This document discusses MEMS and robotics. It provides an overview of robotics, including definitions and classifications of robots. It also discusses MEMS (Micro Electro Mechanical Systems), including the basic processes used to construct MEMS like deposition, patterning, and lithography. It describes how MEMS are used in sensors and actuators for robots. Specifically, it notes that sensors in humanoid robots are often MEMS and that MEMS help enable the "popup process" used in micro robots. The document aims to explain the interrelation between MEMS and robotics technologies.

1. MEMS and ROBOTICS
B.DILEEP
Dept. of ECE
MITS, Madanapalle
Email: dileepbheemagani@gmail.com
Contact No: 9676747720
Abstract:
“The great growling Engine of
change Technology”, by the change in
technology world goes faster and busy. For
our convenience we create awesome thing,
one of it is robotics. Looking ahead, future
generations may amused by one great
invention that is robot .This paper gives a
brief knowledge on robotics. Here we are
going to see types of robots, classification of
robotics .In any innovation construction
plays key role. We are going to see the
construction of the robots; firstly we go with
its geometric skeleton, body parts designing,
and purpose of its components. To balance its
body we are going to see how the
mathematical geometry and center of mass
concepts are useful in robots. We know
structural design doest complete the
construction there is another concept called
programming of a robot .we are going to see
how to program and how some other
concepts like artificial intelligence going to
help robotics. After learning this entire thing
we are going to see usage of these robots in
its designed purpose.
Coming to MEMS (Micro Electro
Mechanical System) MEMS techniques
allow both electric circuits and mechanical
devices to be manufactured on Si chip,
similar to the process used for integrated
circuits this allows the construction of items
such as sensor chips with built-in electronics
that are a fraction of size that was previously
possible. In these papers we are going to see
the working and construction of MEMS.
Further this paper shows how the
MEMS and ROBOTICS are related to each
other. In micro robots it is difficult to
maintain core and contacting materials, in
such cases MEMS are used .We are going to
see how it is useful.
Keywords: Robots, programming, sensors
,actuators,
Agenda:
1. Introduction
2. Robotics
A. Classification
B. Program working in robot
3. MEMS
A. Structure analysis
B. Working
4 .MEMS and robotics inter relation
5. Conclusion
1.Introduction:
Robotics:
Robotics is the branch of mechanical
engineering, electrical engineering,
electronic engineering and computer science

2. that deals with the design, construction,
operation, and application of robots, as well
as computer systems for their control,
sensory feedback, and information
processing.
These technologies deal with
automated machines that can take the place
of humans in dangerous environments or
manufacturing processes, or resemble
humans in appearance, behavior, and/or
cognition. Many of today's robots are
inspired by nature contributing to the field
of bio-inspired robotics.
Fully autonomous robots only
appeared in the second half of the 20th
century. The first digitally operated and
programmable robot, the Unimate, was
installed in 1961 to lift hot pieces of metal
from a die casting machine and stack them.
Commercial and industrial robots are
widespread today and used to perform jobs
more cheaply, more accurately and more
reliably, than humans. They are also
employed in some jobs which are too dirty,
dangerous, or dull to be suitable for humans.
Robots are widely used in manufacturing,
assembly, packing and packaging, transport,
earth and space exploration, surgery,
weaponry, laboratory research, safety, and
the mass production of consumer and
industrial goods.
In 1942 the science fiction writer Isaac
Asimov created his Three Laws of Robotics.
In 1948 Norbert Wiener formulated the
principles of cybernetics, the basis of
practical robotics
Inventor:
The first digital and programmable
robot was invented by George Devol in 1954
and was named the Unimate. It was sold to
General Motors in 1961 where it was used to
lift pieces of hot metal from die casting
machines at the Inland Fisher Guide Plant in
the West Trenton section of Ewing
Township, New Jersey.
MEMS: Micro electro mechanical
systems (MEMS) (also written as micro-
electromechanical, MicroElectroMechanical
or micro electronic and micro electro
mechanical systems and the related micro
mechatronics) is the technology of very small
devices; it merges at the nano-scale
into nano electro mechanical Systems(NEMS)
and nanotechnology. MEMS are also
referred to as micromachines (in Japan),
or micro systems technology – MST (in
Europe).
MEMS are separate and distinct from the
hypothetical vision of molecular
nanotechnology or molecular electronics.
MEMS are made up of components between
1 to 100 micrometres in size (i.e. 0.001 to
0.1 mm), and MEMS devices generally range
in size from 20 micrometres to a millimetre
(i.e. 0.02 to 1.0 mm).

