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CEITEC BUT
CENTRAL NANO
Radimir Vrba
June 1, 2016
JIC, BRNO
2
4
CEITEC vision
CEITEC is a project of the European Centre of Excellence which
is being prepared by a consortium of universities and research
institutes in Brno with the aim to integrate life and material
sciences.
It will focus on scientific excellence, provide a state-of-the-art
infrastructure, encourage international mobility, enhance
cooperation with the application sector and stimulate growth of
high-tech sectors.
Life
sciences
Material
sciences
5
Partnering institutions
5
6
CEITEC: Research Programmes
CEITEC
7
CEITEC / BUT – Facts & Figures
CEITEC CEITEC BUT
 6 partners 36,6 % BUT share
 557 researchers 269 HC / 140 FTE
 7 research programmes 2
 61 research groups 16
 25,000 m2 of new laboratories 14,100 m2
 9 core facilities 2
 Budget (eligible cost) EUR 210 mil. EUR 80 mil.
 Start of research activities: Q1 2011
 Project completion: Q4 2015
 51 Ph.D. students
9
CEITEC BUT 2011 – 2015 at a glance
9
379 IF journal papers
77 % in Q1 and Q2
668 mil CZK / 24,7 mil EUR of
external grant funding secured
31,5 mil CZK / 1,2 mil EUR
of private funding received
-
5,00
10,00
15,00
20,00
2012 2013 2014 2015
51 PhD students
CEITEC PhD school
1st CEITEC
Start-up company
CEITEC NANO
Research Infrastructure
11
 Prof. Tomas Sikola - Research Programme Coordinator
 Research groups
 Functional Properties of Nanostructures
 Smart Nanodevices
 Experimental Biophotonics
 Fabrication and Characterisation of Nanostructures
 Development of Methods for Analysis and Measuring
 Materials Characterization and Advanced Coatings
 Plasma Technologies
 Synthesis and Analysis of Nanostructures
 Multiscale Modelling and Measurements of Physical Properties
Plasma Technologies
Transport and Magnetic Properities
RP1: Advanced Nanotechnologies and
Microtechnologies ! Powder processing techn
Examples- Hydrodynami
(a) Apparat
(b) SEM mi
(c) SEM mi
(a)
*Čelko, L., et. al.: Apparatus for magnetically con
12
 Prof. Jaroslav Cihlář - Research Programme Coordinator
 Advanced Ceramic Materials
 Cybernetics in Material Science
 Advanced Polymers and Composites
 Advanced Metallic Materials and Metal Based Composites
Plasma Technologies
RP2: Advanced Materials
Robotics
ORPHEUS-AC
• military reconnaissance robot
• measurement in environments with
radiation/chemical/biological
contamination
• special sensors
• communication: wireless/by wire
13
Core Facilities
1. Nanofabrication and
Nanocharacterization
2. Structural Analysis
Laboratory
Research Infrastructure:
CEITEC Nano
15
CF Nanofabrication and Nanocharacterization
 Atomic Layer Deposition system Fiji 200
 Focused Ion Beam/Scanning Electron
Microscope LYRA
 Lithographic Scanning Probe Micr. Dimension
Icon
 Mechanical profilometer Dektak XT
 Optical microscope MX51
 Resist stripper NANO Plasma cleaner
 Scanning Electron Microscope/e-beam writer
MIRA3
 Scanning Near-field Optical Microscopy MV 4000
 ScanProbeMicro+uRaman+PhLum system
NTegra Spectra
 Spectroscopic Ellipsometer IR-VASE
 Spectroscopic Ellipsometer V-VASE
 Spectroscopic reflectometer NanoCalc 2000
 UV Direct Write Laser system DWL 66-fs
 Vacuum FTIR Vertex80v + Hyperion 3000
 VUV spectrometer VUVAS 1000
 Wire bonder HB 16
 Maskless lithography system
 E-beam writer
 Coating and development system
 Mask Aligner + NIL
 Lithographic wetbench, Chemical wetbenches
 Metal-Organic CVD, Low-Pressure CVD, Plasma-
enhanced CVD
 Annealing ovens
 E-beam evaporator, Magnetron sputtering
 Reactive Ion Etching system
 Deep Reactive Ion Etching system
 Ion beam etching
 Laser cutter
 Glove box
 Semiconductor characterisation system
 Electronic measurement components
 Low Temperature Electro-Magnetic Properties
 Complex UHV system (MBE, STM, PEEM,
LEEM)
 SIMS
 XPS
 nanoSAM
 PLD + RHEED
 Experimental PECVD
16
CF Structural Analysis Laboratory
 X-ray powder diffractometer Rigaku SmartLab 3kW
 X-ray diffractometer for thin layers and
nanostructures Rigaku SmartLab 9kW
 + chambers with controlled environment for
both diffractometers
 HR TEM FEI Titan Themis3 60-300
( TEM Cs corrector, monochromator, HR EELS, EDS,
tomography, Lorentz, ...)
