Silicon on Insulator (SOI) technology utilizes a layered silicon-insulator-silicon substrate for semiconductor manufacturing, allowing for miniaturization and improved performance of devices like MOSFETs. SOI-based devices feature silicon junctions above an insulator, typically silicon dioxide or sapphire, enhancing current density and reducing parasitic capacitance. The choice of insulator varies based on application needs, with specific SOI technologies including Eltran, SOS, SIMOX, and BESOI.

1. SOI
Silicon on Insulator
Technology

2. INTRODUCTION
SILICON: Silicon is a chemical element
that is present in sand and glass and which
is a best known semiconductor material in
electronic components.
INSULATOR: A material that does not
easily transmit energy such as electric
current or heat.

3. WHAT IS SILICON ON INSULATOR
• Silicon on insulator technology refers to the
use of layered silicon-insulator-silicon
substrate in place of conventional silicon
substrate in semiconductor manufacturing.

4. 4
Allow continuous
miniaturization of MOSFET
device.
Improves bulk technology
by
Low parasitic capacitance and
Resistance to Latch-up
Compatible with existing
fabrication process
without
any special equipment or
retooling of an existing
factory
Capable of higher current
densities
than
obtained in equivalent bulk
devices.
Need for SOI Technology

5. • SOI-based devices differ from conventional silicon-
built devices in that the silicon junction is above an
electrical insulator, typically silicon dioxide or
sapphire
SOI Technology

6. • In a Silicon On Insulator (SOI) Fabrication
technology , Transistors are encapsulated in SiO2 on
all sides.
SOI Technology

7. • The choice of insulator depends largely
on intended application
• Sapphire is used for high-
performance radio frequency (RF)
and radiation-sensitive applications,
and
• Silicon dioxide is used for diminished
short channel effects in
microelectronics devices.
SOI Technology

8. ELTRAN (Epitaxial Layer TRANsfer)
SOS (Silicon on Sapphire)
SIMOX (Separation by IMplanted OXygen)
BESOI (Bond and Etch-back SOI)
Smart- Cut
SOI Technologies