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Design Rules for NMOS
and CMOS
Design Rules
Stick Diagrams
Layout Diagram
Examples
Darshana Sankhe
Design Rules: Introduction
 Design rules are a set of geometrical specifications
that dictate the design of the layout
 Layout is top view of a chip
 Design process are aided by stick diagram and layout
 Stick diagram gives the placement of different
components and their connection details
 But the dimensions of devices are not mentioned
 Circuit design with all dimensions is Layout
Darshana Sankhe
Design Rules: Introduction
 Fabrication process needs different masks, these masks are
prepared from layout
 Layout is an Interface between circuit designer and fabrication
engineer
 Layout is made using a set of design rules.
 Design rules allow translation of circuit (usually in stick diagram
or symbolic form) into actual geometry in silicon wafer
 These rules usually specify the minimum allowable line widths for
physical objects on-chip
 Example: metal, polysilicon, interconnects, diffusion areas,
minimum feature dimensions, and minimum allowable
separations between two such features.
Darshana Sankhe
NEED FOR DESIGN RULES
 Better area efficiency
 Better yield
 Better reliability
 Increase the probability of fabricating a successful
product on Si wafer
If design rules are not followed:
 Functional or non-functional circuit.
 Design consuming larger Si area.
 The device can fail during or after simulation.
Darshana Sankhe
Colour Codes :
Layer Color Representation
N+ Active Green
P+ Active Yellow
PolySi Red
Metal 1 Blue
Metal 2 Magenta
Contact Black X
Buried contact Brown X
Via Black X
Implant Dotted yellow
N-Well
Dotted
Green/Black
Darshana Sankhe
Stick Diagrams :
 A stick diagram is a symbolic representation of a layout.
 In stick diagram, each conductive layer is represented by a
line of distinct color.
 Width of line is not important, as stick diagrams just give
only wiring and routing information.
 Does show all components/vias, relative placement.
 Does not show exact placement, transistor sizes, wire
lengths, wire widths, tub boundaries.
Darshana Sankhe
Stick Diagrams: Basic Rules
 Poly crosses diffusion forms transistor
 Red (poly) over Green(Active), gives a FET.
L:W
 Aspect Ratio
L:W
nFET/
nMOS
pFET/pMOS
Darshana Sankhe
Stick Diagrams: Basic Rules
 Blue may cross over red or green, without
connection.
 Connection between layers is specified
with X.
 Metal lines on different layer can cross one
another, connections are done using via.
Darshana Sankhe
Stick Diagrams(NMOS): Basic Steps
 Normally, the first step is to draw two parallel metal (blue)
VDD and GND rails.
 There should be enough space between them for other
circuit elements.
 Next, Active (Green) paths must be drawn for required
transistors.
 Do not forget to mark contacts as X, wherever required.
 Remember, Poly (Red) crosses Active (Green/yellow),
where transistor is required.
 For depletion mode FET, draw required implants (yellow).
 Label each transistor with L:W ratio.
Darshana Sankhe
Enhancement-Mode MOSFET :
n+
p
Gate
Source Drain
bulk Si
SiO2
Polysilicon
n+
D
0
S
Darshana Sankhe
Enhancement-Mode MOSFET :
 When the gate is at
a high voltage:
 Positive charge on
gate of MOS capacitor
 Negative charge
attracted to body
 Inverts a channel
under gate to n-type
 Now current can flow
through n-type silicon
from source through
channel to drain,
transistor is ON
n+
p
Gate
Source Drain
bulk Si
SiO2
Polysilicon
n+
D
1
S
Darshana Sankhe
Inverter Using MOSFET
 Enhancement-Mode MOSFETs act as switches.
 They are switched OFF, when the input to gate is
low.
 So, they can be used to pull the output down.
 Now, for pull-up, we can use a resistor.
 But resistors consume larger area.
 Another alternative is using MOSFET as pull-up.
Darshana Sankhe
Inverter Using MOSFET
 The pull-up MOSFET can be Enhancement-mode
or Depletion mode.
 Enhancement-mode as pull-up:
 To use Enhancement-mode FET as active load,
the gate should be connected to a separate
gate bias voltage.
 Vo(max) = VDD - Vth
Darshana Sankhe
Inverter Using MOSFET
 Depletion mode as pull-up:
 Depletion-Mode FET has a channel with zero
gate-bias.
 They will not turn-off until sufficient reverse
bias is applied to its gate.
 To be used as a load, the gate should be
connected to source.