 HR SEM FEI Verios 460L
(resolution 0,7 nm @ 1-15 kV, in-lens SE/BSE, EDS,
WDS, EBSD)
 FIB-SEM FEI Helios NanoLab 660
(resolution in e- 0,7 nm @ 1-15 kV, resolution in Ga+
2,5-4 nm @ 30 kV, in-lens SE/BSE, EDS, EBSD,
GIS,
manipulator, coldstage)
 Devices for sample preparation for TEM,
SEM and LM:
Mechanical saws, sanders, polishers, etc. for SM
samples, solutions and instruments for TEM samples
in regular way, ion polisher for LM and SEM samples,
ion polisher for TEM samples, steamer/sputter C +
Au/Pd, ...
17
Achievements, international
and intersectoral collaboration
18
TOP 5 - publications
18
Research
Group
Citation IF
RG 1- 4
UHLÍŘ, V.; URBÁNEK, M.; HLADÍK, L.; SPOUSTA, J.; IM, M.; FISCHER, P.; EIBAGI,
N.; KAN, J.; FULLERTON, E.; ŠIKOLA, T. Dynamic switching of the spin
circulation in tapered magnetic nanodisks. Nature Nanotechnology, 2013,
roč. 8, č. 5, s. 341-346. ISSN: 1748- 3387.
33,265
RG 1- 2
NEUŽIL, P., GISELBRECHT, S., LANGE, K., HUANG, TJ., MANZ, A. Revisiting lab-
on-a- chip technology for drug discovery. NATURE REVIEWS DRUG
DISCOVERY, 2012, roč. 2012 (11), č. 8, s. 620-632. ISSN: 1474- 1776
33,078
RG 2-4
POKLUDA, J., ČERNÝ, M., ŠOB,M., UMENO, Y. Ab Initio Calculations of
Mechanical Properties: Methods and Applications, Progress in Materials
Science, 2015
25,87
RG 1-6, 1-2
KAISER, J.; NOVOTNÝ, K.; MARTIN, M.; HRDLIČKA, A.; MALINA, R.; HARTL, M.;
ADAM, V.; KIZEK, R. Trace elemental analysis by laser-induced breakdown
spectroscopy - Biological applications. SURFACE SCIENCE REPORTS, 2012,
roč. 67, č. 11, s. 233-243. ISSN: 0167- 5729.
15,333
RG 1- 4
KOLÍBAL, M.; VYSTAVĚL, T.; VARGA, P.; ŠIKOLA, T. Real- Time Observation of
Collector Droplet Oscillations during Growth of Straight Nanowires. NANO
LETTERS, 2014, vol. 14, no. 2, p. 1756-1761. ISSN: 1530- 6984.