3. Inventor:
Harvey C. Nathanson (born October
22, 1936) is an American electrical
engineer who invented the
first MEMS (micro-electro-mechanical
systems) device of the type now found in
consumer products ranging from cellular
phones to digital projectors.
2. Robotics:
Robots are named for accuracy. They
have unforgettable brain, un-diseased body
.These properties doesn’t classify robots, so
let us get to thing which classify these thing.
A. Classification:
Robots are classified into two
groups.They are
(i). Classification on their design
(ii). Classification by their purpose
(i). Classification on their design:
(a). Cartesian robot /Gantry robot:
A cartesian coordinate
robot (also called linear robot) is an industrial
robot whose three principal axes of control
are linear (i.e. they move in a straight line
rather than rotate) and are at right angles to
each other. The three sliding joints
correspond to moving the wrist up-down, in-
out, back-forth. Among other advantages,
this mechanical arrangement simplifies
the Robot control arm solution. Cartesian
coordinate robots with the horizontal member
supported at both ends are sometimes
called Gantry robots. They are often quite
large.
(b). Cylindrical robots:
A robot in which the degrees of f
reedom of the manipulator arm are defin
ed chiefly by cylindrical coordinates.

4. (c).Spherical/Polar robot:
A spherical robot is a robot with
two rotary joints and one prismatic joint; in
other words, two rotary axes and one
linear axis. Spherical robots have an arm
which forms a spherical coordinate system.
Basically in this type of robots have
sensors, which can sense the change in its
environment. It transfers these changes to an
authorizing computer.
In Japan spherical bots are used in
agricultural purpose.
(d).SCARA robot:
The SCARA acronym stands for
Selective Compliance Assembly Robot Arm
or Selective Compliance
Articulated Robot Arm.
The term SCARA is an acronym that
stands
for Selective Compliant Assembly Robot Ar
m. The SCARA robot is based on a 4-axis
design. It is ideal for high-speed assembly,
kitting, packaging, and other material-
handling applications.
(e).Articulated robot:
An articulated robot is a robot with
rotary joints. Every joint can move at any
point and can rotate at any degree at any axis.
(f).Parallel robot:
It's a robot whose arms have
concurrent prismatic or rotary joints.
One use is a mobile platform handling
cockpit flight simulators.

5. (g).Andro humanoid robots:
Its name tells us everything that these
robots have structure of human i.e., two arms,
two legs, one head etc
It is not a stationary robot so it have a
power source also. In its body it is Center of
mass point.
These robots have two type of sensors .They
are characterized into
 Proprioceptive sensors
 Exteroceptive sensors
“Actuators” in these robots acts as output
devices.
(ii).Classification based on their purpose:
1. Mobile Robots:
A mobile robot is an automatic machine that
is capable of locomotion.
Mars rover is the best example for
mobile robots.
2. Stationary Robots:
Robots are not only used to explore areas or
imitate a human being. Most robots perform
repeating tasks without ever moving an inch.
3. Autonomous Robots:

6. Autonomous robots are self
supporting or in other words self
contained. In a way they rely on their own
‘brains’.
Autonomous robots run a program that
give them the opportunity to decide on the
action to perform depending on their
surroundings.
4. Remote-control Robots:
An autonomous robot is despite its
autonomous not a very clever or
intelligent unit. The memory and brain
capacity is usually limited; an
autonomous robot can be compared to an
insect in that respect.
In case a robot needs to perform more
complicated yet undetermined tasks an
autonomous robot is not the right choice.
Complicated tasks are still best
performed by human beings with real
brainpower. A person can guide a robot
by remote control. A person can perform
difficult and usually dangerous tasks
without being at the spot where the tasks
are performed. To detonate a bomb it is
safer to send the robot to the danger area.
–––
5. Virtual Robots:
Virtual robots don’t exist in real
life. Virtual robots are just programs,
building blocks of software inside a
computer. A virtual robot can simulate a
real robot or just perform a repeating
task. A special kind of robot is a robot
that searches the World Wide Web. The
internet has countless robots crawling
from site to site. These WebCrawler’s
collect information on websites and send
this information to the search engines.
6. BEAM Robots :
BEAM is short for Biology, Electronics,
Aesthetics and Mechanics. BEAM
robots are made by hobbyists. BEAM
robots can be simple and very suitable
for starters

7. B. Program working in a robot:
“A microprocessor is a computer
processor that incorporates the functions of
a computer's central processing unit (CPU)
on a single integrated circuit (IC), or at most
a few integrated circuits. The microprocessor
is a multipurpose, programmable device that
accepts digital data as input, processes it
according to instructions stored in its
memory, and provides results as output “.
These thing we learn in computer .For
purpose in computer we write program in
some languages in many function and each
has their own respective tasks. Similarly we
also write programs for robots in form of
function (for eg: one function for arms , one
function for legs). Sensors in robots sense the
changes and gives as inputs to
microprocessor and microprocessor process
it according to instructions stored in its
memory. Finally output come from their
respective functions and makes legs and arms
to move. If given a particular task to robot
firstly at calculates probability to do that
tasks ,then it chooses the flexible and
efficient way ,after that it analysis the effect
of output . All these thing will work in
Fraction of seconds .But some robots like
Cartesian robots and cylindrical robots
doesn’t goes with this procedure because it
just takes commends from its authorizing
computer.
3.MEMS
Micro-electromechanical systems
(MEMS) is a technology that combines
computers with tiny mechanical devices such
as sensors, valves, gears, mirrors, and
actuators embedded in semiconductor chips.
Paul Saffo of the Institute for the Future in
Palo Alto, California, believes MEMS or
what he calls analog computing will be "the
foundational technology of the next decade."
MEMS is also sometimes called smart
matter.
MEMS are already used as
accelerometers in automobile air-bags.
They've replaced a less reliable device at
lower cost and show promise of being able to
inflate a bag not only on the basis of sensed
deceleration but also on the basis of the size
of the person they are protecting. Basically, a
MEMS device contains micro-circuitry on a
tiny silicon chip into which some mechanical
device such as a mirror or a sensor has been
manufactured. Potentially, such chips can be
built in large quantities at low cost, making
them cost-effective for many uses.
Micro-electromechanical systems
(MEMS) are Freescale's enabling technology
for acceleration and pressure sensors.
MEMS-based sensor products provide an
interface that can sense, process and/or
control the surrounding environment.
Freescale’s MEMS-based sensors are a class
of devices that builds very small electrical
and mechanical components on a single chip.
MEMS-based sensors are a crucial
component in automotive electronics,
medical equipment, hard disk drives,
computer peripherals, wireless devices and
smart portable electronics such as cell phones
and PDA’s(Personal Digital Assistant).
MEMS are categorized into two type
they are

