This document summarizes tester utilization performance from weeks 210-230 and 240-245. It provides utilization percentages for different tester systems, with Fusion FT showing an improvement from 65.6% to 77.6%. The document identifies key issues for different tester types, such as contact problems for Fusion WT, and shows graphs comparing utilization for Fusion before and after using a new pogo ring design. It also discusses actions to address prober accuracy problems, such as classifying probers based on accuracy and inspecting machines.

1. Starting Point :Tester Utilization Performance (av.
week 210-230 as presented in AIMS 28-08-2002)
Tester Installed Planning Operation Overall Overall
System Base Utilization Utilization Utilization Utilization
in PSK from ACS from ACS from ACS in Output
# % % % %
Fusion FT 13 84.1% 77.6% 65.6% 49.7%
Fusion WT 21 99.2% 66.7% 66.2% 49.0%
Catalyst FT 14 74.2% 65.6% 48.7% 52.7%
Catalyst WT 4 ? 74.2% ? 65.6% ? 48.7% ? 52.7%
VQ FT 37 91.1% 68.0% 62.1% 63.5%
VQ WT 17 ? 91.1% ? 68.0% ? 62.1% ? 63.5%
Turbo FT 26 94.4% 88.0% 83.2% 75.0%
Turbo WT 20 82.5% 85.5% 71.7% 64.2%
Total/Av. 152 89.1% 74.1% 66.3% 61.1%
Target Operational Utilization:
- Immature Testers/Applications > 80%
- Mature Testers/Applications > 90%
Division, Content owner, Date(in numbers), ISO No 1

2. Current Tester Utilization Performance
(av. week 240-245)
Tester Installed Planning Operation Overall Overall
System Base Utilization Utilization Utilization Utilization
in PSK from ACS from ACS from ACS in Output
# % % % %
Fusion FT ? ? ? ? ?
Fusion WT ?
28.5 ?
99.4 ?
78.6 ?
78.2 ?
0
Catalyst FT ? ? ? ? ?
Catalyst WT ? ? ? ? ?
VQ FT ? ? ? ? ?
VQ WT ? ? ? ? ?
Turbo FT ? ? ? ? ?
Turbo WT ? ? ? ? ?
Total/Av. ? ? ? ? ?
Current Operational Utilization:
- Quite improved compared to first half 2002 by ongoing improvement-actions.
- Target Operational Utilization can be > 80% for immatutr testers/ applications.
Division, Content owner, Date(in numbers), ISO No 2

3. Fusion utilization
Planning Utilization (a) Operation Utilization (b) Overall Tester Utilization (a)x(b) Overall Tester Utilization from Output
100.0
90.0
80.0
70.0
60.0
50.0
40.0
30.0
Wk210~wk230 Wk231~wk245
20.0
Avg. Util. : 68.51% Avg. Util. : 77.39%
10.0
0.0
WK210
WK212
WK214
WK215
WK216
WK217
WK218
WK219
WK220
WK221
WK222
WK223
WK224
WK226
WK227
WK228
WK229
WK231
WK232
WK233
WK234
WK235
WK236
WK238
WK239
WK240
WK241
WK243
WK244
WK245
WK211
WK213
WK225
WK230
WK237
WK242
Division, Content owner, Date(in numbers), ISO No 3

4. Fusion utilization 2002-10-07~2002-10-27
Utilization Efficiency Prod.(%) Idle.(%) System .(%) Type.(%) Prober.(%) Contact.(%) Sm all_D.(%) Unknow n_D.(%)
Schedule_D.(%)
N-Prod.(%)
65.49% 83.26% 78.65% 0.21% 1.25% 4.40% 0.39% 0.50% 0.01% 2.03% 0.55% 12.00%
Fusion Utilization 2002-10-07 ~ 2002-10-27
Unknown-down
Non-Production
Prod.(%)
2.03%
12.00%
Type down
4.40% Idle.(%)
System.(%)
Type.(%)
Prober.(%)
Contact.(%)
System down
1.25% Small_D.(%)
Unknown_D.(%)
Schedule_D.(%)
Production
78.65% N-Prod.(%)
Division, Content owner, Date(in numbers), ISO No 4

