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1. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
Thin Film Measurement solution
Software, sensors, custom development
and integration
Diamond films measurement
A set of diamond films on Si and freestanding films were measured using MProbe
spectroscopic reflectometer system. Films on Si were measured using spectral
reflectance. Freestanding films were measured using transmittance (optional fixture).
Two spectrometer were used:
a) Vis spectrometer 400-1000nm (~ 1.5nm spectral resolution) for thinner films
b) High-resolution Vis spectrometer 700-1000nm (0.35nm resolution) for thicker
films (> 20um films)
Measurement site ~ 2 mm (reflectance measurement was done without focusing lens,
transmittance measurement were done using collimating lens)
Sample Measured
thickness,um
Comments
1- square 0.329 Diamond film on Si
Large square
2 - square 0.441 Diamond film on Si
Large square
3 - square 1.019 Diamond film on Si
Large square
4 - small square 0.697 Diamond film on Si
Small square
5 - small
square
1.019 Diamond film on Si
Small square
6 - small square 0.892
Free standing 1 46.965 Diamond film piece

2. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
Details of the measurement.
I. Free standing diamond film.
Spectral transmittance measurement was done in 700-1000nm range using high-
resolution spectrometer. The thickness was found using thick film algorithm (based
on FFT)
Fig, 1. Raw/uncalibrated transmittance data (free standing 1) oscillation indicate
interference due to ~ 40um thickness.
Fig. 2 Same data as Fig. 1 only calibrated to show real transmittance spectrum

3. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
Fig. 3 Free standing 1 sample - thickness is determined using thick film algorithm
(peak indicates the thickness value). Thickness 469468 Angstroms is displayed is
parameters table.
II. Sample 1 (Si square with diamond film)
Fig. 4 Measurement results of the diamond film thickness (sample 1). Thickness is
inferred from the best fit to measured data. Thickness=3290 Angstroms

4. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
III. Sample 2 (Si square with diamond film)
Fig. 5 Measurement results of the diamond film thickness(sample 2). Thickness is
inferred from the best fit to measured data. Thickness=4411 Angstroms. This sample
shows significantly high surface roughness (than sample 1). Effective surface
roughness of ~ 490A was inferred from the best fit.
IV. Sample 3 (Si square with diamond film)
Fig. 6 Measurement results of the diamond film thickness(sample 3). Thickness is
determined using thick film algorithm. Thickness = 10190Angstroms

5. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
Fig. 7. Measurement results of the diamond film thickness(sample 3). Thickness is
inferred from the best fit to measured data. Thickness=10190 Angstroms. This sample
shows significantly high surface roughness (than sample 2). Effective surface
roughness of ~ 900A was inferred from the best fit. The quality of the fit is decreased
because of surface roughness – it is easier to use thick film algorithm (Fig. 6)

6. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
V Sample 4 (small square)
Fig. 8 Measurement results of the diamond film thickness (sample 4). Thickness is
inferred from the best fit to measured data. Thickness=6971 Angstroms. This sample
shows low surface roughness. Effective surface roughness of ~ 200A was inferred from
the best fit.
VI. Sample 5 (small square)
Fig. 9 Measurement results of the diamond film thickness(sample 5). Thickness is
determined using thick film algorithm. Thickness = 10190 Angstroms

7. 83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com
VII Sample 6 (small square)
Fig. 10. Measurement results of the diamond film thickness (sample 6). Thickness is
determined using thick film algorithm. Thickness = 8960 Angstroms