Basic Cleanroom Protocol


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  • CleanroomA room in which the air supply, air distribution, filtration of air supply, materials of construction, and operating procedures are regulated to control airborne particle concentrations so that appropriate air cleanliness levels, as defined by FED-STD-209 (see section 2), can be met. clean zoneA defined space in which the concentration of air-borne particles is controlled to a specified airborne particulate cleanliness class, as defined by FED-STD-209.IES INSTITUTE OF ENVIRONMENTAL SCIENCES940 East Northwest HighwayMount Prospect, Illinois 60056Telephone 708.255.1561 Facsimile 708.255・1 699
  • Basic Cleanroom Protocol

    1. 1. CLEANROOM/CLEANZONE PROTOCOL<br />PRESENTED BY:<br />Sid Calayag<br />
    2. 2. TRAINING OBJECTIVES<br />Understand the requirements and prohibitions of production areas<br />2. Apply the proper discipline<br />
    3. 3. AGENDA<br />
    4. 4.
    5. 5. CLEANROOM BASICS<br />What is a Clean room?<br />A clean environment designed to reduce the contamination of processes and materials.<br />This is accomplished by removing or reducing contamination sources.<br />
    6. 6. Cleanroom BASICS<br />A cleanroom is a controlled environment that regulates the following:<br /><ul><li>particulate matters in the air( i.e. dust and other particles)
    7. 7. temperature
    8. 8. humidity
    9. 9. pressure
    10. 10. contaminants from people, machines, etc. </li></li></ul><li>Cleanroom BASICS<br />DEFINITION OF TERMS<br />CLEANROOM<br />An enclosed space employing control over the<br />particulate matter in the air, temperature, humidity,<br />pressure and human contributed contaminants.<br />CLEANZONE<br />A defined space in which the concentration of airborne particulate matter, including human contaminants is controlled to specified limits.<br />B<br />
    11. 11. Basic components of Cleanroom<br />CEILING GRID<br />GLASS WINDOWS<br />WALL PANELS<br />CONDUCTIVE FLOORS OR RAISED FLOOR<br />
    12. 12. Basic components of Cleanroom<br />FULL GLASS WINDOWS<br />ANTE ROOM<br />AIR SHOWERS<br />PASS BOX<br />
    13. 13.
    14. 14. CIVIL WORKS<br />ELECTROMECH WORKS<br />BUILDING/CONSTRUCTION<br />Cleanroom at construction stage<br />
    15. 15. Cleanroom stages of construction<br /><ul><li>INTERIOR WORKS
    16. 16. Columns
    17. 17. Slabs
    18. 18. Walls
    19. 19. Sanding and Painting
    20. 20. Secondary Ceiling and Installation
    21. 21. Painting Works</li></ul>CIVIL WORKS<br /><ul><li>INTERIOR WORKS
    22. 22. Piping Works
    23. 23. Equipment Installation
    24. 24. Support System Installation
    25. 25. Lightings
    26. 26. Fire Protection
    27. 27. Enclosure of area and issuance of access route
    28. 28. To remove the generated dust before it spread</li></ul>ENCLOSURE<br /><ul><li>OTHERS
    29. 29. Main Feeder line
    30. 30. Other Electromechanical Works and etc.</li></ul>ELECTRO-MECH’L WORKS<br />
    31. 31. CONSTRUCTIOn STAGE APPARELS & ppe<br />helmet<br />Wear<br /><ul><li>Shoes for indoor use
    32. 32. Helmet</li></ul>Shoes for Indoor use<br />
    33. 33. Basic Cleanliness Requirement<br /><ul><li>Materials
    34. 34. To be stored in a clean & orderly manner
    35. 35. Others
    36. 36. Dirty Work to be isolated
    37. 37. Sweep daily
    38. 38. Wet with sawdust</li></li></ul><li>5S and Housekeeping<br />Every user is responsible for keeping the cleanroom clean<br />Always clean your workspace before leaving<br />Don’t leave or store items on or in equipment<br />Do not set liquids on any equipment<br />Properly store all materials before leaving the cleanroom<br />Last one out should make sure the room is in a safe idle mode<br />
    39. 39.
