This document discusses DuPont Photomasks' Canary technology, which uses a specialized reticle to detect electrostatic discharge (ESD) damage. The reticle has varying gap sizes that make it highly sensitive to ESD. When run on wafers, any ESD damage during the reticle's handling or use will be visible. This allows companies to identify ESD issues, implement solutions like changing procedures or adding protection, and confirm the solutions worked by rerunning the Canary reticle. The technology benefits the semiconductor industry by enabling better ESD control, cost savings, and collaboration between users and suppliers to solve ESD problems.
The electrical arc creates a pressure wave. The incident energy is the energy of this arc-flash coming into contact with a surface. Essentially an electric arc creates a radiation burn which accounts for the internal burns a person can receive when exposed to an electrical arc flash.
The electrical arc creates a pressure wave. The incident energy is the energy of this arc-flash coming into contact with a surface. Essentially an electric arc creates a radiation burn which accounts for the internal burns a person can receive when exposed to an electrical arc flash.
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Optocouplers eliminate the effects of electrical noise caused by crosstalk, power glitches and electrical interference. They provide high voltage isolation allowing safe interface between high and low voltages in electrical circuits and are also used for shifting logic levels. Key Broadcom products include optocouplers with digital and analog output, high speed and high gain performance, drivers for isolated gate transistors, MOSFETS and intelligent power modules, smart current sensors and other application specific devices.
When selecting the correct product to use in isolation applications, it is important for designers to understand safety and performance relevant features to guarantee optimum reliability over the lifetime of their products.
Lisa Dietrich, Field Application Engineer, Broadcom Inc. delves into this topic more in the below presentation that specifically covers the topics of LED degradation, insulation ratings, aging mechanisms and the effects of ESD and high voltage surges.
Nowadays, mobile consumer electronics devices integrate various wireless interfaces like WIFI, Bluetooth, GPRS and GPS. Various approaches exist to protect the wireless interfaces against ESD stress. In recent years, researchers have focused on so‐called 'co‐design' techniques to solve both functional and protection constraints together which requires both RF and ESD design skills. However many IC designers still prefer to work with 'plug‐n‐play' protection concepts where the ESD clamps exhibit low parasitic capacitance, low series resistance and low leakage. This paper presents measurement results of 3 different SCR based protection approaches that exhibit high Q‐factor and low and stable parasitic capacitance over a broad voltage and frequency range. The clamps are used for protection of LNA circuits in 90nm and 40nm Low Power (LP) CMOS technologies.
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Optocouplers eliminate the effects of electrical noise caused by crosstalk, power glitches and electrical interference. They provide high voltage isolation allowing safe interface between high and low voltages in electrical circuits and are also used for shifting logic levels. Key Broadcom products include optocouplers with digital and analog output, high speed and high gain performance, drivers for isolated gate transistors, MOSFETS and intelligent power modules, smart current sensors and other application specific devices.
When selecting the correct product to use in isolation applications, it is important for designers to understand safety and performance relevant features to guarantee optimum reliability over the lifetime of their products.
Lisa Dietrich, Field Application Engineer, Broadcom Inc. delves into this topic more in the below presentation that specifically covers the topics of LED degradation, insulation ratings, aging mechanisms and the effects of ESD and high voltage surges.
Nowadays, mobile consumer electronics devices integrate various wireless interfaces like WIFI, Bluetooth, GPRS and GPS. Various approaches exist to protect the wireless interfaces against ESD stress. In recent years, researchers have focused on so‐called 'co‐design' techniques to solve both functional and protection constraints together which requires both RF and ESD design skills. However many IC designers still prefer to work with 'plug‐n‐play' protection concepts where the ESD clamps exhibit low parasitic capacitance, low series resistance and low leakage. This paper presents measurement results of 3 different SCR based protection approaches that exhibit high Q‐factor and low and stable parasitic capacitance over a broad voltage and frequency range. The clamps are used for protection of LNA circuits in 90nm and 40nm Low Power (LP) CMOS technologies.
