Lam Research ,Novellus, Gasonics, Tel ,Tokyo Electron Ltd, Matrix etc. Spare Parts

No Maker Part Number and Description
1 3M 231514-001 CARTRIDGE TAPE
2 3M WR-NA DETECTOR-WATER LEAKAGE
3 ABB S262-B10 CIRCUIT BREAKER
7 ABB S263-D25 CIRCUIT BREAKER
8 ABB S263-D32 CIRCUIT BREAKER
9 ABB S281W K1A CIRCUIT BREAKER 1P1A RING LUG
18 ABB S283UX K30A CIRCUIT BREAKER 3P30A RING LUG
23 ADEPT TECH 10332-12400 VME MOTION INTERFACE MODULE MI6
24 ADVANCE 5-39-00798 AIR VALVE
25 ADVANCE AV-250-114ASUM VALVE
26 ADVANCE AV-3232-11-A PNEUMATIC VALVE
27 ADVANCE AV-3242-415 AIR VALVE
28 ADVANCE AV-5260-131W M-SETEK BACK LINE VALVE
29 ADVANCE AV-6270-114 5″ AIR VALVE
30 ADVANCE AV6280-114ASU AIR VALVE
31 ADVANCE AV-6370-1140 5″ 3-WAY VALVE
32 ADVANCE AV-7250-114 PNEUMATIC VALVE
33 ADVANCE AV-7260-114 PNEUMATIC VALVE
34 ADVANCE AV-7270-114 IPA DRIAN PNEUMATIC VALVE
35 ADVANCE AV-8689-13143F AIR VALVE 3143F
36 ADVANTEST BGRC-14633C RATE
37 AERA 082043G2 MA EFFECIVITIES
38 AERA FC PA781C BW MFC NF3 5SLM
39 AERA FC PA781C BW MFC O2 20SLM
40 AERA FC-581 MFC H2 20 SLM
41 AERA FC-780 MFC 50%SiH4/He 1 SLM
42 AERA FC-7800CD MFC AR 500 SCCM / 22-053901-00
43 AERA FC-7800CD MFC AR 500 SCCM / 22-053901-00
44 AERA FC-7800CD MFC C2F6 50 SCCM / 3030-02914
45 AERA FC-7800CD MFC CHF3 100 SCCM
46 AERA FC-7800CD MFC NF3 1SLM
47 AERA FC-7800CD MFC NF3 1SLM
48 AERA FC-7800CD MFC O2 2 SLM
sales@semistarcorp.com Email us for the availability pls. 1 / 60
The items are subject to prior sale without notice. These items are only for end users. ID-Parts-7359-1

49 AERA FC-7800CD MFC O2 20 SCCM
50 AERA FC-7800CD MFC O2 500 SCCM / 22-109675-00
51 AERA FC-7800CD MFC SF6(.263) 100 SCCM
52 AERA FC-7800CD MFC SIH4 200 SCCM
53 AERA FC-7800CD MFC SiH4 50 SCCM
54 AERA FC-7800CD MFC WF6(0.231) 500 SCCM / 22-118139-00
55 AERA FC-7800CD-EP MFC CO 500 SCCM / 3030-02913
56 AERA FC-7800CU MFC CHF3 100SCCM
57 AERA FC-7800CU MFC CL2 100 SCCM / 797-095023-405
58 AERA FC-7800CU MFC N2 50SCCM
59 AERA FC-7800CU MFC NH3 20 SCCM
60 AERA FC-7800CU MFC SF6 100 SCCM / 797-095023-409
61 AERA FC-7800CU MFC SF6 100SCCM
62 AERA FC-7810CD MFC C2F6 2 SLM
63 AERA FC-7810CD MFC C2F6 5 SLM
64 AERA FC-795CT-BF MFC AR 1000 SCCM
65 AERA FC-980 MFC 300 SCCM 1%PH3/HE
66 AERA FC-980 MFC 50 SCCM 1%PH3/HE
67 AERA FC-980C MFC 1%PH3/N2 100 SCCM
68 AERA FC-980C MFC 50 SCCM HE
69 AERA FC-980C MFC AR 1 SLM
70 AERA FC-980C MFC CF4 100 SCCM
71 AERA FC-980C MFC CF4 200 SCCM
72 AERA FC-980C MFC CF4 50SCCM
73 AERA FC-980C MFC CH2F2 20SCCM
74 AERA FC-980C MFC CHF3 100SCCM
77 AERA FC-980C MFC H2 300SCCM
78 AERA FC-980C MFC N2 300SCCM
79 AERA FC-980C MFC O2 2 SLM
80 AERA FC-980C MFC O2 20SCCM
81 AERA FC-980C MFC O2 300SCCM
82 AERA FC-981 MFC H2 20 SLM
83 AERA FC-985C MFC AR-1000SCCM
84 AERA FC-985C MFC C4F6-50SCCM
85 AERA FC-985C MFC CF4-50SCCM
86 AERA FC-985C MFC CH2F2-50SCCM
87 AERA FC-985C MFC CHF3-100SCCM
88 AERA FC-985C MFC O2-200SCCM
89 AERA FC-985C MFC O2-50SCCM
90 AERA FC-D980C MFC 2 SLM O2
91 AERA FC-D980C MFC 20 SCCM O2
92 AERA FC-D980C MFC SiH4 20 SCCM
93 AERA FC-PA780C MFC CF4 20SCCM
94 AERA FC-PA780C MFC N2 1SLM
95 AERA FC-PA780C MFC O2 10SLM
96 AIO 206-740 QUICK DISCO PNL MT 1/4ID TUBE
97 AION BS302-0 SCL VRUSH ROLLER

98 ALLEN BRADLEY Y1510002 POWER DISTRIBUTION MODULE
99 ALLEN-BRADLEY
1492-AIFM8-3 SFR A 8 CHANNEL INPUT OR OUTPUT IFM 3
TERMINAL
100 ALLEN-BRADLEY 1492-IFM40F 40 POINT DIGITAL INTERFACE
101 ALLIANCE SYSTEMS BP420S UPS
102 ALPHA 4T-33207 BEARING
103 ALTECH 38020 POWER DISTRIBUTION BLOCK
104 ANALOG DEVICES 2B52A-1-K-04 THERMOCOUPLE TRANSMITTER
105 ANSWER ENGINEERING
112-B2873 ACTR PNEU DBL LOCK 37X435 OPENING
ANODIZ
106 ASE ZCP-2001 TIMING BELT
107 AXCELIS 0475-0015-0003 BELLOWS 8250 BEAMLINE
108 AXCELIS 1176910 MOTOR
109 AXCELIS 11S4278 FARADAY BELLOWS ASSY
110 AXCELIS 17031140 BELLOWS ASSY
111 AXCELIS 17037730 FIFLD RING NV20A
112 AXCELIS 17161640 INA 65286 FLD RPL ONLY BEAMLINE BELLOWS
113 AXCELIS 1906850 BELLOWS LD/UNLD MANIP
114 AXCELIS 1906890 BELLOWS WAFER HOLDER
115 AXCELIS 1906900 BELLOWS HOLDER CHUCK
116 AXCELIS 1907830 V3 PUSH BELLOWS
117 AXCELIS 19S0170 COUPLING BELLOWS NW25
118 AXCELIS 19S0217 CASSETT STAND BELLOWS
119 AXCELIS 238101 KIT AIR JET SHORT-B
120 AXCELIS 238102 KIT AIR JET REPLACEMENT
121 AXCELIS 539203 ASSY CHUCK 200 PCV
122 AXCELIS 658291-C LINKED ARM ROBOT ASSY
123 AXCELIS 69661 ANALOG DEVICES THERMOCOUPLE TRANSMITTER
124 BROOKS AUTOMATION 001-1951-05 VACUTRAN 5 MTR5 TRANSFER ROBOT DRIVE
125 BROOKS AUTOMATION 001-4130-03 ALIGNER CONTROLLER
126 BROOKS AUTOMATION 001-4130-09 ALIGNER CONTROLLER
127 BROOKS AUTOMATION 134161 DC POWER SUPPLY
128 BROOKS INSTRUMENT 6256SCZVCLAC MFC 500 SCCM O2
129 BURGESS XCG3 MICRO SWITCH ROLLER LEVER SPDT 6A
130 CANON 1803-0010-00 HEATER BLOCK ASSY
131 CANON PC7-0178-000 TUNER STUB CAP ASSY-3
132 CANON PC7-0179-000 TUNER STUB CAP ASSY-1
133 CANON PC7-1397-000 QUARTZ VIEW PORT
134 CANON PC7-1410-000 TOP RING
137 CANON PC7-2327-000 RING GAS
138 CANON PC7-2591-000 QUARTZ BELL JAR
139 CANON 00-0049-A CONTROLLER
140 CANON 01-R-S6-CR3 CANON
141 CANON 104210005 COLD CATHEODE ION GAUGE
142 CANON 107549001 VACUUM CHUCK
143 CANON 182-74000-03 CABLE COAXIAL RF 25FT
144 CANON 2D1-0246-000 ASSY SLEEVE FLEX VALVE
145 CANON 2D1-4126-000 BELLOWS CARRIAGE
146 CANON 2D1-4221-000 CANON

147 CANON 2D1-4354-000 HEAT TAPE MXR & LEAD LG
148 CANON 2DI-0252-010 RUDOLPH TECHNOLOGY CONN RTD.100 OHM
149 CANON 2G4-0458-000 SINGLE CABLE
150 CANON 2H4-0161-000 PCB CPU CP-2007
151 CANON 5202053 CONNECTOR MALE 1/8T-1/8MNPT
152 CANON 5404022 BEARING BALL 100mm OD*80ID*10
153 CANON 5426007 BRUSH CUP MANUAL
154 CANON 5451003 CYLINDER NUMERIC 16*10mm
155 CANON 5501028 O-RING
156 CANON 5605005 DUAL SOLID STATE RELAY
157 CANON 5608013 SWITCH OVERTEMP 600
158 CANON 574420-B017 DIFFUSER_40KA ASSY
159 CANON 58GC3496 RAD-OPTICD LEVEL SENSOR
160 CANON 58GD0092 DISPERSION HEAD ASSEMBLY
161 CANON 58-HA-6665 RETN KIT HEATER RING BEARING
162 CANON 58MA0089 GUIDE B-MAIN
163 CANON 58MA0970 TUBE FLEX VACUUM
164 CANON 58MC3779 ROTARY BRUSH
165 CANON 58WA0074 RETAINER SPRING HUB
166 CANON 58WA0090 GUIDE C-SUB
167 CANON 59MA0619 ANCHOR SPRING
168 CANON BD0-5250-000 CYLINDER
169 CANON BD4-5396-000 ENCODER PLATE(X)
170 CANON BD4-5397-000 ENCODER PLATE(Y)
171 CANON BD4-5413-000 LEVER(W/C)
172 CANON BD4-7497-000 CLEANING PLATE
173 CANON BD7-3769-000 PLATE
174 CANON BD7-7989-000 COVER
175 CANON BF6-0567-000 CYLINDER
176 CANON BF6-2019-000 WAFER DETECTOR UNIT
177 CANON BF6-2043-000 FINGER UNIT FEED HAND
178 CANON BF6-2255-000 GLASS FLAT UNIT(FOR 8 INCH)
179 CANON BF6-2567-000 RETICLE HAND UNIT
180 CANON BF6-2699-000 FINGER UNIT(R)
181 CANON BF6-2706-000 LIGHT GUIDE(C) GLASS
182 CANON BF6-2711-000 CHUCK FOR PA UNIT
183 CANON BF6-2854-000 IMAGE FIBER CABLE(OA) ASSY
184 CANON BF6-6553-000 MIRROR UNIT
185 CANON BG0-4057-000 AFC SENSOR UNIT. R
186 CANON BG0-4058-000 AFC SENSOR UNIT. L
187 CANON BG0-7750-000 1ST CONDENSER LENS UNIT
188 CANON BG0-7754-000 2ND CONDENSER LENS UNIT (B)
189 CANON BG0-7755-000 2ND CONDENSER LENS UNIT (C)
190 CANON BG0-7756-000 2ND CONDENSER LENS UNIT (D)
191 CANON BG0-7898-000 CANON
193 CANON BG3-0001 CANNON 14 SHUTTER
194 CANON BG3-3089-000 STG-CD PCB
195 CANON BG3-3833-000 STG-PREAMP PCB ASSY

196 CANON BG3-3925-000 LENS UNIT 1ST CONDENSER LAMP-1
197 CANON BG3-4062-000 LASER HEAD UNIT(L)
198 CANON BG3-4464-000 PA/SH PCB ASSY
199 CANON BG3-5555-000 8″ LOW CONTACT TYPE P/N WAFER CHUCK
200 CANON BG3-6576-R00 IMAGE SHIFTER UNIT
201 CANON BG3-6594-000 INDEXER UNIT
202 CANON BG3-6594-R00 ROBOT UNIT R THETA WF(R)
203 CANON BG3-7947-000 ROBOT
204 CANON BG4-2035-000 IPIF-3 PCB ASSY
205 CANON BG4-2420-000 COMMUNICATION RELAY PCB ASSY
206 CANON BG4-2766-000 5CH ORAF ASSY W/IC
207 CANON BG4-2815-000 ENCODER PCB ASSY
208 CANON BG4-2816-000 ENCODER PCB ASSY
209 CANON BG4-2817-000 XY DISTRIBUTOR PCB ASSY W/IC
210 CANON BG4-2838-000 PHOTO SW PCB ASSY W/IC
211 CANON BG4-2838-000 PHOTO SW PCB ASSY W/IC
212 CANON BG4-2846-000 OAS AF SENSOR AMP PCB ASSY
213 CANON BG4-2875-000 PA PCB ASSY W/IC
214 CANON BG4-3171-000 USM DRV PCB ASSY W/IC
215 CANON BG4-3172-000 INTER-PLARTOR PCB ASSY W/IC
216 CANON BG4-3505-000 SH PCB ASSY W/IC
217 CANON BG4-3518-000 SCH BPS PCB ASSY W/IC
218 CANON BG4-3539-000 ELEV 2 PCB ASSY W/IC
219 CANON BG4-3885-000 SCSI EXTENDER PCB ASSY
220 CANON BG4-4044-000 2CH CCD PCB ASSY W/IC
221 CANON BG4-4368-000 2ND CONDENSER LENS UNIT
222 CANON BG4-4369-000 2ND CON.LENS(B-UL32)
223 CANON BG4-4370-000 2ND CONDENSOR (CUL32)
224 CANON BG4-4371-000 2ND CONDENSOR LENS(D-UL32)
225 CANON BG4-4378-000 EXPOSE SHUTTER UNIT
226 CANON BG4-4390-000 SYNC DET AMP PCB ASSY W/IC
227 CANON BG4-4395-000 OPTICAL FIBER CABLE UNIT (BL)
228 CANON BG4-4397-000 RPC MV DRV PCB ASSY W/IC
229 CANON BG4-4399-000 MAGNETIC VALVE UNIT(SHUTTER)
230 CANON BG4-4400-000 VACUUM SWITCH UNIT
231 CANON BG4-4429-000 PROCESSING 1 PCB ASSY W/IC
232 CANON BG4-4430-000 PROCESSING 2 PCB ASSY W/IC
233 CANON BG4-4432-000 CONTROLLER 2 PCB ASSY W/IC
234 CANON BG4-4433-000 CONTROLLER 3 PCB ASSY W/IC
235 CANON BG4-4444-000 POSITIONING U-DIST PCB ASSY
236 CANON BG4-4455-000 RPC MOTHER PCB ASSY W/CONN
237 CANON BG4-4498-000 OBJECTIVE LENS UNIT
238 CANON BG4-4686-000 ROM PCB ASSY W/IC
239 CANON BG4-4687-000 RF IF PCB ASSY W/IC
240 CANON BG4-4918-000 PHOTO SW PCB ASSY W/INTERR
241 CANON BG4-4930-000 XY DIST PCB ASSY W/CONN
242 CANON BG4-4938-000 FLAT CABLE (X1)
243 CANON BG4-4939-000 FLAT CABLE (X2)
244 CANON BG4-5347-000 CD OPTF SENSOR PCB ASSY W/IC

245 CANON BG4-5380-000 PRESSURE SWITCH UNIT
246 CANON BG4-5413-000 LEVER (WAFER STAGE)
247 CANON BG4-5459-000 PIEZO DRV PCB ASSY W/IC
248 CANON BG4-5993-000 ISOLATION MV-DRV PCB ASSY
249 CANON BG4-6079-000 RPC CPU PCB ASSY
250 CANON BG4-6374-000 LENS UNIT
251 CANON BG4-6457-000 XY STAGE PRE-AP PCB ASSY
252 CANON BG4-6458-000 CURRENT FEED-BACK PCB ASSY
253 CANON BG4-6459-000 OFCD-IF PCB ASSY
254 CANON BG4-6467-000 MEASUREMENT PCB (THETA) ASSY
255 CANON BG4-6481-000 2ND CONDENSER LENS (G) UNIT
256 CANON BG4-6569-000 ACCELERATION SENSOR UNIT (X)
257 CANON BG4-6570-000 ACCELERATION SENSOR UNIT (Y)
258 CANON BG4-6579-000 MV CD PCB ASSY
259 CANON BG4-6583-000 HRD SENSOR PCB ASSY
260 CANON BG4-6591-000 A-MOUNT CD PCB ASSY
261 CANON BG4-6601-R00 AC/DC POWER SUPPLY UNIT
262 CANON BG4-6616-000 UNIFORMITY PRE-AMP PCB ASSY
263 CANON BG4-6628-000 CAM UNIT
264 CANON BG4-6629-000 XY STAGE CPU PCB ASSY
265 CANON BG4-6631-000 CD I/F PCB ASSY
266 CANON BG4-6673-000 HROA CD PCB ASSY
267 CANON BG4-6680-000 COUPLING UNIT (YA)
268 CANON BG4-6690-000 1ST CONDENSER LENDS UNIT(MAIN)
269 CANON BG4-6698-000 STARTER FOR 2KW MERCURY LAMP
270 CANON BG4-6704-000 ASSY PDB IL 1 CD
271 CANON BG4-6728-000 RS PCB ASSY
272 CANON BG4-6733-000 LIBRARY SUB PCB
273 CANON BG4-6748-000 P2 BACK PLANE PCB ASSY
274 CANON BG4-6755-000 SH PCB ASSY
275 CANON BG4-6760-000 6 INCH PA UNIT SEMI
276 CANON BG4-6783-000 WF SCH/PS PCB ASSY
277 CANON BG4-6786-000 DETECTOR UNIT A/F ELEVATOR
278 CANON BG4-6794-000 WF SCH/EL PCB ASSY
279 CANON BG4-6797-000 SENSOR AMP UNIT
280 CANON BG4-6804-000 IL-SNS AMP PCB ASSY
281 CANON BG4-6823-000 WF CPU PCB ASSY
282 CANON BG4-6853-000 S-ORDER
283 CANON BG4-6867-000 LC PRESSURE BOARD
284 CANON BG4-6923-000 AF SNS PCB ASSY
285 CANON BG4-6943-000 ALS CD PCB ASSY
286 CANON BG4-6974-000 E-CD PCB ASSY
287 CANON BG4-7001-000 RS-232C SWITCHING PCB ASSY
288 CANON BG4-7082-000 I LINE POWER SUPPLY
289 CANON BG4-7142-000 CABLE W/CONNECTOR BD-32
290 CANON BG4-7267-000 BAR CODE READER UNIT (RETICLE)
291 CANON BG4-7329-000 PPC PCB ASSY
292 CANON BG4-7521-R00 SCH ROBOT UNIT (R)
293 CANON BG4-7841-000 CABLE UNIT RCRS-1

