The document discusses considerations for designing sub-micron positioning systems. It covers evaluating specifications, choosing appropriate mechanical components like bearings and screws, and factors that impact accuracy like thermal expansion and feedback methods. The goal is to understand all factors that influence precision so the optimal design can be selected for the target application.

1. High Precision Made
Easy
Sub-Micron Positioning
Hosted by Electromate
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2. The Science Of Precision Motion
Agenda
• About Ibex
• Considerations In Sub
Micron Position System
• Projects
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3. The Science Of Precision Motion
Ibex Engineering Introduction
• Precision Stage Manufacturer
• Forte
– Micron and under
– Cross roller stages
• We make Nano technology easy
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4. Ibex History
• Founded By Andre Perrin in
1999
• Background – Metrology
System
• Formed the company to fill a
gap In Industry by providing
non-standard precision
motion control platforms
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5. The Markets We Serve
• Biomedical/Pharmaceutical
• Life Sciences
– Cell Imaging…..
• Medical Device
• Semi Conductor Fab
• Data Storage
• National Lab/Research
• Metrology
• Photonics/Telecom
• Aerospace and Defense….
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6. What We Look For When Designing A
High Precision System
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7. The Process
When Reviewing a Sub-Micron Application
• Basic Engineering
– Project scope
– Specification review
– Engineering challenges relative to
the specification
– Motor Type – Stiffness (Nanomotion)
– Component sizing
– Materials
– Control (Galil)
• Stiffness
• Feedback compatibility
• Capability
• Who, what, where, and how
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8. Basic Engineering
The Main Decision Drivers
• Accuracy and Repeatability
– Length of Travel
• Straightness/Flatness
• Roll, Pitch and Yaw
– Envelope
– Load and load position
– Multi-axis Compounding
– Environment
• Materials
• Finish
– Feedback Type Sold & Serviced By:
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9. Basic Engineering
Concept Review
Accuracy
• The closeness of agreement between the
results of a measurement and the true value of
the object being measured
Repeatability
• Under Identical conditions how well a
system can return to one commanded location
– Unidirectional
– Bi-Directional Sold & Serviced By:
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10. Mechanical Concepts
Resolution
Resolution
• Smallest possible movement of a system
• Resolution of the Encoder
• Step size
Encoder Resolution doesn’t define the Accuracy of
a Complete System
• Many Factors Determine Accuracy
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11. Concept Review
• Straightness/Flatness – Run out
• Not The Same As Running Parallelism
Straightness
Flatness
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12. Basic Engineering
• Roll, Pitch and Yaw – Arc-sec
Yaw
Pitch Roll
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13. Basic Engineering
• Pitch – Arc-sec
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14. Basic Engineering
• Yaw – Arc-sec
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15. Basic Engineering
• Roll – Arc-sec
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16. Basic Engineering
What will the stage be mounted on???
• If accuracy is critical to the application
– Roll, Pitch and Yaw
– Straightness/Flatness
• It doesn’t matter how good the stage is if you mount to a potato
chip….
4 M wide,
1.5 M tall
All Granite
1 mm shim
can twist
the entire Compensate
for Sag
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17. Basic Engineering
Concept Review
• Envelope
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18. Basic Engineering
Determine position and state of the load
• Orientation of the Load
– Bearings
– Materials
– Abbe Error
• Load Vibration - Work
• Speed - CG
– Settling
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19. Basic Engineering
Specifications Drive The Choice of Bearing
• Bearing type
– Crossed Roller
• Anti-Creep considerations
– Profile Rails
• Precision/preload
– Air bearing
• Size
• Orientation
• Cost
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20. Basic Engineering
Contact Area
• Bearing Stiffness review
Ball versus Crossed Roller
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21. Basic Engineering
Crossed Roller Review
• Bearing
– Anti-Creep Considerations
– Materials
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22. Basic Engineering
Air Bearings Review
• Air Bearings
– More surface area = High Stiffness
– High pressure = less deformation
– No friction = no heat
– Precision parts
– Control Flatness and Straightness
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23. Basic Engineering
Velocity Control Considerations
• Ball Screws
• Lead Error
• Ball entering and exiting the return tube
• Profile Rails
• Ball entering and exiting the return tube
• Seal Drag
• Preload
• Best
– Linear Servo
• (Piezo - NanoMotion or Ironless)
– Air Bearing or Crossed Rollers
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24. Basic Engineering
