Introductory workshop for users of core facilities CEITEC BUT_05/03/2015

1. CORE FACILITIES CEITEC BUT
05. 03. 2015

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q Core facilities Nano and StAn – what are they?
q Core facility team
q Technological units
q CF Nano – instruments, where to find devices, where to find information
q CF StAn – instruments, where to find devices, where to find information
q Installation of instruments
q Research infrastructure CEITEC Nano
q Types of users
q Access to CEITEC Nano research infrastructure – an example for an FME student
q Fees – operating costs
q Why do we do this?
q Data – how many of you there are, the things you use, how much it costs
q Our plans
q Discussion
OUTLINE

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CEITEC CORE FACILITIES
CF Nano
CF StAn

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§ Joined sites of Masaryk University and Brno University of Technology
§ The Centre of Laboratories - operation, maintenance and development of core
facilities and their instruments and technical equipment
§ Under supervision of the head of CEITEC BUT and the Laboratory Board
CORE FACILITIES Nano and StAn

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CORE FACILITIES Nano a StAn TEAM
Ing. David Škoda, Ph.D.
Head of Core facility Nano, head
of Centre of Laboratories
Mgr. Marek Eliáš, Ph.D.
Operator
RNDr. Alois Nebojsa
Operator
Ing. Dalibor Šulc
Operator
Ing. Martin Buršík, Ph.D.
Operator
Ing. Eva Kolíbalová, Ph.D.
Operator
Ing. Erik Pálesch, Ph.D.
Operator
Ing. Ondřej Man, Ph.D.
Head of Core facility StAn
Mgr. Ondřej Caha, Ph.D.
Operator
Ing. Jan Michalička
Operator
Ing. Pavla Roupcová, Ph.D.
Operator
Ing. Zdeněk Spotz
Operator
Ing. Pavel Gejdoš, Ph.D.
Technician
Mgr. Kateřina Švidrnochová
Core Facilities Manager
Ing. Pavlína Zajícová
Core Facilities Financial Manager

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TECHNOLOGICAL UNITS
X-ray diffraction:

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CF Nano - instruments
In operation (on provisional premises of
MU and BUT) – 16 instruments:
To be in operation by the end of 2015 (on
provisional premises):
q Atomic Layer Deposition system Fiji 200
q Focused Ion Beam/Scanning Electron Microscope
LYRA
q Lithographic Scanning Probe Micr. Dimension Icon
q Mechanical profilometer Dektak XT
q Optical microscope MX51
q Resist stripper NANO Plasma cleaner
q Scanning Electron Microscope/e-beam writer MIRA3
q Scanning Near-field Optical Microscopy MV 4000
q ScanProbeMicro+uRaman+PhLum system NTegra
Spectra
q Spectroscopic Ellipsometer IR-VASE
q Spectroscopic Ellipsometer V-VASE
q Spectroscopic reflectometer NanoCalc 2000
q UV Direct Write Laser system DWL 66-fs
q Vacuum FTIR Vertex80v + Hyperion 3000
q VUV spectrometer VUVAS 1000
q Wire bonder HB 16
q Maskless lithography system
q E-beam writer
q Coating and development system
q Mask Aligner + NIL
q Lithographic wetbench, Chemical wetbenches
q Metal-Organic CVD, Low-Pressure CVD, Plasma-
enhanced CVD
q Annealing ovens
q E-beam evaporator, Magnetron sputtering
q Reactive Ion Etching system
q Deep Reactive Ion Etching system
q Ion beam etching
q Laser cutter
q Glove box
q Semiconductor characterisation system
q Electronic measurement components
q Low Temperature Electro-Magnetic Properties
q Complex UHV systém (MBE, STM, PEEM, LEEM)
q SIMS
q XPS
q nanoSAM
q PLD + RHEED
q Experimental PECVD

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WHERE TO FIND CF Nano
q FME BUT - lab A2/518
q Dept. of Condensed Matter Physics,
Faculty of Science, MU – Kotlářská str., building no. 9
q Since 2Q/2015 in the former FEI factory
- Podnikatelská str.