12,94
19
Publications
0
20
40
60
80
100
120
140
2011 2012 2013 2014 2015
Publication rate CEITEC BUT, 2011-15
Q1
Q2
Total
2011 2012 2013 2014 2015 Total %
Q1 4 22 34 50 75 185 42%
Q2 6 32 53 30 41 162 37%
Q3 0 15 11 29 6 61 14%
Q4 0 4 11 5 10 30 7%
Celkem 10 73 109 114 132 438
20
CEITEC BUT projects during 2011-2015
 National funding
 OP VaVpI (without CEITEC grant): 7 pre-seed individual activities
in 3 projects, c. 40 mil CZK
 OP VK: 9 projects, c. 197 mil CZK
 GA CR: 22 projects, c. 83 mil CZK
 TA CR: 18 projects, c. 178 mil CZK
 Other (MPO, SoMoPro etc.): 19 projects, c. 90 mil CZK
 International funding (incl. co-financing from national
sources, typically ENIAC/ARTEMIS co-financed from
MEYS)
 FP7/H2020: 11 projects, c. 80 mil. CZK
 IN TOTAL c. 668 mil CZK 24,7 mil EUR
21
Selected international projects (2011-2015)
 EMC2 - Embedded multi-core systems
for mixed criticality applications in
dynamic and changeable real-time
environments
• FP7 JTI ARTEMIS (2014 – 2017) – 100
partners, < 100 mil. EUR (key partners:
Infineon, BMW, AUDI, Volvo, ABB, Fraunhofer, NXP,
Siemens, AIT, Thales, Rockwell, TU/e, Technion)
 3CCAR - Integrated Components for
Complexity Control in affordable
electrified cars
• H2020 JTI ECSEL (2015 – 2018) – 50
partners, < 50 mil. EUR (key partners: Infineon,
BMW, Daimler, Fraunhofer, Siemens, OTH-AW, TU
Dresden, AVL, AIT, ITRI Taiwan)
 OSEM-EV – Optimized and Systematic
Energy Management in Electric Vehicles
• H2020 GV (2015 – 2018) – 12 partners,
< 8 mil. EUR (key partners: Infineon, Daimler,
Fraunhofer, Siemens, Valeo, TU Dresden, Hutchinson
SA, University of Sheffield)
 BIO-SCAFFOLDS - Natural inorganic
polymers and smart functionalized
micro-units applied in customized rapid
prototyping of bioactive scaffolds
 FP7 NMP: EU-China (2013 – 2016) – 8
partners, < 2,2 mil. EUR (partners: University of
Mainz, University of Extremadura, ORTOMA,
NanotecMARIN, Tsinghua Uniiversity, Peking University,
Shenzen Lando Biomaterials)
 UnivSEM - universal scanning electron
microscope as a multi-nano-analytical
tool
• H2020 NMP (2012 – 2015) – 8 partners,
≈ 6 mil. EUR (partners: TESCAN, Max Planck
Institute, EMPA, Witec, Amires, Tofwerk, Specs)
 MotorBrain - Nanoelectronics for Electric
Vehicle Intelligent Failsafe Power Train
• FP7 ENIAC (2011 – 2013) – 30 partners,
≈ 36 mil. EUR (key partners: Infineon, Fraunhofer,
Siemens, TU Dresden, AIT, Volkswagen, TNO, University
of Sheffield)
22
Contractual research – collaboration with
industrial partners
 Systematic collaboration with industrial partners, both via externally
financed research projects, contractual research paid by the industry
itself and commercialization/licensing of inventions of CEITEC PI’s
 International and domestic industrial partners, many of them represent
strategic R&D relationships
 Since 2011 CEITEC BUT has shown a significant increase in the
volume of contractual research and development, in fact now we see
2.5 times growth per annum in average.
1,73
5,48
6,80
17,50
-
2,00
4,00
6,00
8,00
10,00
12,00
14,00
16,00
18,00
20,00
2012 2013 2014 2015
MillionsofCZK
Volume of contractual R&D, 2012-15
25
Collaboration ideas?
Meet our colleagues during networking session
and discuss possible collaboration!