5. WT Utilization Pilots in PSK
(Top 5 key issues to be tackled)
Fusion WT Catalyst WT VQ WT
Operational Utilization av. wk 210-230 66.7% av. wk 210-230 ..% av. wk 210-230 ..%
av. wk 240-245 78.6%
Key Issues: 1.Docking .4.1% 1.Contact ....% 1.Prober ....%
problems accuracy
Info. From
FTF 2.Prober ..3% 2.Type down ....%
accuracy
3.System hang .0.3%
Finished. 4.Prober-Wafer ....% 3.Prober-Wafer ....% 2.Prober-Wafer ....%
contacting contacting contacting
5. Abrasive paper 2%
Operational Utilization Target 86.0% Target 80.0% Target 80.0%
Division, Content owner, Date(in numbers), ISO No 5

6. Fusion New Design Pogo Ring
Contact Problem is a key issue Under Survey.
in Fusion of WTF.
New design of
Contact is better than Pogo Ring by
Before, testing is more Engineering
Stable ? Group.
Division, Content owner, Date(in numbers), ISO No 6

7. Fusion New Design Pogo Ring
Use new pogo ring
New pogo ring
is better.
Use old pogo ring
Trace the same type
in the same days,but
the results are different
Division, Content owner, Date(in numbers), ISO No 7

8. Fusion New Design Pogo Ring
Fusion#06 Utilization 2002-1007~2002-1107
The re-test rate of
120.00% new pogo ring is lower
Fusion#34 Utilization 2002-1007~2002-1107
100.00% Than old one.
120.00%
80.00% Yield
100.00%
60.00% Utilization
80.00% RetestRateYield
40.00%
60.00% Utilization
20.00%
40.00% RetestRate
0.00%
20.00%
185
116
139
162
208
24
47
70
93
1
0.00%
103
120
137
154
35
69
86
18
52
1
Division, Content owner, Date(in numbers), ISO No 8

9. Fusion New Design Pogo Ring
Machine Number Installation date Description Remark
Use from 10/17 till 11/14 then new pogo ring
Fusion#34 2002/10/17 with prober move to Fusion#03 in 11/15
Fusion#02 2002/11/1 in use **
Fusion#07 2002/11/1 in use **
Fusion#05 2002/11/5 in use **
Fusion#09 2002/11/14 in use **
Fusion#03 2002/11/15 in use **
Total use 5 sets in site 2002/11/18
Division, Content owner, Date(in numbers), ISO No 9

10. Fusion New Machine stop & Inspection
Design Pogo Ring
⇒ Utilization lost
⇒ Prober accuracy problem
New docking. Old docking.
Ideal
New docking:0.783
Utilization
Expectation:0.95
distribution.
Target:17%
Discuss with prober
New Docking will increase Vendor - Undergoing!
Utilization effectively
Division, Content owner, Date(in numbers), ISO No 10

11. Fusion New Design Pogo Ring
Fusion07 New Pogo Ring Installation days :11/01
Trace type: PCF8811BW1_b
Utilization Improvement: 0.685 -> 0.827 = > improve 14.2%
From Operation Utilization: 0.786 -> 0.827
= > improve 4.1% Improvement Estimation:
>= 4.1%
Division, Content owner, Date(in numbers), ISO No 11

12. Prober accuracy problem: Current spec. survey
•Prober accuracy +/- 4 um
•Probe card alignment +/- 6 um (epoxy)
(New probe card alignment) +/- 5 um (epoxy)
•Bump placement accuracy +/- 4 um
•Human variation +/- 2 um
?
How to ensure probe How to measure
Accumulated shift at worst case: 4+6+4+2 = 16 um !
for 32 um bump width ensure accuracy?
prober
How to accuracy?
card
Bump placement
PCF8813 bump width: 40 um
accuracy?
Division, Content owner, Date(in numbers), ISO No Pitch 12