Environment
other Error Causing Factors
• Thermal expansion errors
• Feedback
• Cosine errors
• Abbé offsets
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25. Basic Engineering
Environment
Temperature
Thermal Expansion
• Stainless Screw = 12ppm/deg C
• Aluminum = 23 ppm/deg. C
• 3 degree rise makes a 100mm screw grow ~7
microns
• Areas of concern
– Type of motor and associated duty
– Temperature swings of the environment Sold & Serviced By:
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26. Basic Engineering
Environment
Materials
• Granite
– Hardness – good for lapping
– Best commercially available flatness spec’s
– Size = Thermal inertia
Stiffness
• Stainless Steel
– Good stiffness – 3 times that of Aluminum F= KX
– Half the expansion of Aluminum F= Force
K = Modulus of
• Aluminum elasticity
– Stiffness to weight ratio
– Rapidly adjusts to temp change X= Deflection
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27. Basic Engineering
Feedback
• Feedback type
– Linear
• Digital vs Analog
– Scale Type – Typically
20um grating
• Tape
• Glass 1.8 µm/m/°C
• Invar 0.6 µm/m/°C
– Rotary Sold & Serviced By:
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28. Basic Engineering
Feedback – Cosine Error
Cosine errors occur when a positioning feedback scale is
not in perfect parallel alignment with the motion of the
moving carriage.
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29. Basic Engineering
Abbé errors
– Encoder Measurement vs. Actual Position
• Mechanical Errors
Control thinks
The work is the work is
really out here
here
Control thinks
you are
moving in a
straight line
The encoder head doesn’t
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30. Basic Engineering
Concept Review
Other Considerations
• Structural Stiffness
– What are we mounting too
– Mechanical Vibration dampening
– The building and traffic
• Wire Management
• Controls
– Features based relative to the end goal
– Mapping, Notch filtering, Adaptive tuning for
variable inertias, Sin-Cosine inputs…. Sold & Serviced By:
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31. Basic Engineering
Natural Frequencies and Gain Control
• All mechanical systems have a natural frequency
• Sometimes the system frequency can be in a range that causes
instability issues
• Advanced Gain controls such as FRF (Frequency Response
Function) can be used to improve your mechanical system
stability when applications demand
– Velocity control
– Short/fast settling times
– Crisp Movements
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32. Basic Engineering
Natural Frequencies and Gain Control
• DSA (Digital Signal Analyzers)
included in today’s controls
make it possible to Characterize
the system dynamics with FRF
• The Idea is Analyze and Monitor
the resonance so that you can
enhance the stability of the
system through the optimization
of Gains and System bandwidth.
• A perfect world is you get back
what you put in - unity
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33. Basic Engineering
Natural Frequencies and Gain Control
• Through the use of FRF and
Notch filters one can effectively
dampen out some of the
resonance.
• There are various levels of
filters offered by many different
control companies
•
• Example show cause and effect
of a notch at 140Hz…thin line is
the result thick line is the first
analysis Sold & Serviced By:
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34. A World Of Choice
Custom and OEM Built Motion Platforms
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35. System Technologies and
Configurations
• Positioning stages
– X,Y,Z, Theta
– Z-Wedges
– Goniometer
– Gantries
– Various compound stages
– Granite Stages
– Assemblies
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36. System Technologies and
Configurations
• Bearing Technologies
– Air Bearings
– Crossed Roller
– Recirculating Ball
• Round and Profile
– Cam Rollers
• Screw Technologies
– Precision Ground
– Precision Rolled / Standard Rolled Sold & Serviced By:
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37. System Technologies and
Configurations
• Controls
– Galil
– Yaskawa
– Trio
– ACS
– Elmo
– PLC….
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38. System Technologies and
Configurations
–Motor Technologies
– Nano Motion
– Rotary
• Stepper
• Servo / Frameless
– Linear Servo
• Nippon Pulse
• Yaskawa
• Technotion
– Integrated Lead/acme motors Sold & Serviced By:
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39. Product and Capabilities Review
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40. National Labs / Research
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41. Kinematics Systems
Multiple sizes and configurations. 5 and 6 Degrees of freedom
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42. Multi Pod Systems
6 Degrees of freedom
Multiple sizes and configurations.
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43. High and Ultra High Vacuum
Ibex has the Vacuum solutions with
years of experience building stages in
a range atmospheres from 10-3 to
10-10. We’ve built an array of
precision stage configurations using
multiple combinations of bearing and
motors.
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44. Semi Conductor Research