Lab Tour
temporary location in B3 Building
of previous FEI Factory
as a guide Dr. Petr Bábor
26
B3
JIC
CEITEC
BUT
CEITEC BUT
c/o Brno University of Technology
Purkyňova 656/123, CZ-61200 Brno
Czech Republic
www.ceitec.vutbr.cz | info@ceitec.vutbr.cz

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CEITEC - Central European Institute of Technology

  • 1. CEITEC BUT CENTRAL NANO Radimir Vrba June 1, 2016 JIC, BRNO
  • 2. 2
  • 3. 4 CEITEC vision CEITEC is a project of the European Centre of Excellence which is being prepared by a consortium of universities and research institutes in Brno with the aim to integrate life and material sciences. It will focus on scientific excellence, provide a state-of-the-art infrastructure, encourage international mobility, enhance cooperation with the application sector and stimulate growth of high-tech sectors. Life sciences Material sciences
  • 6. 7 CEITEC / BUT – Facts & Figures CEITEC CEITEC BUT  6 partners 36,6 % BUT share  557 researchers 269 HC / 140 FTE  7 research programmes 2  61 research groups 16  25,000 m2 of new laboratories 14,100 m2  9 core facilities 2  Budget (eligible cost) EUR 210 mil. EUR 80 mil.  Start of research activities: Q1 2011  Project completion: Q4 2015  51 Ph.D. students
  • 7. 9 CEITEC BUT 2011 – 2015 at a glance 9 379 IF journal papers 77 % in Q1 and Q2 668 mil CZK / 24,7 mil EUR of external grant funding secured 31,5 mil CZK / 1,2 mil EUR of private funding received - 5,00 10,00 15,00 20,00 2012 2013 2014 2015 51 PhD students CEITEC PhD school 1st CEITEC Start-up company CEITEC NANO Research Infrastructure
  • 8. 11  Prof. Tomas Sikola - Research Programme Coordinator  Research groups  Functional Properties of Nanostructures  Smart Nanodevices  Experimental Biophotonics  Fabrication and Characterisation of Nanostructures  Development of Methods for Analysis and Measuring  Materials Characterization and Advanced Coatings  Plasma Technologies  Synthesis and Analysis of Nanostructures  Multiscale Modelling and Measurements of Physical Properties Plasma Technologies Transport and Magnetic Properities RP1: Advanced Nanotechnologies and Microtechnologies ! Powder processing techn Examples- Hydrodynami (a) Apparat (b) SEM mi (c) SEM mi (a) *Čelko, L., et. al.: Apparatus for magnetically con
  • 9. 12  Prof. Jaroslav Cihlář - Research Programme Coordinator  Advanced Ceramic Materials  Cybernetics in Material Science  Advanced Polymers and Composites  Advanced Metallic Materials and Metal Based Composites Plasma Technologies RP2: Advanced Materials Robotics ORPHEUS-AC • military reconnaissance robot • measurement in environments with radiation/chemical/biological contamination • special sensors • communication: wireless/by wire
  • 10. 13 Core Facilities 1. Nanofabrication and Nanocharacterization 2. Structural Analysis Laboratory Research Infrastructure: CEITEC Nano