13. Prober accuracy verification : Alignment Error
Condition:
Wafer : Standard wafer
Temp : 30 degree C
Probing mode : Horizontal (From wafer top)
Reference Die : Wafer center die
Die size : 82x82 mil
Rotation Error = 0.0015413 Degrees no:4090u-73
Prober
X range Y range Cpk(X) Cpk(Y)
Measure Data 8.330 9.460 0.896 0.744
After Rotation 5.387 6.210 1.437 0.947
Division, Content owner, Date(in numbers), ISO No 13

14. Prober accuracy verification – Wafer to wafer accuracy error
Condition:
• Prober :4090u-13
• Wafer type: 40913
• Die size : X 139.643 mil , Y 122.831 mil
• Temperature : 30 degree C
• Load wafer to chuck  profile  alignment
• Train reference target on die of wafer center for
measurement
• Probed and measured the reference target
position
• Repeat measured wafer to wafer for 25 times.
Unload wafer  reload  profile  alignment 
probing & measurement
Repeat measured 25 times load & unload
Wafer to wafer average X shift 0.43
Wafer to wafer average Y shift 0.41
Wafer to wafer Max X shift 1.96
Wafer to wafer Max Y shift 1.72
25 wafers X shift range -4.16 ~ 8.30 = 12.46
25 wafers Y shift range -3.41 ~ 7.61 = 11.02
25 wafers average X range 6.49
25 wafers average Y range 6.17
Max X shift range 8.08
Min X shift range 5.71
Max Y shift range 8.81
Min Y shift range 5.24
Average Cp(X) 1.15
Average Cp(Y) 1.10
Division, Content owner, Date(in numbers), ISO No 14

15. Prober accuracy verification – (Die size V.S accuracy)
Condition: X,Y within
± 4 um
•Prober:
X out of
4090u-57 spec
•Wafer: Y out of
spec
Glass Mask 82Size : 82 x 82
Die
X 82 471.5 :X 82
Die Size 471.5 x 82
82 X 471.5
Die Size : 82 x 471.5
X & Y out 6 6 6
•Temp: of spec 4 4 4
2 2 2
30 degree C -6 -4 -2
0
0 2 4 6 -6 -4 -2
0
0 2 4 6 -6 -4 -2
0
0 2 4 6
•Probing mode:
-2 -2 -2
-4 -4 -4
From wafer top -6 -6 -6
Die size (mil) 82 X 82 471.5 X 82 82 X 471.5
(Horizontal) X min shift -4.62 -3.15 -3.34
X max shift 3.35 4.33 3.46
•Reference Die:
X mean -0.9064 0.5133 -0.5233
Wafer center die Y min shift -3.41 -4.32 -4.53
Y max shift 4.86 3.36 3.28
Y mean 0.4553 -1.0811 -0.8071
X range 7.97 7.48 6.80
Y range 8.27 7.68 7.81
Division, Content owner, Date(in numbers), ISO No 15

16. Prober accuracy problem - action
Use CMS tool to classify prober to 4 levels:
If (1)Cp > 1.33, class: A -- Prober Quantity: 21
(2) 1.0 < Cp <= 1.33, class: B
(3) Cp <= 1.0, class: C
(4) Prober accuracy more than 8 um, class: D
Contact and discuss with Vendor, Machine stop & Inspection
Survey & Action are undergoing ! Time reduce, then
Utilization will go up
Deservedly!!
Division, Content owner, Date(in numbers), ISO No 16

17. Action – (4) New Material Abrasive Paper
Probe Tip
Abrasive Side
Result: Clean effect Cleaning Layer
is better than Cushion Layer
before
Liner Paper
Cleaning
method CL type cleaning film B2L type cleaning film
Yield (particle size: 3.0μm) (particle size: 1.0μm)
Tester
FUS-10 78% 73%
Before : 18 mil 1 um
FUS-34 79% 76%
Now : 18 mil 3 um
FUS-35 78% 70%
Division, Content owner, Date(in numbers), ISO No 17

18. Division, Content owner, Date(in numbers), ISO No 18