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Introduction
The electro magneto elastic actuator of the piezoeffect, the
piezomagnetic effect, the electrostriction or the magnetostriction
effect is used for precise alignment in the nanotechnology, the
biotechnology and the adaptive optics [1-32]. The piezoactuator on
the inverse piezoeffect is serves for the actuation of mechanisms or
the management, converts electrical signals into displacement and
force [1-8]. The piezoactuator for the nanomechanics is provided
thedisplacementfromnanometerstotensofmicrometers,aforceto
1000N. The piezoactuator is used for research in the nanomedicine
and the nanobiotechnology for the scanning tunneling microscopes,
scanning force microscopes and atomic force microscopes [14-32].
In the present paper the generalized structural-parametric
modelandthegeneralizedparametricstructuralschematicdiagram
of the electro magneto elastic actuator are constructed by solving
the wave equation with the Laplace transform for the equation of
the electro magnetolasticity, the boundary conditions on loaded
working surfaces of the actuator, the strains along the coordinate
axes.Thetransferfunctionsandtheparametricstructuralschematic
diagrams of the piezoactuator are obtained from the generalized
structural-parametric model. In [6,7] was determined the solution
of the wave equation of the piezoactuator. In the [14-16,30,31]
were obtained the structural-parametric models, the schematic
diagrams for simple piezoactuator and were transformed to the
structural-parametric model of the electro magneto elastic actuator.
The structural-parametric model of the electroelastic actuator was
determined in contrast electrical equivalent circuit for calculation
of piezoelectric transmitter and receiver [9-12]. In [8,27] was
used the transfer functions of the piezoactuator for the decision
problem absolute stability conditions for a system controlling the
deformation of the electro magneto elastic actuator. The elastic
compliances and the mechanical and adjusting characteristics of
the piezoactuator were found in [18,21-23,28,29] for calculation
its transfer functions and the structural-parametric models. The
structural-parametric model of the multilayer and compound
piezoactuator was determined in [18-20]. In this paper is solving
the problem of building the generalized structural parametric
model and the generalized parametric structural schematic
diagram of the electro magneto elastic actuator for the equation of
electro magneto elasticity.
Structural-Parametric Model of Electro Magneto Elastic
Actuator
The general structural-parametric model and the parametric
structural schematic diagram of the electro magneto elastic
actuator are obtained. In the electro elastic actuator are presented
six stress components 1T , 2T , 3T , 4T , 5T , 6T , the components 1T - 3T are
related to extension-compression stresses, 4T - 6T to shear stresses.
For the electro elastic actuator its deformation corresponds to
stressed state. For polarized piezoceramics PZT the matrix state
equations [12,14] connected the electric and elastic variables have
the form two equations, then the first equation describes the direct
piezoelectric effect, the second - the inverse piezoelectric effect.
(1)
E t
= +S s T d E (2)
Where D is the column matrix of electric induction; S is the
column matrix of relative deformations; T is the column matrix
of mechanical stresses; E is the column matrix of electric field
Afonin SM*
Department of Intellectual Technical Systems, National Research University of Electronic Technology (MIET), Russia
*Corresponding author: Afonin SM, Department of Intellectual Technical Systems, National Research University of Electronic Technology (MIET),
Russia, Email:
Submission: November 7, 2017 ; Published: January 05, 2018
Electro Magneto Elastic Actuator for Nanotechnology
and Biotechnology
Mini Review Mod Appl Pharm Pharmacol
Copyright © All rights are reserved by Afonin SM.
CRIMSONpublishers
http://www.crimsonpublishers.com
Abstract
The electro magneto elastic actuator is used for precise alignment in the nanotechnology, the biotechnology, the adaptive optics. The structural-
parametric models, the solution of wave equation, the generalized matrix transfer function of the electro magneto elastic actuator are determined. The
dynamic and static characteristics of the actuator are obtained. The parametric structural schematic diagram and the transfer functions are determined
for the control systems in the nanotechnology and the biotechnology. The structural-parametric models of the piezoactuator for the transverse,
longitudinal, shift piezoelectric effects are constructed.
Keywords: Electro magneto elastic actuator; Piezoactuator; Structural parametric model; Parametric structural schematic diagram; Transfer
function
ISSN 2637-7756
How to cite this article: Afonin SM. Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology. Mod Appl Pharm Pharmacol. 1(2). MAPP.0005010.
2018. DOI: 10.31031/MAPP.2018.01.000510
Modern Applications in Pharmacy & Pharmacology
2/4
Mod Appl Pharm Pharmacol
strength;
E
s is the elastic compliance matrix for constE = ;
is the matrix of dielectric constants for constT = ; t
d is the
transposed matrix of the piezoelectric modules.
The piezoactuator (piezoplate) has the following properties: δ
- the thickness, h – the height, b – the width, respectively { , ,l h bδ=
the length of the piezoactuator for the longitudinal, transverse and
shift piezoeffect. The direction of the polarization axis Р, i.e., the
direction along which polarization was performed, is usually taken
as the direction of axis 3. The equation of the inverse piezo effect for
controlling voltage [6,12] has the form.
( ) ( , )i mi m ij jS d t s T x tΨ
= Ψ + , ( , )iS x t xξ=∂ ∂ , ( ) ( ) ( )m mt E t U t δΨ = = (3)
where is the relative displacement of the cross section of the
piezoactuator along axis i, ( )m tΨ is the control parameter along axis
m, mid is the piezomodule, ( )mE t is the electric field strength along
axis m, ( )U t is the voltage between the electrodes of actuator, ijsΨ
is
the elastic compliance, jT is the mechanical stress along axis j and
i, j = 1, 2, …, 6; m = 1, 2, 3. The main size for the piezoactuator,
respectively, the thickness, the height, the width for the longitudinal,
transverse, shift piezoeffect. For calculation of actuator is used the
wave equation [6,7,12,14] for the wave propagation in a long line
with damping but without distortions. After Laplace transform is
obtained the linear ordinary second-order differential equation
with the parameter p, whereupon the original problem for the
partial differential hyperbolic equation of type using the Laplace
transform is reduced to the simpler problem [6,13] for the linear
ordinary differential equation.
2
2
2
( , )
( , ) 0
d x p
x p
dx
γ
Ξ
− Ξ = (4)
With its solution
( , ) x x
x p Ce Beγ γ−
Ξ = + (5)
where ( ),x pΞ is the Laplace transform of the displacement
of the section of the piezoactuator, p cγ αΨ
= + is the
propagation coefficient, cΨ is the sound speed for constΨ =
,is the damping coefficient, Ψ is the control parameter: E for the
voltage control, D for the current control, H for the magnet field
strength control. From (3, 5), the boundary conditions on loaded
surfaces, the strains along the axes the system of equations for
the generalized structural-parametric model and the generalized
parametric structural schematic diagram Figure 1 of the actuator
are determined
( )
( )1 12
1 21
( )
1 1
( ) ( )
ch ( ) ( )
sh
mi m
ij
d p
p F p
l p pM p
l
γ
γχ
γ
Ψ
 Ψ − 
     
