Hukings solid state rf generator is designed for all plasma applications including, PECVD, HDPCVD, PVD, ALD, etc, and manufacturing of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices,etc.

1. Your Reliable Source for Solid State Amplifiers and Generators
Address: No. 1408, North of Tianfu Dadao Road, High-Tech District, Chengdu, 610000, Sichuan, China.
Tel: +86-28-8411-1861 Fax: +86-28-6792-0663 Web: www.hukings.com E-mail: info@hukings.com
HUKINGS and its logo are trademarks of HUKINGS or one of its subsidiaries.
Copyright @ 2016 HUKINGS All rights reserved.
HUKINGS Solid State RF Generator Data Sheet
HSRFG-13.56MHz-1000W
HUKINGS solid state Radio-frequency generators provide continuous wave (CW) output power
adjustable from 100 W to 3000 W at frequencies ranging between 13.56 MHz and 433 MHz.
This generator(13.56MHz) is ideally designed for all plasma applications including, PECVD, HDPCVD,
PVD, ALD, etc, and manufacturing of integrated circuits, solar cells, flat panel displays, LEDs and data
storage devices, etc.
HUKINGS solid state Radio-frequency generators feature:
1) Semiconductor (longer life time than magnetron & no high voltage)
2) True RMS detector with linear measurement of reflected and forward power
3) Compact size and lighter weight
4) Frequency stability equals 13.56MHz, forward power referenced to rating ±250KHz
5) Regulation tolerance of ±1.5%
6) point within power range
7) Automatic load mismatch protection

2. Your Reliable Source for Solid State Amplifiers and Generators
Address: No. 1408, North of Tianfu Dadao Road, High-Tech District, Chengdu, 610000, Sichuan, China.
Tel: +86-28-8411-1861 Fax: +86-28-6792-0663 Web: www.hukings.com E-mail: info@hukings.com
HUKINGS and its logo are trademarks of HUKINGS or one of its subsidiaries.
Copyright @ 2016 HUKINGS All rights reserved.
HUKINGS Solid State Radio-frequency generators- HSRFG-13.56MHz-1000W Technical Specification
Model HSRFG-13.56MHz-1000W
Rated power output 1000W
Frequency stability 13.56MHz ±0.005%
Dynamic power rang 10-1000W
Load impedance rang unlimited
Harmonic output & distortion < -40dBc
Load mismatch protection Automatic; forward power limits typically 0.25ms
after reverse power reaches a pre-programmed
level ≤ 16% of rated power
VSWR 1.1:1 1000W
2.0:1 800W
3.0:1 650W
Regulation tolerance > 125 W: ±1.5%
SP < 125 W: ± 3.0 W
Primary AC power source 220/100 VAC, 2/PE~ (2W+G) 14 A/PHASE
Cooling system Water flow at 2.0 Gal. /Min. (7.6 LPM) minimum
at +5°C to +35°C. Connections provided to
accept 1/4” male (NPT) pipe thread.
Power readout Digital readout displays frequency and forward,
reflected and load power
Safety compliance NRTL Listed: UL3111-1 (1994) CAN/CSA C22.2
No. 1010.1-92 EN61010-1:1993; A2:1995
EMC compliance EN50081-2: 1992 EN50082-2: 1995
Remote interface connectors Standard: RS-232 Subminiature Type-D 9-pin
digital; optional custom interface cards available.
RF output connector Type N
Weight 32.5 lbs. (14.8 kg)
Dimensions(HXWXD) 3.5” x 19” rack mount x 20.0”
(89 x 483 x 508 mm.)
Issued by HUKINGS
Version2.16