    40. 40. <ul><li> LAUNDRY: Garments shall be changed and washed at least </li></ul>once a week.<br />1. head cap / headgear<br />2. Safety Glasses<br />3. Facemask<br />static dissipative<br /> smocks <br />In-plant shoes/<br /> safety shoes<br />Cleanroom apparels & PPE<br />
    41. 41. <ul><li> LAUNDRY: Garments shall be changed and washed at least </li></ul>once a week.<br />Ultra Clean suit & apparels<br />REQUIRED COMPLETE APPAREL<br />Cleanroom:<br />1. hair net (before hood)<br />2. facemask<br />3. bunny suit <br />4. booties over in-plant shoes<br />
    42. 42. BASIC CLEANROOM PROTOCOL<br /><ul><li>Entrance Control
    43. 43. Air lock room
    44. 44. Sticky/Tacky mats
    45. 45. Materials & Tools
    46. 46. clean materials to be brought into the building
    47. 47. clean materials before entering</li></li></ul><li>Cleanroom PRACTICES<br />All workers must attend an orientation,<br />Chemicals must be approved<br />Equipment and materials must be cleaned<br />Moving must be done with care<br />Eating, smoking and the chewing gums is prohibited<br />Housekeeping<br />
    48. 48. Cleanroom requirement<br /><ul><li>No visible dust
    49. 49. No rust, no peeling paint
    50. 50. No sand/pebbles
    51. 51. No fiber/hair, wood chips
    52. 52. No plastic debris, carbon/paper
    53. 53. No styro foam chips
    54. 54. No presence of food</li></li></ul><li>Cleanroom requirement & practices<br />Implementing Clean Production Environment<br />Based on 4 principles   <br />Planning Stage<br />Prevent entry of dust<br />Prevent dustgeneration<br />Remove dust<br />Do not accumulate<br />Apply appropriate filter<br />Choose anti-static materials<br />Positive pressure/barricade<br />Clean suit/eqpt layout<br />Apply energy saving systems<br />Based on 4 principles    <br />Operational Stage<br />Prevent entry of dust<br />Prevent dustgeneration<br />Remove dust<br />Do not accumulate<br />Air shower operational<br />Cleaning implemented<br />Proper RH control, etc<br />Room pressure control<br />Implementation and Maintenance of Clean Production Environment<br />Improving workers level of consciousness is very important<br />
    55. 55. ① Do not allow dusts to flow into the ducting system<br />1.airtight ducting system <br />2.install HEPA filters at all supply side<br />3.positive pressure beyond HEPA<br />③ Remove immediately generated particles <br />1.provide localized exhaust near sources of contaminants<br />2.make indoor air distribution as laminar as possible<br />② Minimize dust generation in the room<br />1.wearing of clean suits<br />2.workflow/layout to reduce unnecessary movements <br />3.use of finishing materials that generate few particles<br />4.No bringing of useless things inside<br />④ Do not pile-up dusts or scatter these particles<br />1.eliminate unnecessary horizontal surfaces<br />2.Use round ends instead of angles<br /> not install unnecessary equipment that vibrates<br />① Do the cleaning(people and things) at the anteroom before bringing inside the cleanroom<br />1.installation of air shower at anteroon<br />APPLICATION OF 4 PRINCIPLES<br />
    56. 56. +pressure against outside<br />Prevent entry of dust <br /><ul><li>basic control measures(1)</li></ul>・ install air shower/pass box<br /> - prevent dust from entering during opening/closing of doors <br /> -dusting off before entry<br />・ pressurize the room(cleanroom indoor) to prevent entry of dust from outside<br />air shower<br />pass box<br /><ul><li>JACA
    57. 57. >10Pa</li></ul>(1.02mmAq)<br /><ul><li>FDA
    58. 58. >0.05inAq</li></ul>(1.27mmAq)<br /><ul><li>ISO13408-1
