22. Conversion Efficiency
Test Results (Uniform Grating)
22
2
)()(
)(
zBzA
zB
utputr at the oTotal powe
ion powerpolarizatConverted
PCE
+
==
1528 1530 1532 1534 1536 1538 1540
0.0
0.2
0.4
0.6
0.8
1.0
W/G 5 - Linear Scale
Room Temperature
500 elements
TE input/TM output
TM input/TE output
Theoretical Response
PolarizationConversionEfficiency
Wavelength (nm)
Conversion Efficiency =
99.8%
@ 1533 nm
23. Device Fabrication
Conversion Efficiency
•Coupling coefficient had to be adjusted
dxdzEE TM
pert
TE
∫
∞
∞−
∆⋅= εκ
Critical Parameters:
1. Titanium film thickness → Mode Profiles
2. Titanium in-diffusion time and temperature → Mode Profiles
3. SiO2 strain film thickness and deposition temperature → Strain field
Conversion Mechanism (index modulation) → Static strain-optic (elastooptic) effect
24. Conversion Efficiency
Uniform Grating ( 500 spatial periods)
• 1250 Å Ti film deposition
• Photolithography to define Waveguides (Ti-strips)
• 13 h diffusion @ 1035
o
C and wet atmosphere
• 1.7 µm SiO2 strain film deposited @ 389
o
C
• Photolithography to define strain grating (500 periods) @ room temperature
After many trials:
25. Conversion Efficiency
Temperature Tuning (Uniform Grating)
1524 1526 1528 1530 1532 1534 1536 1538 1540 1542 1544 1546 1548
0.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
24.5
o
C 22.5
o
C 20.0
o
C
17.7
o
C 16.6
o
C 15.2
o
C
14.4
o
C
Temperature tuning
PolarizationConverisonEfficiency
Wavelength (nm)
14 16 18 20 22 24 26
1528
1530
1532
1534
1536
1538
1540
1542
1544
Peak wavelengths vs Temperature
and
Linear Regression
dλ/dT = - 1.3419 nm /
o
C
ConvertedPeakwavelength(nm)
Temperature (
o
C)
34. Electrooptically Tunable Sparse Grating
Filter
L1 L2 L3 L4 L5 L6
L L L LL LiNbO3
Ti diffused
Waveguide
Electrodes
L1 L2 L3 L4 L5 L6
L L L LL LiNbO3
Ti diffused
Waveguide
L1 L2 L3 L4 L5 L6
L L L LL LiNbO3
Ti diffused
Waveguide
Electrodes
35. Device Fabrication / Electrodes
Fabrication Steps
Titanium Deposition
(DC sputtering)
LiNbO3
Ti t
Patterning
(Litho and Etching)
Diffusion
LiNbO3
Ti t
LiNbO3
Ti
LiNbO3
Heat
and
Time
LiNbO3
Photolithography
(Image Reversal)
E-Beam
3 metalsLiNbO3
Lift-Off
LiNbO3
Silica Deposition
(E-beam evaporation)
@ High Temp
Cool-down to
Room Temp.
Surface Strain
build-up
αSiO2
< α LiNbO3
Patterning
(Litho and Etching)LiNbO3
SiO2
LiNbO3
SiO2
LiNbO3
SiO2
40. Test Results (Sparse Grating)
Thermal Tuning
1515 1520 1525 1530 1535 1540 1545 1550 1555
0.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
14
o
C
25
o
C
PolarizationConversionEfficiency
Wavelength (nm)
12 14 16 18 20 22 24 26 28 30
1524
1526
1528
1530
1532
1534
1536
1538
1540
1542
TM to TE conversion
TM to TE data linear regression
TE to TM conversion
TE to TM data linear regression
CenterPeakWavelength(nm)
Temperature (
o
C)
CdTd o
nm/0.1−=λ
41. Test Results (Sparse Grating)
Voltage Tuning
input)(TMnm/V045.0=dVdλ
1520 1530 1540
0.0
0.2
0.4
0.6
0.8
1.0
70 V
-70 V
PolarizationConversionEfficiency
Wavelength (nm)
-80 -70 -60 -50 -40 -30 -20 -10 0 10 20 30 40 50 60 70 80
1528
1529
1530
1531
1532
1533
1534
1535
1536
1537
TM input/TE output
Linear fit TM input data
TE input/TM output
Linear fit TE input data
Wavelength(nm)
Applied Voltage (V)
input)(TEnm/V039.0=dVdλ
99.4%91.7%
44. Polarization Independent Sparse Grating
L1 L2 L3
L L L L L
L3 L2 L1
LiNbO3
L1 L2 L3
L L L L L
L3 L2 L1
LiNbO3
L1 L2 L3
L L L L L
L3 L2 L1
LiNbO3
45. Test Results - Polarization Independent Sparse Grating
Er+
doped fiber
Laser Diode
Pump @ 980 nm
WDM 980/1550
coupler
Er ASE light source
PZ fiber
Optical
Power
Meter
Ge Photodetector
Sample
Under
Test
Current
Source
Output Fiber
Isolator
Er+
doped fiber
Laser Diode
Pump @ 980 nm
WDM 980/1550
coupler
Er ASE light source
PZ fiber
Optical
Power
Meter
Ge Photodetector
Sample
Under
Test
Current
Source
Output Fiber
Isolator
48. Test Results - Polarization Independent Sparse Grating
Thermal Tuning
1515 1520 1525 1530 1535 1540 1545 1550 1555
0.0
0.2
0.4
0.6
0.8
1.0
TE input @ 14
o
C
TE input @ 27
o
C
NormalizedFilterResponse
Wavelength (nm)
10 12 14 16 18 20 22 24 26 28 30
1524
1526
1528
1530
1532
1534
1536
1538
1540
1542
1544
TM input
Linear Fit of TM data
TE input
Linear Fit of TE data
Wavelength(nm)
Temperature (
o
C)
CdTd o
nm/0.1−=λ
49. Future Work
• 4-Port Asymmetric MZI
L1 L2 L3
L L L L L
L3 L2 L1
LiNbO3
L1 L2 L3
L L L L L
L3 L2 L1
LiNbO3
50. Future Work
• Generic “all-zero” synthesis
L1 L2 L3 L4
L5 L6
B C D EA LiNbO3
Ti diffused
Waveguide
Electrodes
L1 L2 L3 L4
L5 L6
B C D EA LiNbO3
Ti diffused
Waveguide
L1 L2 L3 L4
L5 L6
B C D EA LiNbO3
Ti diffused
Waveguide
Electrodes