295 CANON BG4-8140-000 2HC PRE-PROCESSING PCB ASSY
296 CANON BG4-8141-000 2CH PRE-PROCESSING PCB ASSY
297 CANON BG4-8192-000 INTERMEDIATE LIBRARY CONTROL
298 CANON BG4-8195-000 N6″ INT-LIB CONTROL PCB ASSY
299 CANON BG4-8207-000 PHOTO DIODE UNIT
300 CANON BG4-8422-000 SHUTTER UNIT
301 CANON BG4-8535-000 PULSE MOTOR UNIT(BS1) DC 2.96W
302 CANON BG4-8536-000 PULSE MOTOR UNIT(BS2) DC 2.96W
303 CANON BG4-8539-000 IL1-CD PCB ASSY
304 CANON BG4-8546-000 IL3-CD PCB ASSY
305 CANON BG4-8616-000 A-AMP PCB ASSY
306 CANON BG4-8680-000 EXPO-CD PCB ASSY
307 CANON BG4-8700-000 ADP-II
308 CANON BG4-9150-000 BACK PLANE PCB ASSY(VME)
309 CANON BG4-9151-000 FZANA IF PCB ASSY
310 CANON BG4-9154-000 STAGE DIST PCB ASSY
311 CANON BG4-9159-000 STAGE DIST PCB ASSY(B)
312 CANON BG4-9164-000 ACCELERATION SENSOR UNIT (ZF)
313 CANON BG4-9165-000 ACCELERATION SENSOR UNIT (ZB)
314 CANON BG4-9171-000 AC/DC POWER SUPPLY UNIT
315 CANON BG4-9191-000 STAGE PRE-AMP PCB ASSY(2)
316 CANON BG4-9193-000 DISPLACEMENT GUAGE UNIT (B)
317 CANON BG4-9194-000 STAGE DIST. PCB ASSY(Y1)
318 CANON BG4-9195-000 STAGE DIST. PCB ASSY(Y2X)
319 CANON BG4-9298-000 POWER AMP PCB ASSY
320 CANON BG4-9300-000 CURRENT AMP PCB ASSY(FZ)
321 CANON BG4-9306-000 8 INCH WAFER CHUCK
322 CANON BG4-9353-000 PHOTO DIODE UNIT
323 CANON BG5-0425-000 ROBOT UNIT. R THEATA.WF(L)
324 CANON BG5-0854-R00 CANON
325 CANON BG5-1760-000 ROBOT CONTROLLER UNIT
326 CANON BG5-4874-000 ROBOT CONTROLLER UNIT
327 CANON BG6-0103-000 WAFER CHUCK UNIT 4 INCH
329 CANON BG6-1025-000 PCB ASSY MV DST MA
330 CANON BG6-1161-000 CABLE ASSY AC3
331 CANON BG6-1191-000 SPEED SENSOR UNIT
332 CANON BG6-1212-000 PCB ASSY SC IF AS-2
333 CANON BG6-1214-000 PCB ASSY DI/DO IF AS-2
334 CANON BG6-1222-000 PCB ASSY AF CPU
335 CANON BG6-1224-000 PCB ASSY MX CPU
336 CANON BG6-1231-000 PCB ASSY DST 1-2 AF
340 CANON BG6-1277-000 PCB ASSY MP CPU
341 CANON BG6-1279-000 PCB ASSY MC CPU
342 CANON BG6-1281-000 PCB ASSY MA CPU

343 CANON BG6-1294-000 PCB ASSY FK
344 CANON BG6-1295-000 PCB ASSY WH-1
345 CANON BG6-1641-000 PT PCB ASSY
346 CANON BG6-1908-R00 PANEL KEY BOARD UNIT
347 CANON BG6-3023-000 AUTO FOCUS SENSOR UNIT
348 CANON BG6-3127-000 VACUUM SENSOR UNIT
349 CANON BG6-3128-000 VACUUM SENSOR UNIT
350 CANON BG6-3187-000 PCB ASSY POWER DISTRUBITE
351 CANON BG6-3453-000 PCB ASSY TV-CPU 2000(2)
352 CANON BG6-3613-000 PPC MOTOR PCB ASSY
353 CANON BG6-3617-000 MOTOR UNIT
354 CANON BG6-3797-000 PCB ASSY LED DRIVE
355 CANON BG6-3816-000 CABLE ASSY OUT PUT(2)
356 CANON BG6-4388-000 PCB ASSY IL CONT
357 CANON BG6-4472-000 PCB ASSY HP AXIP THETA
358 CANON BG6-4477-000 PCB ASSY COUNTER
359 CANON BG6-4504-000 ACCELERATION SENSOR UNIT
362 CANON BG6-4662-000 PRESSURE SENSOR UNIT
363 CANON BG6-4741-000 DISPLACEMENT SENSOR UNIT
364 CANON BG6-4830-000 PCB ASSEMBLED TO BG6-9275-000
365 CANON BG6-4966-000 LED UNIT
371 CANON BG6-4975-000 PCB ASSY MX-PSLAV
372 CANON BG6-4987-000 PCB ASSY ML CONT
373 CANON BG6-5227-000 LED DISPLACEMEMT SENSOR UNIT
374 CANON BG6-5228-000 LED DISPLACEMEMT SENSOR UNIT
375 CANON BG6-5374-000 TOGGLE SWITCH UNIT
376 CANON BG6-5726-000 ROTARY ENCODER UNIT
377 CANON BG6-5860-000 PCB ASSY ST DRV
378 CANON BG6-5950-000 LASER UNIT
379 CANON BG6-6117-000 PCB ASSY FL CONT
380 CANON BG6-6349-000 PHOTO SWITCH UNIT
382 CANON BG6-9227-000 PCB ASSY IF IL
384 CANON BG8-2442-000 PCB ASSY IL PRE-AMP
385 CANON BG9-0935-000 PM DRIVE PCB ASSY. GE(CU35)
386 CANON BG9-1840-000 TOOL AF/MV I/F PCB ASSY
387 CANON BG9-1861-000 W-TRANSFER PCB ASSY
388 CANON BG9-1884-000 PANEL DRIVE PCB ASSY
389 CANON BG9-2155-000 4CH PRE AMP PCB ASSY
390 CANON BG9-2160-000 RETICLE CHANGER I/F PCB ASSY

393 CANON BG9-2557-000 PCB ASSY 1 PHOTO SWITCH
394 CANON BG9-3239-000 DC MOTOR DRV PCB W/IC GE(CU35)
395 CANON BG9-3244-000 LOCAL 2 PCB ASSY W/IC
396 CANON BG9-3701-000 PHOTO SWITH PCB ASSY
397 CANON BG9-3715-000 TILT WAFER Z IF PCB ASSY W/IC
398 CANON BG9-3719-000 IME IF PCB ASSY W/IC
399 CANON BG9-3728-000 AF CPU PCB ASSY W/IC
400 CANON BG9-3729-000 OPAF CPU PCB ASSY W/IC
401 CANON BG9-3753-000 LENS UNIT 1ST CONDENSER LAMP-1
402 CANON BG9-3779-000 PIEZO (A) PROCESSOR PCB ASSY
403 CANON BG9-3793-000 IMP-2B PCB ASSY W/IC
404 CANON BG9-3794-000 DISPLACEMENT PRE AMP PCB ASSY
405 CANON BG9-4090-000 RC-2 PCB ASSY W/IC
406 CANON BG9-4129-000 MV DISTRIBUTOR 2 PCB ASSY
407 CANON BG9-4131-000 XY STAGE PRE AMP PCB ASSY
408 CANON BG9-4350-000 RC-1 PCB ASSY W/IC
409 CANON BG9-4352-000 LOCAL 1 PCB ASSY W/IC
410 CANON BG9-4658-000 LED UNIT(800NM)
411 CANON BG9-4687-000 2CH OPAF PCB ASSY
412 CANON BG9-4762-000 PA STAGE PCB ASSY
413 CANON BG9-4783-000 INPUT/OUTPUT PCB ASSY
414 CANON BG9-8465-000 MAIN CPU PCB ASSY
415 CANON BG9-9045-000 PS PCB ASSY
416 CANON BG9-9668-000 PCB ASSY CCD DR 2
417 CANON BH0-0647-000 BOARD
418 CANON BH0-4393-000 PHOTO MULTIPLIER TUBE R1355-01
419 CANON BH0-4419-000 BASIS IMAGE SENSOR
420 CANON BH0-8012-000 AMPLIFIER LED
421 CANON BH0-8026-000 SENSOR OXYGEN
424 CANON BH2-0661-000 AC SERVO MOTOR
425 CANON BH2-0715-000 STEPPING MOTOR
426 CANON BH2-0723-000 STEPPING MOTOR DC20V 0.03W
427 CANON BH2-0725-000 LINEAR MOTOR(X) DC 70W OVER
428 CANON BH2-0726-000 LINEAR MOTOR(YL) DC 70W OVER
429 CANON BH2-0727-000 LINEAR MOTOR(YR) DC 70W OVER
430 CANON BH2-1163-000 MAGNETIC VALVE
431 CANON BH2-1218-000 MAGNETIC VALVE
432 CANON BH2-9114-000 DRIVER UNIT MOTOR
433 CANON BH3-0800-000 MICRO SWITCH
434 CANON BH3-2125-000 FUSE (1A)
435 CANON BH3-2190-000 FUSE 1A AC 125V
436 CANON BH5-3429-000 DC POWER SUPPLY UNIT
437 CANON BH5-3523-000 AC/DC POWER SUPPLY UNIT
438 CANON BH5-3729-000 DRIVER MOTOR 4CH-PP
439 CANON BH5-3739-000 DRIVER UNIT MOTOR
440 CANON
BH5-3768-000 UPS FUJI ELECTRONIC M-UPS010J11W-
UL(CE)-Z073

441 CANON BH5-3840-000 POWER SUPPLY TYPE-J
442 CANON BH5-4211-0KP MONITOR
443 CANON BH5-6242-000 PRESSURE SENSOR
444 CANON BH5-6249-000 OPTICAL FIBER CABLES GLASS/PL
445 CANON BH5-6254-000 OPTICAL SCALE-X LIP101R
446 CANON BH5-6257-000 PRESSURE SENSOR
447 CANON BH5-6258-000 ATMOSPHERIC TRANSDUCER
448 CANON BH5-6747-000 CANON
449 CANON BH5-7294-000 PCB
450 CANON BH5-7677-000 AMPLIFIER UNIT
451 CANON BH5-7742-000 CHIME PHONE(BUZZER)
452 CANON BH5-7919-000 SCSI EXTENDER PCB ASSY
453 CANON BH5-7948-000 SP PRINTER BJ
455 CANON BH6-6595-000 CABLE ASSY AC
457 CANON BH8-1054-001 LED UNIT (730NM)
458 CANON BH8-1760-001 XY STAGE PRE-AMP PCB
459 CANON BH8-1834-001 PROCESS PCB
462 CANON BH8-3251-001 MS DIST PCB
463 CANON BH9-0105-000 KEYBOARD
464 CANON BM0-0819-000 PCB ASSY XZ3
465 CANON BM1-3345-000 FLEXIBLE CABLE UNIT Y6
466 CANON BN9-2717-000 GLASS BOARD
467 CANON BN9-4644-000 G1 MIRROR
468 CANON BN9-4709-030 MIRROR(UV)
469 CANON BN9-4730-000 MIRROR
470 CANON BN9-6168-000 PCB ASSY DI/DO IF AS-2
471 CANON BN9-6206-000 COLD MIRROR
472 CANON BN9-6347-020 OPTICAL IMAGE CABLE GLASS
473 CANON BN9-6545-000 ND FILTER
474 CANON BN9-6634-000 FILTER I-LINE
475 CANON BN9-7005-000 030 OPTICAL FILTER ND(T=30%)
480 CANON BN9-7008-000 PLAIN MIRROR
481 CANON BN9-7009-000 PLAIN MIRROR
482 CANON BN9-7052-000 FILTER ND OPTICAL
483 CANON BN9-7069-000 GLASS PLATE
484 CANON BN9-7182-000 CANON
488 CANON BN9-7906-000 HALF MIRROR (R50)
489 CANON BN9-7907-000 MIRROR(15)

490 CANON BN9-7908-000 MIRROR(15)
493 CANON BS2-4293-000 TIMING BELT B-100S3M741
494 CANON BS2-4301-000 COUPLING
495 CANON BS2-4323-000 TIMING BELT COGGED RUBBER
496 CANON BS2-5258-000 SCREW BALL (COMPLEX BUSH)
497 CANON BS2-5261-000 LM GUIDE(COMPLEX BUSH) SET(2PCS)
498 CANON BS2-7182-000 LM GUIDE(COMPLEX BUSH)
499 CANON BS2-9031-000 COUPLING
500 CANON BS6-1374-000 AIR CYLINDER
501 CANON BS7-4085-000 AIR CYLINDER
502 CANON BS7-4103-000 CYLINDER
503 CANON BS7-4111-000 BF DIAPHGRAM CYLINDER
504 CANON BS7-5060-000 VALVE REGULATOR
505 CANON BS7-5061-000 VALVE REGULATOR
506 CANON BSI-2106-000 TEFLON RING
507 CANON PH4-0065-000 DETECTOR PCB
508 CANON PH4-0104-01 EXP PCB
509 CANON PH4-0104-01 EXP PCB
510 CANON PH4-0107-000 ESC PCB
511 CANON PH4-0107-000 ESU PCB
512 CANON PH4-0108-000 EHU PCB
513 CANON PH5-3099-000 STEPPING MOTOR DRIVER
514 CANON WA3-3585-000 IC AT28C256-15PC EP-ROM
515 CANON WD1-0080-000 FUSE 1A
516 CANON WG8-0242-000 SOLENOID FRA SHUTTER ROTARY
517 CANON WG8-0334-000 OPTICAL FIBER UNIT E32-L25
518 CANON WG8-0335-000 SENSOR
519 CANON WL3-5028-000 FAN AC 11W
520 CANON Y60-0863-000 LENS UNIT 1ST CONDENSER LAMP-2
521 CANON Y60-0883-000 ROTARY SOLENOID UNIT
522 CANON Y60-1423-000-0KPD WORKSTATION
523 CANON Y60-4726-000 LINEAR MOTOR UNIT DC 70W OVER
524 CKD CORPORATION 1137-2C-EY AIR FILTER
525 CSR CONTRAVES 500PMA SERVOMOTOR
526 CTI CRYOGENICS
8081608 HOSE 20 FT LENGTH 3/4″ 250 PSI HELIUM
STAINLESS STEEL
527 CTI CRYOGENICS 8112463G500 CABLE POWER UL/VDE
528 CYBOR 5126C PUMP
529 DEVICENET
1485A-T1H4 ALLEN BRADLEY DISPLACEMENT
CONNECTOR
530 DEVICENET
1485P-P1H4-R5 ALLEN BRADLEY DISPLACEMENT
CONNECTOR
531 DNS 2-39-22607 PENUMATIC VALVE
532 DUPONT AS568A-022 O-RING CHEMRAZ
533 DUPONT AS568A-025 O-RING CHEMRAZ
534 DUPONT AS568A-166 O-RING KALREZ
535 DUPONT AS568A-242 O-RING KALREZ
536 DUPONT AS568A-244 O-RING
537 DUPONT AS568A-266 O-RING
538 EATON 1520420 PCB ASSY

539 EATON 15S0301 SENSOR INTERFACE BOARD
540 EATON 17098390 GUIDE
541 EATON 17123410 INSULATOR FILAMENT
542 EATON 17123420 INSULATOR FILAMENT
543 EATON 17123430 RETAINER FILAMENT
544 EATON 1766531 PLATE BURNTHRU
545 EATON 251411 DETECTOR BULE ROTATE
546 EATON 4001167 SPRING RETAINING ROD
547 EATON 6300076 IRF153 N-CH 150W 60V 24A T03
548 EATON 6400022 BRIDGE 30A 100V
549 EDWARDS 0602-8781-0 INSULATOR KIT
550 FAUTHABER 3557K024C DC CORDLESS MOTOR
551 FLOUROWARE 202-39 VALVE
552 FREEPORT 243PC15M MICRO SWITCH
553 FSI 231198-001 SENSOR
554 FSI 293010-400 SENSOR EXHAUST PC ASSY
555 FSI 294018-001 IDI MOTHER BOARD
556 FSI 301740-006 TIMING BELT
557 FSI
3066152-001 POWER SUPPLY-DC BATTERY BACKUP CEC#
05D-0167-03MN
558 FSI 412488-001 DEFLECTOR ISR200 200MM
559 FUJI SEIKI INC 000214 NEEDLE VALVE
560 FURON 1103421 3-WAY VALVE DV3-144D2
561 FUSION 099402 RF SCREEN
562 FUSION 238481 QUARTZ
563 GASONICS 17622-01 PLATE DIFFUSER QUARTZ LAMP
564 GASONICS 17688-01 GAS DISTRIBUTION PLATE 200MM L3510
565 GASONICS 8576 QUARTZ
566 GAST MFG. 4AM-NRV-22B AIR MOTOR
567 GENUS 22451-00 OUTER RING HEATER
568 GENUS 40425-002 CHARGE EXCHANGE CANAL EXTRANCE
569 GENUS 40426-002 CHARGE EXCHANGE CANAL EXT
570 GENUS 41800-00 BLOCK SPOON MOUNTING
571 GENUS 41801-00 ARM SPOON MOUNTING
572 GENUS 42004-00 CUP COLLECTOR
573 GENUS 42881-00 CLAMP RING
574 GENUS 43384-00 SHUTTLE TAPERED RIGHT
575 GENUS 43385-00 SHUTTLE TAPERED LEFT
576 GPT 78-2871 LIP SEAL
577 GRANVILLE-PHILLIPS 356012-YL-T MICRO-ION PLUS DEGAS GAUGE
578 GRANVILLE-PHILLIPS 392501-2-YD-T MICRO-ION PLUS GAUGE
579 HISCO 531-2382 APERTURE PLATE
580 HITACHI 12-EAQ-501 GROUND ELECTRDOE 6″(M)
581 HITACHI 12-EAR-501 G/E PLATE
582 HITACHI 12-EBB-503 CHAMBER LID (D-TYPE)
583 HITACHI 12-EBP-501 CHAMBER WALL LINER 6″
584 HITACHI 2-814571-F ELECTRODE HEAD 6″(M)
585 HITACHI 2-814715-D FOCUS RING
586 HITACHI 2-816894-B WAFER PLATE
587 HITACHI 2-819843-H FOCUS RING 8INCH

