Measurement of the thickness of Alumina (Al2O3) using MProbe thin-film measurement system. Thickness and n&k can be measured quickly (<1 s) and reliably. Layer can be measured on different substrates and as a part of multilayer filmstack

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Aluminum oxide and ALON measurement
Aluminum oxide (alumina) is widely used as a protective coating in various applications.
Optical properties of alumina depend on the deposition conditions. Both thickness and optical constants of the alumina can be measured accurately using MProbe system.
Below are several examples of alumina & ALON measurement.
1.
Example 1 Alumina on glass slide
MProbe Vis system (400-1000nm wavelength range) was used for this measurement.
Fig. 1 Results of the alumina on glass measurement. Fit of the model to measured data. Thickness and R.I. of alumina are determined. Thickness: 1202nm (R.I. see Fig. 2)

2. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
Fig. 2. Measured R.I. of alumina (yellow) compared to a standard library alumina (red)

3. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
2.
Example 2. Yttrium oxide/alumina on quartz substrate
MProbe Vis system (400-1000nm wavelength range) was used for this measurement.
Fig. 3. Results of the Y2O3/Alumina/Quartz measurement. Fit of the model to measured data. Thickness Y2O3: 2535nm , Alumina: 938 nm

4. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com
3.
Example 3. ALON/alumina on quartz
MProbe VisHR system (700-1000nm wavelength range) was used for this measurement.
Fig. 4. Raw reflectance spectrum of the ALON/Alumina/quartz sample
Fig. 5. Results of the measurement: ALON thickness-32 μm,
Alumina thickness - 5.4 μm (additional interface layer 2.3 μm is also visible). Peak positions indicate layer thicknesses. http://www.semiconsoft.com