    59. 59. 10~15Pa</li></ul>・ provide sticky mat<br /> place mat near entry points to prevent dust under the shoes from entering<br />
    60. 60. < Effects of Cosmetic Products><br />100,000<br />10,000<br />1,000<br />[ particles/cft/min ]<br />female(20’s)<br />100<br /> male, thick beard(30’s)<br /> male, slight beard(40’s)<br /> male, slight beard(40’s)<br />10<br />bare<br />after <br />washing<br />face<br />lotion/<br />facial<br />foundation<br />eye shadow/<br />cheek <br />blush on<br />bunny suit<br />smack gown<br />source~実践 LSI工場清浄化技術 (1985) <br />① no surface breakup/detachment<br />② smooth surface with few gaps<br />③ durable/wear resistant<br />④ static electricity is hard to generate<br />⑤ difficult to be stained but easy to clean<br />⑥ acid/alkali resistant<br />⑦ low outgassing properties<br />cleanroom interior finish<br />Prevent entry of dust <br /><ul><li>basic control measures(2)
    61. 61. wear cleanroom suits/gown
    62. 62. ban use of cosmetics
    63. 63. use of low/non-particle generating finishing materials</li></li></ul><li>Cleanroom CONTAMINANT<br /><ul><li>people
    64. 64. manufacturing equipment
    65. 65. tools
    66. 66. processes/utilities(CDA, N2, DI water)
    67. 67. office equipment and supplies(computers, papers)
    68. 68. molds, fungi, bacteria
    69. 69. structural materials(paint peels, outgassing) </li></li></ul><li>Dust Removal by Filtration<br />Dust removal by supplying clean air into the equipment<br />Dust removal by room air recirculation<br />Dust from room and outdoor air (OA) can mix<br />filter selection and recirculating air volume calculation <br />Direct supply of clean air into the machine<br />Ensure particle concentration within room specification<br />Ensure particle concentration within room specification<br />外気<br />Recirculating <br />air<br />Filter<br />Room<br />Exhaust<br />OA<br />Room<br />Exhaust<br />particle sources<br />Return air<br />
    70. 70. Daily Cleaning<br />Regular Cleaning<br />・once a day/after each shift<br />・wet type cleaning(using water)<br />・sticky mat changing<br />・dry type cleaning by vacuum cleaner<br />・cleaning done during operation<br />・once per week/per month or semiannually<br />・done by service cleaners<br />・cleaning including moving the equipment <br />・done during shutdown<br />CLEANING THE Cleanroom<br />
    71. 71. ELECTROSTATIC DISCHARGE (esd)<br />What is STATIC ELECTRICITY?<br />- It is an electrical charge atREST.<br />
    72. 72. We generate static electricity when….<br />Electrical charge is created by changes in capacitance as follows;<br /><ul><li> When a footwear of a person separates from</li></ul> the floor, it creates friction which is a source <br /> of electrical charge.<br /><ul><li> When a person moves, clothing separates </li></ul> from body parts. This creates friction<br /> which is a source of electrical charge.<br /><ul><li> When a person moves, the body parts rub</li></ul> with the surrounding air. Friction caused by <br /> contact and separation generates electrical <br /> charge.<br />
    73. 73. 4 Principles of Maintaining Cleanliness<br />1. Prevent entry of dust.<br />Minimize sources that generate dust. <br />Remove the dust generated in the room before they spread. <br />4. Do not accumulate and scatter the dust.<br />
    74. 74. End of presentation<br />
    75. 75. <ul><li>Prepared for TI Construction Group</li></ul>By: Sid Calayag<br /><ul><li>References:
    76. 76. TI Cleanroom Basic Cleanroom Orientation
    77. 77. Basic Cleanroom Orientation</li>