coil. The alternating current will create a time varying magnetic field. The
flux generated by the time varying magnetic field will then induce a voltage on a receiving coil
closed loop system. This seemingly simple system outlines the major principle that our research
investigated. The primary benefits to using inductive coupling are the simplicity of the
transmission and receiving antennas, additionally for small power transmission this is a much
safer means of conveyance. To demonstrate the success of our the teams we created a receiving
circuit to maximize the amount of received power and light an LED at a distance up to two feet.
We were able to create both transmission and receiving circuits capable of transmitting the
necessary power to light an LED in a pulsed mode. On average with transmitting one watt of
power the receiving circuit was able to receive 100 micro-watts of power. While the efficiency of
the system is extremely low, approximately 0.01% with some improvements we feel certain the
efficiency could be greatly improved. Furthermore, as the transmission distance is decreased the
efficiency of any system using inductive coupling improves exponentially.
Fundamentals of electromagnetic compatibility (EMC)Bruno De Wachter
Electromagnetic interference, EMI, has become very important in the last few decades as the amount of electronic equipment in use has increased enormously. This has led to an increase in the sources of interference, e.g. digital equipment and switching power supplies, and an increase in the sensitivity of equipment to interference, due to higher data rates.
This development demands high quality electrical installations in all buildings where electromagnetic non-compatibility leads to either higher costs or to an unacceptable decrease in safety standards.
This application note gives an overview and a basic understanding of the major physical principles of electromagnetic interference and an introduction to the principles of mitigation of disturbing effects. As a result, the measures required to achieve an EMC-compliant installation should be easily understood.
Wireless Energy Harvesting to Charge Cell phone Batteriesidescitation
he research deals with the charging of cellphones
wirelessly using various techniques. A voltage doubler circuit
assembled with a “more” efficient circuit definitely makes
this project a brighter innovation.
The main objective of this project is to develop a device for wireless power transfer. The concept of wireless power transfer was realized by Nikolas Tesla. Wireless power transfer can make a remarkable change in the field of the electrical engineering which eliminates the use conventional copper cables and current carrying wires. Based on this concept, the project is developed to transfer power within a small range. This project can be used for charging batteries those are physically not possible to be connected electrically.
ENERGY HARVESTING METHOD IN WIRELESS SENSOR NETWORKijejournal
With the advent of modern micro mechanical system technology and wireless communication wireless
sensor networks are finding a lot of application in modern day life. The design of the sensor network
depends on the specific application. This paper gives a description of the components of the wireless
sensor nodes used. It also describes how the lifetime of a wireless sensor network can be increased by the
use of energy harvesting sensor nodes.
Wireless charging (also known as " Inductive charging ") uses an electromagnetic field to transfer energy between two objects.
This is usually done with a charging station.
Energy is sent through an inductive coupling to an electrical device, which can then use that energy to charge batteries or run the device.
This paper presents a highly efficient power transfer system based on a co-design of a class-E power amplifier (PA) and a pair of inductively coupled Helical coils for through-metal-wall power transfer. Power is transferred wirelessly through a 3.1-mm thick aluminum barrier without any physical penetration and contact. Measurement results show that the class-E PA achieves a peak power gain of 25.2 dB and a maximum collector efficiency of 57.3%, all at 200 Hz. The proposed system obtains a maximum power transfer efficiency of 9% and it can deliver 5 W power to the receiver side through the aluminum barrier.
These slides explain the topics mentioned in Chapter 1, part (a) of the course EE110-Basic Electrical and Electronics Engineering, prescribed for non-circuit branches of engineering at JSS Science & Technology University, Sri Jayachamarajendra College of Engineering, Mysuru, India
This project is used to develop a wireless power transfer for vehicles without wires and connections for several applications like vehicles in stores, airports etc
In this project, main focus is to develop high power density and high efficiency converter with closed loop control for attaining load and line regulation. Complete converter was simulated in PSIM and implemented hardware in CEERI lab.
Fundamentals of electromagnetic compatibility (EMC)Bruno De Wachter
Electromagnetic interference, EMI, has become very important in the last few decades as the amount of electronic equipment in use has increased enormously. This has led to an increase in the sources of interference, e.g. digital equipment and switching power supplies, and an increase in the sensitivity of equipment to interference, due to higher data rates.