 Ξ= − +         Ξ − Ξ        
   
,
( )
( )2 22
2 12
( )
1 1
( ) ( )
ch ( ) ( )
sh
mi m
ij
d p
p F p
l p pM p
l
γ
γχ
γ
Ψ
 Ψ −  
     
 Ξ = − +        Ξ − Ξ         
   
(6)
Where
0
ij
ij
s
S
χ
Ψ
Ψ
= ,
33 31 15
33 31 15
33 31 15
, ,
, ,
, ,
mi
d d d
d g g g
d d d


= 


,
3 3 1
3 3 1
3 3 1
, ,
, ,
, ,
m
E E E
D D D
H H H


Ψ =


,
33 11 55
33 11 55
33 11 55
, ,
, ,
, ,
E E E
D D D
ij
H H H
s s s
s s s s
s s s
Ψ


= 

,
{ , ,l h bδ= , { , ,E D H
c c c cΨ
= , { , ,E D H
γ γ γ γΨ
=
Figure 1: Generalized parametric structural schematic diagram of
the electro magneto elastic actuator.
Is the coefficient of the electro magnetolasticity (piezomodule
or coefficient of magnetostriction). Figure 1 shows the generalized
parametric structural schematic diagram of the electro magneto
elastic actuator corresponding to the set of equations (6). The
generalized transfer functions of the electro magneto elastic
actuator are the ratio of the Laplace transform of the displacement
of the face actuator and the Laplace transform of the corresponding
control parameter or the force at zero initial conditions. From (6)
the generalized matrix equation of the transfer functions of electro
magneto elastic actuator.
( )
( )
( ) ( ) ( )
( ) ( ) ( )
( )
( )
( )
1 11 12 13
1
2 21 22 23
2
m p
p W p W p W p
F p
p W p W p W p
F p
 Ψ
   Ξ  
=     Ξ     
 