  • 11. 15 CF Nanofabrication and Nanocharacterization  Atomic Layer Deposition system Fiji 200  Focused Ion Beam/Scanning Electron Microscope LYRA  Lithographic Scanning Probe Micr. Dimension Icon  Mechanical profilometer Dektak XT  Optical microscope MX51  Resist stripper NANO Plasma cleaner  Scanning Electron Microscope/e-beam writer MIRA3  Scanning Near-field Optical Microscopy MV 4000  ScanProbeMicro+uRaman+PhLum system NTegra Spectra  Spectroscopic Ellipsometer IR-VASE  Spectroscopic Ellipsometer V-VASE  Spectroscopic reflectometer NanoCalc 2000  UV Direct Write Laser system DWL 66-fs  Vacuum FTIR Vertex80v + Hyperion 3000  VUV spectrometer VUVAS 1000  Wire bonder HB 16  Maskless lithography system  E-beam writer  Coating and development system  Mask Aligner + NIL  Lithographic wetbench, Chemical wetbenches  Metal-Organic CVD, Low-Pressure CVD, Plasma- enhanced CVD  Annealing ovens  E-beam evaporator, Magnetron sputtering  Reactive Ion Etching system  Deep Reactive Ion Etching system  Ion beam etching  Laser cutter  Glove box  Semiconductor characterisation system  Electronic measurement components  Low Temperature Electro-Magnetic Properties  Complex UHV system (MBE, STM, PEEM, LEEM)  SIMS  XPS  nanoSAM  PLD + RHEED  Experimental PECVD
  • 12. 16 CF Structural Analysis Laboratory  X-ray powder diffractometer Rigaku SmartLab 3kW  X-ray diffractometer for thin layers and nanostructures Rigaku SmartLab 9kW  + chambers with controlled environment for both diffractometers  HR TEM FEI Titan Themis3 60-300 ( TEM Cs corrector, monochromator, HR EELS, EDS, tomography, Lorentz, ...)  HR SEM FEI Verios 460L (resolution 0,7 nm @ 1-15 kV, in-lens SE/BSE, EDS, WDS, EBSD)  FIB-SEM FEI Helios NanoLab 660 (resolution in e- 0,7 nm @ 1-15 kV, resolution in Ga+ 2,5-4 nm @ 30 kV, in-lens SE/BSE, EDS, EBSD, GIS, manipulator, coldstage)  Devices for sample preparation for TEM, SEM and LM: Mechanical saws, sanders, polishers, etc. for SM samples, solutions and instruments for TEM samples in regular way, ion polisher for LM and SEM samples, ion polisher for TEM samples, steamer/sputter C + Au/Pd, ...
  • 14. 18 TOP 5 - publications 18 Research Group Citation IF RG 1- 4 UHLÍŘ, V.; URBÁNEK, M.; HLADÍK, L.; SPOUSTA, J.; IM, M.; FISCHER, P.; EIBAGI, N.; KAN, J.; FULLERTON, E.; ŠIKOLA, T. Dynamic switching of the spin circulation in tapered magnetic nanodisks. Nature Nanotechnology, 2013, roč. 8, č. 5, s. 341-346. ISSN: 1748- 3387. 33,265 RG 1- 2 NEUŽIL, P., GISELBRECHT, S., LANGE, K., HUANG, TJ., MANZ, A. Revisiting lab- on-a- chip technology for drug discovery. NATURE REVIEWS DRUG DISCOVERY, 2012, roč. 2012 (11), č. 8, s. 620-632. ISSN: 1474- 1776 33,078 RG 2-4 POKLUDA, J., ČERNÝ, M., ŠOB,M., UMENO, Y. Ab Initio Calculations of Mechanical Properties: Methods and Applications, Progress in Materials Science, 2015 25,87 RG 1-6, 1-2 KAISER, J.; NOVOTNÝ, K.; MARTIN, M.; HRDLIČKA, A.; MALINA, R.; HARTL, M.; ADAM, V.; KIZEK, R. Trace elemental analysis by laser-induced breakdown spectroscopy - Biological applications. SURFACE SCIENCE REPORTS, 2012, roč. 67, č. 11, s. 233-243. ISSN: 0167- 5729. 15,333 RG 1- 4 KOLÍBAL, M.; VYSTAVĚL, T.; VARGA, P.; ŠIKOLA, T. Real- Time Observation of Collector Droplet Oscillations during Growth of Straight Nanowires. NANO LETTERS, 2014, vol. 14, no. 2, p. 1756-1761. ISSN: 1530- 6984. 12,94
  • 15. 19 Publications 0 20 40 60 80 100 120 140 2011 2012 2013 2014 2015 Publication rate CEITEC BUT, 2011-15 Q1 Q2 Total 2011 2012 2013 2014 2015 Total % Q1 4 22 34 50 75 185 42% Q2 6 32 53 30 41 162 37% Q3 0 15 11 29 6 61 14% Q4 0 4 11 5 10 30 7% Celkem 10 73 109 114 132 438