This development demands high quality electrical installations in all buildings where electromagnetic non-compatibility leads to either higher costs or to an unacceptable decrease in safety standards.
This application note gives an overview and a basic understanding of the major physical principles of electromagnetic interference and an introduction to the principles of mitigation of disturbing effects. As a result, the measures required to achieve an EMC-compliant installation should be easily understood.
Wireless Energy Harvesting to Charge Cell phone Batteriesidescitation
he research deals with the charging of cellphones
wirelessly using various techniques. A voltage doubler circuit
assembled with a “more” efficient circuit definitely makes
this project a brighter innovation.
The main objective of this project is to develop a device for wireless power transfer. The concept of wireless power transfer was realized by Nikolas Tesla. Wireless power transfer can make a remarkable change in the field of the electrical engineering which eliminates the use conventional copper cables and current carrying wires. Based on this concept, the project is developed to transfer power within a small range. This project can be used for charging batteries those are physically not possible to be connected electrically.
ENERGY HARVESTING METHOD IN WIRELESS SENSOR NETWORKijejournal
With the advent of modern micro mechanical system technology and wireless communication wireless
sensor networks are finding a lot of application in modern day life. The design of the sensor network
depends on the specific application. This paper gives a description of the components of the wireless
sensor nodes used. It also describes how the lifetime of a wireless sensor network can be increased by the
use of energy harvesting sensor nodes.
Wireless charging (also known as " Inductive charging ") uses an electromagnetic field to transfer energy between two objects.
This is usually done with a charging station.
Energy is sent through an inductive coupling to an electrical device, which can then use that energy to charge batteries or run the device.
This paper presents a highly efficient power transfer system based on a co-design of a class-E power amplifier (PA) and a pair of inductively coupled Helical coils for through-metal-wall power transfer. Power is transferred wirelessly through a 3.1-mm thick aluminum barrier without any physical penetration and contact. Measurement results show that the class-E PA achieves a peak power gain of 25.2 dB and a maximum collector efficiency of 57.3%, all at 200 Hz. The proposed system obtains a maximum power transfer efficiency of 9% and it can deliver 5 W power to the receiver side through the aluminum barrier.
These slides explain the topics mentioned in Chapter 1, part (a) of the course EE110-Basic Electrical and Electronics Engineering, prescribed for non-circuit branches of engineering at JSS Science & Technology University, Sri Jayachamarajendra College of Engineering, Mysuru, India
This project is used to develop a wireless power transfer for vehicles without wires and connections for several applications like vehicles in stores, airports etc
In this project, main focus is to develop high power density and high efficiency converter with closed loop control for attaining load and line regulation. Complete converter was simulated in PSIM and implemented hardware in CEERI lab.
I'm teaching my students the form of argumentative writing.
Our prompt:What are the pros and cons of using digital technology to teach writing?
I took the side of cons of digital writing to get my students hooked on the topic.
What they need to do is argue for technology in writing.
This is my presentation to get the discussion going.
PROJECT DESCRIPTION
DOWNLOAD
The main objective of this project is to develop a device for wireless power transfer. The concept of wireless power transfer was realized by Nikolas tesla. Wireless power transfer can make a remarkable change in the field of the electrical engineering which eliminates the use conventional copper cables and current carrying wires.
Based on this concept, the project is developed to transfer power within a small range. This project can be used for charging batteries those are physically not possible to be connected electrically such as pace makers (An electronic device that works in place of a defective heart valve) implanted in the body that runs on a battery.
The patient is required to be operated every year to replace the battery. This project is designed to charge a rechargeable battery wirelessly for the purpose. Since charging of the battery is not possible to be demonstrated, we are providing a DC fan that runs through wireless power.
This project is built upon using an electronic circuit which converts AC 230V 50Hz to AC 12V, High frequency. The output is fed to a tuned coil forming as primary of an air core transformer. The secondary coil develops a voltage of HF 12volt.
Thus the transfer of power is done by the primary(transmitter) to the secondary that is separated with a considerable distance(say 3cm). Therefore the transfer could be seen as the primary transmits and the secondary receives the power to run load.
Moreover this technique can be used in number of applications, like to charge a mobile phone, iPod, laptop battery, propeller clock wirelessly. And also this kind of charging provides a far lower risk of electrical shock as it would be galvanically isolated.
