This document lists 68 pieces of refurbished semiconductor equipment from various manufacturers such as AG Associates, AMAT, Lam Research, and Veeco. The equipment includes rapid thermal processing (RTP) systems, plasma etchers, sputtering systems, evaporators, and more. Wafer sizes range from 2 to 8 inches. Most of the equipment is located in California, USA or Nanjing, China and all are refurbished. Contact information is provided to inquire about additional details.

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Item Maker Model Wafer Size Processes Condition Location
1 AG Associates Heatpulse 4100 3”,4”,5”,6” RTA,RTP,RTO,RTN Refurbished CA,USA
2 AG Associates Heatpulse 4100S 3”,4”,5”,6” RTA,RTP,RTO,RTN Refurbished CA,USA
3 AG Associates Heatpulse 4108 4”,5”,6”,8” RTA,RTP,RTO,RTN Refurbished CA,USA
4 AG Associates Heatpulse 8108 4”,5”,6”,8” RTA,RTP,RTO,RTN Refurbished CA,USA
5 AG Associates Heatpulse 610 3”,4”,5”,6” RTA,RTP,RTO,RTN Refurbished CA,USA
6 AG Associates Heatpulse 610 3”,4”,5”,6” RTA,RTP,RTO,RTN Refurbished Nanjing
7 AG Associates Heatpulse 610I 3”,4”,5”,6” RTA,RTP,RTO,RTN Refurbished CA,USA
8 AMAT P5000 4"‐8" Plasma Etch Refurbished CA,USA
9 AMAT P5000 4"‐8" CVD Refurbished CA,USA
10 Branson/IPC 200,030,004,000 2~8” Plasma Asher Refurbished Nanjing
11 Branson/IPC 200,030,004,000 2~8” Plasma Asher Refurbished CA,USA
12 Canon PLA501 2~4” Mask Aligner Refurbished Nanjing
13 ElectroGlas EG 1034 3~6” Probe Refurbished Nanjing
14 ElectroGlas EG 2001 3~6” Probe Refurbished Nanjing
15 ElectroGlas EG 1034 3~6” Probe Refurbished CA,USA
16 ElectroGlas EG 2001 3~6” Probe Refurbished CA,USA
17 ElectroGlas EG 3001 3~6” Probe Refurbished CA,USA
18 ElectroGlas EG 4090U+ 8” Probe Refurbished CA,USA
19 Gasonics L3510 4”‐ 8” Plasma Asher,Descum Refurbished CA,USA
20 Gasonics Aura 3010 4"‐8" Plasma Asher Refurbished CA,USA
21 Gasonics Aura 2000 4"‐8" Plasma Asher Refurbished CA,USA
22 Gasonics Aura 1000 4"‐6" Plasma Asher Refurbished CA,USA
23 HP 4062UX All Tester Refurbished CA,USA
24 HP 4062UX All Tester Refurbished Nanjing
25 Lam Research AutoEtch 490 4"‐6" Plasma Etch Refurbished CA,USA
26 Lam Research AutoEtch 590 4"‐6" Plasma Etch Refurbished CA,USA
27 Lam Research AutoEtch 590 4"‐6" Plasma Etch Refurbished Nanjing
28 Lam Research AutoEtch 490 4"‐6" Plasma Etch Refurbished Nanjing
29 Lam Research Rainbow 4420 8" Plasma Etch Refurbished CA,USA
30 Lam Research Rainbow 4500B 8" Plasma Etch Refurbished CA,USA
31 Lucas/Signatone Quad Pro 2‐8" Four‐Point Probe New,Tested CA,USA
SemiStar Corp Main Equipment in stock
Email us for more info pls! 1 of 3 sales@semistarcorp.com

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32 Matrix Matrix 105 3”,4”,5”,6” Plasma Asher Descum Refurbished CA,USA
33 Matrix Matrix 303 3”,4”,5”,6” Plasma Etcher Refurbished CA,USA
34 Matrix Bobcat 209S 8” Plasma Asher,Descum Refurbished CA,USA
35 MPT RTP‐3000 4”,5”,6”,8” RTA,RTP,RTO,RTN Refurbished CA,USA
36 MRC 643 2~6” Sputtering Refurbished CA,USA
37 MRC 603 2~6” Sputtering Refurbished CA,USA
38 Oxford 133 2”~8” RIE Refurbished Nanjing
39 Perkin‐Elmer 4400 2~6” Sputtering Refurbished CA,USA
40 Perkin‐Elmer 4400 2~6” Sputtering Refurbished Nanjing
41 Perkin‐Elmer 4450 2~8” Sputtering Refurbished CA,USA
42 Plasma Etch BT1 2” ‐ 6” Plasma Asher Refurbished CA,USA
43 Plasma Etch PE‐100 11"X11" Plasma Etcher Refurbished CA,USA
44 PlasmaTherm 700 2” – 6* Plasma Etch& PECVD Refurbished CA,USA
45 PlasmaTherm 790 2” – 8" RIE Refurbished CA,USA
46 Plasma‐Therm SLR 720 2”~8” REI Refurbished CA,USA
47 PVA Tepla M4L 2” ‐ 6” Plasma Asher Refurbished CA,USA
48 SANWA LC361C 3‐6" Probe Refurbished CA,USA
49 STS PRO ICP Etcher 2”~8” ICP Refurbished CA,USA
50 STS
Multiplex HR ICP Bosch
Process
8” ICP/DRIE Refurbished CA,USA
51 STS MESC Multiplex ICP 6” ICP Refurbished CA,USA
52 STS Multi‐chamber Cluster 8” ICP Refurbished CA,USA
53 STS MULTIPLEX ICP 4” ICP Refurbished CA,USA
54 STS
Multiplex DRIE Bosch
Process
4” ICP Refurbished Nanjing
55 Technics Macro Series 2000 2” ‐ 6” Plasma Asher Refurbished CA,USA
56 Technics PE‐11A 2” ‐ 6” RIE Refurbished CA,USA
57 Tegal Tegal 901e 3”,4”,5”,6” Plasma Etcher Refurbished CA,USA
58 Tegal Tegal 903e 3”,4”,5”,6” Plasma Etcher Refurbished CA,USA
59 Tegal Tegal 901e 3”,4”,5”,6” Plasma Etcher Refurbished Nanjing
60 Tegal Tegal 903e 3”,4”,5”,6” Plasma Etcher Refurbished Nanjing
61 Temescal FC‐1800 2~6” Evaporator Refurbished CA,USA
62 Temescal FC‐1800 2~6” Evaporator Refurbished Nanjing
63 TES‐ Temescal BJD‐1800 2”,3”,4” Sputtering Refurbished CA,USA
64 TES‐ Temescal FC‐1800 2~6” Evaporator Refurbished CA,USA
65 TES‐MRC 603 2~6” Sputtering Refurbished CA,USA
SemiStar Corp Main Equipment in stock
Email us for more info pls! 2 of 3 sales@semistarcorp.com

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66 Varian 3118 2~6” Evaporator Refurbished Nanjing
67 Veeco GEN‐II MBE MBE Compelet CA,USA
68 Wentworth MP2020 2‐8" Probe Refurbished CA,USA
SemiStar Corp Main Equipment in stock
Email us for more info pls! 3 of 3 sales@semistarcorp.com