 Vo(max) = VDD
Darshana Sankhe
Inverter Using MOSFET
Pull Down
Pull Up
Output
Input
Darshana Sankhe
NMOS Inverter: Enhancement load
Vdd
GND
Vout
Vin
Zpu = 2/1
Zpd=1/2
Darshana Sankhe
NMOS Inverter: Enhancement load (Stick diagram)
VDD
GND
Vin
Vout
1:2
2:1
Darshana Sankhe
NMOS Inverter: Depletion load
Vdd
GND
Vin
Vout
Zpu = 2/1
Zpd = 1/2
Darshana Sankhe
NMOS Inverter: Depletion load (Stick Diagram)
2:1
1:2
Vdd
GND
Vin
Vout
Darshana Sankhe
NMOS 2 I/P NAND Gate :
Vdd
GND
I/P a
b
Y = !(ab)
Zpu = 4/1
Zpd = 1/2
Zpu = 1/2
Darshana Sankhe
NMOS NAND (Stick Diagram) :
Vdd
GND
b
a
Y=!(ab)
Darshana Sankhe
NMOS 2 I/P NOR Gate :
Vdd
GND
a b
Y=!(a+b)
Zpu = 2/1
Zpd = 1/2
Zpd = 1/2
Darshana Sankhe
NMOS NOR (Stick Diagram)
Vdd
GND
a b
Y=a+b
1:2
2:1
1:2
Darshana Sankhe
MOSFET
 L
A silicon wafer
N-type transistor
Darshana Sankhe
Aspect Ratio For Pull-up and Pull-down
 The size of a MOSFET depends on the reference inverter design.
 The reference inverter for nMOS logic design is the inverter with
depletion mode load.
 ZPD = Aspect Ratio of pull-down= LPD/WPD
 ZPU = Aspect Ratio of pull-up= LPU/WPU
 The ratio of aspect ratio of Pull-up and Pull-down is known as
Inverter Ratio i.e. Rinv = ZPU / ZPD
 When we draw a stick diagram, inverter ratio should be
mentioned for that gate.
 When a we draw a stick diagram, aspect ratio should be
mentioned for all the MOSFETS.
Darshana Sankhe
Aspect Ratio For Pull-up and Pull-down
 For example, if we say, the reference design has
Rinv = 4:1, then, ratio of effective ZPU and
effective ZPD, should be equal to 4:1.
 Rchannel = (L/W)Rsc
 Therefore:
 if MOSFETs are connected in series, the
effective L/W = (L/W)1+(L/W)2+….
 if MOSFETs are connected in parallel, the
effective L/W = (L/W)1= (L/W)2
Darshana Sankhe
Aspect Ratio For Pull-up and Pull-down
For NMOS:
 There are two values of Rinv, that are sufficient
for all NMOS basic gates:
 Rinv = 4:1
 To save space.
 Rinv = 8:1
 When input is taken from a pass transistor.
Darshana Sankhe
Inverter Ratio for NMOS Gates :
Gates Rinv
ZPU ZPD
Inverter 4 2:1 1:2
4:1 1:1
8 8:1 1:1
4:1 1:2
2:1 1:4
NAND
(2 I/P)
4 4:1 1:2 (Each)
2:1 1:4 (Each)
NOR
(2 I/P)
4 2:1 1:2 (Each)
4:1 1:1 (Each)
Darshana Sankhe
NMOS NAND and NOR :
NMOS NAND
 Two nmos in series.
 Gate delay and area
increases with
increase in no of
inputs.
 Length also increases
with increase in no of
input.
 NMOS NAND is slower
for same no of inputs
and power dissipation.
NMOS NOR
 Two nmos in parallel.
 NOR works quite well
for any no of inputs.
 Width is proportional
to number of inputs.
 NMOS NOR is faster
for same no of inputs
and power dissipation.
Darshana Sankhe
Types of Layout Design Rules
 Industry Standard: Micron Rule
 λ Based Design Rules
Darshana Sankhe
Types of Design Rules (Contd…)
 Industry Standard: Micron Rule
 All device dimensions are expressed in terms
of absolute dimension(μm/nm)
 These rules will not support proportional
scaling
Darshana Sankhe
Types of Design Rules (Contd…)
 λ Based Design Rules :
 Developed by Mead and Conway.
 All device dimensions are expresses in terms of a scalable
parameter λ.
 λ = L/2; L = The minimum feature size of transistor
 L = 2 λ
 These rules support proportional scaling.
 They should be applied carefully in sub-micron CMOS process.
Darshana Sankhe
Types of Design Rules (Contd…)
 λ Based Design Rules
 In MOS, the minimum feature size of Tr is:
(L/W)n = 1/1 = 2 λ/2 λ
Active area = L*W = 4 λ2
 In CMOS, the minimum feature size of Tr is:
(L/W)n = 1/1.5 = 2 λ/3 λ
Active area = L*W = 6 λ2
Darshana Sankhe
Design Rules
• Minimum length or width of a feature on a
layer is 2
• To allow for shape contraction
• Minimum separation of features on a layer
is 2
• To ensure adequate continuity of the
intervening materials.
