Discussion of behavioral modeling era of a system and CPS respectively. Then, the survey of the state of the art of system behavioral modeling and CPS behavioral modeling is provided in which most of the approaches are reviewed PLM system. The system modeling survey is conducted based on the work done in the late 20th century to the recent years of 21st century. The CPS modeling survey is conducted based on the work done in the recent years of 21th century as this technology and modeling approach is emerging. Based on the discussion and survey, conclusion and future work will be explained.