6. ADR Ultrasound Scanner Concept -
circa 1982 - Pastel color concept for a
next generation scanner.
7. ADR Ultrasound Scanner Concept -
circa 1982 - Pen and ink line drawing
of a next generation scanner - front
view.
8. ADR Ultrasound Scanner Concept -
circa 1982 - Pen and ink line drawing
of a next generation scanner - rear
view.
9. ASM Robotic Wafer Handling System - circa
1985 - ASM Sales Brochure - Responsible for
the design of the frame (1.5" square steel
tubing) and sheet metal panels (16 GA cold-
rolled sheet metal).
10. ASM Epsilon One single wafer epitaxy reactor - circa
1988 - Responsible for the overall layout of major
components, frame design (1.5" square steel tubing),
nickle plated load lock doors, shelf, and sheet metal
doors and panels (16-18 GA cold rolled sheet metal).
Awarded "Product of the Year - 1988" by
Semiconductor International magazine.
11. ASM Epitaxy Quartz Chamber (Section view) -
circa 1988-2009 - Part of a three man team
tasked with developing a quartz process
chamber for wafers ranging in size from
100mm to 200mm. Includes various designs for
"susceptors", a graphite disc that supports the
wafer and thermocouples encased in quartz
sheaths.
12. ASM Epitaxy Injector Flange Assembly - circa
1993-2009 - Machined 316L stainless steel flange used
to inject process gases into the quartz process chamber.
Gas flow is "tuned" via five inlet ports with micrometer
head inject cartridges. Flange is water-cooled and seals
are o-rings. - PRO/Engineer
13. ASM Epitaxy Injector Cartridge Needle -
circa 1993-2009 - Machined 316L stainless
steel needle precisely delivers process gas
to the process chamber. Simple example of
geometric dimensioning and tolerancing. -
PRO/E
14. ASM Epitaxy Gas Panel Assembly Drawing - sheet 1 -
circa 1988-2009 - Second page of assembly drawing
includes remaining bill of material items and 3D (PRO/E)
illustrations of the assembly. - PRO/E
15. ASM Epitaxy Gas Panel Assembly Drawing -
sheet 2 - circa 1988-2009 - Second page of
assembly drawing includes remaining bill of
material items and 3D (PRO/E) illustrations of
the assembly. - PRO/E
16. ASM Epitaxy Gas Panel Assembly Drawing - sheet 3; circa 1988-2009;
Third page of assembly drawing. Orthographic view including balloons
with bill of materials "Find Numbers" and the quantity of each item.
Responsibilities included component selection based on customer
requirements, the design for all inter-connecting gas lines, and
component labeling matching the gas schematic. PRO/E.
17. ASM Gas Schematic - sheet 2 -
circa 1988-2009 - Typical gas
schematic for the primary gas
delivery system- Autocad v. 14
18. ASM Gas Schematic - sheet 3 - circa 1988-2009 -
Atmospheric Exhaust System - Autocad v. 14
19. ASM Gas Schematic - sheet 5 - circa 1988-2009 - Typical
Pneumatic Schematic for an epitaxial reactor. Autocad v. 14
20. ASM Epitaxy Surface Mount Gas Module Concept - circa 2008-9 - Self-initiated concept
for a reduced footprint gas module with enhanced functionality. Concept illustrates
integration of several optional features which are currently bolted to the exterior of the
gas module. Concept is currently on hold pending maturity of surface mount technology -
Autocad/PRO/E.
21. ASM Epsilon E3220 300mm Cluster Reactor - circa 2008-9 -
Page one of a multi-sheet document compiled to provide all
pertinent customer specific information required to install the tool
in the customer's facility. Autocad PRO/E.
22. Safe, Inc. - Modified MHU 191 Cart - circa 2009 -
3D views of the MHU 191 adaptor includes built-
in lift capability to ease the loading of modules to
be attached to other modules on the carriage
frame. - SolidWorks Professional v. 2009
23. Safe, Inc. - Modified MHU 191 Cart - circa 2009 -
3D view of the modified MHU 191 Cart without a
module to be transported. - SolidWorks
Professional v. 2009