(7)
For and thestaticdisplacementofthefacesofthepiezoactuator
for the transverse piezoeffect are obtained.
( )
( )
( )
11 0 31 0 2
1 0
1 2
0
lim
p
pW p U d hU M
p M M
α
ξ
δ δ→
→
∞= =
+
(8)
(9) (9)
ForthepiezoactuatorfromPZTunderthetransversepiezoeffect
at 1m M<< and 2m M<< , 10
31 2.5 10d −
= ⋅ m/V, 20h δ = , 100U =
V, 1 2M = kg and 2 8M = kg the static displacement of the faces are
determined nm, nm,
nm. For the approximation of the hyperbolic cotangent by two
terms of the power series in transfer function (7) the following
expressions of the transfer function of the piezoactuator is
obtained for the elastic-inertial load at 1M → ∞ ,
2m M<< under
the transverse piezoeffect
( )
312
2 2
11
( )
( )
( ) 1 ( 2 1)E
e t t t
d hp
W p
U p C C T p T p
δ
ξ
Ξ
= =
+ + +
(10)
( )2 11
E
t eT M C C= + , ( )( )2
11 113E E E
t eh C c M C Cξ α= +
Modern Applications in Pharmacy & Pharmacology
How to cite this article: Afonin SM. Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology. Mod Appl Pharm Pharmacol. 1(2). MAPP.0005010.
2018. DOI: 10.31031/MAPP.2018.01.000510
3/4
Mod Appl Pharm Pharmacol
Where ( )U p the Laplace is transform of the voltage, tT is the
timeconstantand tξ isthedampingcoefficientofthepiezoactuator.
The expression for the transient response of the voltage-controlled
piezoactuator for the elastic-inertial load under the transverse
piezoeffect is determined.
( ) ( )2
1 sin
1
t
t
m t t
t
t
T
e
t t
ξ
ξ ξ ω φ
ξ
 
− 
 
=− + 
− 
 
 
,
,
2
1 t
t
tT
ξ
ω
−
=
2
1
arctg t
t
t
ξ
φ
ξ
 −
 =
 
 
, (11)
Where mξ the steady-state value of displacement of the
piezoactuator is, mU is the amplitude of the voltage. For the
voltage-controlled piezoactuator from the piezoceramics PZT
under the transverse piezoelectric effect for the elastic-inertial load
1M → ∞ , 2m M<< and input voltage with amplitude 120mU = V at
10
31 2.5 10d −
= ⋅ m/V, 20h δ = , 2 4M = kg, 7
11 2 10E
C = ⋅ N/m, 7
0.5 10eC= ⋅
H/m are obtained values nm, 3
0.4 10tT −
= ⋅ c.
Results and Discussions
The structural-parametric model and parametric structural
schematic diagrams of the voltage-controlled piezoactuator for
the longitudinal, transverse and shift piezoelectric effects are
determined from the generalized structural-parametric model of
the electro magneto elastic actuator for the nanotechnology and the
biotechnology with the replacement of the generalized parameters.
The generalized structural-parametric model, the generalized
parametric structural schematic diagram and the matrix equation
of the electro magneto elastic actuator are obtained from the
solutions of the wave equation with the Laplace transform and from
its deformations along the coordinate axes. From the generalized
matrix equation for the transfer functions of the electro magneto
elastic actuator after algebraic transformations are constructed
the matrix equations of the piezoactuator for the longitudinal,
transverse and shift piezoelectric effects.
Conclusion
The deformations of the actuator are described by the
matrix equation for the transfer functions of the electro magneto
elastic actuator for precise alignment in the nanotechnology, the
biotechnology, the adaptive optics. The structural-parametric
model, the matrix transfer function of the electro magneto
elastic actuator is determined. For the control systems in the
nanotechnology and the biotechnology. The structural-parametric
model, the matrix equation and the parametric structural schematic
diagram of the piezoactuator for the transverse, longitudinal, shift
piezoelectric effects are obtained from the generalized structural-
parametric model of the electro magneto elastic actuator. From
the solution of the wave equation, from the equation of the electro
Magneto elasticity and the deformations along the coordinate axes
the generalized structural-parametric model and the generalized
parametric structural schematic diagram of the electro Magneto
elastic actuator are constructed for the control systems for the
nanotechnology and the biotechnology.
References
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sion Engineering. Engineering and Technology 3(6): 110-119.
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of electro Magneto elastic actuators nano- and microdisplacement for
mechatronic systems. International Journal of Theoretical and Applied
Mathematics 2(2): 52-59.
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[11]
How to cite this article: Afonin SM. Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology. Mod Appl Pharm Pharmacol. 1(2). MAPP.0005010.
2018. DOI: 10.31031/MAPP.2018.01.000510
Modern Applications in Pharmacy & Pharmacology
4/4
Mod Appl Pharm Pharmacol
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tor for nano-and microdisplacement of mechatronic system. In: Bartul Z,
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Crimson Publishers-Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology

  • 1. 1/4 Introduction The electro magneto elastic actuator of the piezoeffect, the piezomagnetic effect, the electrostriction or the magnetostriction effect is used for precise alignment in the nanotechnology, the biotechnology and the adaptive optics [1-32]. The piezoactuator on the inverse piezoeffect is serves for the actuation of mechanisms or the management, converts electrical signals into displacement and force [1-8]. The piezoactuator for the nanomechanics is provided thedisplacementfromnanometerstotensofmicrometers,aforceto 1000N. The piezoactuator is used for research in the nanomedicine and the nanobiotechnology for the scanning tunneling microscopes, scanning force microscopes and atomic force microscopes [14-32]. In the present paper the generalized structural-parametric modelandthegeneralizedparametricstructuralschematicdiagram of the electro magneto elastic actuator are constructed by solving the wave equation with the Laplace transform for the equation of the electro magnetolasticity, the boundary conditions on loaded working surfaces of the actuator, the strains along the coordinate axes.Thetransferfunctionsandtheparametricstructuralschematic diagrams of the piezoactuator are obtained from the generalized structural-parametric model. In [6,7] was determined the solution of the wave equation of the piezoactuator. In the [14-16,30,31] were obtained the structural-parametric models, the schematic diagrams for simple piezoactuator and were transformed to the structural-parametric model of the electro magneto elastic actuator. The structural-parametric model of the electroelastic actuator was determined in contrast electrical equivalent circuit for calculation of piezoelectric transmitter and receiver [9-12]. In [8,27] was used the transfer functions of the piezoactuator for the decision problem absolute stability conditions for a system controlling the deformation of the electro magneto elastic actuator. The elastic compliances and the mechanical and adjusting characteristics of the piezoactuator were found in [18,21-23,28,29] for calculation its transfer functions and the structural-parametric models. The structural-parametric model of the multilayer and compound piezoactuator was determined in [18-20]. In this paper is solving the problem of building the generalized structural parametric model and the generalized parametric structural schematic diagram of the electro magneto elastic actuator for the equation of electro magneto elasticity. Structural-Parametric Model of Electro Magneto Elastic Actuator The general structural-parametric model and the parametric structural schematic diagram of the electro magneto elastic actuator are obtained. In the electro elastic actuator are presented six stress components 1T , 2T , 3T , 4T , 5T , 6T , the components 1T - 3T are related to extension-compression stresses, 4T - 6T to shear stresses. For the electro elastic actuator its deformation corresponds to stressed state. For polarized piezoceramics PZT the matrix state equations [12,14] connected the electric and elastic variables have the form two equations, then the first equation describes the direct piezoelectric effect, the second - the inverse piezoelectric effect. (1) E t = +S s T d E (2) Where D is the column matrix of electric induction; S is the column matrix of relative deformations; T is the column matrix of mechanical stresses; E is the column matrix of electric field Afonin SM* Department of Intellectual Technical Systems, National Research University of Electronic Technology (MIET), Russia *Corresponding author: Afonin SM, Department of Intellectual Technical Systems, National Research University of Electronic Technology (MIET), Russia, Email: Submission: November 7, 2017 ; Published: January 05, 2018 Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology Mini Review Mod Appl Pharm Pharmacol Copyright © All rights are reserved by Afonin SM. CRIMSONpublishers http://www.crimsonpublishers.com Abstract The electro magneto elastic actuator is used for precise alignment in the nanotechnology, the biotechnology, the adaptive optics. The structural- parametric models, the solution of wave equation, the generalized matrix transfer function of the electro magneto elastic actuator are determined. The dynamic and static characteristics of the actuator are obtained. The parametric structural schematic diagram and the transfer functions are determined for the control systems in the nanotechnology and the biotechnology. The structural-parametric models of the piezoactuator for the transverse, longitudinal, shift piezoelectric effects are constructed. Keywords: Electro magneto elastic actuator; Piezoactuator; Structural parametric model; Parametric structural schematic diagram; Transfer function ISSN 2637-7756