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q CEITEC Web
http://www.ceitec.eu/ceitec-but/nanofabrication-and-nanocharacterization/z1
q CEITEC Nano Wikipedia
http://cfnanomicro.fme.vutbr.cz
WHERE TO LOOK FOR INFORMATION ABOUT CF Nano

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CF StAn - INSTRUMENTS
In operation (on provisional premises): To be in operation by the end of 2015 (on
provisional premises):
q X-ray powder diffractometer Rigaku SmartLab
3kW
q X-ray diffractometer for thin layers and
nanostructures Rigaku SmartLab 9kW
q + chambers with controlled
environment for both diffractometers
q HR TEM FEI Titan Themis3 300 Cubed
( TEM Cs corrector, monochromator, HR EELS, EDS,
tomography, Lorentz, ...)
q HR SEM FEI Verios 460L
(resolution 0,7 nm @
1-­‐15
kV,
in-­‐lens
SE/BSE,
EDS, WDS,
EBSD)
q FIB-SEM FEI Helios NanoLab 660
(resolution in e- 0,7 nm @
1-­‐15
kV,
resolution in Ga+ 2,5-4
nm @
30
kV,
in-­‐lens
SE/BSE,
EDS, EBSD, GIS,
manipulator, coldstage)
q Devices for sample preparation for TEM, SEM
and SM:
Mechanical saws, sanders, polishers, etc. for SM samples,
solutions and instruments for TEM samples in regular
way, ion polisher for SM and SEM samples, ion
polisher for TEM samples, steamer/sputter C + Au/
Pd, ...

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WHERE TO FIND CF StAn
q X-ray diffractometers – lab A3/310 at FME BUT
q Since 2Q/2015 in the former FEI factory
- Podnikatelská str.

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q CEITEC Web
http://www.ceitec.eu/ceitec-but/structural-analysis-laboratory/z3
q CEITEC Nano Wikipedia
http://cfnanomicro.fme.vutbr.cz
WHERE TO LOOK FOR INFORMATION ABOUT CF StAn

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q Current state
q Building technical facilities – laboratories
q Provisional installation – BUT FME, MU Dept. of Condensed Matter
Physics
q Installation of remaining instruments – discussion
q Based on sales contracts
q Q2/2015 – Q4/2015
q Location
q Technology Park B3 (former FEI) – restoring cleanrooms, cleanness
class 100, 100 000
q MU Dept. of Condensed Matter Physics, building 9
q BUT FME A2/518 – IPE lab
INSTRUMENT INSTALLATION

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q Shared presentation of CF Nano, CF StAn and µCT Laboratory and LIBS 30% of lab time based on
the open access principle) on national and international level
q RI CEITEC Nano has been in operation since 2011 and maintained its place on the Czech Roadmap
for large infrastructures for another period (2016 – 2020(22))
q Strategy paper of CZR and EU regarding research, experimental development and innovations
q http://ec.europa.eu/research/infrastructures/index_en.cfm?pg=esfri-national-roadmaps
q RI CEITEC Nano – based on OPEN ACCESS principles – unified terms for user access to core
facilities
q Advantages
q CEITEC’s international reputation
q Establishing cooperation between research subjects
q Economic support for the core facilities operation
RESEARCH INFRASTRUCTURE CEITEC NANO (RI CEITEC NANO)