PROJECT DESCRIPTION
DOWNLOAD
The main objective of this project is to develop a device for wireless power transfer. The concept of wireless power transfer was realized by Nikolas tesla. Wireless power transfer can make a remarkable change in the field of the electrical engineering which eliminates the use conventional copper cables and current carrying wires.
Based on this concept, the project is developed to transfer power within a small range. This project can be used for charging batteries those are physically not possible to be connected electrically such as pace makers (An electronic device that works in place of a defective heart valve) implanted in the body that runs on a battery.
The patient is required to be operated every year to replace the battery. This project is designed to charge a rechargeable battery wirelessly for the purpose. Since charging of the battery is not possible to be demonstrated, we are providing a DC fan that runs through wireless power.
This project is built upon using an electronic circuit which converts AC 230V 50Hz to AC 12V, High frequency. The output is fed to a tuned coil forming as primary of an air core transformer. The secondary coil develops a voltage of HF 12volt.
Thus the transfer of power is done by the primary(transmitter) to the secondary that is separated with a considerable distance(say 3cm). Therefore the transfer could be seen as the primary transmits and the secondary receives the power to run load.
Moreover this technique can be used in number of applications, like to charge a mobile phone, iPod, laptop battery, propeller clock wirelessly. And also this kind of charging provides a far lower risk of electrical shock as it would be galvanically isolated.
Study of RF-MEMS Capacitive Shunt Switch for Microwave Backhaul Applications IOSRJECE
In this research paper, we have proposed a new type of capacitive shunt RF-MEMS switch. MicroElectro-Mechanical System (MEMS) is a combination of mechanical and electromagnetics properties at micro level unit. This MEMS switch can be used for switching purpose at RF and microwave frequencies, called RFMEMS switch. The RF-MEMS switch has a potential characteristics and superior performances at radio frequency. The MEMS switch has excellent advantages such as zero power consumption, high power handling capacity, high performance, and low inter-modulation distortion. In this proposed design, a new type of capacitive shunt switch is designed and analyzed for RF applications. The switch is designed both in UP and DOWN-states. The proposed switch design consists of substrate, co-planar waveguide (CPW), dielectric material and suspended metallic bridge. The proposed MEMS switch has dimension of 508 µm × 620 µm with a height of 500 µm and implemented on GaAs as a substrate material with relative permittivity of 12.9. The geometry and results of the proposed switch is designed using Ansoft HFSS electromagnetic simulator based on finite element method (FEM). The electrostatic and electromagnetic result showed better performances such as return loss, insertion loss and isolation. The switch has also excellent isolation property of -48 dB at 26 GHz.
Wireless power transmission via resonance coupling.Xûbåįr Kakar
this slides give you idea about the recent research on Wireless power transmission.
compiled by Muhammad Xubair (BS-Electronic engg) at BUITEMS Quetta Pakistan.
Analysis and Implementation of Solid-State Relays in Industrial application F...IJMREMJournal
There are many applications and circumstances where switching devices are required for proper operation,
controlling and isolating the high power and low power systems. The most widely used switching devices are
electromechanical relays and solid state relays. In this work, analysis and implementation of solid state relays over
electromechanical relays with respect to instantaneous current supply inindustrial application is conducted and
compared. For this purpose, an experimental setup is arranged for switching operation of electromechanical relays
and solid-state relays.The results of voltage and the current transients are analyzed and compared. It was observed
that there are no transients occurred during switching of solid state relays where as during switching of
electromechanical relay transients observed in volatge and current waveforms. So, it is advisable to use the solid
state relays over electromagnetic relay for safe and smooth operation of the system.
Review Paper on Wireless Power Transmission by using Inductive Coupling for D...
ARR_Presentation
1. 2011
Electrical
Engineering
Department
Annual
Research
Review
CMOS-‐Compa*ble
Surface-‐
Micromachined
RF-‐Relay
Prepared
for
the
2011
UCLA
EE
ARR
November
14
Jere
Harrison,
Xiaoxu
Wu,
&
Professor
Rob
Candler
TC3
TC4
2. 2011
Electrical
Engineering
Department
Annual
Research
Review
Presenta*on
outline
Mo*va*on
State
of
the
art
Design
Performance
Next
genera*on
switch
Future
direc*on
for
our
magne*c
MEMS
3. 2011
Electrical
Engineering
Department
Annual
Research
Review
A
liSle
bit
of
perspec*ve
1
m
1
cm
1
mm
10
nm
<1
nm
1
μm
100
μm
Device
scale
Some
parameters
to
compare
across
devices:
Power
handling
–
How
much
power
can
the
relay
handle?
