The thesis presents a haptic-controlled MEMS gripper system capable of manipulating micro-scale objects (0-100μm) with sub-micron resolution and meso-scale travel capabilities. It highlights the integration of a high-fidelity three-dimensional force feedback device for precision handling and micro-assembly applications, showcasing experimental results and evidence of successful manipulation of biological cells and microbeads. The developed system achieves travel ranges and high precision that can significantly enhance various micro-manipulation tasks in biological and industrial applications.

1. M.S. Thesis defense – 06/30/2010Haptic controlled X-Y-ZMEMS gripper system1Presented by: AshwinVijayasaiCommittee membersDr. Tim Dallas (Chair)Dr. Richard GaleDr. Stephen Bayne

2. OutlineMotivationObjectiveIntroductionLiterature reviewSetup overviewMEMS microgripper: description and characterizationHaptic InterfaceThree axis positionerStepper-motor CharacterizationExperimental SetupHandling and manipulation results2

3. “…You know, in the atomic energy plants they have materials and machines that they can’t handle directly because they have become radioactive. To unscrew nuts and put on bolts and so on, they have a set of master and slave hands, so that by operating a set of levers here, you control the “hands” there, and can turn them this way and that so you can handle things quite nicely.” - Richard Feynmen[1]3motivation[1] There's plenty of room at the bottom, Feynman, R.P.; IEEE JMEMS, vol 1, issue 1, 1992 , pp 60 - 66

4. 4objectiveAbility to handle micro-scale objects in the range 0-100µm.Ability to manipulate the micro-objects at sub-micron resolution (~0.5µm) with meso-scale (~25mm) travel.Provide tactile interaction with micro-scale objects (Haptic interface).50 µmZygote [2]Novint Falcon[3][2] Pronuclear Injection – Transgenic mice production, Eppendorf®[3] Image reproduced from Novint® Falcon™, Novint Technologies Inc.

5. 5INTRODUCTIONResearchers have integrated MEMS devices in micro-positioning tools and demonstrated handling, grasping, and construction of micro-structures, micro-beads, and other devices.

6. MEMS based micro-positioning and handling tools can be used in various applicationsMicro-assemblyTransgenic miceIVF and ICSISingle cell analysisCell sorting

7. 6Design considerationsReliabilityTravel rangeStep resolutionOperating speedHandling forcesExperimental setupBio-compatibility

8. 7LITERATURE REVIEWMicromanipulation of micro-objects using electrostatic microgripper and its bio-compatibility was reported by Felix et al.[3].Handling of microbeads aligned in a ultrasonic field [6][3] B. Felix, N. Adrian, O. Stefano, J. B. Dominik, S. Yu, D. Jurg, J. N. Bradley, “Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field”, in JMEMS, vol. 16, Iss. 1, 2007, pp. 7-15.

9. 8LITERATURE REVIEWOur method differs from the work discussed by Trinh Chu et al.[4]. They do not have haptic based control of axial motion and gripper actuation.Handling of glassbeads [4][4] D. Trinh Chu, L. Gih-Keong, J.F. Creemer, P.M. Sarro, “Electrothermal microgripper with large jaw displacement and integrated force sensors”, in JMEMS, vol. 17, Iss. 6, 2008, pp. 1546-1555.

10. LITERATURE REVIEWOur method differs from the work discussed by Kim et al.[5] in the electrostatic gripper design by improving compatibility to various biological samples.Handling of He-la cells [5][5] K. Kim, X. Liu, Y. Zhang, Y. Sun, “Micronewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback” in IEEE Int. conf. on robotics and automation, 2008, pp. 3100-3105.9

11. 10SETUP OVERVIEW

12. MEMS microgripperFT-G100FT-G60F = k . VoltageA’ – Gripper actuating armA’’ – Comb-fingersB – Force sense circuitC’ – Gripper actuating armsC’’ – Comb fingers11

13. 12Displacement characteristicsFT-G100FT-G60R2 = 0.99R2 = 0.99…(ii)…(i)

14. 13Haptic interfaceSchematic Diagram of Haptic ControlsHaptic gives the ability to perceive and manipulate micro-scale objects.It is a 3 DOF deviceThe X,Y,Z on the diagram shows the axial operation of manipulator assembly.

15. Micromanipulator, Probing Solutions Inc.Rotary motion of Y, Z couplers produces axial motion of rodThe Y, Z from the diagram shows the axial operation of manipulator assemblyCoupled screw causes deviation of orthogonal axial motion in the rod14Three axis positionerSchematic representation of Y, Z positioner

16. 15Three axis positionerSchematic representation of X positionerAssembly of X positionerLinear stage (Newport)Rotary motion of X coupler produces axial motion of stageThe stage motion is shown in the assembly

17. Comparison of axial motion and lateral motion16ResultsCalibration conditions:Half-step mode of stepper motor1 complete rotation of stepper motorClockwise and counter clockwise10 iterations

18. Stepper motor resolutionAxial step resolution of all X-Y-Z axes operating at Half step mode Operational Step modes17X and Y combined result

19. Experimental setup18

20. 19Labview controls (VI)Video Feed Automatic PositionerOperation Speed Haptic ControlsForce sense

21. Manipulation results polystyrene beadsmems devicesmems chessboard20

22. 21Manipulation sequenceManipulation of Polystyrene beads to form assembled structure

23. 22Assembled microspheresPolystyrenebead ˜ 45µmGlass SlideMicroscope image of assembled polymer beads taking the shape of a double T (TTU symbol).

24. Manipulation resultspolystyrene beads mems devicesmems chessboard23

25. 24Summit – V Process AutoCAD layout Cross-sectional view of SUMMiT - V process Packaged chip

26. 252009 nano category MEMS chipA – Microscopic bird’s eye view of chipB – Portion of the chip with detachable devicesC – Microscopic image: Microgripper is positioned for handling MEMS devices

27. 26SUMMiT-V Microgripper (SMG)DESIGNMODELINGFEA modeling using ANSYSApplied voltage 4 voltsObserved total opening 31µmA – SMG arm tip initial opening 7µmB – bond pad with steps at endC – Mechanical stop (spring )D – Hot/ Cold arm actuator

28. 27SUMMiT-V Microgripper (smg)Cross-sectional view of slider mechanismSlider travel distance ~27µmExperimental setup showing FT-G60 on a holder, assembly platform, Y-Z manipulator rod, X stage.

29. Off-chip devices - SMG28

30. Manipulation resultspolystyrene beadsmems devicesmems chessboard29

31. Micro-chessboardFabricated by Sandia National Labs, 2009 1mm x 1mm

32. Inspiration from SPICE (Susan Polger)

33. P1 – P4 (P4 – stub)

34. Off – chip manipulation

35. Test the limits of X-Y-Z positioner30

36. 31Game on – ‘queen’ calls check!123 456789

37. 32Recent media attentionSandia Lab news, June 4 2010TTU daily news, July 16 2010 450µm x 450µm

38. Robotic arm moving pieces

39. P1 – P4 (P4 – stub)

40. On – chip manipulationhttp://www.sandia.gov/LabNews/100604.htmlhttp://www.popsci.com/gadgets/article/2010-06/microbarbershop-micro-chessboard-actually-work-winning-sandia-design-awards

41. CONCLUSIONA mesoscale (~24mm) to microscale (~0.3µm) controlled manipulation system has been designed, developed and integrated with a high-fidelity three-dimensional force feedback haptic device.