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45. The Sciences
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46. Gantry and Granite
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47. Gantry and Granite
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48. Metrology Platforms
Metrology
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49. Metrology
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50. Semiconductor
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51. Semiconductor
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52. Nano Positioning
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53. Medical OEM’s
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54. Medical OEM’s
Laser Based
Scan Scopes
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55. Custom OEM
Screw Applications
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56. Precision Screw Platforms
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57. Life Sciences - OEM Builds
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58. Life Sciences - OEM Builds
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59. Linear Crossed Roller
Screw Stage
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60. Multi Axis Screw Stages
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61. Multi Axis Microscope
Screw Stages
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62. Precision Screw Stage
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63. Vacuum Screw Stages
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64. Standard Screw Stages
• Configurable stages
– Acme, Ball and Linear
Servo
– Open or closed loop
• 10nm to 5um
– Sizes Sold & Serviced By:
• 300,200,150,100
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65. Screw Driven Actuator
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66. Custom Screw Stages
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67. Stainless Screw Stages
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68. Linear Servo Applications
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69. Linear Servo Applications
500mm x 500mm
Precision Linear
Servo stage
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70. Linear Servo Applications
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71. Linear Servo Applications
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72. Always Developing New Products
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73. Always Developing New Products
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74. Always Developing New Products
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75. Voice Coil Linear Applications
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76. Custom Applications
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77. Custom Applications
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78. Exotic Platforms
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79. Custom Applications
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80. Aerospace - Gimbal
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81. Aerospace - Gimbal
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82. Exotic Nano Platforms
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83. Multi Axis Nano Stages
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84. Counter Balance Configurations
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85. Miscellaneous Assemblies
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86. Rotary Stages and Goniometers
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87. Rotary – Nano Direct Drive
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88. Rotary –Direct Drive Servo
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89. Rotary – Worm Gear
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90. Multiple Z-Wedge
Configurations
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91. What’s New?
Sold & Serviced By:
ELECTROMATE
Toll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099
www.electromate.com
sales@electromate.com

92. Design To MFG
IBEX is a Fully Integrated Company –
From 3D Design
All mechanical designs are created in 3D
Sold & Serviced By:
ELECTROMATE
Toll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099
www.electromate.com
sales@electromate.com

93. Design To MFG
From 3D Design – To Mastercam
Fully Integrated Manufacturing
From SolidWorks
To Master Cam CAD/CAM Sold & Serviced By:
ELECTROMATE
Toll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099
www.electromate.com
sales@electromate.com

94. Mastercam to Machine Centers
Sold & Serviced By:
5 Fully Integrated CNC MillsELECTROMATE Toll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099
www.electromate.com
sales@electromate.com

95. From Assembly to QA
In House Measuring Systems
• Laser Interferometer – 1nm res
• Auto Collimator
• Laser Rotary Calibrator Sold & Serviced By:
ELECTROMATE
Toll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099
www.electromate.com
sales@electromate.com

96. Thank You!
• For allowing our organization
to present today
• We look forward to the
partnership
Sold & Serviced By:
ELECTROMATE
Toll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099
www.electromate.com
sales@electromate.com