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wang ESD & reticle damage DUPONT Presenation to prevent ESD damage to reticlesT.pdf
1. 1
DuPont Photomasks, Inc.
ESD and Reticle Damage
K. C. Wang, MBA, MS Ch.E.
Director, New Ventures Development
October 19, 2000
International SEMATECH
Electrostatic Discharge Impact
and Control Workshop
2. 2
DuPont Photomasks, Inc.
Disclaimer
The information provided in the SEMATECH ESD
workshop and publications presented on October
19 and 20, 2000 regarding DuPont Photomasks,
Inc.’s CanaryTM technology is for informational
purposes only. CanaryTM is a registered trademark
and is subject to patent and trade secret
protection in accordance with United States and
foreign law and regulations. The use, copying,
transfer and publication of this proprietary
technology is strictly prohibited by law.
3. 3
DuPont Photomasks, Inc.
Why Photo Areas?
nAdvanced design rule
nProcess complexity
nDefect induced and sensitive
nIncreasing cost of reticles
nReticle quality impacting
wafer yield significantly
5. 5
DuPont Photomasks, Inc.
A Reticle in a Pod
Operator’s fingers
When the operator takes or releases the pod,
it becomes tribo-electrically charged at the finger sites.
7. 7
DuPont Photomasks, Inc.
Compare a 5 µm Gap (then) and a 1 µm Gap (now)
Voltage Thresholdthen= 5x Voltage Threshold now
Energy Deposit then= 25x Energy Deposit now
Chrome Temperature then= 25x Chrome Temperature now
Vaporized Chrome Melted Chrome
1 or 2 rare sparks 100 frequently occurring sparks
Conclusion - modern reticle damage is cumulative
- past generation damage was catastrophic
Wait long enough and your reticle lines will melt!
8. 8
DuPont Photomasks, Inc.
ESD Learning
n Reticle damage is caused by
nearby charged objects
n In the past it was catastrophic and
rare
n Now it is very common but not a
single shot event
n Modern reticles accumulate ESD
damage over time
13. 13
DuPont Photomasks, Inc.
Canary Applications in
Semiconductor Fabs
n Customized Canary design
♦ alignment mark
♦ bar code
♦ design rule: gap, linewidth
n Wafer fabrication environment
characterization and safeguard
♦ ESD defect printability
♦ reticle stocker room
♦ reticle pod
♦ reticle handling path and procedure
♦ lithography & inspection equipment
14. 14
DuPont Photomasks, Inc.
Canary Diagnosis and Solution Flow
Initial
Assessment
EMI/RFI
Study
Canary
Run
Report
Recommend
Solution
Implement
Solution
Canary
Confirmation
Run
Routine
Compliance
Certification
15. 15
DuPont Photomasks, Inc.
Possible Solutions
n Change of process
n Redesigns of procedures and flow
n ESD awareness training
n ESD protection
n Remote on-line monitoring
n Materials changes
n Equipment grounding issues
n ESD control program improvements
♦ Periodic Canary runs
♦ ESD audits to 20.20 spec
♦ E78 exit charge tests
16. 16
DuPont Photomasks, Inc.
Canary Applications in
Semiconductor Equipment
nMethodology determining level of
E78 compliance required
nCanary test method required in
procurement spec
nAcceptance test item
17. 17
DuPont Photomasks, Inc.
Canary Development Status
nAlpha site tests complete
nAdvanced fab beta site tests complete
nProduction customer orders start
nCurrent service capacity is limited
18. 18
DuPont Photomasks, Inc.
Summary
Benefits to Semiconductor Industry
nHolistic ESD control (peace of mind)
nSignificant cost savings and productivity
improvements (lowest cost of ownership)
nMarketing competitive advantage
nShared problem solving accountability
and teamwork (users and suppliers)