Isola*on
–
How
much
power
leaks
when
switched
off?
Inser*on
loss
–
How
much
power
is
lost
when
switched
on?
4. 2011
Electrical
Engineering
Department
Annual
Research
Review
A
liSle
bit
of
perspec*ve
1
m
1
cm
1
mm
10
nm
<1
nm
1
μm
100
μm
Transmission
line
isolators:
Ultra-‐high
power,
ultra-‐high
isola*on,
&
low
loss
Device
scale
5. 2011
Electrical
Engineering
Department
Annual
Research
Review
A
liSle
bit
of
perspec*ve
1
m
1
cm
1
mm
10
nm
<1
nm
1
μm
100
μm
Transmission
line
isolators:
Ultra-‐high
power,
ultra-‐high
isola*on,
&
low
loss
Vacuum
triodes
&
macro-‐relays:
High
power,
high
isola*on,
&
low
loss
Device
scale
6. 2011
Electrical
Engineering
Department
Annual
Research
Review
A
liSle
bit
of
perspec*ve
1
m
1
cm
1
mm
10
nm
<1
nm
1
μm
100
μm
Transmission
line
isolators:
Ultra-‐high
power,
ultra-‐high
isola*on,
&
low
loss
Vacuum
triodes
&
macro-‐relays:
High
power,
high
isola*on,
&
low
loss
MEMS
relays:
Moderate
power,
high
isola*on,
&
low
loss
Device
scale
7. 2011
Electrical
Engineering
Department
Annual
Research
Review
A
liSle
bit
of
perspec*ve
1
m
1
cm
1
mm
10
nm
<1
nm
1
μm
100
μm
Transmission
line
isolators:
Ultra-‐high
power,
ultra-‐high
isola*on,
&
low
loss
Vacuum
triodes
&
macro-‐relays:
High
power,
high
isola*on,
&
low
loss
MEMS
relays:
Moderate
power,
high
isola*on,
&
low
loss
Semiconductor
transistors:
Moderate
power,
moderate
isola*on,
&
moderate
loss
Device
scale
8. 2011
Electrical
Engineering
Department
Annual
Research
Review
A
liSle
bit
of
perspec*ve
1
m
1
cm
1
mm
10
nm
<1
nm
1
μm
100
μm
Transmission
line
isolators:
Ultra-‐high
power,
ultra-‐high
isola*on,
&
low
loss
Vacuum
triodes
&
macro-‐relays:
High
power,
high
isola*on,
&
low
loss
MEMS
relays:
Moderate
power,
high
isola*on,
&
low
loss
Biological
ion
channels:
Ultra-‐small
Semiconductor
transistors:
Moderate
power,
moderate
isola*on,
&
moderate
loss
Device
scale
10. 2011
Electrical
Engineering
Department
Annual
Research
Review
Who
needs
a
high
isola*on,
low
loss
relay?
TelecommunicaDon
Switched
capacitor
banks
for
low-‐loss
tunable
filters
Antenna
switches
for
mul*-‐band
phones
11. 2011
Electrical
Engineering
Department
Annual
Research
Review
Who
needs
a
high
isola*on,
low
loss
relay?
Precision
measurement
instruments
TelecommunicaDon
Switched
capacitor
banks
for
low-‐loss
tunable
filters
Antenna
switches
for
mul*-‐band
phones
Precision
digital
filters
Switched
amplifiers
for
expanded
dynamic
range
12. 2011
Electrical
Engineering
Department
Annual
Research
Review
Who
needs
a
high
isola*on,
low
loss
relay?