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USER TYPES

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STUDENT ACCESS TO THE RESEARCH INFRASTRUCTURE

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STUDENT ACCESS TO THE RESEARCH INFRASTRUCTURE

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q Log in the website, select CF, the ACCESS tab
q Click on the application, open the pdf, fill in, click Submit, automatically sent
to katerina.svidrnochova@ceitec.vutbr.cz
q K. Švidrnochová sends a delivery confirmation within two days via e-mail (we
are working on automatic reply)
q KŠ submits the application for technical feasibility assessment to the
supervisor, and enters the project into the system– a demonstration of the
internal system – WHAT WE SEE
q A demonstration of the user view– WHAT THE USER SEES – a progress
through the booking system to the overview of the project
q After technical assessment, KŠ arranges further steps with the user (training,
contacts, grants, etc.)
q Everything follows the rules brought into effect on 1 Mar 2015, and
approved by the Laboratory Board – ACCESS TO THE RULES (CEITEC web)
q Access to the BOOKING SYSTEM via CEITEC web – the booking system will be
launched in XY minutes
q INSTRUMENTS OVERVIEW with detailed information – click on instruments
q An appeal for suggestions for the title of the Knowledge Base – you can get
in touch via Sli.do or Facebook C E I T E C Nano Research Infrastructure
q Acknowledgement
q Satisfaction questionnaire
DEMONSTRATION OF ACCESS TO THE RESEARCH INFRASTRUCTURE

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q Users gain access to instruments only after they have been granted the
access to the research infrastructure
q Services provided
q Unaided user work on a selected device
q Assisted user work on a selected device
q Complete service carried out by authorised personnel
q A reservation in the booking system is required to access any instrument
q Both users and CEITEC Nano follow the Terms of Use for the CEITEC Nano
Infrastructure for 2015 – a document explaining the relationship
between the user and the research infrastructure CEITEC Nano
SUMMARY

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SERVICE FEES – OPERATING COSTS
q Sharing the operating costs of laboratories and instruments decreases the
economic burden of research groups
q Purchasing capital-intensive and costly high-tech instruments
q Creating reserves for re-investment
q Increasing the effectivity of lab-time use
Current situation for 2015
q Bursar’s directive, Secretary’s directive, bylaw of payments
q Informative invoices to each user since April 2015, the cost of lab time will be
calculated quarterly
q Invoices in 2015 are of informative character, the costs are covered from public
sources of STI BUT
q Starting 2016, a discussion about covering the operating costs also partly by users
q Commercial cooperation – via HS
Contact
Ing. Pavlína Zajícová

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COST MATRIX
External price
Academic price
Internal price
Direct costs
- Personal costs
- Instrument
operation
 consumables
 spare parts
 service contracts
 repair and
maintenance
- Cleanroom costs
Indirect costs
- Electricity
- Clean air
- Gases, etc.
.
Administrative
costs
- Personal costs
- Travelling
- Representation
- Consumables
Write-offs
- Purchase price/
durability/
usability time in a
year
- Bursary’s directive regarding the price calculation at BUT is expected (certified full-
cost methodology)
- STI Secretary’s directive is expected

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OPERATING COSTS CALCULATION FOR THE DEVICES

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COST MATRIX AND PRICE
CALCULATION

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Mapping user activities
q Overall utilised capacity
q Overall number of users
q User mapping (CEITEC, academic, commercial)
q Science mapping (what you do, things for which we can look for grants, collaborations
we can establish – with other universities, foreign institutions)
q Utilised capacity of the devices
How it helps
q Increase in user comfort
q CEITEC’s international reputation, participation in national and international projects
q Proving to the Ministry of Education (CZR) and EU, that we are active and use the devices
q We increase our attractiveness for potential research partners
q We increase the shared know-how
q Support for purchasing new devices (also the same ones)
q Strategy for the future development of laboratories
q Finding monetary sources for laboratory operation
WHY DO WE DO THIS?

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OUR PLANS
q 24. – 25. 3. 2015 – Nanotechnology for Electronics
q Small technology workshops
q EDS Conference – October 2015

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DISCUSSION

31. CEITEC BUT
c/o Brno University of Technology
Technická 3058/10, 616 00 Brno
Czech Republic
www.ceitec.cz | core.facility@ceitec.vutbr.cz