This document lists 7 books related to microelectromechanical systems (MEMS) and microfabrication. The books cover topics such as MEMS applications, design and fabrication, fundamentals and introduction, manufacturing techniques, science of miniaturization, and an introduction to MEMS engineering. The authors include Mohamed Gad-el-Hak, Marc J. Madou, and Nadim Maluf.

1. Mahalik N P
Tata McGraw-Hill Education, 07-Feb-2008 - Electronic books –
MEMS:Applications
Mohamed Gad-el-Hak
CRC Press, 29-Nov-2005 - Technology & Engineering - 568 pages
MEMS: Design and Fabrication
Mohamed Gad-el-Hak
CRC Press, 29-Nov-2005 - Technology & Engineering - 664 pages

2. The MEMS Handbook: MEMS, introduction
and fundamentals
Mohamed Gad-el-Hak
CRC/Taylor & Francis, 2006 - Microelectromechanical systems
Manufacturing Techniques for
Microfabrication and Nanotechnology
Marc J. Madou
CRC Press, 13-Jun-2011 - Technology & Engineering - 670 pages
Fundamentals of Microfabrication: The
Science of Miniaturization, Second Edition

3. Marc J. Madou
CRC Press, 13-Mar-2002 - Technology & Engineering - 752 pages
Introduction to Microelectromechanical
Systems Engineering
Nadim Maluf, Kirt Williams
Artech House, 2004 - Technology & Engineering - 283 pages