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- 1. Equipment Engineering andProcess Consulting © 2014 88 Equipment 10/28/2014
- 2. Engineering and BusinessServices Silicon Based Direct On-site Consulting Manage Equipment Engineering Equipment Selection & Specifications Laboratory & Clean Room Designs* Site & Facilities Design* Solar III-V Based Process Engineering Materials Engineering Device Engineering Business Operations & Marketing *Via our JV Partners © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 2
- 3. Universal Project Services • Solar • Energy Fab Finder: a Professional . . International Engineering . . Company Consulting & Feasibility Studies Site Designs via JV Partner Equipment Layout Site Construction & Clean Rooms via JV Partner Materials Consulting & Business Operations Device & Process Tech Install & Start-Up Equipment Specifications & Re-Furb •Raw Materls • Semi •Nano • LED • Energy CONFIDENTIAL © 2014 88 Equipment 10/28/2014
- 4. Scope Of EngineeringServices Process Engineering • Focus on Silicon, III-V based and Energy (Solar, etc.) •Very Broad Expertise in Semi, Solar, LED, Materials Equipment Engineering • Selections, Specifications, Valuations. 40+ yrs. Exp. •New or used. Re-furbishment, support services Device Engineering • Semiconductor, MEMs, Solar Cells, silicon, III-V, etc. • Personal Expertise and Partner Expertise Materials Engineering • Silicon based, III-V based, spin-on, print, novel, more • Dielectrics, Conductors, Barriers, Sacrificial, etc. Multi-Purpose Site Designs • Concept-Design-Construction via our JV partners • Clean rooms, energy, waste, gas, chemical, office CONFIDENTIAL © 2014 88 Equipment 10/28/2014
- 5. Member Biographies ToddO. Curtis - V.P. and Chief Technical Officer 40 yrs. experience in III-V and Silicon: CVD/ALD processing and integration R&D with IBM, Intel, TI, Motorola, SEMATECH, SELETE Japan, TSMC, ST… Semi-Materials R&D Apps. Lab Mngr: equip, metro, staff, training, facilities… Over 25 articles: CVD & ALD, silicon and III-V materials, device integration Technology consultant to the 22nm node, selective deposition patent Semi, Solar, LED, and Raw Materials Engineering. Taiwan resident Michel D. Ouaknine - Vice-President of European Operations μProcessor Apps Mgr. for 12 years with Intel, Intersil, and Zilog Authored 2 books on μP’s and ~ 40 technical & scientific papers CNAM ingénieur thesis on selective EPROM programming, 1976 Coordinator with EU organizations: CE standardization, working with IMEC, LETI & Fraunhofer Institute SEMI S23 standard on Energy Conservation. Paris resident Peter J. Nowosad - President and Director of Operations 20+ yrs. experience in project and customer support management WW Broad semiconductor and equipment background CAD design for high-tech chemical/gas distribution systems Knowledgeable in diffusion, CVD, ALD, PVD, and Etch Based and living in Taiwan since 2000 Expanded Bios available at end of presentation © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 5
- 6. Equipment Services Asset valuation, inspections, specifications De-installations-refurbish-installation Rigging, Crating, and Shipping assistance Storage Staging prior to Shipments International Client Base © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 6
- 7. International Operations Teams Local Audit Teams to Reduce Costs De- Install Crate Ship Re- Install Start-up © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 7
- 8. High-Tech Equipment Sourcing World-Wide Marketplace Ash • Axcelis • NVLS CMP • AMAT • Ebara • IPEC Diff. • TEL • HKE RTP • AMAT • Mattson PE Etch • LAM, AMAT • TEL Thin Film • AMAT, NVLS • TEL Litho • ASML, Nikon • TEL,DNS Ion I. • Axcelis, SEN • Varian Metal • AMAT, NVLS • TEL Metro • KLA, Hitachi • Rudolph Wets • DNS, TEL • FSI, SEZ Test • Agilent • TSK Taiwan Hdqrs. CONFIDENTIAL © 2014 88 Equipment 10/28/2014
- 9. Equipment Engineering I Evaluate Options Spec the Core Tool Re-furbish Modify as needed Gas, power, fixtures Front End Production R&D/Lab Specials Install, qualify, and support © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 9
- 10. Equipment Engineering II Open Cassette to SMIF Conversions © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 10
- 11. Equipment Engineering III Gas Box Conversions-3D CAD © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 11
- 12. Renewable Energy Solar& More Solar Solids to Gas Recycled Energy Ocean Wave Crystalline & Thin Film Cell Engineering Rigid Flexible BIPV Solids to Gas Energy Recovery Recycle & Design © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 12
- 13. Materials Science WideRange of Practical Experience in Multiple Technologies & Applications Silicon Based Gas, Liquid, Solid III-V Based Gas, Liquid, Solid, Semi-Solid Organics Organics, Gas, Liquid, Solid, Semi-Solids Depositions © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 13
- 14. Nano-Technology (examples) Nanotechnology ("nanotech") is the manipulation of matter on an atomic, molecular, and supramolecular scale. High Voltage Electron Beams (to <5nm) Nano-particles Conductive Inks Extraction Substitution © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 14
- 15. Materials Engineering The Applications and Practical Use of Materials Science Compounds Cross-Over Technologies Laminates BIPV Lattice Matching for Flexible Substrates © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 15
- 16. Device Engineering I.C. Solar Cells MOSFET MESFET Consumer Military LED High Efficiency Solar Cells MOSFET Basics Then Advanced MESFET Applications L.E.D. Products © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 16
- 17. Semiconductor Engineering Technologies Device Process Integration Failure Analysis © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 17
- 18. Process Engineering Detail Integration & Interactions Fab Finder: a Professional International Engineering Company Lithography Ash Dry Etch Wet Cleans CMP & Metals Thin Films Ion Implant RTP & Diffusion © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 18
- 19. Process Engineering Semi • Very Broad Experience in all Operations • Expert level in Thin Films and Integration Solar • Knowledgeable in Most Sectors • Crystalline, Thin Film, Composites, single, hetero LED • Well Experienced from Ingot Growth to Fabrication • Fundamental Epi Knowledge Mat. • From Base Fundamental Refining to Purification • More Pragmatic Approach Rather than Theoretical © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 19
- 20. Semiconductor Line Equipment Ion Implanters Cleans Diffusion and LPCVD Photo Lithography Thin Films Dry Etch © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 20
- 21. Semiconductor Line Layouts © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 21
- 22. Solar Line Equipment& Complete Solar Supply Chain © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 22
- 23. Solar Line Layouts Panel Factory Solar Cell Factory Ingot and Shaping Factory © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 23
- 24. Training Services Actingas a Training Consultant and Liaison Equipment Theory Operation Maintain Facility Operations Process Mentor © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 24
- 25. Developed A TrainingProgram for Semi Professionals this Spring-”3T” 3T=Tech Transfer and Training Hands- On 12 to 15 month program Personalized Training Near 1:1 trainer to trainee 20 Trainers 30 Trainees Broad Scope of Training Facilities Equipment Process Integration Device Fab Management © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 25
- 26. Summary Site Designs& Engineering Consulting Technology & Business Services Pre and Post-Construction Consulting Comprehensive Engineering Liaison Budget Reviews, Equipment Selections, Specifications, Procurement, and Support Site Formal Design and Drawings (and construction) via our Joint Venture Partners © 2014 88 Equipment CONFIDENTIAL 1 0 / 2 8 / 2 0 14 26