Darshana Sankhe
Design Rules :
 Two Features on different mask layers can
be misaligned by a maximum of 2 on the
wafer.
 If the overlap of these two different mask
layers can be catastrophic to the design,
they must be separated by at least 2
 If the overlap is just undesirable, they
must be separated by at least 
Darshana Sankhe
Design Rules: NMOS
 Minimum width of PolySi and diffusion line 2
 Minimum width of Metal line 3 as metal lines run over a
more uneven surface than other conducting layers to
ensure their continuity
2
Metal
Diffusion
3
2
Darshana Sankhe
Design Rules: NMOS
 PolySi – PolySi spacing 2
 Metal - Metal spacing 3
 Diffusion – Diffusion spacing 3 To avoid the possibility of their
associated regions overlapping and conducting current
2
Metal
Diffusion
Polysilicon
3
3Darshana Sankhe
Design Rules: NMOS
 Diffusion – PolySi spacing  To prevent the lines
overlapping to form unwanted capacitor.
 Metal lines can pass over both diffusion and polySi without
electrical effect. Where no separation is specified, metal
lines can overlap or cross.

Metal
Diffusion
Polysilicon
Darshana Sankhe
Design Rules: NMOS
 Metal lines can pass over both diffusion and polySi
without electrical effect
 It is recommended practice to leave  between a
metal edge and a polySi or diffusion line to which it is
not electrically connected

Metal
Polysilicon
Darshana Sankhe
Contact Cut :
 Metal connects to polySi/diffusion by contact cut.
 Contact area: 2*2
 Metal and polySi or diffusion must overlap this
contact area by  so that the two desired conductors
encompass the contact area despite any mis-
alignment between conducting layers and the contact
hole
4
Darshana Sankhe
Contact Cut
 Contact cut – contact cut: 2 apart
 Why? To prevent holes from merging.
2
Darshana Sankhe
Design Rules: NMOS
 Minimum diff width 2
 Minimum poly width 2
 Minimum metal width 3
 poly-poly spacing 2
 diff-diff spacing 3
(depletion regions tend to spread outward)
 metal-metal spacing 3
 diff-poly spacing 
Darshana Sankhe
Design Rules: NMOS
 Poly gate extend beyond diff by 2
 Diff extend beyond poly by 2
 Contact size 2 * 2
 Contact diff/poly/metal overlap 1
 Contact to contact spacing 2
 Contact to poly/diff spacing 2
 Buried contact to active device spacing 2
 Buried contact overlap in diff direction 2
 Buried contact overlap in poly direction 1
 Implant gate overlap 2
Darshana Sankhe
Darshana Sankhe
Darshana Sankhe
Interlayer Contacts :
 Interconnection between poly and diffusion is
done by contacts.
 Metal contact
 Butting contact
 Buried contact
Darshana Sankhe
Metal contact :
 Contact cut of 2λ * 2λ
in oxide layer above
poly and diffusion
 Metal used for
interconnection
 Individual contact size
becomes 4λ * 4λ
Darshana Sankhe
Butting Contact
• The gate and diffusion of NMOS device can be
connected by a butting contact.
• Two contact cuts are adjacent to each other
• Therefore effective contact area is less
• Here metal makes contact to both the diffusion
forming the drain of the transistor and to the polySi
forming this device’s gate.
Darshana Sankhe
Butting Contact
Disadvantages:
• Metal descending the hole has a tendency to fracture at the
polySi corner, causing an open circuit.
• Requires a metal cap.
n+ n+
Insulating
Oxide
Metal
Gate Oxide PolySi
Darshana Sankhe
Butting Contact :
Darshana Sankhe
Butting Contact
 Metallization is required only over the butting contact
holes which are 2 λ x 4λ in size
 A border of width λ around all four sides is added to
allow for mis-registration and to ensure proper
contact.
 This brings the metallization size to 4λ x6λ
Advantage:
 No buried contact mask required and avoids associated
processing.
Darshana Sankhe
NMOS INVERTER-
Enhancement load
Darshana Sankhe
NMOS INVERTER: Enhancement Load
Darshana Sankhe
NMOS INVERTER-
Enhancement load
Darshana Sankhe
Buried Contact
 The buried contact window defines the area where
oxide is to be removed so that polySi connects
directly to diffusion.
 Contact Area must be a min. of 2 λ *2λ to ensure
adequate contact area.
 Advantages: No metal cap required.
 Disadvantage: An extra mask is required.
2
2
Contact Area
Darshana Sankhe
Buried contact :
Darshana Sankhe
Buried Contact
2
2
 
Channel length 
PolySi
Buried contact
Diffusion
Darshana Sankhe
Buried Contact
 The buried contact window surrounds this contact
by λ in all directions to avoid any part of this area
forming a transistor.
 Separated from its related transistor gate by 2λ
to prevent gate area from being reduced.
2
λ
Darshana Sankhe
Darshana Sankhe
NMOS INVERTER
Depletion load
Darshana Sankhe
NMOS INVERTER:
Depletion Load
Darshana Sankhe
NMOS NAND
Darshana Sankhe
NMOS NAND
Darshana Sankhe
NMOS NOR
Darshana Sankhe
NMOS NOR: Layout
Darshana Sankhe
CMOS :
 Pull-up is PMOS
 Pull-down is NMOS
 The channel mobility of electrons is approximately
twice of that of holes.
 Conductivity of NMOS is twice, that of identical
PMOS.
 But in case of CMOS inverters, one of the devices is
always switched off and has very high impedance.
 The noise margin of CMOS circuits is larger than
those of NMOS gate operating between same supply
rails.
Darshana Sankhe
pMO
S
PMOS
uW
100 mW
1 mW
10 mW
100
ps
100
ns
1
ns
10
Power dissipation/gate
Propagation delay/gate
BiCMOS
nMOS
CMOS
Darshana Sankhe
Aspect Ratio :
For CMOS:
 Rinv = 1:1(Ratioless)
 As one of the device is always off.
 1:1 inverter ratio gives more symmetric
layout
Darshana Sankhe
Stick Diagram (CMOS): Basic Steps
 Steps for CMOS are similar to NMOS
 But one difference is that depletion mode FETs are not
used.
 Here, yellow/ brown is used to identify PMOS.
 The two types of FET, n and p, are separated in the
diagram by the demarcation line.
 This line represents the well (n/p-well).
 Above this line are all p-type MOSFETs.
 Below this line n-type MOSFET are present.
Darshana Sankhe
Stick Diagram (CMOS): Basic Steps
 No Diffusion can cross demarcation line.
 Only poly and metal can cross demarcation line
 N-diffusion and p-diffusion are joined using a metal wire.
 First step is to draw two parallel rails for VDD and GND.
 Next draw a demarcation line (brown)
 Place all PMOS above and NMOS below this line.
 Connect them using wires (metal).
Darshana Sankhe
PMOS :
 Body tied to high
voltage (VDD)
 Gate low:
transistor ON
 Gate high:
transistor OFF
 Bubble indicates
inverted behavior
SiO2
n
Gate
Source Drain
bulk Si
Polysilicon
p+ p+
Darshana Sankhe
CMOS Invertor (Cicuit Diagram)
Darshana Sankhe
CMOS Inverter :
VDD
A=1 Y=0
GND
ON
OFF
VDD
A=0 Y=1
GND
OFF
ON
Darshana Sankhe
CMOS Invertor (Stick Diagram)
Darshana Sankhe
CMOS Invertor (Stick Diagram)
In
Out
VDD
GND
Darshana Sankhe
Well Biasing :
 The various N and P diffusions must be reverse
biased to ensure that those wells are insulated
from each other.
 This requires that the N- wells are connected to
the most positive voltage, VDD.
 The P- substrate must be connected to the most
negative voltage, ground.
 This assumes that all other nets are at a voltage
between 0V and VDD.
Darshana Sankhe
CMOS INVERTER :
n+
p substrate
p+
n well
A
Y
GND VDD
n+
p+
substrate tap well tap
n+ p+
Darshana Sankhe
CMOS NAND (Cicuit Diagram)
B
VDD
A
Darshana Sankhe
CMOS NAND:
A=0
B=0
Y=1
OFF
ON ON
OFF
Darshana Sankhe
Darshana Sankhe
CMOS NAND (Stick Diagram)
A Out
VDD
GND
B
Darshana Sankhe
CMOS NOR (Cicuit Diagram)
Darshana Sankhe
CMOS NOR (Stick Diagram)
A Out
VDD
GND
Darshana Sankhe
Design Rules: CMOS
 Line size and spacing:
 metal1:
 Minimum width=3, Minimum Spacing=3
 metal2:
 Minimum width=3, Minimum Spacing=4
 poly:
 Minimum width= 2, Minimum Spacing=2
 ndiff/pdiff:
 Minimum width= 3, Minimum Spacing=3,
 wells:
 minimum width=6,
minimum n-well/p-well space = 6( They are at same potential)
= 9 (They are at different
potential)
Darshana Sankhe
Design Rules: CMOS
 Transistors:
 Min width=3
 Min length=2
 Min poly overhang=2
 Contacts (Vias)
 Cut size: exactly 2 X 2
 Cut separation: minimum 2
 Overlap: min 1 in all directions
Darshana Sankhe
CMOS
Inverter:
Darshana Sankhe
CMOS NAND
Darshana Sankhe
CMOS NOR :
Darshana Sankhe
CMOS INVERTER
(This layout does not have n-well and contacts for n-well and substrate)
Darshana Sankhe
CMOS NAND
B
vdd
GND
A
!(A.B)
Darshana Sankhe
CMOS NAND
This layout does not have n-well and contacts for n-well and substrate)
Darshana Sankhe
CMOS NOR(Circuit Diagram)
A
Vdd
!(A+B)
B
GND
Darshana Sankhe
CMOS NOR
This layout does not have n-well and contacts for n-well and substrate)
Darshana Sankhe
Design of NMOS/CMOS Circuits:
 PDN – The Function to be implemented, must be expressed
in a inverted form.
_________
 F = (A + BC) D
 F = (AB + C) (D + E)
__
 F = A + B + CD
Darshana Sankhe
F’ = A + B + CD
Darshana Sankhe
Thank you
Darshana Sankhe

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layouts_ds.pdf

  • 1. Design Rules for NMOS and CMOS Design Rules Stick Diagrams Layout Diagram Examples Darshana Sankhe
  • 2. Design Rules: Introduction  Design rules are a set of geometrical specifications that dictate the design of the layout  Layout is top view of a chip  Design process are aided by stick diagram and layout  Stick diagram gives the placement of different components and their connection details  But the dimensions of devices are not mentioned  Circuit design with all dimensions is Layout Darshana Sankhe
  • 3. Design Rules: Introduction  Fabrication process needs different masks, these masks are prepared from layout  Layout is an Interface between circuit designer and fabrication engineer  Layout is made using a set of design rules.  Design rules allow translation of circuit (usually in stick diagram or symbolic form) into actual geometry in silicon wafer  These rules usually specify the minimum allowable line widths for physical objects on-chip  Example: metal, polysilicon, interconnects, diffusion areas, minimum feature dimensions, and minimum allowable separations between two such features. Darshana Sankhe
  • 4. NEED FOR DESIGN RULES  Better area efficiency  Better yield  Better reliability  Increase the probability of fabricating a successful product on Si wafer If design rules are not followed:  Functional or non-functional circuit.  Design consuming larger Si area.  The device can fail during or after simulation. Darshana Sankhe
  • 5. Colour Codes : Layer Color Representation N+ Active Green P+ Active Yellow PolySi Red Metal 1 Blue Metal 2 Magenta Contact Black X Buried contact Brown X Via Black X Implant Dotted yellow N-Well Dotted Green/Black Darshana Sankhe
  • 6. Stick Diagrams :  A stick diagram is a symbolic representation of a layout.  In stick diagram, each conductive layer is represented by a line of distinct color.  Width of line is not important, as stick diagrams just give only wiring and routing information.  Does show all components/vias, relative placement.  Does not show exact placement, transistor sizes, wire lengths, wire widths, tub boundaries. Darshana Sankhe
  • 7. Stick Diagrams: Basic Rules  Poly crosses diffusion forms transistor  Red (poly) over Green(Active), gives a FET. L:W  Aspect Ratio L:W nFET/ nMOS pFET/pMOS Darshana Sankhe
  • 8. Stick Diagrams: Basic Rules  Blue may cross over red or green, without connection.  Connection between layers is specified with X.  Metal lines on different layer can cross one another, connections are done using via. Darshana Sankhe
  • 9. Stick Diagrams(NMOS): Basic Steps  Normally, the first step is to draw two parallel metal (blue) VDD and GND rails.  There should be enough space between them for other circuit elements.  Next, Active (Green) paths must be drawn for required transistors.  Do not forget to mark contacts as X, wherever required.  Remember, Poly (Red) crosses Active (Green/yellow), where transistor is required.  For depletion mode FET, draw required implants (yellow).  Label each transistor with L:W ratio. Darshana Sankhe
  • 10. Enhancement-Mode MOSFET : n+ p Gate Source Drain bulk Si SiO2 Polysilicon n+ D 0 S Darshana Sankhe
  • 11. Enhancement-Mode MOSFET :  When the gate is at a high voltage:  Positive charge on gate of MOS capacitor  Negative charge attracted to body  Inverts a channel under gate to n-type  Now current can flow through n-type silicon from source through channel to drain, transistor is ON n+ p Gate Source Drain bulk Si SiO2 Polysilicon n+ D 1 S Darshana Sankhe
  • 12. Inverter Using MOSFET  Enhancement-Mode MOSFETs act as switches.  They are switched OFF, when the input to gate is low.  So, they can be used to pull the output down.  Now, for pull-up, we can use a resistor.  But resistors consume larger area.  Another alternative is using MOSFET as pull-up. Darshana Sankhe
  • 13. Inverter Using MOSFET  The pull-up MOSFET can be Enhancement-mode or Depletion mode.  Enhancement-mode as pull-up:  To use Enhancement-mode FET as active load, the gate should be connected to a separate gate bias voltage.  Vo(max) = VDD - Vth Darshana Sankhe
  • 14. Inverter Using MOSFET  Depletion mode as pull-up:  Depletion-Mode FET has a channel with zero gate-bias.  They will not turn-off until sufficient reverse bias is applied to its gate.  To be used as a load, the gate should be connected to source.  Vo(max) = VDD Darshana Sankhe
  • 15. Inverter Using MOSFET Pull Down Pull Up Output Input Darshana Sankhe
  • 16. NMOS Inverter: Enhancement load Vdd GND Vout Vin Zpu = 2/1 Zpd=1/2 Darshana Sankhe
  • 17. NMOS Inverter: Enhancement load (Stick diagram) VDD GND Vin Vout 1:2 2:1 Darshana Sankhe
  • 18. NMOS Inverter: Depletion load Vdd GND Vin Vout Zpu = 2/1 Zpd = 1/2 Darshana Sankhe
  • 19. NMOS Inverter: Depletion load (Stick Diagram) 2:1 1:2 Vdd GND Vin Vout Darshana Sankhe
  • 20. NMOS 2 I/P NAND Gate : Vdd GND I/P a b Y = !(ab) Zpu = 4/1 Zpd = 1/2 Zpu = 1/2 Darshana Sankhe
  • 21. NMOS NAND (Stick Diagram) : Vdd GND b a Y=!(ab) Darshana Sankhe
  • 22. NMOS 2 I/P NOR Gate : Vdd GND a b Y=!(a+b) Zpu = 2/1 Zpd = 1/2 Zpd = 1/2 Darshana Sankhe
  • 23. NMOS NOR (Stick Diagram) Vdd GND a b Y=a+b 1:2 2:1 1:2 Darshana Sankhe
  • 24. MOSFET  L A silicon wafer N-type transistor Darshana Sankhe
  • 25. Aspect Ratio For Pull-up and Pull-down  The size of a MOSFET depends on the reference inverter design.  The reference inverter for nMOS logic design is the inverter with depletion mode load.  ZPD = Aspect Ratio of pull-down= LPD/WPD  ZPU = Aspect Ratio of pull-up= LPU/WPU  The ratio of aspect ratio of Pull-up and Pull-down is known as Inverter Ratio i.e. Rinv = ZPU / ZPD  When we draw a stick diagram, inverter ratio should be mentioned for that gate.  When a we draw a stick diagram, aspect ratio should be mentioned for all the MOSFETS. Darshana Sankhe
  • 26. Aspect Ratio For Pull-up and Pull-down  For example, if we say, the reference design has Rinv = 4:1, then, ratio of effective ZPU and effective ZPD, should be equal to 4:1.  Rchannel = (L/W)Rsc  Therefore:  if MOSFETs are connected in series, the effective L/W = (L/W)1+(L/W)2+….  if MOSFETs are connected in parallel, the effective L/W = (L/W)1= (L/W)2 Darshana Sankhe
  • 27. Aspect Ratio For Pull-up and Pull-down For NMOS:  There are two values of Rinv, that are sufficient for all NMOS basic gates:  Rinv = 4:1  To save space.  Rinv = 8:1  When input is taken from a pass transistor. Darshana Sankhe
  • 28. Inverter Ratio for NMOS Gates : Gates Rinv ZPU ZPD Inverter 4 2:1 1:2 4:1 1:1 8 8:1 1:1 4:1 1:2 2:1 1:4 NAND (2 I/P) 4 4:1 1:2 (Each) 2:1 1:4 (Each) NOR (2 I/P) 4 2:1 1:2 (Each) 4:1 1:1 (Each) Darshana Sankhe
  • 29. NMOS NAND and NOR : NMOS NAND  Two nmos in series.  Gate delay and area increases with increase in no of inputs.  Length also increases with increase in no of input.  NMOS NAND is slower for same no of inputs and power dissipation. NMOS NOR  Two nmos in parallel.  NOR works quite well for any no of inputs.  Width is proportional to number of inputs.  NMOS NOR is faster for same no of inputs and power dissipation. Darshana Sankhe
  • 30. Types of Layout Design Rules  Industry Standard: Micron Rule  λ Based Design Rules Darshana Sankhe
  • 31. Types of Design Rules (Contd…)  Industry Standard: Micron Rule  All device dimensions are expressed in terms of absolute dimension(μm/nm)  These rules will not support proportional scaling Darshana Sankhe
  • 32. Types of Design Rules (Contd…)  λ Based Design Rules :  Developed by Mead and Conway.  All device dimensions are expresses in terms of a scalable parameter λ.  λ = L/2; L = The minimum feature size of transistor  L = 2 λ  These rules support proportional scaling.  They should be applied carefully in sub-micron CMOS process. Darshana Sankhe
  • 33. Types of Design Rules (Contd…)  λ Based Design Rules  In MOS, the minimum feature size of Tr is: (L/W)n = 1/1 = 2 λ/2 λ Active area = L*W = 4 λ2  In CMOS, the minimum feature size of Tr is: (L/W)n = 1/1.5 = 2 λ/3 λ Active area = L*W = 6 λ2 Darshana Sankhe
  • 34. Design Rules • Minimum length or width of a feature on a layer is 2 • To allow for shape contraction • Minimum separation of features on a layer is 2 • To ensure adequate continuity of the intervening materials. Darshana Sankhe
  • 35. Design Rules :  Two Features on different mask layers can be misaligned by a maximum of 2 on the wafer.  If the overlap of these two different mask layers can be catastrophic to the design, they must be separated by at least 2  If the overlap is just undesirable, they must be separated by at least  Darshana Sankhe
  • 36. Design Rules: NMOS  Minimum width of PolySi and diffusion line 2  Minimum width of Metal line 3 as metal lines run over a more uneven surface than other conducting layers to ensure their continuity 2 Metal Diffusion 3 2 Darshana Sankhe
  • 37. Design Rules: NMOS  PolySi – PolySi spacing 2  Metal - Metal spacing 3  Diffusion – Diffusion spacing 3 To avoid the possibility of their associated regions overlapping and conducting current 2 Metal Diffusion Polysilicon 3 3Darshana Sankhe
  • 38. Design Rules: NMOS  Diffusion – PolySi spacing  To prevent the lines overlapping to form unwanted capacitor.  Metal lines can pass over both diffusion and polySi without electrical effect. Where no separation is specified, metal lines can overlap or cross.  Metal Diffusion Polysilicon Darshana Sankhe
  • 39. Design Rules: NMOS  Metal lines can pass over both diffusion and polySi without electrical effect  It is recommended practice to leave  between a metal edge and a polySi or diffusion line to which it is not electrically connected  Metal Polysilicon Darshana Sankhe
  • 40. Contact Cut :  Metal connects to polySi/diffusion by contact cut.  Contact area: 2*2  Metal and polySi or diffusion must overlap this contact area by  so that the two desired conductors encompass the contact area despite any mis- alignment between conducting layers and the contact hole 4 Darshana Sankhe
  • 41. Contact Cut  Contact cut – contact cut: 2 apart  Why? To prevent holes from merging. 2 Darshana Sankhe
  • 42. Design Rules: NMOS  Minimum diff width 2  Minimum poly width 2  Minimum metal width 3  poly-poly spacing 2  diff-diff spacing 3 (depletion regions tend to spread outward)  metal-metal spacing 3  diff-poly spacing  Darshana Sankhe
  • 43. Design Rules: NMOS  Poly gate extend beyond diff by 2  Diff extend beyond poly by 2  Contact size 2 * 2  Contact diff/poly/metal overlap 1  Contact to contact spacing 2  Contact to poly/diff spacing 2  Buried contact to active device spacing 2  Buried contact overlap in diff direction 2  Buried contact overlap in poly direction 1  Implant gate overlap 2 Darshana Sankhe
  • 46. Interlayer Contacts :  Interconnection between poly and diffusion is done by contacts.  Metal contact  Butting contact  Buried contact Darshana Sankhe
  • 47. Metal contact :  Contact cut of 2λ * 2λ in oxide layer above poly and diffusion  Metal used for interconnection  Individual contact size becomes 4λ * 4λ Darshana Sankhe
  • 48. Butting Contact • The gate and diffusion of NMOS device can be connected by a butting contact. • Two contact cuts are adjacent to each other • Therefore effective contact area is less • Here metal makes contact to both the diffusion forming the drain of the transistor and to the polySi forming this device’s gate. Darshana Sankhe
  • 49. Butting Contact Disadvantages: • Metal descending the hole has a tendency to fracture at the polySi corner, causing an open circuit. • Requires a metal cap. n+ n+ Insulating Oxide Metal Gate Oxide PolySi Darshana Sankhe
  • 51. Butting Contact  Metallization is required only over the butting contact holes which are 2 λ x 4λ in size  A border of width λ around all four sides is added to allow for mis-registration and to ensure proper contact.  This brings the metallization size to 4λ x6λ Advantage:  No buried contact mask required and avoids associated processing. Darshana Sankhe
  • 53. NMOS INVERTER: Enhancement Load Darshana Sankhe
  • 55. Buried Contact  The buried contact window defines the area where oxide is to be removed so that polySi connects directly to diffusion.  Contact Area must be a min. of 2 λ *2λ to ensure adequate contact area.  Advantages: No metal cap required.  Disadvantage: An extra mask is required. 2 2 Contact Area Darshana Sankhe
  • 57. Buried Contact 2 2   Channel length  PolySi Buried contact Diffusion Darshana Sankhe
  • 58. Buried Contact  The buried contact window surrounds this contact by λ in all directions to avoid any part of this area forming a transistor.  Separated from its related transistor gate by 2λ to prevent gate area from being reduced. 2 λ Darshana Sankhe
  • 66. CMOS :  Pull-up is PMOS  Pull-down is NMOS  The channel mobility of electrons is approximately twice of that of holes.  Conductivity of NMOS is twice, that of identical PMOS.  But in case of CMOS inverters, one of the devices is always switched off and has very high impedance.  The noise margin of CMOS circuits is larger than those of NMOS gate operating between same supply rails. Darshana Sankhe
  • 67. pMO S PMOS uW 100 mW 1 mW 10 mW 100 ps 100 ns 1 ns 10 Power dissipation/gate Propagation delay/gate BiCMOS nMOS CMOS Darshana Sankhe
  • 68. Aspect Ratio : For CMOS:  Rinv = 1:1(Ratioless)  As one of the device is always off.  1:1 inverter ratio gives more symmetric layout Darshana Sankhe
  • 69. Stick Diagram (CMOS): Basic Steps  Steps for CMOS are similar to NMOS  But one difference is that depletion mode FETs are not used.  Here, yellow/ brown is used to identify PMOS.  The two types of FET, n and p, are separated in the diagram by the demarcation line.  This line represents the well (n/p-well).  Above this line are all p-type MOSFETs.  Below this line n-type MOSFET are present. Darshana Sankhe
  • 70. Stick Diagram (CMOS): Basic Steps  No Diffusion can cross demarcation line.  Only poly and metal can cross demarcation line  N-diffusion and p-diffusion are joined using a metal wire.  First step is to draw two parallel rails for VDD and GND.  Next draw a demarcation line (brown)  Place all PMOS above and NMOS below this line.  Connect them using wires (metal). Darshana Sankhe
  • 71. PMOS :  Body tied to high voltage (VDD)  Gate low: transistor ON  Gate high: transistor OFF  Bubble indicates inverted behavior SiO2 n Gate Source Drain bulk Si Polysilicon p+ p+ Darshana Sankhe
  • 72. CMOS Invertor (Cicuit Diagram) Darshana Sankhe
  • 73. CMOS Inverter : VDD A=1 Y=0 GND ON OFF VDD A=0 Y=1 GND OFF ON Darshana Sankhe
  • 74. CMOS Invertor (Stick Diagram) Darshana Sankhe
  • 75. CMOS Invertor (Stick Diagram) In Out VDD GND Darshana Sankhe
  • 76. Well Biasing :  The various N and P diffusions must be reverse biased to ensure that those wells are insulated from each other.  This requires that the N- wells are connected to the most positive voltage, VDD.  The P- substrate must be connected to the most negative voltage, ground.  This assumes that all other nets are at a voltage between 0V and VDD. Darshana Sankhe
  • 77. CMOS INVERTER : n+ p substrate p+ n well A Y GND VDD n+ p+ substrate tap well tap n+ p+ Darshana Sankhe
  • 78. CMOS NAND (Cicuit Diagram) B VDD A Darshana Sankhe
  • 81. CMOS NAND (Stick Diagram) A Out VDD GND B Darshana Sankhe
  • 82. CMOS NOR (Cicuit Diagram) Darshana Sankhe
  • 83. CMOS NOR (Stick Diagram) A Out VDD GND Darshana Sankhe
  • 84. Design Rules: CMOS  Line size and spacing:  metal1:  Minimum width=3, Minimum Spacing=3  metal2:  Minimum width=3, Minimum Spacing=4  poly:  Minimum width= 2, Minimum Spacing=2  ndiff/pdiff:  Minimum width= 3, Minimum Spacing=3,  wells:  minimum width=6, minimum n-well/p-well space = 6( They are at same potential) = 9 (They are at different potential) Darshana Sankhe
  • 85. Design Rules: CMOS  Transistors:  Min width=3  Min length=2  Min poly overhang=2  Contacts (Vias)  Cut size: exactly 2 X 2  Cut separation: minimum 2  Overlap: min 1 in all directions Darshana Sankhe
  • 89. CMOS INVERTER (This layout does not have n-well and contacts for n-well and substrate) Darshana Sankhe
  • 91. CMOS NAND This layout does not have n-well and contacts for n-well and substrate) Darshana Sankhe
  • 93. CMOS NOR This layout does not have n-well and contacts for n-well and substrate) Darshana Sankhe
  • 94. Design of NMOS/CMOS Circuits:  PDN – The Function to be implemented, must be expressed in a inverted form. _________  F = (A + BC) D  F = (AB + C) (D + E) __  F = A + B + CD Darshana Sankhe
  • 95. F’ = A + B + CD Darshana Sankhe