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Basic Cleanroom Protocol

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Basic Cleanroom Protocol

  1. 1. CLEANROOM/CLEANZONE PROTOCOL<br />PRESENTED BY:<br />Sid Calayag<br />
  2. 2. TRAINING OBJECTIVES<br />Understand the requirements and prohibitions of production areas<br />2. Apply the proper discipline<br />
  3. 3. AGENDA<br />
  4. 4.
  5. 5. CLEANROOM BASICS<br />What is a Clean room?<br />A clean environment designed to reduce the contamination of processes and materials.<br />This is accomplished by removing or reducing contamination sources.<br />
  6. 6. Cleanroom BASICS<br />A cleanroom is a controlled environment that regulates the following:<br /><ul><li>particulate matters in the air( i.e. dust and other particles)
  7. 7. temperature
  8. 8. humidity
  9. 9. pressure
  10. 10. contaminants from people, machines, etc. </li></li></ul><li>Cleanroom BASICS<br />DEFINITION OF TERMS<br />CLEANROOM<br />An enclosed space employing control over the<br />particulate matter in the air, temperature, humidity,<br />pressure and human contributed contaminants.<br />CLEANZONE<br />A defined space in which the concentration of airborne particulate matter, including human contaminants is controlled to specified limits.<br />B<br />
  11. 11. Basic components of Cleanroom<br />CEILING GRID<br />GLASS WINDOWS<br />WALL PANELS<br />CONDUCTIVE FLOORS OR RAISED FLOOR<br />
  12. 12. Basic components of Cleanroom<br />FULL GLASS WINDOWS<br />ANTE ROOM<br />AIR SHOWERS<br />PASS BOX<br />
  13. 13.
  14. 14. CIVIL WORKS<br />ELECTROMECH WORKS<br />BUILDING/CONSTRUCTION<br />Cleanroom at construction stage<br />
  15. 15. Cleanroom stages of construction<br /><ul><li>INTERIOR WORKS
  16. 16. Columns
  17. 17. Slabs
  18. 18. Walls
  19. 19. Sanding and Painting
  20. 20. Secondary Ceiling and Installation
  21. 21. Painting Works</li></ul>CIVIL WORKS<br /><ul><li>INTERIOR WORKS
  22. 22. Piping Works
  23. 23. Equipment Installation
  24. 24. Support System Installation
  25. 25. Lightings
  26. 26. Fire Protection
  27. 27. Enclosure of area and issuance of access route
  28. 28. To remove the generated dust before it spread</li></ul>ENCLOSURE<br /><ul><li>OTHERS
  29. 29. Main Feeder line
  30. 30. Other Electromechanical Works and etc.</li></ul>ELECTRO-MECH’L WORKS<br />
  31. 31. CONSTRUCTIOn STAGE APPARELS & ppe<br />helmet<br />Wear<br /><ul><li>Shoes for indoor use
  32. 32. Helmet</li></ul>Shoes for Indoor use<br />
  33. 33. Basic Cleanliness Requirement<br /><ul><li>Materials
  34. 34. To be stored in a clean & orderly manner
  35. 35. Others
  36. 36. Dirty Work to be isolated
  37. 37. Sweep daily
  38. 38. Wet with sawdust</li></li></ul><li>5S and Housekeeping<br />Every user is responsible for keeping the cleanroom clean<br />Always clean your workspace before leaving<br />Don’t leave or store items on or in equipment<br />Do not set liquids on any equipment<br />Properly store all materials before leaving the cleanroom<br />Last one out should make sure the room is in a safe idle mode<br />
  39. 39.
