Micro-electro-mechanical systems (MEMS) are miniaturized mechanical and electro-mechanical devices created through microfabrication techniques. The technology's history dates back to a tuner conceived in 1965, and its terminology varies worldwide, being referred to as microsystems technology or micromachined devices in different regions. MEMS sensors are primarily manufactured from silicon, utilizing a process of layering and etching to form intricate 3D structures that respond to changes in electric potential.

1. MEMS

2. DEFINITION OF MEMS
 Micro-Electro-Mechanical Systems, or MEMS,
is a technology that in its most general form can
be defined as miniaturized mechanical and
electro-mechanical elements (i.e., devices and
structures) that are made using the techniques of
microfabrication. ...

3. HISTORY OF MEMS
 Nathanson conceived the first MEMS device in 1965 to
serve as a tuner for microelectronic radios.
 MEMS was developed with Robert A. Wickstrom and
William E. Newell at Westinghouse Research Labs in
Pittsburgh, PA., and patented as a Microelectric
Frequency Selective Apparatus.

4. VARIOUS NAMES OF MEMS ACROSS
WORLD
 The term used to define MEMS varies in
different parts of the world. In the United States
they are predominantly called MEMS, while in
some other parts of the world they are called
“Microsystems Technology” or
“micromachined devices”. In japan they called
it as microsensor

5. COMPONENTS OF
MEMS
o MICRO SENSORS
o MICRO
ACTUATORS
o MICRO
ELECTRONICS
o MICRO
STRUCTURES

6. FABRICATION STEPS OF MEMS

7. MANUFACTURING OF MEMS SENSORS
 As with IC fabrication, the majority
of MEMS sensors are manufactured from
silicon, whereby thin layers of materials are
deposited or implanted onto a silicon substrate
and then selectively etched away to leave
microscopic 3D structures including beams,
diaphragms, gears, levers, or springs.

8. WORKING OF MEMS SENSORS
When tilt is applied to the sensor, the
suspended mass creates a difference in
electric potential which is measured as a
change in capacitance. That signal is then
amplified to produce a stable output signal
in digital, 4-20mA or VDC

9. NEED FOR MEMS

10. PROS AND CONS OF MEMS

11. APPLICATIONS OF MEMS

15. SOFTWARE

16. CONCLUSION: