DC Hollow Discharge

1. Copyright 2002-2015 PEGASUS Software Inc., All rights reserved. 1
Plasma Enhanced materials processing and
rarefied GAS dynamics Unified Simulation tools
P E G A S U S

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Simulation of
DC hollow cathode discharge
Module ： TTBEQ (for fluid model)
PHM
(hybrid model, fluid model)

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Computational model and conditions
H
W
D Unit ： mm
Gas : Ar
30, 10, 2 4.5,1.6,0.5
133 1) 1330
2) 6650
1) -230 -300
2) -280
0.05 0.04
Hybrid model
Cathode
Case-1 Case-2
・ H, D, W :
・ Pressure
[Pa]
・ Cathode
voltage [V]
・ γ+
・ PHM Fluid model

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Anode（GND）
5
32
2
Cathode
-230 [V]
-280 [V]
γ+= 0.05
Ar : 133 [Pa]
Anode（GND）
0.8
5
0.5
Cathode
-300 [V]
γ+= 0.04
Ar : 1330 [Pa]
6650 [Pa]
Hybrid model Fluid model
Unit:[mm]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Electron
density [/m3]
Electron
density [/m3]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Ar+
density [/m3]
Ar+
density [/m3]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Electric
potential [V]
Electric
potential [V]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Electron
Temp. [eV]
Electron
Temp. [eV]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Ar+
source rate [/m3 /s]
Ar+
source rate [/m3 /s]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Reduced electric field
[Td]
換算電界[Td]Reduced electric field
[Td]

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Ar : 133 [Pa]
Vc= - 230[V] Vc= - 280[V]
Ar+
Temp. [eV]
Ar+
Temp. [eV]

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Ar : 133 [Pa]
2.8 [mA]
9.5 [mA]
0
0.03

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Ar : 133 [Pa]
-230[V] Mid.
-230[V] Bottom
-280[V] Bottom
-280[V] Mid.
×
×
Mid.
Bottom
yield=0.406
yield=0.086
yield=0.011

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Electron
density [/m3]
Electron
density [/m3]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
density [/m3]
Ar+
density [/m3]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Electron
Temp. [eV]
Electron
Temp. [eV]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Electric
potential [V]
Electric
potential [V]

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Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
source rate [/m3 /s]
Ar+
source rate [/m3 /s]

19. Copyright 2002-2015 PEGASUS Software Inc., All rights reserved. 19
Ar : 1330 [Pa] Ar : 6650 [Pa]
換算電界[Td] 換算電界[Td]Reduced electric field
[Td]
Reduced electric field
[Td]

20. Copyright 2002-2015 PEGASUS Software Inc., All rights reserved. 20
Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
Temp. [eV]
Ar+
Temp. [eV]