588 HITACHI 32-EAV-501 REFLECTOR
589 HITACHI 33-EAV-501 GROUND ELECTRODE (P)
590 HITACHI 3-824917-A ORING RETAINER
591 HITACHI 3-827452-B GROUND ELECTRODE
592 HITACHI 3-836308-1 REFLECTOR
593 HITACHI 4-817835 PUNCH METAL 8″
594 HITACHI 4-818310-A PUNCHING METAL
595 HITACHI 4-819998-B SHIELD PLATE
596 HITACHI 589-6542 MOTOR FAN
597 HITACHI 825-4390 WATER COOLING PLATE
598 HONELYWELL 311SM6-T MICRO SWITCH
599 HONEYWELL 13AC1 MICRO DOOR SWITCH
600 HP 07550-60033 Y MOTOR ASSEMBLY
601 HVA 28242-0213RXS RECTANGULAR SLIT VALVE
602 IRCON 22-05F-0-1-0 THERMOMETER
603 ISORAN 480H100 TIMING BELT
604 JUSUNG ENGINEEIRNG 301-72-074 SUSCEPTOR UNIT
605 KAIJO 101-16 SENSOR
606 KAIJO 105-28 PHOTO MICRO SENSOR
607 KAIJO 114-41613 PHOTO SENSOR
608
KEYENCE
CORPORATION 6000-0527 AREA SENSOR PJ-50A
609
KEYENCE
CORPORATION 6000-4339 MOTOR SEAL
610
KEYENCE
CORPORATION 6000-8426 DRIVER MOTOR
611 KLA-TENCOR 104825 LAMP FFM 6V
612 KLA-TENCOR 217190 L-STYLUS 5.0UM MOCROHEAD
613 KLA-TENCOR 450-451849-00 X Y PZT w/ 22CM CABLE 40 MICRON
614 KLA-TENCOR 710-658807-00 VIF ASSY BOARD
615 KLA-TENCOR 710-678545-00 PCB ESCORT DISPLAY PROCESSOR 2
616 KOGANEI 110-4E1-J62-PSL SOLENOID VALVE
617 KOGANEI 2G553A CYLINDER SENSOR
618 KOGANEI 300-4E1-03-39-IN-53W AIR VALVE
619 KOKUSAI 13-DAK-502 EXTERNAL TORCH 6″ ASSY
620 KOKUSAI 23-DAK-501-532 EXTERNAL TORCH UNIT
621 KOLLMORGEN 00-S0613-049 WAFER INDEXER ASSY TYPE S6M4H
622
KURODA PRESICION
INDUSTIRES 25X10 BALL SCREW NO.1K
623
KURODA PRESICION
INDUSTIRES 25X10 BALL SCREW NO.DF
624 Lam, LAM RESEARCH 060083Z GRID 150MM
625 Lam, LAM RESEARCH 01-W3781B-03C ASSY PCB VME 68030
626 Lam, LAM RESEARCH 413-330504-082 RING FOCUS FLAT 9608
627 Lam, LAM RESEARCH 668-092373-001 PLUG MINIATURE BANANA JACK
628 Lam, LAM RESEARCH 672-001351-009 LUG RING INSUL 16-14 AWG #6
629 Lam, LAM RESEARCH 713-001585-004 GDP CAP SCREW
630 Lam, LAM RESEARCH 713-011545-002 GUIDE SPRING KEL-F
631 Lam, LAM RESEARCH 713-011585-004 COVER CLAMP BOLT
632 Lam, LAM RESEARCH 713-011980-001 HOUSING PLUNGER
633 Lam, LAM RESEARCH 713-021267-001 CLAMP PIN HEAD
634 Lam, LAM RESEARCH 713-028553-103 COMFINEMENT RING CERAMIC
635 Lam, LAM RESEARCH 713-040539-013 PED LNDNG
636 Lam, LAM RESEARCH 713-040539-014 PED LNDNG

637 Lam, LAM RESEARCH 713-040539-015 LIMIT CONF RING
638 Lam, LAM RESEARCH 713-082933-550 INSULATOR BRACKET ULTEM
639 Lam, LAM RESEARCH 713-082933-555 INSULATOR BRACKET ULTEM
640 Lam, LAM RESEARCH 713-11203-001 ENTRANCE LOAD LOCK COVER PLATE
641 Lam, LAM RESEARCH 713-540182-002 CONFINEMENT RING PLUNGER
642 Lam, LAM RESEARCH 714-044693-002 CHAMBER LINER-D
643 Lam, LAM RESEARCH 714-220096-001 SHUTTLE COVER
644 Lam, LAM RESEARCH 714-220096-003 SHUTTLE COVER
645 Lam, LAM RESEARCH 714-220141-001 AUTO LOADER ARM
646 Lam, LAM RESEARCH 714-330982-001 LINER CHAMBER
647 Lam, LAM RESEARCH 714-460562-004 ESC COVER LINER
648 Lam, LAM RESEARCH 714-495015-001 LINER CHMBR TRNSN MANF
649 Lam, LAM RESEARCH 714-704416-004 LAM SIDE WALL-1
650 Lam, LAM RESEARCH 714-704417-004 LAM SIDE WALL-2
651 Lam, LAM RESEARCH 714-S070326-001-01 DEPOSITION COVER EXHAUST PO
652 Lam, LAM RESEARCH 714-S070328-001-03 DEPOSITION COVER LIGHT PORT
653 Lam, LAM RESEARCH 715-001414-008 R4528 BAFFLE-B
654 Lam, LAM RESEARCH 715-001415-008 R4528 BAFFLE-C
655 Lam, LAM RESEARCH 715-002922-00 Bi-FLEX COOLING STATION
656 Lam, LAM RESEARCH 715-003851-002 HEATED SEAL PLATE INSERT
657 Lam, LAM RESEARCH 715-005115-001 COOLING RING 8″ ELECTRODE
658 Lam, LAM RESEARCH 715-006436-001 BUFFLE MOD
659 Lam, LAM RESEARCH 715-006439-001 PLL ELECTRODE AIR LOCK
660 Lam, LAM RESEARCH 715-006699-001 RING COOLING COVER
661 Lam, LAM RESEARCH 715-006719-001 PLATE SEAL
662 Lam, LAM RESEARCH 715-007469-001 ELECTRODE LOWER 8INCH 4 PIN
663 Lam, LAM RESEARCH 715-007469-002 ELECTRODE LOWER 8INCH
664 Lam, LAM RESEARCH 715-007567-001 BAF UPR HP TRIPLE SET
665 Lam, LAM RESEARCH 715-008721-001 CATHODE 5″
666 Lam, LAM RESEARCH 715-008763-001 BAFFLE
667 Lam, LAM RESEARCH 715-009306-004 FOCUS RING 4″
668 Lam, LAM RESEARCH 715-011002-002 HOUSING LOWER REACTION CHAMBER
669 Lam, LAM RESEARCH 715-011035-001 PLATE LOWER END(REACTION CHAMBER)
670 Lam, LAM RESEARCH 715-011035-002 PLATE LOWER END(REACTION CHAMBER)
671 Lam, LAM RESEARCH 715-011039-001 RETAINER UNIVERSAL WINDOW
672 Lam, LAM RESEARCH 715-011051-001 FRAME CHAMBER WINDOW
673 Lam, LAM RESEARCH 715-011202-001 ELL CHAMBER BODY
674 Lam, LAM RESEARCH 715-011204-001 XLL CHAM BODY
675 Lam, LAM RESEARCH 715-011502-001 COOLING COVER
676 Lam, LAM RESEARCH 715-011531-008 ELECTRODE ALUMINUM ANODIZED 6INCH
677 Lam, LAM RESEARCH 715-011531-014 UPPER ELECTRODE 8″
678 Lam, LAM RESEARCH 715-011531-015 ELECTRODE ALUMINUM ANODIZED
679 Lam, LAM RESEARCH 715-011532-006 PLATE UPPER SEAL 6INCH
680 Lam, LAM RESEARCH 715-011535-001 ELECTRODE CLAMP RING
681 Lam, LAM RESEARCH 715-011593-002 PLATE SEAL_RB4728
682 Lam, LAM RESEARCH 715-011622-001 LIFTER WAFER 4 PIN
683 Lam, LAM RESEARCH 715-011622-101 LFTR WFR 4-PIN FLEX
685 Lam, LAM RESEARCH 715-011640-30-006 FOCUS RING

686 Lam, LAM RESEARCH 715-011662-001 PIN REGISTRATION/VENT
687 Lam, LAM RESEARCH 715-011665-006 CAP LOWER ELECTRODE 6INCH
688 Lam, LAM RESEARCH 715-011673-005 CAP LWR ELECT 5″ DOME W/VENT
689 Lam, LAM RESEARCH 715-011673-006 CAP LOWER ELECTRODE 6INCH
690 Lam, LAM RESEARCH 715-011746-168 WAFER CLAMP
691 Lam, LAM RESEARCH 715-011753-001 PLATE UPPER BAFFLE
692 Lam, LAM RESEARCH 715-011825-001 PLATE LOWER END (REACTION CHAMBER)
693 Lam, LAM RESEARCH
715-011901-006 LOWER BAFFLE DOMED 6INCH
ELECTRODE
694 Lam, LAM RESEARCH 715-011912-083 PLATE UPPER BAFFLE
695 Lam, LAM RESEARCH 715-011913-080 PLATE LOWER BAFFLE 8INCH
696 Lam, LAM RESEARCH 715-011913-083 PLATE LOWER BAFFLE
697 Lam, LAM RESEARCH 715-012101-008 HOLDER WAFER 8INCH ARM EXIT
698 Lam, LAM RESEARCH 715-012111-002 ARM HOUSING COVER
699 Lam, LAM RESEARCH 715-012165-006 ARM LOAD ENT 6INCH TIGHT POCKET
700 Lam, LAM RESEARCH 715-012165-008 HOLDER WAFER 8″ TIGHT POCKET
701 Lam, LAM RESEARCH 715-012233-002 INNER GATE PLATE
702 Lam, LAM RESEARCH 715-012233-003 GATE INR HD ANDZ
703 Lam, LAM RESEARCH 715-012370-002 SLIP VALVE BOLT
704 Lam, LAM RESEARCH 715-013639-005 GROUND SHIELD (TP#1)
705 Lam, LAM RESEARCH 715-013639-009 GROUND SHIELD (TP#2)
706 Lam, LAM RESEARCH 715-013830-002 EXTENSION ARM TRANSPORT
707 Lam, LAM RESEARCH 715-015169-011 LINER TMP SHILD TOP GAS ANODIZED
708 Lam, LAM RESEARCH 715-016744-011 LVGROUNDED SHIELD
709 Lam, LAM RESEARCH 715-018991-006 ELECTRODE UPPER 8″
710 Lam, LAM RESEARCH 715-018991-206 ELCTD ALUM ANDZ 6 INCH
711 Lam, LAM RESEARCH 715-018991-208 ELCTD ALUM ANDZ 8″
712 Lam, LAM RESEARCH 715-018991-208 ELECTRODE UPPER 8″
713 Lam, LAM RESEARCH 715-021771-001 COVER ARM HOUSING LIFTER
714 Lam, LAM RESEARCH 715-023233-019 EPD PLATE BODY #1
715 Lam, LAM RESEARCH 715-023790-004 INSR CHMBR TUNNEL
716 Lam, LAM RESEARCH 715-025106-001 PLATE LOWER BAFFLE ESC
717 Lam, LAM RESEARCH 715-025724-001 RING GAS FEED FLANGED
718 Lam, LAM RESEARCH 715-027741-002 MNMTR PORT END PT
719 Lam, LAM RESEARCH 715-027741-004 EPD PLATE BODY #2
720 Lam, LAM RESEARCH 715-028087-005 SHROUD UPPER ELECTRODE 2M
721 Lam, LAM RESEARCH 715-028306-001 WASHER 1/4 TURN
722 Lam, LAM RESEARCH 715-028405-001 LOWER CHAMBER HOUSING
723 Lam, LAM RESEARCH 715-028459-001 PLATE LOWER END
724 Lam, LAM RESEARCH 715-028486-002 PLATE UPPER SEAL 12 BOLT
725 Lam, LAM RESEARCH 715-028532-002 RING COOLING 8INCH ELECTROSTATIC
726 Lam, LAM RESEARCH 715-028552-001 RING CLAMP UPPER ELECTRODE
727 Lam, LAM RESEARCH 715-028554-002 PLATE UPPER SEAL 8INCH ELECTRODE
728 Lam, LAM RESEARCH 715-030136-003 RING EDGE ESC
729 Lam, LAM RESEARCH 715-030319-001 COVER SCREW BSR
730 Lam, LAM RESEARCH 715-030320-001 R BOT GAS INJ BSR
731 Lam, LAM RESEARCH 715-030329-002 CHAMBER LINER
732 Lam, LAM RESEARCH 715-030860-001 LINER/SPCR EXT GND
733 Lam, LAM RESEARCH 715-030860-003 LINER/SPCR EXT GND
734 Lam, LAM RESEARCH 715-031113-001 BAFFLE 6″ LOWER

735 Lam, LAM RESEARCH 715-031129-001 BAFFLE 6″ UPPER
736 Lam, LAM RESEARCH 715-031454-001 PLATE WINDOW CHAMBER
737 Lam, LAM RESEARCH 715-031507-001 HOUSING LWR REACTION CHAMBER
738 Lam, LAM RESEARCH 715-031507-002 HOUSING LOWER REACTION CHAMBER
739 Lam, LAM RESEARCH 715-031768-001 ELECTRODE BOTTOM HEATED
740 Lam, LAM RESEARCH 715-031768-002 ELECTRODE BOTTOM HEATED
741 Lam, LAM RESEARCH 715-031777-002 SCREW CPV ANODIZING
742 Lam, LAM RESEARCH 715-031960-007 PLUNGER HAA
743 Lam, LAM RESEARCH 715-031984-003 FRAME WINDOW CHAMBER
744 Lam, LAM RESEARCH 715-031986-005 HSG LWR REACTION CHAMBER
745 Lam, LAM RESEARCH 715-031986-006 HSG REACTION CHAMBER A6
715-032012-004 PLATE WINDOW CHAMBER CAPTIVE HDW
A6
747 Lam, LAM RESEARCH 715-032012-006 CHAMBER WINDOW EPD PLATE
748 Lam, LAM RESEARCH 715-036580-001 UPPER ELECTRODE 6″
749 Lam, LAM RESEARCH 715-037038-001 BAFFLE 6″ UPPER
750 Lam, LAM RESEARCH 715-042721-009 CHAMBER LINER (METAL 45-AL)
751 Lam, LAM RESEARCH 715-044691-002 LINER CHMBR LWR HI
752 Lam, LAM RESEARCH 715-044691-004 LINER SPACER
753 Lam, LAM RESEARCH 715-045264-200 R GND EXT AL SLOT
754 Lam, LAM RESEARCH 715-045264-242 R GND EXT AL SLOTT
755 Lam, LAM RESEARCH 715-045710-807 SMACTRIC DOOR LINER 2300
756 Lam, LAM RESEARCH 715-046844-001 PIN SCREW 6-32 BAFFLE/TCP
757 Lam, LAM RESEARCH 715-046844-011 KIT BAFFLE-1
758 Lam, LAM RESEARCH 715-047769-012 SCREW VNTD SCH CAP LOW PR/TCP
759 Lam, LAM RESEARCH 715-047802-001 WSHR BEARING SST
762 Lam, LAM RESEARCH 715-06439-001 PLL ELECTRODE
763 Lam, LAM RESEARCH 715-065406-001 EDGE RING ANGLE HOLE
764 Lam, LAM RESEARCH 715-073804-003 WAFER BASE PLATE
765 Lam, LAM RESEARCH 715-074069-004 BASE PLATE
766 Lam, LAM RESEARCH 715-09827-001 RING EDGE 4″
767 Lam, LAM RESEARCH 715-098591-001 PENDULUM VALVE PLATE
768 Lam, LAM RESEARCH 715-098592-001 ISO VALVE COVER
769 Lam, LAM RESEARCH 715-11002-002 CHAMBER LOWER REACTION
770 Lam, LAM RESEARCH 715-11006-002 CLAMP RING
771 Lam, LAM RESEARCH 715-11035-002 MAIN CHAMBER BASE
772 Lam, LAM RESEARCH 715-11492-006 ASSY WFR HLDR TIGHT POCKET 6 XLL
773 Lam, LAM RESEARCH 715-11532-006 PLATE UPPER SEAL 6INCH
774 Lam, LAM RESEARCH 715-11629-006 LOWER CAP ELECTRODE 6″
775 Lam, LAM RESEARCH 715-11673-006 DOME ELECTRODE
776 Lam, LAM RESEARCH 715-11753-001 PLATE UPPER BAFFLE 8″
777 Lam, LAM RESEARCH 715-11900-001 UPPER BAFFLE E-TRONE/EDG
778 Lam, LAM RESEARCH 715-11901-006 LOWER BAFFLE DOMED 6″ ELECTRODE
779 Lam, LAM RESEARCH 715-11985-006 LOWER ELECTRODE 6″ (DOME 0-025″)
780 Lam, LAM RESEARCH 715-12101-008 ARM HOLDER
781 Lam, LAM RESEARCH 715-12110-001 COVER LOWER ARM
782 Lam, LAM RESEARCH 715-12205-002 BELLOWS HOUSING
783 Lam, LAM RESEARCH 715-12233-002 INNER GATE ASSEMBLY

