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1. Department of Electronics and Instrumentation Engineering
Master of Technology in Bio-Medical Signal Processing
& Instrumentation
presentation on
“ MEMS Based Gas Sensor For Early Detection Of Lung Cancer”
Presented By-
Mahesh Bani Designation: Professor,Dept E&IE
2. Contents:
Introduction to Lung Cancer
Symptoms
Gas sensor
Fabrication Process
Literature Survey
References
3. Introduction to Lung Cancer
Lung cancer, also known as lung carcinoma, is a malignant lung tumor characterized
by uncontrolled cell growth in tissues of the lung.
Most cancers that start in the lung, known as primary lung cancers, are carcinomas.
The two main types are small-cell lung carcinoma (SCLC) and non-small-cell lung
carcinoma (NSCLC).
1)Non-Small Cell Lung Cancer
-most common type
-grows very slowly
2)Small Cell Lung Cancer
-spreads more quickly and aggressively
-Found mostly in heavy smokers
5. Gas Sensor:
A gas detector is a device that detects the presence
of gases in an area, often as part of a safety system.
This type of equipment is used to detect a gas
leak or other emissions and can interface with a control
system so a process can be automatically shut down.
A gas detector can sound an alarm to operators in
the area where the leak is occurring, giving them the
opportunity to leave.
This type of device is important because there are
many gases that can be harmful to organic life, such as
humans or animals.
6. LUNG CANCER DETECTION IN PRIMITIVE STAGE
:METHODS
PWS(partial wave spectroscopic microscopy)
-based on alteration in Buccal epithelium.
Chest CT and PET scan
Analysis of VOCs(volatile organic compounds) in exhale air using E-Nose
Concept:“The exhaled breath contains VOCs .Analysis of Exhaled breath can be
analyzed to detect lung cancer in primitive stages . This analysis results in the detection
of “biomarkers”, 1- butanol and 3-hydroxy-2-butanone in the exhaled air which indicates
the probability of lung cancer”
7. Methods Contd..
The “electronic nose” is an electronic detection system consisting of an array of
coated sensors, which can detect VOCs. And the change in chemical reactivity or
electrical properties of the Enose can be analyzed to evaluate certain important
parameters:
Breath samples are taken from lung cancer patients, healthy nonsmokers, Ex-smokers,
and patients with respiratory condition.
Surface Acoustic Wave (SAW) gas sensors was used to detect chemical compounds
8. Fabrication:
It is composed of piezoelectric substrate
with an input(transmitting) and output
(receiving ) interdigital transducer deposited
on top of the surface
It is a class of microelectromechanical
systems (MEMS) which rely on the
modulation of surface acoustic waves to
sense a physical phenomenon.
9. Fabrication Steps:
There are three important process steps that
need to be followed in fabricating the SAW
biosensor.
Step 1: Sample Preparation
Step 2: Growth Zno Piezoelectric Layer
Step 3: IDT Formation And Fabrication
10. Literature Survey:
Micro Gas Sensor Based on a WO3 Thin Film for Aromatic Hydrocarbon Detection:
A gas sensor is used for detection of aromatic hydrocarbons (benzene, toluene and
xylene), consisting of a quartz substrate, Pt electrodes and a WO3 thin film.
Oxidation occurs on the heated WO3 sensing layer as an aromatic hydrocarbon is
present in the atmosphere, which causes a resistance variation of the WO3 thin film..
At the optimal working temperature of 300°C, the experimental results show that the
sensor has a rapid response time and a high degree of sensitivity for detection of
benzene, toluene and xylene.
11. Paper 2
High-performance and low-cost lung cancer sensor array
based on self-assembled graphene
The lung cancer sensor array (LCSA) based on layer-by-
layer (LbL) self-assembled graphene.
They are capable of detecting different lung cancer
biomarkers selectively with advantages of high sensing
performance and low cost due to graphene inherent
properties and self assembly technique.
According to the resistance change of graphene, the
detection limit of LCSA is down to 0.1 pg/mL.
Schematic of LCSA sensor array.
12. Paper 3
Development of Electronic Nose for Diagnosis of Lung Cancer at Early Stage:
Non-invasive electronic nose for detection and diagnosis of lung cancer based on an
electronic nose instrument which includes a gas extraction and desorb and separate
volatile organic compounds (VOCs) in patients’ breath, respectively.
Surface Acoustic Wave (SAW) gas sensors was used to detect chemical compounds.
The specific VOCs exhaled by lung cancer cells in the microenvironment are proven
the source biomarkers of lung cancer. The clinical experimental results show that this
kind of novel electronic nose is effective for recognition of lung cancer patents and
healthy persons and will be also possible non-invasive method to diagnose of lung
cancer at early stage.