  • 2. How to cite this article: Afonin SM. Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology. Mod Appl Pharm Pharmacol. 1(2). MAPP.0005010. 2018. DOI: 10.31031/MAPP.2018.01.000510 Modern Applications in Pharmacy & Pharmacology 2/4 Mod Appl Pharm Pharmacol strength; E s is the elastic compliance matrix for constE = ; is the matrix of dielectric constants for constT = ; t d is the transposed matrix of the piezoelectric modules. The piezoactuator (piezoplate) has the following properties: δ - the thickness, h – the height, b – the width, respectively { , ,l h bδ= the length of the piezoactuator for the longitudinal, transverse and shift piezoeffect. The direction of the polarization axis Р, i.e., the direction along which polarization was performed, is usually taken as the direction of axis 3. The equation of the inverse piezo effect for controlling voltage [6,12] has the form. ( ) ( , )i mi m ij jS d t s T x tΨ = Ψ + , ( , )iS x t xξ=∂ ∂ , ( ) ( ) ( )m mt E t U t δΨ = = (3) where is the relative displacement of the cross section of the piezoactuator along axis i, ( )m tΨ is the control parameter along axis m, mid is the piezomodule, ( )mE t is the electric field strength along axis m, ( )U t is the voltage between the electrodes of actuator, ijsΨ is the elastic compliance, jT is the mechanical stress along axis j and i, j = 1, 2, …, 6; m = 1, 2, 3. The main size for the piezoactuator, respectively, the thickness, the height, the width for the longitudinal, transverse, shift piezoeffect. For calculation of actuator is used the wave equation [6,7,12,14] for the wave propagation in a long line with damping but without distortions. After Laplace transform is obtained the linear ordinary second-order differential equation with the parameter p, whereupon the original problem for the partial differential hyperbolic equation of type using the Laplace transform is reduced to the simpler problem [6,13] for the linear ordinary differential equation. 2 2 2 ( , ) ( , ) 0 d x p x p dx γ Ξ − Ξ = (4) With its solution ( , ) x x x p Ce Beγ γ− Ξ = + (5) where ( ),x pΞ is the Laplace transform of the displacement of the section of the piezoactuator, p cγ αΨ = + is the propagation coefficient, cΨ is the sound speed for constΨ = ,is the damping coefficient, Ψ is the control parameter: E for the voltage control, D for the current control, H for the magnet field strength control. From (3, 5), the boundary conditions on loaded surfaces, the strains along the axes the system of equations for the generalized structural-parametric model and the generalized parametric structural schematic diagram Figure 1 of the actuator are determined ( ) ( )1 12 1 21 ( ) 1 1 ( ) ( ) ch ( ) ( ) sh mi m ij d p p F p l p pM p l γ γχ γ Ψ  Ψ −         Ξ= − +         Ξ − Ξ             , ( ) ( )2 22 2 12 ( ) 1 1 ( ) ( ) ch ( ) ( ) sh mi m ij d p p F p l p pM p l γ γχ γ Ψ  Ψ −          Ξ = − +        Ξ − Ξ              (6) Where 0 ij ij s S χ Ψ Ψ = , 33 31 15 33 31 15 33 31 15 , , , , , , mi d d d d g g g d d d   =    , 3 3 1 3 3 1 3 3 1 , , , , , , m E E E D D D H H H   Ψ =   , 33 11 55 33 11 55 33 11 55 , , , , , , E E E D D D ij H H H s s s s s s s s s s Ψ   =   , { , ,l h bδ= , { , ,E D H c c c cΨ = , { , ,E D H γ γ γ γΨ = Figure 1: Generalized parametric structural schematic diagram of the electro magneto elastic actuator. Is the coefficient of the electro magnetolasticity (piezomodule or coefficient of magnetostriction). Figure 1 shows the generalized parametric structural schematic diagram of the electro magneto elastic actuator corresponding to the set of equations (6). The generalized transfer functions of the electro magneto elastic actuator are the ratio of the Laplace transform of the displacement of the face actuator and the Laplace transform of the corresponding control parameter or the force at zero initial conditions. From (6) the generalized matrix equation of the transfer functions of electro magneto elastic actuator. ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) 1 11 12 13 1 2 21 22 23 2 m p p W p W p W p F p p W p W p W p F p  Ψ    Ξ   =     Ξ        (7) For and thestaticdisplacementofthefacesofthepiezoactuator for the transverse piezoeffect are obtained. ( ) ( ) ( ) 11 0 31 0 2 1 0 1 2 0 lim p pW p U d hU M p M M α ξ δ δ→ → ∞= = + (8) (9) (9) ForthepiezoactuatorfromPZTunderthetransversepiezoeffect at 1m M<< and 2m M<< , 10 31 2.5 10d − = ⋅ m/V, 20h δ = , 100U = V, 1 2M = kg and 2 8M = kg the static displacement of the faces are determined nm, nm, nm. For the approximation of the hyperbolic cotangent by two terms of the power series in transfer function (7) the following expressions of the transfer function of the piezoactuator is obtained for the elastic-inertial load at 1M → ∞ , 2m M<< under the transverse piezoeffect ( ) 312 2 2 11 ( ) ( ) ( ) 1 ( 2 1)E e t t t d hp W p U p C C T p T p δ ξ Ξ = = + + + (10) ( )2 11 E t eT M C C= + , ( )( )2 11 113E E E t eh C c M C Cξ α= +
  • 3. Modern Applications in Pharmacy & Pharmacology How to cite this article: Afonin SM. Electro Magneto Elastic Actuator for Nanotechnology and Biotechnology. Mod Appl Pharm Pharmacol. 1(2). MAPP.0005010. 2018. DOI: 10.31031/MAPP.2018.01.000510 3/4 Mod Appl Pharm Pharmacol Where ( )U p the Laplace is transform of the voltage, tT is the timeconstantand tξ isthedampingcoefficientofthepiezoactuator. The expression for the transient response of the voltage-controlled piezoactuator for the elastic-inertial load under the transverse piezoeffect is determined. ( ) ( )2 1 sin 1 t t m t t t t T e t t ξ ξ ξ ω φ ξ   −    =− +  −      , , 2 1 t t tT ξ ω − = 2 1 arctg t t t ξ φ ξ  −  =     , (11) Where mξ the steady-state value of displacement of the piezoactuator is, mU is the amplitude of the voltage. For the voltage-controlled piezoactuator from the piezoceramics PZT under the transverse piezoelectric effect for the elastic-inertial load 1M → ∞ , 2m M<< and input voltage with amplitude 120mU = V at 10 31 2.5 10d − = ⋅ m/V, 20h δ = , 2 4M = kg, 7 11 2 10E C = ⋅ N/m, 7 0.5 10eC= ⋅ H/m are obtained values nm, 3 0.4 10tT − = ⋅ c. Results and Discussions The structural-parametric model and parametric structural schematic diagrams of the voltage-controlled piezoactuator for the longitudinal, transverse and shift piezoelectric effects are determined from the generalized structural-parametric model of the electro magneto elastic actuator for the nanotechnology and the biotechnology with the replacement of the generalized parameters. The generalized structural-parametric model, the generalized parametric structural schematic diagram and the matrix equation of the electro magneto elastic actuator are obtained from the solutions of the wave equation with the Laplace transform and from its deformations along the coordinate axes. From the generalized matrix equation for the transfer functions of the electro magneto elastic actuator after algebraic transformations are constructed the matrix equations of the piezoactuator for the longitudinal, transverse and shift piezoelectric effects. Conclusion The deformations of the actuator are described by the matrix equation for the transfer functions of the electro magneto elastic actuator for precise alignment in the nanotechnology, the biotechnology, the adaptive optics. The structural-parametric model, the matrix transfer function of the electro magneto elastic actuator is determined. For the control systems in the nanotechnology and the biotechnology. The structural-parametric model, the matrix equation and the parametric structural schematic diagram of the piezoactuator for the transverse, longitudinal, shift piezoelectric effects are obtained from the generalized structural- parametric model of the electro magneto elastic actuator. From the solution of the wave equation, from the equation of the electro Magneto elasticity and the deformations along the coordinate axes the generalized structural-parametric model and the generalized parametric structural schematic diagram of the electro Magneto elastic actuator are constructed for the control systems for the nanotechnology and the biotechnology. References 1. Schultz J, Ueda J, Asada H (2017) Cellular actuators. Butter- worth-Heinemann Publisher, Oxford, UK, p. 382. 2. Uchino K (1997) Piezoelectric actuator and ultrasonic motors, Springer, US, p. 347. 3. Przybylski J (2015) Static and dynamic analysis of a flextensional trans- ducer with an axial piezoelectric actuation. 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