784 Lam, LAM RESEARCH 715-12233-003 GATE INR HD ANODIZED
715-130063-106-00 HOLDER WAFER ISOTROPIC ETCH
REDUCED NOTCH
786 Lam, LAM RESEARCH 715-130080-005 WAFER HOLDER TIGHT POCKET 5″
787 Lam, LAM RESEARCH 715-130080-008 WAFER HOLDER TIGHT POCKET
788 Lam, LAM RESEARCH 715-130092-006 ARM 6″ WAFER HOLDER
789 Lam, LAM RESEARCH 715-140042-001 RING VOLUME FILLER
790 Lam, LAM RESEARCH 715-140124-001 BAFFLE 4528 UPPER TPL SET
791 Lam, LAM RESEARCH 715-140125-001 BAFFLE LWR OF THREE
792 Lam, LAM RESEARCH 715-140126-001 BAF 4528 MDL TPL SET
793 Lam, LAM RESEARCH 715-140153-008 RING CLG EST SIZE ESC 8INCH STD
794 Lam, LAM RESEARCH 715-140166-003 ELCTD BOT CER ESC OXD
795 Lam, LAM RESEARCH 715-140286-001 RING FOCUS 6INCH 4420
796 Lam, LAM RESEARCH 715-140287-002 CLAMP RING UPPER ELECTRODE
797 Lam, LAM RESEARCH 715-140287-003 RING CLAMP UPPER ELECTRODE
798 Lam, LAM RESEARCH 715-140287-3 UPPER CLAMP RING
799 Lam, LAM RESEARCH 715-220172-001 AUTO LOADER CASSETTE STAGE
800 Lam, LAM RESEARCH 715-221413-008 R4528 BAFFLE-A
801 Lam, LAM RESEARCH 715-25106-001 PLATE LOWER BAFFLE
802 Lam, LAM RESEARCH 715-252847-001 LNR HTD TOP MNT 10CM GAP AP(LAM)
803 Lam, LAM RESEARCH 715-28356-005 SHOWER HEAD
804 Lam, LAM RESEARCH 715-28554-002 PLATE UPPER SEAL (8″ ELECT)
805 Lam, LAM RESEARCH 715-330092-004 CAP GAS RING TRI-HEAD ACME COA
715-330092-004 CAP GAS RING TRI-HEAD ACME COA
(Copy)
715-330105-001 HOUSING UPPER REACTION CHAMBER
FIXED GAP
808 Lam, LAM RESEARCH 715-330106-001 HSG MDL RCTN CHMBR FXD GAP
809 Lam, LAM RESEARCH 715-330106-003 HSG MDL RCTN CHMBR FXD GAP
810 Lam, LAM RESEARCH 715-330133-001 RING UPPER CHAMBER FIXED GAP
811 Lam, LAM RESEARCH 715-330135-001 GAS INJECTION RING
812 Lam, LAM RESEARCH 715-330135-002 BOTTOM GAS FEED RING
813 Lam, LAM RESEARCH 715-330224-001 INSERT SHAPED WINDOW
814 Lam, LAM RESEARCH 715-330236-001 BOT HSG 6 INCH SPLIT CHAMBER
815 Lam, LAM RESEARCH 715-330299-001 FTG BOT GAS FEED BLANK
816 Lam, LAM RESEARCH 715-330394-001 CHAMBER LINER BRACKET
817 Lam, LAM RESEARCH 715-330394-002 BRACKET CHAMBER LINER 9400W/PLENUM
818 Lam, LAM RESEARCH 715-330394-010 BRACKET CHAMBER LINER
819 Lam, LAM RESEARCH 715-330445-002 PL ADPTR UPR MATCH
820 Lam, LAM RESEARCH 715-330445-008 PL ADPTR UPR MATCH TOP GAS
821 Lam, LAM RESEARCH 715-330445-600 PLATE ADATER UPPER MATCH
822 Lam, LAM RESEARCH 715-330445-601 PL ADPTR UPR MATCH
823 Lam, LAM RESEARCH 715-330746-002 BSR CYLINDER PLUNGER PIN KIT
824 Lam, LAM RESEARCH 715-330773-001 COVER TOP LOWER CHAMBER HSG
825 Lam, LAM RESEARCH 715-330778-001 CYLINDER HOUSING
827 Lam, LAM RESEARCH 715-330825-007 LINER CHMABER AL ALLI BSR 9600
828 Lam, LAM RESEARCH 715-330834-001 HOUSING LOWER REACTION
829 Lam, LAM RESEARCH 715-330889-002 GROUND RING
830 Lam, LAM RESEARCH 715-330928-002 LINER PUMP PORT O-SHAPE
831 Lam, LAM RESEARCH 715-330981-001 LINER WINDOW SIDE
832 Lam, LAM RESEARCH 715-330984-001 RING BOTTOM GAS INJ FXD GAP ES

833 Lam, LAM RESEARCH 715-330984-300 RING GND LOW CAP BGST OPNG
834 Lam, LAM RESEARCH 715-330987-001 GAS INJECTION RING (TCP9408)
835 Lam, LAM RESEARCH 715-331131-001 HSG MDL RCTN CHMBR FXD GP
836 Lam, LAM RESEARCH 715-331211-002 PTX CHAMBER WALL LINER
837 Lam, LAM RESEARCH 715-331218-001 COLLAR
838 Lam, LAM RESEARCH 715-360268-001 PL CHAMBER TO VALVE
839 Lam, LAM RESEARCH 715-360321-00 THROTTLE VALVE HOUSING
840 Lam, LAM RESEARCH 715-370861-010 ORF SYL 55HOLES DIA 052
841 Lam, LAM RESEARCH 715-440264-002 A9600 SE CHAMBER
842 Lam, LAM RESEARCH 715-440463-001 CH# HSG MDL 9608 ASSY [ALN_9600 SE]
843 Lam, LAM RESEARCH 715-441352-001 CHAMBER HIFLOW TCP
715-441536-001 HOUSING ELECTRODE ELECTROSATIC
CHUCK
845 Lam, LAM RESEARCH 715-441537-001 COV- HSG- ELCTD- ESC
846 Lam, LAM RESEARCH 715-443178-001 RING EDGE HOT
847 Lam, LAM RESEARCH 715-443178-300 HOT EDGE RING
848 Lam, LAM RESEARCH 715-443223-002 RING GROUND AL HP
849 Lam, LAM RESEARCH 715-460214-003 HSG LWR CHAMBR STP MDL MTL
850 Lam, LAM RESEARCH 715-460416-013 LNR HTD TOP MNT 10CM GAP AP
851 Lam, LAM RESEARCH 715-491057-002 CLP RING INSULR ESC
852 Lam, LAM RESEARCH 715-495013-001 PENDULUM VALVE WALL LINER
853 Lam, LAM RESEARCH 715-495014-001 CHAMBER LINER TRANS
854 Lam, LAM RESEARCH 715-495014-002 HAA ADAPTOR LINER
855 Lam, LAM RESEARCH 715-704046-004 TOP PLATE
856 Lam, LAM RESEARCH 715-704458-001 SUB ELECTRODE
857 Lam, LAM RESEARCH 715-801021-012 LINER UPPER 300MM
859 Lam, LAM RESEARCH 715-801021-813 LINER UPPER 300MM
862 Lam, LAM RESEARCH 715-801685-002 VIEW PORT COVER_2300
863 Lam, LAM RESEARCH 715-801916-008 PLT GAS DIST 300MM
864 Lam, LAM RESEARCH 715-802381-002 PLATE SEAL THRM IS
865 Lam, LAM RESEARCH 715-802381-104 SEAL PLATE ROCKER
867 Lam, LAM RESEARCH 715-803131-114 BFL GAS MIXED RA
868 Lam, LAM RESEARCH 715-L011531-012 AL ELECTRODE (RB4220)
869 Lam, LAM RESEARCH 715-S070212-001-E1 INNER BELLJAR
870 Lam, LAM RESEARCH 716-005773-005 FOCUS RING
871 Lam, LAM RESEARCH 716-006721-001 INSULATOR RING
872 Lam, LAM RESEARCH 716-011009-001 WINDOW QUARTZ
873 Lam, LAM RESEARCH 716-011057-002 UPPER ALUMINA FILLER RING
874 Lam, LAM RESEARCH 716-011427-003 9600SE DSQ CERAMIC DISK
875 Lam, LAM RESEARCH 716-011533-001 WINDOW QUARTZ
876 Lam, LAM RESEARCH 716-011540-001 RING FACE UPPER ELECTRODE (Al)
877 Lam, LAM RESEARCH 716-011563-063 WAFER CLAMP 6 INCH
878 Lam, LAM RESEARCH 716-011563-151 UNIVERSAL CLAMP RING
879 Lam, LAM RESEARCH 716-011563-161 WAFER CLAMP 6 INCH
880 Lam, LAM RESEARCH 716-011564-001 6.00INCH DFP-2 UPPER
881 Lam, LAM RESEARCH 716-011565-002 BOLT CLAMP RETAINING

716-011570-001 LOWER ORIFICE FILLER RING WAFER
CLAMP
716-011570-001 LOWER ORIFICE FILLER RING WAFER
CLAMP
884 Lam, LAM RESEARCH 716-011638-006 RING FOCUS THIN EDGE
885 Lam, LAM RESEARCH 716-011651-006 RING EDGE WAFER CLAMP 6″
886 Lam, LAM RESEARCH 716-011758-016 RING EDGE FOCUS ORIFICE COMBO
887 Lam, LAM RESEARCH 716-011830-006 RING FOCUS ALUMINA WAFER CLAMP
888 Lam, LAM RESEARCH 716-011923-001 ATTACHMENT RING
889 Lam, LAM RESEARCH 716-013325-020 ELECTRODE OUTTER Si 300MM
890 Lam, LAM RESEARCH 716-018614-081 FOCUS RING 9600 NOTCH
891 Lam, LAM RESEARCH 716-020904-018 RING EDGE FOCUS
892 Lam, LAM RESEARCH 716-020905-001 FILLER RING
893 Lam, LAM RESEARCH 716-028028-004 RING ELECTRODE CLAMP
894 Lam, LAM RESEARCH 716-028123-002 UPPER FILLER RING
895 Lam, LAM RESEARCH 716-028721-261 UNIVERSAL CLAMP RING
896 Lam, LAM RESEARCH 716-028721-268 CLAMP 6 INCH
897 Lam, LAM RESEARCH 716-028721-288 BOTTOM WAFER CLAMP 8″ MAJOR FLAT
898 Lam, LAM RESEARCH 716-028725-161 PLATE BOTTOM WAFER CLAMP DOMED
899 Lam, LAM RESEARCH 716-030135-001 EDGE RING 8 NOTCH
900 Lam, LAM RESEARCH 716-030136-001 RING EDGE ESC 6INCH
901 Lam, LAM RESEARCH 716-031257-533 EDGE RING
902 Lam, LAM RESEARCH 716-031453-002 RING FILLER LOWER CHAMBER
716-040738-413 HOT EDGE RING Si
RINGS/P/100/345MM*290MM 0.005~0.020
904 Lam, LAM RESEARCH 716-057993-003 DUAL GAS INJECTOR
905 Lam, LAM RESEARCH 716-069688-005 ELECTRODE INNER Si 300MM
906 Lam, LAM RESEARCH 716-074512-002 PIN LIFTER LOADLOCK
907 Lam, LAM RESEARCH 716-101086-003 PEZ RING LOWER
908 Lam, LAM RESEARCH 716-101087-003 PEZ RING UPPER
909 Lam, LAM RESEARCH 716-140118-001 RING FOCUS ESC 8INCH
910 Lam, LAM RESEARCH 716-140125-001 BAFFLE LOWER OF THREE
911 Lam, LAM RESEARCH 716-140125-100 BAF LWR OF THREE S
912 Lam, LAM RESEARCH 716-140139-001 RING HOT EDGE HI WALL ESC 8INCH
913 Lam, LAM RESEARCH 716-140139-008 HOT EDGE RING CERAMIC
914 Lam, LAM RESEARCH 716-140163-001 HOT EDGE RING 6″
915 Lam, LAM RESEARCH 716-250514-001 CLAMP SHADOW CER 45 150MM
916 Lam, LAM RESEARCH 716-330045-001 RING EDGE 8INCH ESC MAJOR FLAT
917 Lam, LAM RESEARCH 716-330045-002 RING EDGE 8INCH MF ESC VAR GAP
918 Lam, LAM RESEARCH 716-330045-004 RING EDGE 8INCH NCH SHDW R ESC
919 Lam, LAM RESEARCH 716-330045-281 RING EDGE NON LANDED 8″ NOTCH
920 Lam, LAM RESEARCH 716-330045-282 RING EDGE NON LANDED 8INCH MF 9600
921 Lam, LAM RESEARCH 716-330121-001 WINDOW RF SHAPED FIXED GAP
922 Lam, LAM RESEARCH 716-330122-002 TOP PLATE CERAMIC
923 Lam, LAM RESEARCH 716-330131-001 TCP CERAMIC DISK
925 Lam, LAM RESEARCH 716-330504-061 RING FOCUS 6″ GDRING JEIDA ESC
926 Lam, LAM RESEARCH 716-330504-064 RING FOCUS 6INCH ESC GD RING S
927 Lam, LAM RESEARCH 716-330504-082 RING FOCUS FLAT 9608
928 Lam, LAM RESEARCH 716-330890-001 RING 8INCH CNTMNT REAC CHMBR
929 Lam, LAM RESEARCH 716-330892-005 PTX GAS DISTRIBUTION PLATE
930 Lam, LAM RESEARCH 716-330892-007 PLATE SH HD CER 21 HOLE 9600

931 Lam, LAM RESEARCH 716-330892-507 FOCUS RING BASE
932 Lam, LAM RESEARCH 716-330915-001 INSUL ESC 9600XX
933 Lam, LAM RESEARCH 716-330915-003 SLV INSUL ESC-LOW CAP
934 Lam, LAM RESEARCH 716-331051-002 BOTTOM SHADOW RING
935 Lam, LAM RESEARCH 716-331051-006 UNIFORMITY RING
936 Lam, LAM RESEARCH 716-331157-014 DISK TOP GAS
937 Lam, LAM RESEARCH 716-440054-108 RING FOCUS ADAPTER ALUMINA PLT
938 Lam, LAM RESEARCH 716-440241-001 RING BOTTOM LOWER CHAMBER
939 Lam, LAM RESEARCH 716-443090-002 RING QUARTZ UPPER 4520XL PH
940 Lam, LAM RESEARCH 716-460216-001 RING FOCUS 8 INCH STP CHAMBER
941 Lam, LAM RESEARCH 716-S073200-001 DEPOSITION COVER
942 Lam, LAM RESEARCH 716-S073234-003 DEPOSITION COVER R/C(CHAMBER)
943 Lam, LAM RESEARCH 716-S073265-002 DEPOSITION UPPER R/C
944 Lam, LAM RESEARCH 718-092326-082 ELECTRODE ESC 8″ FLA
945 Lam, LAM RESEARCH 718-098591-001 PENDULUM PL HARD A
946 Lam, LAM RESEARCH 718-098592-001 LOCKING R HARD ANO
947 Lam, LAM RESEARCH 7200-0636-02 HOLDER
948 Lam, LAM RESEARCH 720-009530-016 SCREW FH 1/4-20 KEL-F
949 Lam, LAM RESEARCH 720-098325-001 PLATE SOCKET SCREW
950 Lam, LAM RESEARCH 721-000956-001 WSHR FLT #10
951 Lam, LAM RESEARCH 721-028183-001 WSHR FL TEFLON -277 ID X -500 OD
952 Lam, LAM RESEARCH 724-032077-001 CLAMP PLATE 6″
953 Lam, LAM RESEARCH 724-037649-001 ANODIZING UPPER ELECTRODE 8″
954 Lam, LAM RESEARCH 724-049748-015 AL ELECTRODE
955 Lam, LAM RESEARCH 724-071981-002 BLADE 150MM
956 Lam, LAM RESEARCH 724-071982-002 VACUUM ROBOT PICK 200MM
957 Lam, LAM RESEARCH 724-073429-003 PICK FIXING PLATE
958 Lam, LAM RESEARCH 724-073973-005 LIFT PIN PLATE (R)
959 Lam, LAM RESEARCH 724-073973-006 LIFT PIN PLATE (L)
960 Lam, LAM RESEARCH 724-074076-005 SEAL PLATE
961 Lam, LAM RESEARCH 724-074130-006 ATM PICK PLATE (B)
962 Lam, LAM RESEARCH 724-074361-003 ATM PICK PLATE (A)
963 Lam, LAM RESEARCH 724-074362-001 PICK FIXING PLATE
964 Lam, LAM RESEARCH 724-074363-002 AL SHEET
965 Lam, LAM RESEARCH 724-074363-004 AL SHEET
966 Lam, LAM RESEARCH 724-076882-003 LIFT PIN
967 Lam, LAM RESEARCH 724-077075-002 VACUUM ROBOT PICK
968 Lam, LAM RESEARCH 724-077075-004 VACUUM ROBOT PICK
969 Lam, LAM RESEARCH 724-077755-001 VACUUM ROBOT FINGER
970 Lam, LAM RESEARCH 746-007652-001 BEARING DOUB ROW ANG CONT 15 M
971 Lam, LAM RESEARCH 746-007700-001 BEARING RADIAL BALL .375 BORE
972 Lam, LAM RESEARCH 748-012161-001 ASSY HARMONIC DRIVE COMP ASSY
973 Lam, LAM RESEARCH 750-001127-001 OFFSET LINK 25 ROLLER CHAIN
974 Lam, LAM RESEARCH 751-443130-001 RING FOCUS ESC OUTER AL 8″
975 Lam, LAM RESEARCH 768-091910-001 SWITCH VACUUM 5 TORR GAUGE
770-009005-001 CYLINDER AIR STROKE 2 3/4INCH BORE 1
5/8INCH
977 Lam, LAM RESEARCH 775-008331-001 FILTER IMLPRE 1/4INCH BOSS-1/4INCH
978 Lam, LAM RESEARCH 775-109754-001 GAS PANEL FILTER
979 Lam, LAM RESEARCH 795-002627-001 FILTER OPTICAL 405MM