Aerospace
&
Defense
Precision
measurement
instruments
TelecommunicaDon
Precision
digital
filters
Switched
amplifiers
for
expanded
dynamic
range
RF
isolators
Radia*on-‐hardened
electronics
Switched
capacitor
banks
for
low-‐loss
tunable
filters
Antenna
switches
for
mul*-‐band
phones
13. 2011
Electrical
Engineering
Department
Annual
Research
Review
Presenta*on
outline
Mo*va*on
State
of
the
art
Design
Performance
Next
genera*on
relay
Future
direc*on
for
our
magne*c
MEMS
15. 2011
Electrical
Engineering
Department
Annual
Research
Review
State
of
the
art
in
MEMS
Relays
Middle
of
the
road
performance
in
inser*on
loss
for
MEMS
switches.
For
reference:
GaAs
and
GaN
FETs
have
~1
dB
inser*on
loss
beyond
1
GHz.
17. 2011
Electrical
Engineering
Department
Annual
Research
Review
State
of
the
art
in
MEMS
Relays
UCLA
Magne*c
MEMS
Relay
uses
the
highest
isola*on
topology
and
achieves
a
longer
relay
throw.
Should
be
the
highest
isolaDon
MEMS
switch
reported.
19. 2011
Electrical
Engineering
Department
Annual
Research
Review
State
of
the
art
in
MEMS
Relays
A
long
throw
magneDc
actuator
has
CMOS
compaDble
voltage
levels.
20. 2011
Electrical
Engineering
Department
Annual
Research
Review
Presenta*on
outline
Mo*va*on
State
of
the
art
Design
Performance
Next
genera*on
relay
Future
direc*on
for
our
magne*c
MEMS
21. 2011
Electrical
Engineering
Department
Annual
Research
Review
The
case
for
magne*c
actua*on
Inser*on
loss
is
propor*onal
to
actuator
force.
Isola*on
is
propor*onal
to
maximum
actuator
throw.
The
actuator
for
a
relay
should
have
high
force
across
a
long
actuaDon
distance.
22. 2011
Electrical
Engineering
Department
Annual
Research
Review
The
case
for
magne*c
actua*on
4x105J/m3
@
gap
=
10
μm
7x103J/m3
@
gap
=
10
μm
MagnetostaDc
energy
limited
by
magneDc
saturaDon
ElectrostaDc
energy
limited
by
Townsend
breakdown
ElectrostaDc
energy
limited
by
field
emission
MagneDc
actuaDon
provides
more
force
than
is
possible
with
electrostaDc
actuaDon,
and
does
so
over
longer
distances.
Force
is
propor*onal
to
the
stored
energy:
F = −∇U
23. 2011
Electrical
Engineering
Department
Annual
Research
Review
Actuator
With
enough
remanence,
actuators
are
bi-‐stable.
24. 2011
Electrical
Engineering
Department
Annual
Research
Review
Actuator
Force
Calcula*on:
We
can
calculate
the
simple
force
generated
by
a
gap
closing
magne*c
actuator
with
a
few
assump*ons:
• Neglect
fringing
and
satura*on
• Uniform
permeability
• Constant
cross
sec*onal
area
€
F = −∇(E)
€
E =
1
2
LI2
€
Rcore =
Lcore
µrµ0Acore
€
Rgap =
Lgap
1× µ0Agap€
L =
n2
R
ϕ
Rtotal
25. 2011
Electrical
Engineering
Department
Annual
Research
Review
Actuator
Force
Calcula*on:
We
can
calculate
the
simple
force
generated
by
a
gap
closing
magne*c
actuator
with
a
few
assump*ons:
• Neglect
fringing
and
satura*on
• Uniform
permeability
• Constant
cross
sec*onal
area
€
F = −∇(E)
ϕ
26. 2011
Electrical
Engineering
Department
Annual
Research
Review
Fabrica*on
C
C’
A
A’
All
processes
<
300°
C
(Back-‐end
CMOS
compaDble)
29. 2011
Electrical
Engineering
Department
Annual
Research
Review
Presenta*on
outline
Mo*va*on
State
of
the
art
Design
Performance
Next
genera*on
relay
Future
direc*on
for
our
magne*c
MEMS
30. 2011
Electrical
Engineering
Department
Annual
Research
Review
Actuator
Relay
closes
at
1
V.
Actuator
mo*on
is
measured
with
a
calibrated
camera
at
various
current
bias
levels.
Measurements
match
analy*cal
models
and
FEM
simula*ons.
Inductance
is
measured
on
wafer
and
matches
analy*cal
models
and
FEM
simula*ons.
