Selecting Equipment for Silicon Wet Etching

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Selecting the right Silicon Wet Etching equipment is critical for supporting your process. Modutek provides a full range of highly reliable semiconductor manufacturing equipment and wet bench solutions. Visit www.modutek.com

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Selecting the Right Equipment for Silicon Wet Etching
www.modutek.com

Semiconductor manufacturing processes involves different
processing steps that require fabrication facilities to utilize the
right processing equipment. So, it’s vital for a fabrication
facility to choose equipment that supports all their application
and meets their requirement.
www.modutek.com

At Modutek Corporation, we carry a wide range of high
quality semiconductor manufacturing equipment and other
reliable products that suit all silicon wet etching applications.
www.modutek.com

QUARTZ BATHS
Quartz baths are designed for safety and reliability. These
baths support a variety of etching, cleaning and stripping
processes including SC1 cleaning, RCA clean and SPM clean.
Made of semiconductor grade, flame polished quartz, they
come in a variety of sizes to meet your requirement.
www.modutek.com

TEMPERATURE CONTROLLED CIRCULATORS
Temperature controlled circulator units feature a compact
design and stainless steel fluid paths for a high level of safety
and reliability. With a heating capacity of 1500 W, these
circulators are suitable for etching, plating and developing
applications and constant temperature baths.
www.modutek.com

QUICK DUMP RINSERS
The unique specialty of quick dump rinsers is that they
provide efficient process rinsing without particle entrapment
and reduced use of de-ionized water. Other features include
bottom filling, well-located D.I water spray nozzles and N2
agitation.
www.modutek.com

TEFLON TANKS
The modular design of Teflon tanks is easy to integrate into
new silicon wet etching stations or incorporate into existing
stations. This equipment is available in different sizes for
single or double capacity and they support KOH Etching and
TMAH applications.
www.modutek.com

Visit www.modutek.com to find a full range of
semiconductor manufacturing and silicon wet
etching products.
Call: 408 362-2000
E-mail: modutek@modutek.com
www.modutek.com

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Selecting Equipment for Silicon Wet Etching

1. Selecting the Right Equipment for Silicon Wet Etching www.modutek.com

2. Semiconductor manufacturing processes involves different processing steps that require fabrication facilities to utilize the right processing equipment. So, it’s vital for a fabrication facility to choose equipment that supports all their application and meets their requirement. www.modutek.com

3. At Modutek Corporation, we carry a wide range of high quality semiconductor manufacturing equipment and other reliable products that suit all silicon wet etching applications. www.modutek.com

4. QUARTZ BATHS Quartz baths are designed for safety and reliability. These baths support a variety of etching, cleaning and stripping processes including SC1 cleaning, RCA clean and SPM clean. Made of semiconductor grade, flame polished quartz, they come in a variety of sizes to meet your requirement. www.modutek.com

5. TEMPERATURE CONTROLLED CIRCULATORS Temperature controlled circulator units feature a compact design and stainless steel fluid paths for a high level of safety and reliability. With a heating capacity of 1500 W, these circulators are suitable for etching, plating and developing applications and constant temperature baths. www.modutek.com

6. QUICK DUMP RINSERS The unique specialty of quick dump rinsers is that they provide efficient process rinsing without particle entrapment and reduced use of de-ionized water. Other features include bottom filling, well-located D.I water spray nozzles and N2 agitation. www.modutek.com

7. TEFLON TANKS The modular design of Teflon tanks is easy to integrate into new silicon wet etching stations or incorporate into existing stations. This equipment is available in different sizes for single or double capacity and they support KOH Etching and TMAH applications. www.modutek.com

8. Visit www.modutek.com to find a full range of semiconductor manufacturing and silicon wet etching products. Call: 408 362-2000 E-mail: modutek@modutek.com www.modutek.com

Selecting Equipment for Silicon Wet Etching

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