980 Lam, LAM RESEARCH 796-000469-001 GATE VALVE
981 Lam, LAM RESEARCH 796-000716-001 VALVE CHECK GAS PANEL
982 Lam, LAM RESEARCH 796-009638-001 BELLOWS REPLACEMENT KIT
983 Lam, LAM RESEARCH 796-028633-010 SCR FL HD SLTD VNT 6-32X5/8INCH
984 Lam, LAM RESEARCH 796-094363-001 TURBO ISO GATE VALVE
985 Lam, LAM RESEARCH 796-094747-001 A4 VCE ISO VALVE
986 Lam, LAM RESEARCH 800-802-1002 COVER
987 Lam, LAM RESEARCH 810-017083-001 PCB RF ESC FILTER
988 Lam, LAM RESEARCH 810-707183-001 NETWORK INTERFACE ASSY
989 Lam, LAM RESEARCH 839-000888-005 WLDMT LINER CNDG UPR CHMBR 17INCH
990 Lam, LAM RESEARCH 839-011906-001 ELECTRODE SILICON 6 INCH
991 Lam, LAM RESEARCH 839-011906-100 ELECTRODE Si 6 INCH HI TEMP
992 Lam, LAM RESEARCH 839-011906-902 ELECTRODE Si CATHODE 6 INCH
993 Lam, LAM RESEARCH 839-011907-001 ELECTRODE SILICON 8 INCH
994 Lam, LAM RESEARCH 839-011907-100 ELCTD SILICON 8INCH HI TEMP
995 Lam, LAM RESEARCH 839-011907-222 ELECTRODE Si 8 INCH LR SM HOLE LCR
996 Lam, LAM RESEARCH 839-011907-334 ELECTRODE UPPER SILICON 8 INCH
998 Lam, LAM RESEARCH 839-011907-422 ELECTRODE Si 8 INCH LR SM HOLE LCR
839-011907-902 ELECTRODE SILICON HI TEMP POLISH 8
INCH
1000 Lam, LAM RESEARCH 839-012255-001 BELLOWS INNER GATE
1001 Lam, LAM RESEARCH 839-017561-001 TOP PLATE 200MM LAM2300 EXELAN FLEX
1002 Lam, LAM RESEARCH 839-031766-001 BELLOWS LIFTER
1003 Lam, LAM RESEARCH 839-033204-001 WELDMENT ADAPTER
1004 Lam, LAM RESEARCH 839-044692-002 LINER BIAS ELECTD
1005 Lam, LAM RESEARCH 839-330300-001 WLDMT BOT GAS FEED THRU
1006 Lam, LAM RESEARCH 839-330743-002 BELLOWS BTM ROD LFTR
1007 Lam, LAM RESEARCH 839-331158-003 WELDMENT TOP GAS LINE
1008 Lam, LAM RESEARCH 839-443215-101 ELECTRODE HP SILICON 8 INCH
1009 Lam, LAM RESEARCH 839-443215-502 ELECTRODE SILICON HPT 8 INCH
1010 Lam, LAM RESEARCH 839-443215-504 ELECTRODE UPPER HPT 8 INCH
1012 Lam, LAM RESEARCH 839-495013-001 LINER CHAMBER VAT65 TRNSN MANF
1013 Lam, LAM RESEARCH 839-520038-004 VALVE
853-012176-008 WAFER ASSEMBLY HLDR TIGHT POCKET 8
OPTIO
1015 Lam, LAM RESEARCH 853-025083-001 TCP BOTTOM MATCHER
1016 Lam, LAM RESEARCH 853-025736-001 ASSY COAX RF MATCH STRIPPER
1017 Lam, LAM RESEARCH 853-028525-001 ASSY TEMP SENSOR BOT OXE.
1018 Lam, LAM RESEARCH 853-032294-002 TOP RF MATCHER
1019 Lam, LAM RESEARCH 853-032776-001 ASSY LFTR STRPR
1020 Lam, LAM RESEARCH 853-032908-001 RIGHT ANGLE BYPASS VALVE
1021 Lam, LAM RESEARCH 853-032946-001 HARN HTR ISO VALVE
1022 Lam, LAM RESEARCH 853-034112-001 ASSY CABLE TC J-TYPE
1023 Lam, LAM RESEARCH 853-034399-100 ASSY CA TC J-TYPE 90 DEG PTX/DFM
1024 Lam, LAM RESEARCH 853-073116-200 COOL P-M ANODE
1025 Lam, LAM RESEARCH 853-074360-007 ATM PICK (A)
1026 Lam, LAM RESEARCH 853-074360-009 ATM PICK (B)
1027 Lam, LAM RESEARCH 853-094608-056 ASSY CABLE COAX 56 INCH

1029 Lam, LAM RESEARCH 853-140013-001 OUT DOOR ASSY
1031 Lam, LAM RESEARCH 853-330951-021 ASSY RF MATCH ESC TCP 2
853-331019-001 “ASSY R WINDOW QUICK CLEAN
E9400/E9600”
1033 Lam, LAM RESEARCH 853-331025-001 DESC ASSY Q/C TOP
1035 Lam, LAM RESEARCH 853-370015-001 ASSY CABLE COAX BLKHD/UPR MA
1036 Lam, LAM RESEARCH 853-370015-008 ASSY CABLE COAX RG214 N-TYPE
1037 Lam, LAM RESEARCH 853-370361-001 ASSY CABLE COAX RF SEN BOX U
1038 Lam, LAM RESEARCH 853-442064-002 ASSY GATEVALVE ANDZ ALLI
1039 Lam, LAM RESEARCH 853-443093-001 EXELAN LOWER CHAMBER
1040 Lam, LAM RESEARCH 853-443095-001 EXELAN UPPER CHAMBER
1041 Lam, LAM RESEARCH 856-004863-003 BRACKET
1042 Lam, LAM RESEARCH 856-100495-002 BREAK FILTER
1043 Lam, LAM RESEARCH 856-331069-001 PUMPING PORT LINER ASSY
1045 Lam, LAM RESEARCH 888-107103-002 SHAFT CYLINDER SCREW
1046 Lam, LAM RESEARCH 888-107103-003 CYLINDER PLATE
1047 Lam, LAM RESEARCH 888-107103-004 SPACER
1048 Lam, LAM RESEARCH WSC0111 BSR BELLOWSE CAP
1049 LIN ENGINEERING 4218M-03P STEPPING MOTOR 1.68A
1050 LITTLETON CO USA 11-005-009 NORGREEN VALVE
1051 MASTER FLEX 07024-21 PUMP HEAD-SHT SHAFT SS
1052
MATIRX INTEGRATED
SYSTEM 0990-83069 SOCKET SMART
1053
MATIRX INTEGRATED
SYSTEM 0990-84050 JUMPER 2 PIN CONNECTOR
1054
MATIRX INTEGRATED
SYSTEM 0992-40312 FASTENER THERMOCOUPLE
1055
MATIRX INTEGRATED
SYSTEM 0993-40068 STANDOFF 6/32X3/8INCH ALUM
1056
MATIRX INTEGRATED
SYSTEM
0994-10015 SCREW 6-32X1/4INCH PAN HEAD PHILLIPS
ZINC PLATE
1057
MATIRX INTEGRATED
SYSTEM 0995-10590 THERMOCOUPLE MINERAL INSULATED
1058
MATIRX INTEGRATED
SYSTEM 0995-99733 INTERFACE J THERMOCOUPLE TO RS232C
1059
MATIRX INTEGRATED
SYSTEM 0995-99753 AUTOTUNE MATCHING NETWORK
1060
MATIRX INTEGRATED
SYSTEM
1000-0040 ASSY PCB TEMPERATURE CONTROLLER
INTERFACE
1061
MATIRX INTEGRATED
SYSTEM 1000-0042 ASSY PCB OPERATOR INTERFACE
1062
MATIRX INTEGRATED
SYSTEM 1000-0049 PROCESS INTERFACE BOARD
1063
MATIRX INTEGRATED
SYSTEM 1070-0117 CABLE RS232
1064
MATIRX INTEGRATED
SYSTEM 1070-0118 CABLE RIBBON RS232 INTERCONNECT 103
1065
MATIRX INTEGRATED
SYSTEM 1070-0119 CABLE RIBBON CPU BUS INTERCONNECT 103
1066
MATIRX INTEGRATED
SYSTEM 1070-0124 HARNESS CPU POWER
1067
MATIRX INTEGRATED
SYSTEM 1070-0125 HARNESS CPU RESET
1068
MATIRX INTEGRATED
SYSTEM 1070-0140 CABLE RIBBON CPU BUS
1069
MATIRX INTEGRATED
SYSTEM 1070-0180 HARNESS CHUCK TEMP
1070
MATRIX INTEGRATED
SYSTEM 0101-0443 KIT CHUCK TEMP SENSING
1071
MATRIX INTEGRATED
SYSTEM 0101-0443 KIT CHUCK TEMP SENSING
1072 MATTSON 062-00002-00 STANDOFF HEATER
1073 MATTSON 062-00021-00 PUSHER HEATER
1074 MATTSON 1000936-B-300774-0308-07 STRIP GRID
1075 MATTSON 1010434 FOCUS RING BULK YTTRIA OD NOTCH
1076 MATTSON 141-00006-00 LEAD SCREW SHUTTLE STRIP
1077 MATTSON 152-00018-00 STRIP RESIST DELRIN BACK CHAMBER

1078 MATTSON 165-00090-00 PCA DIGITAL I/O
1079 MATTSON
17002568.-1 IPC-2000-ILC SIEMENS SIMATIC RACK PC
6ES7643-6GA31-0JX0
1080 MATTSON 246-90000-00 PCB TERMINAL PANEL
1081 MATTSON 246-92000-00 ASSY PCA MOTOR CONTROL
1082 MATTSON 255-00568-00 ROBOT PCB FLEX MOBILE
1083 MATTSON 255-03883-00 PCA MAIN AC STRIP CVD
1084 MATTSON 263-02940-00 DC POWER SUPPLY
1085 MATTSON 301-08585-00 RESERVOIR ROBOT SEAL
1086 MATTSON 303-01425-00 PADDLE ASPEN
1087 MATTSON 303-21228-00 STRIP GRID
1088 MATTSON 510-08660-00 CAP VACUUM 100PF
1089 MATTSON 58900159 QUARTZ RING
1090 MATTSON 58900160 QUARTZ TRAY
1091 MDC 311073-10 ANGLE VALVE NW25
1092 MILLIPORE WDFG40PTF FILTER
1093 MILLIPORE WDFV40W0F FILTER
1094 MILLIPORE WDFZATX0F FILTER
1095 MILLIPORE WDPM0CPSF CHEMICAL FILTER
1096 MILLIPORE WFGZ80P01 WAFERGARD PF-80 FILTER UNIT
1097 MILLIPORE WGFG 01H S1 GAS FILTER
1098 MILLIPORE WGFG 01H SI WAFERGARD MINI INLINE FILTER 3000PSI
1099 MILLIPORE WGFG02PR1 WAFERGARD F MINI XL IN-LINE GAS FILTER
1100 MILLIPORE WGFG06WR1 GAS FILTER
1101 MILLIPORE WGFV16D01 WAFERGARD FILTER
1102 MILLIPORE WGFV40D01 FILTER
1103 MILLIPORE WGVL40S01 FILTER
1104 MKS 252C-1-VP0 THROTTLE VALVE CONTROLLER
1105 MKS 252D-1-VP0 THROTTLE VALVE CONTROLLER
1106 MKS 51A11TCA1AA003 BARATRON PRESSURE SWITCH
1107 MKS 623A11TBE BARATRON GAUGE 10 TORR
1108 MKS 625A-14059 BARATRON GAUGE 10 TORR
1109 MKS 626A02TDE BARATRON GAUGE 2 TORR
1110 MKS 626A-23963 BARATRON GAUGE 0.25 TORR
1111 MKS 629B-15894 BARATRON GAUGE
1112 MKS 651D-24942 THROTTLE VALVE CONTROLLER
1113 MKS 653B-27408 THROTTLE VALVE HIGH SPEED
1114 MOELLER FAZ C0.5 CIRCUIT BREAKER 1P0.5A
1115 MOELLER FAZ C1 CIRCUIT BREAKER 1P1A
1119 MOELLER FAZ-2-C13 CIRCUIT BREAKER 2P13A
1123 MOELLER FAZN-3-C40 CIRCUIT BREAKER 3P40A
1124 MYKROLIS WG2F36WR1 WAFERGARD II F-6 3/8INCH GASKET SEAL
1125 MYKROLIS
WG3D16TR2 ENTEGRIS CHAMBERGARD FV-16T 1/4INCH
MVCR
1126 MYKROLIS WG3D40DR2 VENT DIFFUSER

1127 MYKROLIS
WG3NS2RR4 WAFERGARD III NF Mini-XL 1/2 Inch VCR
FILTER
1128 NANOMETRICS 62-01-0002 C-DRIVE
1129 NEC 134-500558-501 D3142 DISK DRIVE
1130 NIKON 4S010-003-A PCB ASSY
1131 NIKON KBA00600-AE16 BCR-SPD PCB
1132 NIKON KBB00127-AE3 PCB
1133 NIKON KBB00610-502 DC MOTOR
1134 NIKON KBB00651-08 COUPLING
1135 NIKON KBB01500-527 NIKON
1136 NIKON KBB02003-501 CABLE
1137 NIKON KBB02003-514 P.M. PLIER
1138 NIKON KBB02021-502 CABLE
1139 NIKON KBB02110-AE03-1 PCB
1140 NIKON KBB02201-01 FLEXIBLE COUPLING
1141 NIKON KBB02201-16 TUBE
1144 NIKON KBB02400-14 TIMING BELT
1145 NIKON KBB02400-A01 LOAD ARM
1146 NIKON KBB02650-504 SOLENOID VALVE
1147 NIKON KBB02650-505 VALVE
1148 NIKON KBB027000-503 JOYSTIC
1149 NIKON KBB04000-AE15 4S007-226D RPEM-PSD PCB
1150 NIKON KBB04010-A05A-D MOTOR DRIVE UNIT
1151 NIKON W/L-501
1152 NISSIN SOK40-2011 CLAMP
1153 NISSIN SOK40-2048 BOLT
1156 NISSIN SOKS03-2010 CONDUCTOR
1157 NISSIN SOKS03-2013 REFLECTOR CONDUCTOR
1158 NISSIN SOKS03-2032 CLAMP
1159 NISSIN SOKS03-2036 BOLT
1160 NISSIN SOKS03-2038 SCREW
1161 NOVELLUS 01-5519 BASE WINDOW TC
1162 NOVELLUS #8-32*0.55″ SCREW HEX Ni
1163 NOVELLUS 02-00085-00 ASSY INDUCTOR 420UH 30
1164 NOVELLUS 02-00170-00 ASSY AMP-WOPS(200MM)
1165 NOVELLUS 02-021348-01 Sequel-S/Altus-S Breakout BD
1166 NOVELLUS 02-028715-00 PNEU ASSY VAT VALVE
1167 NOVELLUS
02-030053-10 WATER FLOW SWITCH ASSY/FACILITIES
INLET
1168 NOVELLUS 02-034310-00 ASSY MODULE CONTROLLER P100/16M
1169 NOVELLUS 02-034711-00 ASSY STN SENSOR PNL DLCM-S
1170 NOVELLUS 02-034908-00 MOTOR Z-AXIS INDEXER
1171 NOVELLUS 02-034910-00 MOTOR EXT-AXIS INDEXER
1172 NOVELLUS 02-041994-00 BOARD ASSY HOIST ACTUATOR
1173 NOVELLUS 02-042509-00 ASSY CONTROL PANEL SPEED-S
1174 NOVELLUS 02-042650-00 BOARD ASSY PNEUMATIC 3
1175 NOVELLUS 02-045676-00 PNEUMATIC BOARD 10GANG ASSEMBLY