32. 2011
Electrical
Engineering
Department
Annual
Research
Review
Switch
Closing
Dme
=
64
μs
Opening
Dme
=
4
μs
Switch
Bounce
100
μs
measurement
*me
constant
DC
switch
contact
resistance
was
measured
at
250
mΩ.
100
Million
switch
cycles
before
failure.
RF-‐waveguide
not
func*onal
on
current
genera*on
relay.
33. 2011
Electrical
Engineering
Department
Annual
Research
Review
Presenta*on
outline
Mo*va*on
State
of
the
art
Design
Performance
Next
genera*on
relay
Future
direc*on
for
our
magne*c
MEMS
34. 2011
Electrical
Engineering
Department
Annual
Research
Review
High
frequency
Coplanar
waveguide
switch
integrated
into
the
film
stack
35. 2011
Electrical
Engineering
Department
Annual
Research
Review
High
isola*on
&
Bi-‐stability
Need
a
thicker
core
to
develop
enough
force
to
close
magne*c
gap
Periodic
‘anchors’
remove
low
order
mechanical
buckling
modes
of
the
sacrificial
electropla*ng
mold,
increasing
cri*cal
stress
by
8x.
Sacrificial
‘anchors’
4x
thicker
magneDc
core
36. 2011
Electrical
Engineering
Department
Annual
Research
Review
High
isola*on
&
Bi-‐stability
Need
a
thicker
core
to
develop
enough
force
to
close
magne*c
gap
Periodic
‘anchors’
remove
low
order
mechanical
buckling
modes
of
the
sacrificial
electropla*ng
mold,
increasing
cri*cal
stress
by
8x.
FEM
simula*ons
show
a
<
5%
reduc*on
in
field
due
to
anchors.
Sacrificial
‘anchors’
4x
thicker
magneDc
core
37. 2011
Electrical
Engineering
Department
Annual
Research
Review
Fabrica*on
A’ B B’
Silicon
Dioxide
Amorphous
Si
A
A
A
A
A’
A’
A’
A’ B
B
B
B
B’
B’
B’
B’
(1)
(5)
(6)
(7)
Magne8c
Core
Copper
Gold
A A’
B
B’
C C’
A
(3)
C C’
C C’
A’ B B’ A C C’
(4)
SU‐8
C C’
C C’
C C’
(1)
Etch
trenches
into
substrate
and
fill
with
electroformed
copper,
forming
the
boSom
windings
of
the
flux
source.
(3)
Isolate
the
boSom
copper
from
the
film
stack
with
silicon
nitride.
Deposit
and
paSern
amorphous
silicon
release
layer,
silicon
dioxide
actuator-‐
waveguide
linkage,
and
top
amorphous
silicon
release
layer.
(4)
Electroform
the
gold
through
a
paSerned
sacrificial
mold
to
form
the
waveguide.
(5)
Electroform
NiFe
on
the
surface
through
a
paSerned
polymer
mold
to
form
the
magne*c
core.
(6)
Insulate
the
core
and
planarize
the
surface
with
a
photo-‐paSerned
structural
polymer.
Etch
through
the
silicon
nitride
to
the
copper
in
the
exposed
vias.
(7)
Complete
the
top
of
the
windings
with
electroformed
copper
through
a
paSerned
mold.
38. 2011
Electrical
Engineering
Department
Annual
Research
Review
Presenta*on
outline
Mo*va*on
State
of
the
art
Design
Performance
Next
genera*on
relay
Future
direc*on
for
our
magne*c
MEMS
39. 2011
Electrical
Engineering
Department
Annual
Research
Review
And
now,
for
something
completely
different
Free
electron
lasers
are
kilowaS–megawaS
class
tunable
lasers
from
infrared
light
to
X-‐rays,
and
have
enabled
en*rely
new
paradigms
of
ultra-‐fast
high-‐energy
measurement.
FELs
have
been
used
for
atomic-‐scale
Dme-‐resolved
imaging
of
chemical
reacDons,
instantaneous
MRI
quality
imaging
of
so_
Dssue,
and
automated
non-‐invasive
cancer
surgery.
You
need
an
electron
accelerator
and
an
undulator
40. 2011
Electrical
Engineering
Department
Annual
Research
Review
And
now,
for
something
completely
different
Miniaturize
by
3
orders
of
magnitude
with
microfabricaDon
