Cantilever1

1. FACULTY OF ENGINEERING
(INDUSTRIAL ELECTRONIC AND CONTROL)
MEMS TECHNOLOGY
(KXGK6108)
Simulate the Eigen frequency of 3D cantilever beam
By comsol 4.3
KHAIRI AHMED ELRMALI
KGK1500011
SUBMITTED TO: DR. NORHAYATI BINTI SOIN
Semester I
Academic Session 2016

2. Comsol Simulation
 Selecting Physics
 Defining Geometry
 Defining Materials
 Setting up Physics
 Meshing
 Simulation
 Analysis of Results
Exrcise1 : simulate the Eigen frequency of 3D cantilever beam
Structure description :
Model : Cantilever beam
Geometry parameter :
Length L = 300 micrometer
Width W = 20 micrometer
Thickness t = 2 micrometer
Kind of material Cu
Solid Mechanics graph for this model shown below in Fig (1)
Figure 1 : 3D plot solid mechanics Cantilever beam

3. Results:
We fixed one side and the the opposite one which expanded and result in the
oscillation Define study six step Eigen frequency at relative tolerance 1 e-6
Figure 2 : Eigenvalue Solver
After compute 3D plot set different values of Eigen frequency to get different 3D bending
shapes can be show below in Fig(2,a):
Figure (2,a): Bending shape with Eigen frequency

4. Figure (2,b): Bending shape with Eigen frequency

5. Simulation Result for a 3-D Cantilever Beam with Static Load
figure 6: Parameter Sweep
Figure 7 : The static displacement field in the prestressed beam.

6. Figure 8: Graph result displacement field
Figure9: Graph result of total displacement