1176 NOVELLUS 02-046180-00 HELIUM BACKSIDE GAS ASSY
1177 NOVELLUS 02-046223-00 ASSY VACUUM GAUGE SPEED-S
1178 NOVELLUS 02-046224-00 ASSY METER PRESSURE SW/GA SPD-S
1179 NOVELLUS 02-046224-00 METER ASSY. PRESSURE SWITCH/GAUGE
1180 NOVELLUS 02-048450-00 LOADLOCK ASSY LEFT
1181 NOVELLUS 02-048451-00 LOADLOCK ASSY RIGHT
1184 NOVELLUS 02-053688-00 BOARD ASSY DC DISTRIBUTION EXTRA IOC
1185 NOVELLUS 02-053788-00 PNEUMATIC ASSY SOLENOID
1186 NOVELLUS 02-053990-00 ARM ASSY LET INDEXER
1187 NOVELLUS 02-053990-01 ARM ASSY RIGHT INDEXER
1188 NOVELLUS 02-053993-00 INDEXER ASSY LEFT
1189 NOVELLUS 02-053993-01 INDEXER ASSY RIGHT
1190 NOVELLUS 02-056282-00 PNEUMATIC BOARD ASSEMBLY
1191 NOVELLUS
02-057438-01 LPB ASSY SPEED-S STANDARD BLUE
NEUTRAL
1192 NOVELLUS 02-057438-11 LPB Assy Speed-S
1193 NOVELLUS 02-08146-00 HIM Current Monitor BD
1194 NOVELLUS 02-10068-00 ASSY NETWORK 50FT SYSTEM CABLE
1195 NOVELLUS 02-103148-00 ASSY RF SWITCH BOX
1196 NOVELLUS 02-104454-00 Lower Distribution
1197 NOVELLUS 02-10606-00 ASSY PCB HEATER MONITOR
1198 NOVELLUS 02-109457-01 PANEL ASSY VENT/PURGE HI-LO
1199 NOVELLUS 02-109471-00 ASSY HDP SIOC 1
1200 NOVELLUS 02-111301-00 Gas Box Distribution speed 300
1201 NOVELLUS 02-111903-00 FEEDTHRU ASSY
1202 NOVELLUS 02-113291-00 PEDESTAL LIFT ASSY 2 STOP SPEED
1203 NOVELLUS 02-113639-00 ASSY MODULE CONTROLLER P166/64M
1204 NOVELLUS 02-113640-00 ASSY SYSTEM CONTROLLER P166/64
1205 NOVELLUS 02-119726-00 FORK ASSY
1206 NOVELLUS 02-120403-00 THERMOCOUPLE ASSY SPRING LOADED
1207 NOVELLUS 02-122840-00 LIFT PIN ASSY 2PC WAFER
1208 NOVELLUS 02-122840-00 LIFT PIN ASSY 2PC WAFER
1209 NOVELLUS 02-124503-00 DLCM-S LPB DC DIST .BD
1210 NOVELLUS
02-125859-01 ASSY EMITTER BRKT 01 WAFCNTRG OMRON
E3L-2LE4-50
1211 NOVELLUS
E3L-2LE4-50
1212 NOVELLUS
E3L-2LE4-50
1213 NOVELLUS
02-125859-05 PHOTOELECTRIC SWITCH SENSOR 12-
24VDC Indicator Emitter Dual OMRON E3L-2LE4-50
1214 NOVELLUS 02-128749-00 SEAL PLATE ASSY 200MM
1215 NOVELLUS 02-132030-00 ASSY MOD CONT P166/64M QNX4
1216 NOVELLUS 02-134264-00 ESC ASSY DURATECK-MC 200MM JEIDA
1217 NOVELLUS 02-136881-00 Lift Pedestal Assy 2 STOP
1218 NOVELLUS 02-144640-00 ASSY SOURCE CYL COVER
1219 NOVELLUS 02-154487-00 Degas Module
1220 NOVELLUS 02-161009-00 WTS LPB ASSY
1221 NOVELLUS 02-177460-00 ASSY LOAD EE CERAMIC 2130
1222 NOVELLUS 02-252717-00 HDP 300 SIOC 0
1223 NOVELLUS 02-252719-00 HDP SIOC 0

1224 NOVELLUS
02-253705-00 ASSY MC3 MODULE CONTROLLER WITH
ARCNET
1225 NOVELLUS 02-253708-00 Assy PC3A Platform Controller with Arcnet
1226 NOVELLUS 02-254709-00 Degas Module
1227 NOVELLUS 02-260348-00 HVA 4-GATE VALVE
1228 NOVELLUS 02-260496-00 ESC Assy Top Level Edge Seal
1229 NOVELLUS 02-260942-01 RELAY BOX ASSY RF MATCH
1230 NOVELLUS 02-260957-02 LF COIL ASSY RF 7.5 MICROH
1231 NOVELLUS
02-264189-00 CONTROLLER HDSIOC0 HDP1 FIRMWARE
4.72
1232 NOVELLUS 02-264836-00 ESC
1233 NOVELLUS 02-269938-00 ASSY UNLOAD EE CERAMIC 2130
1234 NOVELLUS 02-270536-03 BLADE EE 13 IN (REV-B)
1235 NOVELLUS 02-271319-03 ATM ROBOT BLADE(REV-B) ASM
1236 NOVELLUS 02-275742-00 Tube Assy Seal Plate Conc
1237 NOVELLUS 02-279562-00 DEGAS ACTURATOR LIFT ASSY
1238 NOVELLUS
02-280596-00 CONTROLLER HDSIOC0 C3SPD FIRMWARE
4.72
1239 NOVELLUS
02-283868-00 ASTEC POWER SUPPLY MP8-2U-1Q-1Q-00-
N602
1240 NOVELLUS 02-289945-00 ASSY NI FEEDTHRU P
1241 NOVELLUS 03-00022-04 CABLE ASSY CA23
1242 NOVELLUS 03-00022-09 CABLE ASSY CA283
1243 NOVELLUS 03-00063-00 ASSY SPINDLE SENSOR HARNESS
1244 NOVELLUS 03-00215-00 PADDLE 6INCH
1245 NOVELLUS 03-00217-00 “WELDMENT SHOWER HEAD PINNED 200mm”
1246 NOVELLUS 03-00254-00 MOTOR ASSY SPINDLE
1247 NOVELLUS 03-00255-00 SHOWERHEAD 150MM STYLE B
1248 NOVELLUS 03-00258-00 SHOWERHEAD 200MM STYLE
1249 NOVELLUS 03-00296-00 CABLE LIFT/EXT SENSOR
1250 NOVELLUS 03-00299-00 INDUCTOR RF ISOLATION CKT
1251 NOVELLUS 03-029915-01 CABLE SIGNAL
1252 NOVELLUS 03-030009-01 PCA ASSY INTERLOCK ALT-S
1253 NOVELLUS 03-033713-00 PCA RF INTF SSD SPEED
1254 NOVELLUS 03-034707-00 ASSY HARN INDEXER ROBOT SNSR
1255 NOVELLUS 03-034716-00 ASSY PCB TM INTRFC DLCM-S
1256 NOVELLUS 03-034719-00 ASSY PCB L/LL INTERFACE DLCM-S
1257 NOVELLUS 03-034720-00 ASSY PCB R/LL INTRFC.DLCM-S
1258 NOVELLUS 03-034907-02 ASSY HARN INDEXER ROBOT DR DLC
1259 NOVELLUS 03-034907-03 ASSY HARN INDEXER ROBOT DR DLC
1260 NOVELLUS 03-034912-01 CABLE SIGNAL
1261 NOVELLUS 03-041149-01 Harness Laser Recv R X Y CAL
1262 NOVELLUS 03-041150-02 Harness Laser Trans R Map
1263 NOVELLUS 03-041150-04 Harness Laser Trans L XY CAL
1264 NOVELLUS 03-042616-02 ASSY CABLE RING217 SPEED-S
1265 NOVELLUS 03-042616-02 ASSY CABLE RING217 SPEED-S
1266 NOVELLUS 03-045549-00 CABLE ASSY RG393 SHORT HF
1267 NOVELLUS 03-045549-01 Cable Assy RG393 Short-RF
1268 NOVELLUS 03-046040-00 EMO/HOIST SWITCH ASSY
1269 NOVELLUS 03-058355-00 CABLE ASSY SPINDLE SENSOR
1270 NOVELLUS 03-104133-00 Cable Assy PS AC Power LPB
1271 NOVELLUS 03-104134-00 Cable Assy PS DC Power LPB
1272 NOVELLUS 03-10434-00 Assy Harness CVD Spindle

1273 NOVELLUS 03-104538-00 ASSY CABLE HDP PRESS SW
1274 NOVELLUS 03-104542-00 ASSY CABLE HDP SIOC 1 LWR DIST
1275 NOVELLUS 03-104547-00 ASSY CABLE HDP 10T MAN
1276 NOVELLUS 03-104558-00 ASSY CABLE HDP FACIL I/F
1277 NOVELLUS 03-104630-00 ASSY CABLE HDP FORELINE XDCR
1278 NOVELLUS 03-104631-00 ASSY CABLE HDP MOD CTRL PWR
1279 NOVELLUS 03-104976-00 ASSY CABLE HDP ARCNET
1280 NOVELLUS 03-111157-00 CABLE A6J2
1281 NOVELLUS 03-112400-00 TURBO CONTROLLER SIGNAL CABLE
1282 NOVELLUS
03-124070-00 STATION CABLE ASSY WITH SENSOR
(A180J6)
1283 NOVELLUS
(A180P5)
1284 NOVELLUS
(A190J6)
1285 NOVELLUS 03-128622-04 CABLE A6J4
1286 NOVELLUS 03-130834-00 4-LINE T.C CABLE
1287 NOVELLUS 03-131453-00 CABLE ASSY PFEIFFER CONTROL
1288 NOVELLUS 03-135191-00 SPUD HPM DISRIBUTION BOARD
1289 NOVELLUS 03-140447-03 DISPLAY CABLE
1290 NOVELLUS 03-144292-00 ASSY HARN SIGNAL CABLE
1291 NOVELLUS 03-146447-03 TRANSDUCER TO DISPLAY CABLE
1292 NOVELLUS 03-147785-01/3 SIGNAL POWER CABLE
1293 NOVELLUS 03-156163-00 AERA ANALOG TO DIGITAL MFC CABLE
1294 NOVELLUS 03-251131-00 A0 H2O CHILLER CABLR ASSY
1295 NOVELLUS 03-251266-00 CABLE BENTEK 4702
1296 NOVELLUS 03-252263-00 PCA VAC ROBOT AWC IXT WTS-HV BORAD
1297 NOVELLUS 03-261314-00 PEDESTAL UP/DOWN SENSOR
1298 NOVELLUS
(A180P8)
1299 NOVELLUS
(A180P7)
1300 NOVELLUS
(A190P8)
1301 NOVELLUS
(A190P7)
1302 NOVELLUS
(A190P5)
1303 NOVELLUS 03-267643-00 CABLE ASSY SYSTEM I/O
1304 NOVELLUS 03-268129-00 GEN POWER CABLE
1305 NOVELLUS 03-278228-00 HOST CONTROL BOARD
1306 NOVELLUS 03-287492-00 LOCAL DISPLAY LD330V
1307 NOVELLUS 03-313456-00 CDA SENSOR CABLE ASSY
1308 NOVELLUS 04-100039-00 ViewPort Kit window
1309 NOVELLUS 04-129845-00 CENTERING RING KIT MOVEABLE
1310 NOVELLUS 04-146784-00 FACILITY INTERLOCK KIT
1311 NOVELLUS 04-707856-01 CABLE SENSOR ROTR SENSOR
1312 NOVELLUS 04-708735-01 Motor Pulley
1313 NOVELLUS 04-716629-02 SHIELD
1314 NOVELLUS 04-716704-01 PRESSURE SWITCH 10 PSIG (P36W-17)
1315 NOVELLUS
04-730718-01 CAP CERAMIC HEATER DMC(HEATER CAP
DFE)
1316 NOVELLUS 04-730722-01 END LFT CHAMBER SHIELD
1317 NOVELLUS 04-730725-01 END RT CHAMBER SHIELD
1318 NOVELLUS 04-73072501-1 DAMA SHIELD CLEAN W/F
1319 NOVELLUS 04-730737-01 SHIELD SUPPORT HTR
1320 NOVELLUS 04-732063-0213 TA CENTER RING
1321 NOVELLUS
05-00024-00 PM KIT HTR CONN DUAL WITHOUT TEFLON
SEALANT

1322 NOVELLUS 05-250188-00 RETROFIT KIT C2 SPEED
1323 NOVELLUS 05-50028-00 KIT NOZZLE GAS DISPERSION
1324 NOVELLUS 10-029545-00 TUBE ASSY GATE VALVE TO CHAMBER
1325 NOVELLUS 10-046386-00 TUBE ASSY AR INLET
1326 NOVELLUS 10-046388-00 TUBE ASSY N2 INLET
1327 NOVELLUS 10-052083-00 TUBE ASSY AR INLET EXTEND
1328 NOVELLUS 10-052084-00 TUBE ASSY N2 INLET EXTEND
1329 NOVELLUS 10-054461-00 GAL LINE
1330 NOVELLUS 10-100867-00 TUBE ASSY ELBOW KF16 TO 1/4 VCR
1331 NOVELLUS 10-101075-00 INSERT ELBOW EQUALIZATION VALVE
1332 NOVELLUS 10-10166-00 TUBE ASSY RIGHT ANGLE MANOMETER
1333 NOVELLUS 10-10232-00 TUBE ASSY FORELINE TM TURBO PUMP
1334 NOVELLUS 10-10322-00 Assy Tube VCR to Insulator
1335 NOVELLUS 10-108038-00 TUBE ASSY TM FORELINE
1336 NOVELLUS 10-108039-00 TUBE ASSY LOADLOCK FORELINE
1337 NOVELLUS 10-116552-01 TUBE ASSY H-PIECE 3/8
1340 NOVELLUS 10-120287-37 TUBE ASSY SPOOL M-M L=7.37 P
1341 NOVELLUS 10-126064-00 TUBE ASSY THROTTLE VALVE TO EXIT
1342 NOVELLUS
10-126181-00 TUBE ASSY ISO TO THROTTLE VALVE SPEED-
S
1343 NOVELLUS 10-126318-00 WTS PUMPING TUBE ASSY NW40
1344 NOVELLUS
10-126553-00 TUBE ASSY CHAMBER TO ISO VALVE SPEED-
S
1345 NOVELLUS 10-126637-00 WTS VACUUM TUBE PORT
1346 NOVELLUS 10-126654-00 NOVELLUS
1347 NOVELLUS 10-127101-00 TUBE ASSY FORELINE HE IN SPEED-S
1348 NOVELLUS 10-132463-00 TUBE ASSY MANIFOLD C SPEED-S 7/8
1349 NOVELLUS 10-132464-00 O2 GAS LINE FOR SPEED CHAMBER
1350 NOVELLUS 10-132621-00 TUBE ASSY HBCVC4 W/POS SENSOR
1352 NOVELLUS 10-139090-00 TEE VACUUM PARTICLE SENSOR
1355 NOVELLUS 10-145388-00 TUBE ASSY NF3 C1 MANF SPEED-S 7/8
1356 NOVELLUS 10-145524-00 TUBE ASSY NF3 C2 MANF SPEED-S 7/8
1358 NOVELLUS 10-151468-00 TUBE ASSY
1359 NOVELLUS 10-166693-00 TUBE ASSY O2/NF3 TO C1/C2 MANF
1360 NOVELLUS 10-169517-00 ASSY TUBE F-F SPOOL L=3.13 P
1366 NOVELLUS 10-264972-00 NW40 VACUUM PORT
1368 NOVELLUS 10-271574-00 WTS PUMPING TUBE ASSY NW25
1369 NOVELLUS 10-271587-00 WTS PUMPING PORT NW40
1370 NOVELLUS 10-279511-00 GAS LINE

1371 NOVELLUS 11-100257-04 HOSE ASSY 3/8. 3/8 F -3/8F AN WATER
1372 NOVELLUS 11-100257-13 HOSE ASSY 3/8. 3/8 F OPEN END
1373 NOVELLUS 11-100285-02 HOSE ASSY 3/8. 3/8 F OPEN END
1374 NOVELLUS 15-00027-02 GUIDE NOZZLE ADJU
1375 NOVELLUS 15-00043-02 ADJUST GAS PLATE
1376 NOVELLUS 15-00043-02 CERAMIC SHAFT
1377 NOVELLUS 15-00216-00 SINGLE GROUND STRAP
1378 NOVELLUS 15-00229-00 NUT FEED THRU 1/2-20UN*-2
1379 NOVELLUS 15-00309-00 HANGER NOZZLE
1380 NOVELLUS 15-00309-01 Hanger Nozzle 200mm
1381 NOVELLUS 15-00341-10 SCREW Ni (HEATER BLOCK)
1382 NOVELLUS 15-00385-00 NUT 10-32UNF-2B NICKEL
1383 NOVELLUS 15-00386-00 WSHR #10 NICKEL
1384 NOVELLUS 15-00399-02 SCREW TOP SPINDLE HEATER 8-32*0-96 Ni
1385 NOVELLUS 15-00399-03 SCREW 8-32 x 0-55 INCH-NI
1386 NOVELLUS 15-00399-04 SCREW 1.02 LG TOP SPINDLE
1387 NOVELLUS 15-00399-05 SCREW 1.12 LG TOP SPINDLE
1388 NOVELLUS 15-00401-00 SHAFT SPINDLE
1389 NOVELLUS 15-00418-00 SPACER BEARING
1390 NOVELLUS 15-00457-00 SCREW HEATER STRAP
1391 NOVELLUS 15-00457-00 SCREW HEATER STRAP
1392 NOVELLUS 15-00475-00 CERAMIC INSULATOR GAS FEEDTHRU
1393 NOVELLUS 15-00483-00 Ceramic Ring HTG Hub
1394 NOVELLUS 15-00483-00 SHAFT GUIDE RING
1395 NOVELLUS 15-00484-00 Ring Heater Centering,Ceramic
1396 NOVELLUS 15-00484-00 RING HTR CENTERING CERAMIC
1397 NOVELLUS 15-00558-01 SHIELD HTR STRAP 2.00 LG
1398 NOVELLUS 15-00558-02 SHIELD HTR STRAP 2.75 LG
1399 NOVELLUS 15-00567-00 CERAMIC CAP O/TMP TC
1400 NOVELLUS 15-00567-00 Tube TC 1/8 in ID Ceramic
1401 NOVELLUS 15-00578-00 Sleeve Flanged AC Feedthru Ceramic
1402 NOVELLUS 15-00653-00 CLAMP HUB MOUNT
1403 NOVELLUS 15-00654-00 CLAMP ROTATION ADJUSTMENT
1404 NOVELLUS 15-00680-00 SLEEVE TC CERAMIC
1405 NOVELLUS 15-00684-00 CERAMIC CONTROL TC
1406 NOVELLUS 15-00685-00 O-SEAL FEED THRU 3/8″
1407 NOVELLUS 15-00686-00 WASHER FEED THRU 1/2-20UN*-2
1408 NOVELLUS 15-00698-00 SCREW FORK
1409 NOVELLUS 15-00699-01 SPINDLE FORK 7.65INCH
1410 NOVELLUS 15-00699-02 FORK FINGER
1414 NOVELLUS 15-00700-00 FORK BOTTOM PLATE
1415 NOVELLUS 15-00701-00 FORK BOTTOM PLATE 6INCH
1416 NOVELLUS 15-00702-00 PLATE FORK RETAINER TOP 200MM
1417 NOVELLUS 15-00702-00 Plate Fork Top 200mm Wafer
1418 NOVELLUS 15-00703-00 FORK TOP PLATE 8″
1419 NOVELLUS 15-00721-00 WSHR #8 NICKEL