8. 1 .Sensors
2. Actuators
1. Sensors:
Sensors with sense Moment or
change and gathers information from
surrounding.
2. Actuators:
Actuators execute command or act for
controlled movements.
Let see close view:
MEMS Basic process:
a. Deposition processes:
One of the basic building blocks in
MEMS processing is the ability to deposit
thin films of material with a thickness
anywhere between a few nanometres to about
100 micrometres. There are two types of
deposition processes, as follows.
b. Physical deposition:
Physical vapor deposition ("PVD")
consists of a process in which a material is
removed from a target, and deposited on a
surface. Techniques to do this include the
process of sputtering, in which an ion beam
liberates atoms from a target, allowing them
to move through the intervening space and
deposit on the desired substrate, and
Evaporation (deposition), in which a material
is evaporated from a target using either heat
(thermal evaporation) or an electron beam (e-
beam evaporation) in a vacuum system.
c. Chemical deposition:
Chemical deposition techniques
include chemical vapor deposition ("CVD"),
in which a stream of source gas reacts on the
substrate to grow the material desired. This
can be further divided into categories
depending on the details of the technique, for
example, LPCVD (Low Pressure chemical
vapor deposition) and PECVD (Plasma
Enhanced chemical vapor deposition).
Oxide films can also be grown by the
technique of thermal oxidation, in which the
(typically silicon) wafer is exposed to oxygen
and/or steam, to grow a thin surface layer of
silicon dioxide.
d. Patterning:
Patterning in MEMS is the transfer of
a pattern into a material.
e. Lithography:
Lithography in MEMS context is
typically the transfer of a pattern into a
photosensitive material by selective exposure
to a radiation source such as light. A
photosensitive material is a material that
experiences a change in its physical
properties when exposed to a radiation
source. If a photosensitive material is
selectively exposed to radiation (e.g. by
masking some of the radiation) the pattern of
the radiation on the material is transferred to
the material exposed, as the properties of the
exposed and unexposed regions differ.
This exposed region can then be
removed or treated providing a mask for the
underlying substrate. Photolithography is
typically used with metal or other thin film
deposition, wet and dry etching.

9. f. Electron beam lithography:
Electron beam lithography (often
abbreviated as e-beam lithography) is the
practice of scanning a beam of electrons in a
patterned fashion across a surface covered
with a film (called the resist), ("exposing" the
resist) and of selectively removing either
exposed or non-exposed regions of the resist
("developing"). The purpose, as with
photolithography, is to create very small
structures in the resist that can subsequently
be transferred to the substrate material, often
by etching. It was developed for
manufacturing integrated circuits, and is also
used for
creating nanotechnology architectures.
The primary advantage of electron
beam lithography is that it is one of the ways
to beat the diffraction limit of light and make
features in the nanometer region. This form
of maskless lithography has found wide
usage in photomask-making used
in photolithography, low-volume production
of semiconductor components, and research
& development.
The key limitation of electron beam
lithography is throughput, i.e., the very long
time it takes to expose an entire silicon wafer
or glass substrate. A long exposure time
leaves the user vulnerable to beam drift or
instability which may occur during the
exposure. Also, the turn-around time for
reworking or re-design is lengthened
unnecessarily if the pattern is not being
changed the second time.
Uses:
 MEMS accelorometer
 Micro machines
 Projectors,Hearing Diveces,Duff
machines
 Lens for differently abled
pepole(Blind)
4. Interrelation between Robots and
MEMS:
Previously we discussed about Andro
humanoid robots have sensors and actuators.
These sensors are MEMS. Not only in andro
humanoid robots in every robot has every
part of it had major contribution of mems. In
Micro robots mems process helps in pop-up
process. These helps in robot to set into
motion.
Popup process(fig .1)
Popup process(fig.2)
5.Conclusion:
ROBOTICS and MEMS is awesome
thing .If use it for mankind it results hundred
times better than what we expect , but if use
it for bad things its results such a disaster
even history doesn’t see it before.
References:
[1].Mark Elling Rosheim “LEONARD’s
Lost Robot”.
[2].Gabriel M.Rebeiz “RE MEMS: Theory,
Design and Technology”.