  • 16. 20 CEITEC BUT projects during 2011-2015  National funding  OP VaVpI (without CEITEC grant): 7 pre-seed individual activities in 3 projects, c. 40 mil CZK  OP VK: 9 projects, c. 197 mil CZK  GA CR: 22 projects, c. 83 mil CZK  TA CR: 18 projects, c. 178 mil CZK  Other (MPO, SoMoPro etc.): 19 projects, c. 90 mil CZK  International funding (incl. co-financing from national sources, typically ENIAC/ARTEMIS co-financed from MEYS)  FP7/H2020: 11 projects, c. 80 mil. CZK  IN TOTAL c. 668 mil CZK 24,7 mil EUR
  • 17. 21 Selected international projects (2011-2015)  EMC2 - Embedded multi-core systems for mixed criticality applications in dynamic and changeable real-time environments • FP7 JTI ARTEMIS (2014 – 2017) – 100 partners, < 100 mil. EUR (key partners: Infineon, BMW, AUDI, Volvo, ABB, Fraunhofer, NXP, Siemens, AIT, Thales, Rockwell, TU/e, Technion)  3CCAR - Integrated Components for Complexity Control in affordable electrified cars • H2020 JTI ECSEL (2015 – 2018) – 50 partners, < 50 mil. EUR (key partners: Infineon, BMW, Daimler, Fraunhofer, Siemens, OTH-AW, TU Dresden, AVL, AIT, ITRI Taiwan)  OSEM-EV – Optimized and Systematic Energy Management in Electric Vehicles • H2020 GV (2015 – 2018) – 12 partners, < 8 mil. EUR (key partners: Infineon, Daimler, Fraunhofer, Siemens, Valeo, TU Dresden, Hutchinson SA, University of Sheffield)  BIO-SCAFFOLDS - Natural inorganic polymers and smart functionalized micro-units applied in customized rapid prototyping of bioactive scaffolds  FP7 NMP: EU-China (2013 – 2016) – 8 partners, < 2,2 mil. EUR (partners: University of Mainz, University of Extremadura, ORTOMA, NanotecMARIN, Tsinghua Uniiversity, Peking University, Shenzen Lando Biomaterials)  UnivSEM - universal scanning electron microscope as a multi-nano-analytical tool • H2020 NMP (2012 – 2015) – 8 partners, ≈ 6 mil. EUR (partners: TESCAN, Max Planck Institute, EMPA, Witec, Amires, Tofwerk, Specs)  MotorBrain - Nanoelectronics for Electric Vehicle Intelligent Failsafe Power Train • FP7 ENIAC (2011 – 2013) – 30 partners, ≈ 36 mil. EUR (key partners: Infineon, Fraunhofer, Siemens, TU Dresden, AIT, Volkswagen, TNO, University of Sheffield)
  • 18. 22 Contractual research – collaboration with industrial partners  Systematic collaboration with industrial partners, both via externally financed research projects, contractual research paid by the industry itself and commercialization/licensing of inventions of CEITEC PI’s  International and domestic industrial partners, many of them represent strategic R&D relationships  Since 2011 CEITEC BUT has shown a significant increase in the volume of contractual research and development, in fact now we see 2.5 times growth per annum in average. 1,73 5,48 6,80 17,50 - 2,00 4,00 6,00 8,00 10,00 12,00 14,00 16,00 18,00 20,00 2012 2013 2014 2015 MillionsofCZK Volume of contractual R&D, 2012-15
  • 19. 25 Collaboration ideas? Meet our colleagues during networking session and discuss possible collaboration! Lab Tour temporary location in B3 Building of previous FEI Factory as a guide Dr. Petr Bábor
  • 21. CEITEC BUT c/o Brno University of Technology Purkyňova 656/123, CZ-61200 Brno Czech Republic www.ceitec.vutbr.cz | info@ceitec.vutbr.cz