1420 NOVELLUS 15-00729-00 CLAMP PLATE
1421 NOVELLUS 15-00730-00 FLANGE KEYED
1422 NOVELLUS 15-00731-00 Bushing Keyboard Ceramic
1423 NOVELLUS 15-00731-00 CERAMIC FLANGE
1424 NOVELLUS 15-00731-00 CERAMIC KEYED BUSHING
1425 NOVELLUS 15-00742-00 TUBE TC CERAMIC
1426 NOVELLUS 15-00742-00 TUBE TC CERAMIC
1427 NOVELLUS 15-00743-00 WASHER RETAINER
1428 NOVELLUS 15-00748-00 SPACER TUBE
1429 NOVELLUS
15-00778-00 HOUSING BEARING LIFT & INCLUDED
BEARING
1430 NOVELLUS 15-00834-00 ALTUS LIFT PIN
1431 NOVELLUS 15-00834-00 PIN LIFT WCVD
1432 NOVELLUS 15-00866-00 SPRING CERAMIC
1433 NOVELLUS 15-00924-00 BAR CLAMP HUB EXCLUSION
1434 NOVELLUS 15-00931-00 PLATE RING LIFT EXCL OPTION
1435 NOVELLUS 15-00934-02 INDEXER WAFER EXCLUSION OPTION 200MM
1436 NOVELLUS 15-00935-00 SCREW 10-32X0.5L NICKEL
1437 NOVELLUS 15-00951-00 CUP SCREW COVER
1438 NOVELLUS 15-00982-00 SHAFT SPINDLE RING LIFT
1439 NOVELLUS 15-00982-00 SHAFT SPINDLE_ALT
1440 NOVELLUS 15-01103-00 SHAFT RING LIFT
1441 NOVELLUS 15-01127-00 PADDLE 200MM OPTICAL PIN
1442 NOVELLUS 15-01127-00 PADDLE 200MM OPTICAL PIN
1443 NOVELLUS 15-01132-00 HOUSING SHAFT BEARING
1444 NOVELLUS 1501670 PCB ASSY XCVR 1 CHAN
1445 NOVELLUS 15-024881-00 FORK TOP AL COVER
1446 NOVELLUS 15-028766-00 RING GUARD 200MM
1447 NOVELLUS 15-029308-00 MOER RING
1448 NOVELLUS 15-029544-00 HDP CHAMBER
1449 NOVELLUS 15-032016-00 Pin Ceramic Vented for Htr Blk
1450 NOVELLUS 15-032016-00 PIN CERAMIC VENTED FOR HTR BLK
1451 NOVELLUS 15-032185-00 PIN CENTERING
1452 NOVELLUS 15-032362-00 TUBE RF
1453 NOVELLUS 15-032502-00 LIFT PIN
1454 NOVELLUS 15-032502-00 PIN WAFER LIFT
1455 NOVELLUS 15-032503-00 RING INSULATOR
1456 NOVELLUS 15-032631-00 SHAFT FLANGE
1459 NOVELLUS 15-033874-00 PLUG INJECTOR MANIFOLD
1460 NOVELLUS 15-033928-00 PLATE GAS DISPERSION PINNED
1461 NOVELLUS 15-033929-00 PLATE GAS DISPERSION
1462 NOVELLUS 15-033929-00 PLATE GAS DISPERSION
1463 NOVELLUS 15-033946-00 COVER PLATE(PEC) FLATTED
1464 NOVELLUS 15-033947-00 PROTECTIVE E-Chuck COVER CERAMIC(PEC)
1465 NOVELLUS 15-033949-00 WAFER PEC
1466 NOVELLUS 15-034104-00 BASE COOL STATION DLCM
1467 NOVELLUS 15-034333-00 TUBE PROCESS INJECTOR
1468 NOVELLUS 15-034847-00 HUB UPPER INDEXER

1469 NOVELLUS 15-034847-00 HUB UPPER INDEXER
1470 NOVELLUS 15-034848-00 HUB LOWER INDEXER
1471 NOVELLUS 15-034848-00 HUB LOWER INDEXER
1472 NOVELLUS 15-034849-00 Retainer Seal
1473 NOVELLUS 15-034851-00 BUSHING SPLIT
1474 NOVELLUS 15-034852-00 SPACER BUSHING
1475 NOVELLUS 15-042021-00 PLATE STRAIN RELIEF BOTTOM FACIL INLET
1476 NOVELLUS 15-042549-00 PLATE STRAIN RELIEF TOP FACIL INLET
1477 NOVELLUS 15-044004-00 SLIDE PANEL
1478 NOVELLUS 15-045284-00 COVER BELL JAR ION SOURCE
1479 NOVELLUS 15-045972-01 Clamp BAR EXCL Hub Inconel
1480 NOVELLUS 15-046893-01 COVER COLLET BELL JAR SPEED-S
1481 NOVELLUS 15-050160-15 TUBE INJECTOR HI-PURITY 1.5″
1484 NOVELLUS 15-050160-20 TUBE INJECTOR HI-PURITY 2″
1489 NOVELLUS 15-050160-41 Tube Injector Hi-purity 4.13in
1490 NOVELLUS 15-050160-41 TUBE INJECTOR.HI-PURITY 4.13 IN
1494 NOVELLUS 15-052375-00 FINGER CERAMIC XFR PLT
1495 NOVELLUS 15-052614-001 INDEXER 150MM W/Ni PINS
1496 NOVELLUS 15-052619-00 TONG RING LIFT 200MM
1497 NOVELLUS 15-052620-00 RTNR TONG R-LIFT
1498 NOVELLUS 15-052621-00 HUB TONG R-LIFT SST
1499 NOVELLUS 15-053271-02 TUBE CLEAN INJECTOR 300MM
1500 NOVELLUS 15-053394-01 SPINDLE FORK 7.65″
1501 NOVELLUS 15-053394-02 SPINDLE FORK 8.35″
1502 NOVELLUS 15-053394-03 MINIMUM AREA CONTACT FORK HDEP
1504 NOVELLUS 15-054583-00 CLIP RETAINING
1505 NOVELLUS 15-054586-00 INSERT NUT
1506 NOVELLUS 15-054595-00 SCREW 1/4-28 CERAMIC GUIDE
1507 NOVELLUS 15-054800-00 SPRING CERAMIC 300MM
1510 NOVELLUS 15-055668-00 SHIELD RF/UV
1511 NOVELLUS 15-055720-00 SPACER BUSHING
1512 NOVELLUS 15-055721-00 BUSHING SPLIT
1513 NOVELLUS 15-100263-00 PADDLE 200MM
1514 NOVELLUS 15-100415-00 RING EXCLUSION 0.75 O/H
1515 NOVELLUS 15-100603-00 INSULATOR GAS DIST
1516 NOVELLUS 15-100609-00 SCREW 1/4-28 CERAMIC PLAIN
1517 NOVELLUS 15-100700-00 PLUG ESC W/SAPPHIRE ROD

1518 NOVELLUS 15-101482-00 FORK TOPLATE A ANTIDEFLECT SEQ
1519 NOVELLUS 15-101482-01 FORK TOPLATE B ANTIDEFLECT SEQ
1520 NOVELLUS 15-101482-02 FORK TOPLATE C ANTIDEFLECT SEQ
1521 NOVELLUS 15-10324-00 BOTTOM PIN
1522 NOVELLUS 15-103913-01 FEEDTHRU COPPER
1523 NOVELLUS 15-103913-02 CLAMP STRAP FEEDTHRU
1524 NOVELLUS 15-103987-00 STRAP RF
1525 NOVELLUS 15-10465-00 INDUCTOR GROUND BAR
1526 NOVELLUS 15-10523-00 TIE BLK MODULE
1527 NOVELLUS 15-10523-00 TIE BLK PROCESS MODULE
1528 NOVELLUS 15-10523-00 TIE BLOCK PROCESS MODULE
1529 NOVELLUS 15-105508-00 RING EXCL 2.25 O/H 300MM
1530 NOVELLUS 15-10676-00 BLANK-OFF MESA FLANGE
1531 NOVELLUS 15-107698-00 CAP CERAMIC FEETHRU
1532 NOVELLUS 15-108061-00 GAS RING
1533 NOVELLUS 15-108174-00 CUP SCREW COVER
1534 NOVELLUS 15-108307-00 CLAMP RF STRAP
1537 NOVELLUS 15-10899-00 DOOR FRAME SPRING #2
1538 NOVELLUS 15-109794-00 CAGE SEAL
1539 NOVELLUS 15-109794-00 CAGE SEAL CVDW
1540 NOVELLUS 15-109794-00 CAGE SEAL DP SPNDL CVDW
1541 NOVELLUS 15-109794-00 CAGE SEAL DP SPNDL CVDW
1542 NOVELLUS 15-109795-00 RTNR SEAL BRNG HSNG DP SPN
1543 NOVELLUS 15-109921-00 COVER ESC 200MM ALN
1544 NOVELLUS 15-109921-02 COVER ESC 200 MM W/NOTCH (ALN)
1545 NOVELLUS 15-110411-00 Window Sapphire
1546 NOVELLUS 15-110413-00 Clamp Chamber Viewport Short
1547 NOVELLUS 15-111914-001 CU EDGE RING UP SHIELD
1548 NOVELLUS 15-111959-00 CU CENTER RING
1549 NOVELLUS 15-11241-00 PLATE BOLT
1550 NOVELLUS 15-11263-02 Window Viewport
1551 NOVELLUS 15-11264-02 CLAMP RING VIEWPORT
1552 NOVELLUS 15-112704-00 HOLDER LIFT PIN
1553 NOVELLUS 15-112705-00 CAP RETAINER LIFT
1554 NOVELLUS 15-113064-00 SINGLE NOZZLE
1555 NOVELLUS 15-114331-00 VENTED SCREW CAP 1/4-20 X .50 LG NICKEL
1556 NOVELLUS 15-11606-00 INSULATOR GAS DISTRIBUTION
1557 NOVELLUS 15-118215-00 COLLET BELL JAR SHORT
1558 NOVELLUS
15-118215-00 COLLET SAFETY SHORT BELL JAR ASSY
SPEED-S
1559 NOVELLUS 15-119059-00 SCRW SKT HEX 1/4-2
1560 NOVELLUS 15-119216-00 TUBE CERAMIC RF BREAK
1561 NOVELLUS 15-120150-01 TUBE INJECTOR HI-PURITY 2.0
1564 NOVELLUS 15-120150-03 TUBE INJECTOR HI-PURITY 0.5INCH

1585 NOVELLUS 15-122086-00 COVER ESC
1586 NOVELLUS 15-122178-00 VECTOR CARRIER RING
1587 NOVELLUS 15-123332-00 RING INSULATOR
1588 NOVELLUS 15-126694-00 DEGAS VIEWPORT SENSOR
1589 NOVELLUS 15-127251-01 COVER PLATE CLAMPABLE HDP 300
1590 NOVELLUS 15-127535-00 SHIELD WFR STATIONARY DFE
1591 NOVELLUS 15-128755-00 CLAMP SEAL PLATE
1592 NOVELLUS 15-129271-00 HUB PEDESTAL
1593 NOVELLUS 15-132529-00 ESC COVER
1594 NOVELLUS 15-133061-00
1595 NOVELLUS 15-134299-00 COLLAR INSULATOR SHOWERHEAD VECTOR
1596 NOVELLUS 15-134732-00 Hub 200mm ped concentric lift
1597 NOVELLUS 15-139016-00 SLIDE RF GENERATOR
1598 NOVELLUS 15-139526-00 SCREW COLLET MOUNTING RELIEVED
1599 NOVELLUS 15-143500-00 CLIP TUBE AND WIRES STRAIN RELIEF
1600 NOVELLUS 15-144983-00 AL END-CAP
1601 NOVELLUS 15-147470-00 Plate Cylinder Conc Lift
1602 NOVELLUS 15-149982-00 GUARD DISK LTM
1603 NOVELLUS 15-149996-00 GATE L-TYPE VLV 46X236 SMC
1604 NOVELLUS 15-150002-00 RING GROUND LTM
1605 NOVELLUS 15-151158-00 Ring Insulator LTM
1606 NOVELLUS 15-151243-00 TUBE THICK CLEAN INJECTOR
1607 NOVELLUS 15-158185-00 NANO CLEAN CERAMIC TUBE
1608 NOVELLUS 15-158185-00 NANO CLEAN CERAMIC TUBE
1609 NOVELLUS 15-162161-00 WSHR QUICK SEAL
1610 NOVELLUS 15-163929-00 Hub 300mm ped concentric lift
1611 NOVELLUS 15-164412-00 INSERT SPLIT OUTER C2
1612 NOVELLUS 15-164413-00 INSERT SPLIT INNER C2
1613 NOVELLUS 15-164578-11 SHIELD END LFT CHAMBER
1614 NOVELLUS 15-166116-00 TUBE
1615 NOVELLUS 15-167054-00 SHOWER HEAD

1616 NOVELLUS 15-167054-01 SHOWERHEAD VERSIO
1617 NOVELLUS 15-167054-02 SHOWER HEAD #2
1618 NOVELLUS 15-169372-00 INSERT PADDLE 300M
1619 NOVELLUS 15-169666-00 INJECTOR TUBE LONG
1620 NOVELLUS 15-169667-00 INJECTOR TUBE SHORT
1621 NOVELLUS 15-171466-00 WAFER LIFTER ASSY
1622 NOVELLUS 15-173582-00 LID
1623 NOVELLUS 15-176142-00 SHWRHD CHMBR VER
1624 NOVELLUS 15-177346-00 HOLDER LOAD BLADE GAMMA 2130
1625 NOVELLUS 15-177458-00 COVER LOAD/UNLOAD BLADE GAMMA
1626 NOVELLUS 15-250025-00 MESC SPLIT INSERT
1627 NOVELLUS 15-250878-00 SCREW MOER
1628 NOVELLUS 15-251847-00 INJECTOR TUBE CLOSE END
1629 NOVELLUS 15-253531-00 BLADE RF CONN HDP 300
1630 NOVELLUS 15-255841-00 NOZZLE INJECTOR SPLIT MTL SEAL
1631 NOVELLUS 15-256661-00 RING GUARD
1632 NOVELLUS 15-256677-00 END EFFECTOR
1633 NOVELLUS 15-256772-00 COVER
1634 NOVELLUS 15-257942-20 SPLIT NOZZLE
1635 NOVELLUS 15-257942-21 SPLIT NOZZLE
1636 NOVELLUS 15-257942-22 22MILLS NOZZLE
1637 NOVELLUS 15-257942-23 23 MILS ORIFICE NOZZLE
1638 NOVELLUS 15-258837-00 CLAMP RF STRAP 3.5 INCH ALUM. SEQUEL
1640 NOVELLUS 15-262977-00 HOLDER UNLOAD BLADE GAMMA 2130
1642 NOVELLUS 15-264609-00 LIFT PIN
1643 NOVELLUS 15-274260-01 COOLING PLATE
1644 NOVELLUS 15-275601-00 Blade RF Ped Conn NE-XT
1645 NOVELLUS 15-278968-00 INJECTOR TUBE STAR INSERT 1.375
1646 NOVELLUS 15-280354-00 RING GUARD EXT CATHODE LTM
1647 NOVELLUS 15-280992-00 GUARD DISK LTM EXT CATHODE
1648 NOVELLUS 15-281711-00 FTG TEE VAC 3/8 COMP TO KF16 FUNNEL MIX
1649 NOVELLUS 15-282056-00 FTG SH RF ISOLTR
1650 NOVELLUS 15-283002-22 NOZZLE MTL 22MIL
1651 NOVELLUS 15-285958-00 END EFFECTOR LOAD
1652 NOVELLUS 15-286316-00 END EFFECTOR UNLOAD
1653 NOVELLUS 15-293564-00 BLADE LOAD/UNLOAD
1654 NOVELLUS 152F EXHAUST VALVE CONTROLLER
1655 NOVELLUS 153-00002-00 SPRING LEAF
1656 NOVELLUS 15-302057-00 PRECLEAN CH HEATER
1657 NOVELLUS 15-303364-00 C3 SPACER DISK PEDESTAL
1658 NOVELLUS 15-325002-00 CARRIER RING
1659 NOVELLUS 16-00092-00 HEATER WIRE SHORT
1660 NOVELLUS 16-00098-00 WIRE INSULATED CERAMIC BEAD
1661 NOVELLUS 16-00123-00 BELLOWS WELDMENT
1662 NOVELLUS 16-00124-00 STAGE PARALLEL
1663 NOVELLUS 16-029325-00 COVER INDEXER RIGHT DLCM-S
1664 NOVELLUS 16-029326-00 COVER INDEXER LEFT DLCM-S

1665 NOVELLUS 16-029343-00 PANEL KIOSK DLCM-S
1666 NOVELLUS 16-033537-07 BOX PEDESTAL UTILITY CONCENTRIC LIFT
1667 NOVELLUS 16-033931-00 SHOWERHEAD PINNED 200MM
1668 NOVELLUS 16-034139-00 TUBE INJECTOR
1669 NOVELLUS 16-034139-00 TUBE INJECTOR
1670 NOVELLUS 16-034611-00 DIFFUSER SINTERED LL DLCM
1671 NOVELLUS 16-055733-00 BRACKET DC PWR SUPPLY LPB
1672 NOVELLUS 16-056782-00 SM ENCLOSURE DLCM-S LPB
1673 NOVELLUS 16-056796-00 SM COVER DLCM-S LPB
1674 NOVELLUS 16-10283-00 MANIFOLD LOADLOCK INTERCONNECT
1675 NOVELLUS 16-111964-00 CU LOWER SHIELD
1676 NOVELLUS 16-112553-02 ANODE SHIELD RING
1677 NOVELLUS
16-11311-01 PARKER STEPPING MOTOR CP*Z57-102MO-
10959
1678 NOVELLUS 16-126435-99 TARGET Ti4N5
1679 NOVELLUS 16-127972-00 CRYO PUMP GATE VALVE FRENZY HUB
1680 NOVELLUS 16-129269-00 BELLOWS TO 8INCH CF FLANGE PC300
1681 NOVELLUS 16-129886-00 PRECLEAN CH SEAL PLATE
1682 NOVELLUS 16-132590-00 SHOWERHEAD 300MM
1683 NOVELLUS 16-132590-00 WELDMENT SHOWERHEAD PINNED 300MM
1684 NOVELLUS 16-132590-00 WELDMENT SHOWERHEAD PINNED 300MM
1685 NOVELLUS 16-133042-02 TARGET Ti4N5
1686 NOVELLUS 16-133612-00 CU STAGE SHIELD
1687 NOVELLUS 16-133612-01 TA STAGE SHIELD
1688 NOVELLUS 16-134734-00 BELLOWS SPEED-S CONCENTRIC LIFT
1689 NOVELLUS 16-134734-00 BELLOWS SPEED-S CONCENTRIC LIFT
1690 NOVELLUS 16-137450-00 WELDMENT LOUVER TURBO
1692 NOVELLUS 16-157574-00 CONNECTOR W/LUG LC FEMALE/RF
1693 NOVELLUS 16-159939-00 Gas Box Bracket
1694 NOVELLUS 162-0040K ISOLATION VALVE
1695 NOVELLUS 16-256990-00 SHOWERHEAD PINNED 300MM
1696 NOVELLUS 16-269967-00 BULKHEAD CONN W/LUG TO INDUCTOR
1697 NOVELLUS 16-272247-00 4INCH VAC FORELINE SLOW PUMP VLV
1698 NOVELLUS
16-272248-00 4INCH VAC FORELINE AFTER GATE VLV
BLKHD
1699 NOVELLUS
16-272249-00 SPACER 4INCH VAC FORELINE THROTTLE
GATE VLV
1700 NOVELLUS 16-289070-00 SHOWERHEAD 300MM WCVD
1701 NOVELLUS 17-00148-00 SPRING FORK
1702 NOVELLUS 17-026406-00 Valve Bracket
1703 NOVELLUS 17-026431-00 MFC Bracket
1704 NOVELLUS 17-028158-00 BRACKET FACILITY
1705 NOVELLUS 17-029301-00 COVER KIOSK DLCM-S
1706 NOVELLUS 17-029349-00 COVER KIOSK DLCM-S
1707 NOVELLUS 17-030040-00 PANEL PNEUMATIC VAT VALVE
1708 NOVELLUS 17-032453-01 SCREEN RF SHIELD
1709 NOVELLUS 17-034238-00 BRACKET BSG TUBE RESTRAINT
1711 NOVELLUS 17-042696-00 PANEL LEFT FRONT
1712 NOVELLUS 17-042698-03 PANEL LEFT
1713 NOVELLUS 17-042699-00 PANEL RIGHT

