MProbe thickness measurement system is integrated with a XY motorized stage to measure thickness uniformity across the samples.

1. MProbe system with mapping option
Position precision
< 2mm
Resolution
< 0.5 mm
Drive
Stepper motor
Controller
Integrated with stage
Communication
USB port
Dimension
19” x 19” x 10” (for 6” and 8” stages)
Weight
12 kg
Mapping recipe setup and running
Contour map of the thickness measurement
(thickness color coded)
Hardware options
-150XYM
6”x6” (150x150mm) XY motorized stage
-200XYM
8 x8”(200x200mm) XY motorized stage
-300XYM
12x12”(300x300mm) XY motorized stage
-VAC
Vacuum chuck (Sample holder insert with microholes and a motor pump)
-TR
Transmittance measurement
Majority of translucent or lightly absorbing films can be measured quickly and reliably:Oxides,Nitrides, Photoresists, Polymers, Semiconductors (Si, aSi, polySi), Hard coatings (SiC, DLC), Polymer coatings (Parylene, PMMA, Polyamides), thin metal films and many more.
Thickness and other parameters uniformity measurement are important for many applications.
Mapping Option include:
1. XY motorized stage (150,200 and 300mm travel)
2. Solid 19x19” aluminum platform
3. Probe holder (Reflectance and/or transmittance measurement options are available) with optical system
4. Stage contoller
5. Software support (mapping recipes, etc.)
Mapping Option
MProbe Thin Film Measurement System
It is easy to be an expert with MProbe