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2. MEMS
MICRO ELCTRO- MECHANICAL
SYSTEMS

3. MECHANICAL
ELEMENT
ELECTRONIC
SENSORS ACTUATORS
WHAT IS MEMS?

4. WORKING OF MEMS
 SENSORS - GATHER INFORMATION FROM THE
ENVIRONMENT
 ELECTRONICS - PROCESSES THE INFORMATION
GATHERED AND DIRECTS THE ACTUATORS
 ACTUATORS - RESPOND TO THE DIRECTION &
CHANGE THE ENVIRONMENT TO DESIRED
OUTPUT

5. MATERIALS USED IN MEMS
 SILICON
 POLYMER
 METAL

6. BUILDING BLOCKS OF MEMS
1. DEPOSITION PROCESS.
a. PHYSICAL
b. CHEMICAL
2. LITHORAPHY PROCESS.
a. NEGATIVE RESIST.
b. POSITIVE RESIST.
3. ETCHING PROCESS.
a. WET
b .DRY

7. PHYSICAL DEPOSITION PROCESS

8. CHEMICAL VAPOUR DEPOSITION PROCESS

9. LITHOGRAPHY PROCESS

10. WET ETCHING PROCESS

11. DRY ETCHING PROCESS

12. FABRICATION TECHNIQUES
 SURFACE MICRO MACHINEING
 BULK MICRO MACHINEING

13. SURFACE MICROMACHINING

14. BULK MICROMACHINING

15. APPLICATIONS
1.AUTOMOBILE INDUSTRY
2. BIOMEDICAL
3. DEFENCE
4. ELECTRONICS AND TELECOM.
5. ELECTRICAL
6. MECHANICAL

16. APPLICATION IN AUTOMOBILE

17. BIOMEDICAL APPLICATIONS

18. APPLICATION IN DEFENCE
 MINIATURE
WIRELESS SENSOR.
 RADARS.
 MAGNETOMETERS
 DETECTORS.

19. APPLICATION IN
ELECTRONICS AND
TELECOMUNICATIONS

20. INDIA’S FIRST SILICON
MEMS
 VLM MICROTHRUSTER
 DEVELOPED AT MICROELECTRONIC
LAB OF IIT KHARAGPUR
 UNDER SUPERVISION OF PROF S.K
LAHIRI
 CAPABLE OF PRODUCING THRUST
FROM SEVERAL HUNDERED MICRO
NEWTON TO FEW MILLINEWTONS

21. ADVANTAGES
 FABRICATION OF THOUSANDS OF
MECHANICAL STRUCTURES IN A
SINGLE CHIP.
 CHEAP.
 RELIABLE.

22. CURRENT CHALLENGES
 LIMITED OPTIONS
a) FOR MANUFACTURING DEVICES
b) OF EXPERTISE
 PACKAGING
 HIGH FABRICATION KNOWLEDGE
 DEDICATED RESEARCH

23. WORKING CENTRES IN
INDIA
 ALL THE IIT’S
 CEERI -PILANI.
 BEL –BANGLORE.
 CRANES LAB IN IISC -BANGLORE
 GE AND HONEYWELL

24. DIFFERENT WORKING CENTRES IN INDIA

25. FUTURE OF MEMS
 AS THE WORLD HAVE REALISED THE
POWER OF MEMS WE CAN SAY THAT
INCREASINGLY COMPLEX SYSTEMS
WILL BE POSSIBLE .
 AND AFTER ACCELEROMETERS,INK JET
NOZZLES,&MIRROR ARRAYS ,RF MEMS
USED FOR WIRELESS ID TAGS
CERTAINLY COULD BE THE NEXT
SUCCES STORY OF MEMS.

26. CONCLUSION
CONSIDERING THE ABOVE PAPER WE
CAN CONCLUDE THAT WE CAN SEE
OUR FUTURE IN THIS FIELD OF
TECHNOLOGY.

27. THANK YOU

28. ANY
QUESTIONS
?