1714 NOVELLUS 17-043548-00 BRACKET MTG MFC UNIV
1717 NOVELLUS 17-050283-00 BRACKET BULKHEAD
1718 NOVELLUS 17-054379-00 BRACKET WITH SCREW
1719 NOVELLUS 17-101596-00 RTNR FORK
1720 NOVELLUS 17-106115-00 PEDESTAL ASSY LEADWIRE SHIELD
1721 NOVELLUS 17-110412-00 SCREEN RF SHIELD ETCHED SHORT
1722 NOVELLUS 17-110412-00 SCREEN RF SHIELD ETCHED SHORT
1723 NOVELLUS 17-121342-01 SHIELD HEAT RIGHT SPEED-S
1724 NOVELLUS 17-121342-02 SHIELD HEAT LEFT SPEED-S
1725 NOVELLUS 17-125800-02 DISPLAY BRACKET
1726 NOVELLUS 17-126954-00 AL UT GUIDE BAR
1727 NOVELLUS 17-129828-00 CHASSIS SYSTEM / MODULE CONTROLLER
1728 NOVELLUS 17-132177-00 GAS BOX BRACKET
1729 NOVELLUS 17-134379-00 BRACKET
1730 NOVELLUS 17-134598-02 BRACKET
1731 NOVELLUS 17-136120-00 PLATE AIRFLOW GASBOX VECTOR
1732 NOVELLUS 17-136279-00 PANEL BLANK CONTROLLER
1733 NOVELLUS 17-163201-00 Power Supply 24V 2.2A Cosel
1735 NOVELLUS 17-170543-00 BRACKET VECTOR MANF. B VALVE ILDS
1737 NOVELLUS 17-191208-00 COVER PLASTIC PCB AC C3 ALTUS
1738 NOVELLUS 17-191209-00 COVER PLASTIC PCB DC C3 ALTUS
1739 NOVELLUS 17-264263-00 CONTROLLER AL BRACKET
1740 NOVELLUS 17-267668-00 PLATE MOUNTING SYSTEM CONTROLLER
1742 NOVELLUS 17-280106-00 WTS FACILITIES MAIN PANEL
1743 NOVELLUS 19-00056-00 FEEDTHRU ASSY
1744 NOVELLUS 19-00154-00 HEATER BLOCK 8 INCH
1745 NOVELLUS 19-00232-00 SPLINE SHAFT SPINDLE LIFT EXCL OPT
1746 NOVELLUS 19-034573-04 Bearing Linear/Rotary 1inch WTM
1747 NOVELLUS 19-034573-04 BEARING LINEAR/ROTARY 1INCH WTM
1748 NOVELLUS 19-048139-00 COVER
1749 NOVELLUS 19-049934-00 COVER INDEXER II
1750 NOVELLUS 19-051384-00 ASSY VLV 100MM TORR SPEED-S
1751 NOVELLUS 19-053642-00 GAS SHIELD HI-PURITY GAS DIFFUSER
1752 NOVELLUS 19-053642-00 HI-PURITY GAS DIFFUSER
1753 NOVELLUS 19-122892-00 COMPACT CYLINDER
1754 NOVELLUS
19-271759-00 ACTUATOR 23-IN STROKE PUNCHED TUBE C-
MOUNT
1755 NOVELLUS 20-00153-00 BALL CERAMIC HEATER 2.0INCH
1756 NOVELLUS 20-00288-00 Belt Timing
1757 NOVELLUS 20-00301-00 SPRING EXT
1758 NOVELLUS 20-00332-00 RING RETAINING 1/4 INCH SST
1759 NOVELLUS 20-00452-00 E-Ring 1/2″
1760 NOVELLUS 20-10067-00 CLAMP CAPACITOR
1761 NOVELLUS 20-10150-00 BUBBLE LEVEL

1763 NOVELLUS 21-028323-00 SCREW SKTHD CAP 8-32 * 5/8 NYLON
1764 NOVELLUS 21-041266-14 SCREW SKTHD HEX 6-32 * 7/8 SST
1765 NOVELLUS 21-041270-08 SCREW SKTHD HEX 1/4-20 X 1/2 SST
1766 NOVELLUS 21-041270-10 SCREW SKT HEX 1/4-20 X 5/8 SST
1767 NOVELLUS 21-041270-10 SCREW SKT HEX 1/4-20X5/8 SST
1768 NOVELLUS 21-041272-00 SCREW 5/16-18 * 1-1/4 SST
1769 NOVELLUS 21-041272-40 SCREW SKTHD HEX 5/16 * 2-1/2 SST
1770 NOVELLUS 21-041342-04 SCREW PANHD PHIL #4-40 X 1/4 SST
1771 NOVELLUS 21-041342-24 SCREW PANHD PHIL #4-40 x 1-1/2 SST
1772 NOVELLUS 21-041906-08 SCREW BUTHD HEX 10-32 * 1/2 SST
1773 NOVELLUS 21-042022-09 WASHER FLAT SMALL OD .10 SST
1774 NOVELLUS 21-042022-09 WASHER FLAT SMALL OD 1/4 SST
1775 NOVELLUS 21-042023-00 WASHER 5/16 SST
1776 NOVELLUS 21-042023-09 WASHER FLAT 1/4 SST
1777 NOVELLUS 21-042023-09 WASHER FLAT 1/4 SST
1778 NOVELLUS 21-042024-00 WASHER LOCK 5/16 SST
1779 NOVELLUS 21-042024-03 WASHER LOCK #4 SST
1784 NOVELLUS 21-042270-10 SCREW SKTHD HEX 1/4-20*5/8 SST
1785 NOVELLUS 21-043663-00 SCREW PANHD PHIL M4*8MM SST
1786 NOVELLUS 21-046677-00 Washer Flat #8.032Thk. 3003 AL
1787 NOVELLUS 21-054446-00 WASHER FLAT M4 SST
1788 NOVELLUS 21-054447-00 WASHER LOCK M4 SST
1789 NOVELLUS 21-10074-00 SCREW SKTHD HEX VENTED 8-32 * 3/8 SST
1790 NOVELLUS 21-101383-00 WASHER WAVE .375OD .203ID
1791 NOVELLUS 211-065 EXTENSION SPRING
1792 NOVELLUS 21-113952-00 SCREW 8-32 * .375 BRS
1793 NOVELLUS 21-113955-00 WASHER 8 LOCK BRASS
1794 NOVELLUS 22-00006-00 FILTER MILIPORE WG2FT 1RR2
1795 NOVELLUS 22-00010-00 FTG BULKHEAD 1/4 VCR
1796 NOVELLUS 22-00245-00 ELBOW MALE 1/8 MPT * 1/4 TUBE
1797 NOVELLUS 22-00288-00 T-SEAL 15/16ID X 1 3/16 OD
1798 NOVELLUS 22-00313-00 ORING
1799 NOVELLUS 22-00325-00 SEAL LIP
1800 NOVELLUS 22-00345-00 ORING 0.362 x 0.103 VITON
1801 NOVELLUS 22-00358-00 ORING 0.239 x 0.070 VITON
1802 NOVELLUS 22-00417-00 GASKET 1/4 VCR NICKEL RET
1803 NOVELLUS 22-00427-00 NUT 1/4 INCH TUBE ULTRATORR
1804 NOVELLUS 22-00429-00 SLEEVE 1/4 INCH TUBE ULTRATORR
1805 NOVELLUS 22-00612-00 VALVE DIA NC 1/4 FVCR AIR OPER
1806 NOVELLUS 22-00656-00 O-RING KALREZ AS568A-264
1807 NOVELLUS 22-00680-00 VALVE NO BN MMVCR 1/4INCH
1808 NOVELLUS 22-00716-00 O-RING KALREZ 2-231
1809 NOVELLUS 22-026085-00 VALVE PNEUMATIC 3PORT 2 ACTUATOR
1810 NOVELLUS 22-026373-00 FILTER MOTT
1811 NOVELLUS 22-033312-00 O-RING KALREZ 2-220

1812 NOVELLUS 22-048199-00 Union Bulkhead 3/8 Tube x 1/4FPT SST
1813 NOVELLUS 22-048200-00 NUT TUBE END 1/4 FLARE SST
1814 NOVELLUS 220-50010D-001-A MAIN BOARD
1815 NOVELLUS 22-050285-00 BULKHEAD 1/4 TUBE-1/4 MPT
1816 NOVELLUS 22-053901-00 MFC AREA FC-D980C AR 500SCCM
1817 NOVELLUS 22-053903-00 MFC AREA FC-D980C NF3 1SLM
1818 NOVELLUS 22-054158-00 Bearing Lin/Rot
1819 NOVELLUS 22-055150-00 NIPPLE 3/8-18 FS-371-6FP
1820 NOVELLUS 22-055159-00 COUPLER 3/8- NPSF FS-372-6FP
1821 NOVELLUS 22-10351-00 CONTROLLER SPEED IN-LINE 1/8 NPT
1822 NOVELLUS 22-10369-00 AIR CYL 1-1/8Bx2-1/2 STROKE
1823 NOVELLUS 22-104042-00 O-RING INJECTOR KALREZ
1824 NOVELLUS 22-10408-00 FTG.UNION 5/16-3-8 SWG.
1825 NOVELLUS 22-10502-00 PRESS CONT. 3SLM CVD-W BSIDE
1826 NOVELLUS 22-10528-00 VALVE MONOBLOCK 1/4 VCR NC
1827 NOVELLUS 22-105561-00 MFC AREA FC-D980C SIH4 200SCCM
1828 NOVELLUS 22-108945-00 O-RING .549ID X .103W IN VITON
1829 NOVELLUS 22-109675-00 MFC AREA FC-D980C O2 500SCCM
1830 NOVELLUS 22-109958-00 ROUGHING VALVE CV16-K1K1-NCVV-T12
1831 NOVELLUS 22-116895-00 MANIFOLD VALVE
1832 NOVELLUS 22-117982-00 MFC AREA FC-D980C H2 2SLM
1833 NOVELLUS 22-117988-00 MFC AREA FC-D980C HE 500SCCM
1834 NOVELLUS 22-120289-00 TRANSDUCER 223 VAC 100 4-20MA.M-M
1835 NOVELLUS
22-122969-04 VALVE 930 LOTO VALVE M-M
930GSFSMMLK2.3
1836 NOVELLUS 22-123217-00 O-RING 2-261 KALREZ 4079
1837 NOVELLUS 22-127764-00 GASKET COPPER 8IN NOM DEL SEAL
1840 NOVELLUS 22-260177-00 O-RING SPLICED .210 16.455 IN VITON
1841 NOVELLUS 22-273196-00 FILTER 1/4 VCR M-F
1842 NOVELLUS 22-283579-00 RESTRICTOR ORIFICE
1843 NOVELLUS 22-351829-00 BROOKS H2 100SCCM MFC
1844 NOVELLUS 27-00010-01 TC TYPE J RIGID 1/8 DIA x 12L
1845 NOVELLUS 27-00062-00 GAUGE VACUUM PRESSURE HASTINGS
1846 NOVELLUS 27-00127-00 THERMOCOUPLE TYPE E
1847 NOVELLUS 27-00164-00 Transformer 120V/24V
1848 NOVELLUS
27-024348-00 CONTROLLER TEMP THROTTLE VALVE
HEATED TYLAN HPC
1849 NOVELLUS 27-028502-00 VALVE SOLENOID DOUBLE W/BASE
1850 NOVELLUS 27-029440-00 Pendant Indexer Controller Animatics
1851 NOVELLUS 27-032435-00 PCA SERIAL LIGHT TOWER 24 VDC
1852 NOVELLUS 27-034079-01 POWER SUPPLY ESC IMPROVED DC OFFSET
1853 NOVELLUS 27-047449-00 AE PDX 2500 POWER SUPPLY
1854 NOVELLUS
27-048040-00 WATER PRESSURE SWITCH/GAUGE
PHOTOHELIC
1855 NOVELLUS 27-049867-00 CLF-5000 LF GENERATOR
1856 NOVELLUS 27-053667-00 CONTROLLER T-VALVE AC2 CE & UL
1857 NOVELLUS
27-053667-00 Tylan AC-2 AC213A Controller T-VLV AC2
CE&UL
1858 NOVELLUS 27-10052-00 POWER SUPPLY 5V@7A12V@2A-12V@1A
1859 NOVELLUS 27-10053-00 POWER SUPPLY 15V 1.5A
1860 NOVELLUS 27-10054-00 Power Supply 24V@6.3A

1861 NOVELLUS 27-10069-00 Power Supply 15V@6.6A
1862 NOVELLUS 27-100878-00 Temp Anafaze
1863 NOVELLUS 27-10141-00 PCB Assy Type J Overtemp
1864 NOVELLUS 27-10157-00 IOC 4.1
1865 NOVELLUS 27-10325-00 SOLENOID VALVE 3 WAY
1866 NOVELLUS 27-10343-00 MANOMETER HEATED 10 TORR
1867 NOVELLUS 27-103728-00 POWER SUPPLY +5V +24V 100W
1868 NOVELLUS 27-103729-00 POWER SUPPLY +15V -15V 50W
1869 NOVELLUS 27-106107-00 PENDANT BROOKS EMERGENCY STOP
1870 NOVELLUS 27-118072-00 SPEED PEDESTAL MATCH
1871 NOVELLUS 27-118913-00 PCB ARCnet LAN Ver 3260-0210
1872 NOVELLUS 27-120983-00 GASKET CF 10.0 8.01 ID COPPER
1873 NOVELLUS 27-126029-00 MANOM HTD 0.1T HORIZ ELBOW
1874 NOVELLUS 27-126062-00 MANO 10 TORR DSUB 1/2 VCR
1875 NOVELLUS 27-126669-00 VALVE THROTTLE CONTROLLER
1876 NOVELLUS 27-132575-00 Display 12in Flat Panel
1877 NOVELLUS 27-146795-00 LD2P4BVV100M129 DISPLAY DIGITAL 4-20MA
1878 NOVELLUS 27-153218-00 Trazar ESC Power supply
1879 NOVELLUS 27-154901-01 POWER SUPPLY 24V 500W COSEL F500-24
1880 NOVELLUS 27-156710-00 CONTROLLER IO DUALCAP
1881 NOVELLUS 27-163243-00 NTM500 CONT
1882 NOVELLUS 27-163243-00 NTM500 CONT
1883 NOVELLUS 27-185908-00 DISPLAY SETRA
1884 NOVELLUS 27-263160-00 VECTOR LTM 2 AXIS CONTROLLER
1885 NOVELLUS 27-264472-00 Power Supply 24V 22A Cosel UAF500S-24
1886 NOVELLUS 27-264472-00 POWER SUPPLY 24V22A UAF500S-24
1887 NOVELLUS 27-268058-00 48VDC 7A BENCHTOP ENCLOSED DC POWER
1888 NOVELLUS 27-953668-00 Milipore Throttle Valve controller
1889 NOVELLUS 29-045941-00 CAPACITOR 25-32 MFD 330 VAC
1890 NOVELLUS 29-054712-00 CAP 1500 PF MICA CDM TYPE 292
1894 NOVELLUS 29-10011-00 CAPACITOR 25UF/330V PSU 2130
1895 NOVELLUS 29-10012-00 Capacitor 4uF/370V
1896 NOVELLUS 29-121071-00 CAP 2200 PF 8000 WVDC MICA 5% ST
1897 NOVELLUS 29-121071-00 CAP 2200 PF 8000 WVDC MICA 5% ST
1898 NOVELLUS 30-265877-00 INDUCTOR 3.40E-4MH HI/LO FLOW CLEAN RF
1899 NOVELLUS 31-00114-00 Relay SSR 90A
1900 NOVELLUS 31-00228-00 TIE MOUNT SCREW MOUNT
1901 NOVELLUS 31-033434-00 BAR GROUND 14 POSITION #4-14
1902 NOVELLUS 31-051407-00 STRAP ASSY ION SOURCE TOP
1903 NOVELLUS 31-051408-00 STRAP ASSY ION SOURCE BOTTOM
1904 NOVELLUS 31-053657-00 LAMP SMIF DOCKING 2191QU5-24V(GREEN)
1905 NOVELLUS 33-00002-01 Motor Spindle Rot 115V 60Hz
1906 NOVELLUS 34-00102-00 SWITCH OVERTRAVEL PLUNGER

Lam Research ,Novellus, Gasonics, Tel ,Tokyo Electron Ltd, Matrix etc. Spare Parts

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