  40. 40. <ul><li> LAUNDRY: Garments shall be changed and washed at least </li></ul>once a week.<br />1. head cap / headgear<br />2. Safety Glasses<br />3. Facemask<br />static dissipative<br /> smocks <br />In-plant shoes/<br /> safety shoes<br />Cleanroom apparels & PPE<br />
  41. 41. <ul><li> LAUNDRY: Garments shall be changed and washed at least </li></ul>once a week.<br />Ultra Clean suit & apparels<br />REQUIRED COMPLETE APPAREL<br />Cleanroom:<br />1. hair net (before hood)<br />2. facemask<br />3. bunny suit <br />4. booties over in-plant shoes<br />
  42. 42. BASIC CLEANROOM PROTOCOL<br /><ul><li>Entrance Control
  43. 43. Air lock room
  44. 44. Sticky/Tacky mats
  45. 45. Materials & Tools
  46. 46. clean materials to be brought into the building
  47. 47. clean materials before entering</li></li></ul><li>Cleanroom PRACTICES<br />All workers must attend an orientation,<br />Chemicals must be approved<br />Equipment and materials must be cleaned<br />Moving must be done with care<br />Eating, smoking and the chewing gums is prohibited<br />Housekeeping<br />
  48. 48. Cleanroom requirement<br /><ul><li>No visible dust
  49. 49. No rust, no peeling paint
  50. 50. No sand/pebbles
  51. 51. No fiber/hair, wood chips
  52. 52. No plastic debris, carbon/paper
  53. 53. No styro foam chips
  54. 54. No presence of food</li></li></ul><li>Cleanroom requirement & practices<br />Implementing Clean Production Environment<br />Based on 4 principles   <br />Planning Stage<br />Prevent entry of dust<br />Prevent dustgeneration<br />Remove dust<br />Do not accumulate<br />Apply appropriate filter<br />Choose anti-static materials<br />Positive pressure/barricade<br />Clean suit/eqpt layout<br />Apply energy saving systems<br />Based on 4 principles    <br />Operational Stage<br />Prevent entry of dust<br />Prevent dustgeneration<br />Remove dust<br />Do not accumulate<br />Air shower operational<br />Cleaning implemented<br />Proper RH control, etc<br />Room pressure control<br />Implementation and Maintenance of Clean Production Environment<br />Improving workers level of consciousness is very important<br />
  55. 55. ① Do not allow dusts to flow into the ducting system<br />1.airtight ducting system <br />2.install HEPA filters at all supply side<br />3.positive pressure beyond HEPA<br />③ Remove immediately generated particles <br />1.provide localized exhaust near sources of contaminants<br />2.make indoor air distribution as laminar as possible<br />② Minimize dust generation in the room<br />1.wearing of clean suits<br />2.workflow/layout to reduce unnecessary movements <br />3.use of finishing materials that generate few particles<br />4.No bringing of useless things inside<br />④ Do not pile-up dusts or scatter these particles<br />1.eliminate unnecessary horizontal surfaces<br />2.Use round ends instead of angles<br />3.do not install unnecessary equipment that vibrates<br />① Do the cleaning(people and things) at the anteroom before bringing inside the cleanroom<br />1.installation of air shower at anteroon<br />APPLICATION OF 4 PRINCIPLES<br />
  56. 56. +pressure against outside<br />Prevent entry of dust <br /><ul><li>basic control measures(1)</li></ul>・ install air shower/pass box<br /> - prevent dust from entering during opening/closing of doors <br /> -dusting off before entry<br />・ pressurize the room(cleanroom indoor) to prevent entry of dust from outside<br />air shower<br />pass box<br /><ul><li>JACA
  57. 57. >10Pa</li></ul>(1.02mmAq)<br /><ul><li>FDA
  58. 58. >0.05inAq</li></ul>(1.27mmAq)<br /><ul><li>ISO13408-1
  59. 59. 10~15Pa</li></ul>・ provide sticky mat<br /> place mat near entry points to prevent dust under the shoes from entering<br />
  60. 60. < Effects of Cosmetic Products><br />100,000<br />10,000<br />1,000<br />[ particles/cft/min ]<br />female(20’s)<br />100<br /> male, thick beard(30’s)<br /> male, slight beard(40’s)<br /> male, slight beard(40’s)<br />10<br />bare<br />after <br />washing<br />face<br />lotion/<br />facial<br />foundation<br />eye shadow/<br />cheek <br />blush on<br />bunny suit<br />smack gown<br />source~実践 LSI工場清浄化技術 (1985) <br />① no surface breakup/detachment<br />② smooth surface with few gaps<br />③ durable/wear resistant<br />④ static electricity is hard to generate<br />⑤ difficult to be stained but easy to clean<br />⑥ acid/alkali resistant<br />⑦ low outgassing properties<br />cleanroom interior finish<br />Prevent entry of dust <br /><ul><li>basic control measures(2)
  61. 61. wear cleanroom suits/gown
  62. 62. ban use of cosmetics
  63. 63. use of low/non-particle generating finishing materials</li></li></ul><li>Cleanroom CONTAMINANT<br /><ul><li>people
  64. 64. manufacturing equipment
  65. 65. tools
  66. 66. processes/utilities(CDA, N2, DI water)
  67. 67. office equipment and supplies(computers, papers)
  68. 68. molds, fungi, bacteria
  69. 69. structural materials(paint peels, outgassing) </li></li></ul><li>Dust Removal by Filtration<br />Dust removal by supplying clean air into the equipment<br />Dust removal by room air recirculation<br />Dust from room and outdoor air (OA) can mix<br />filter selection and recirculating air volume calculation <br />Direct supply of clean air into the machine<br />Ensure particle concentration within room specification<br />Ensure particle concentration within room specification<br />外気<br />Recirculating <br />air<br />Filter<br />Room<br />Exhaust<br />OA<br />Room<br />Exhaust<br />particle sources<br />Return air<br />
  70. 70. Daily Cleaning<br />Regular Cleaning<br />・once a day/after each shift<br />・wet type cleaning(using water)<br />・sticky mat changing<br />・dry type cleaning by vacuum cleaner<br />・cleaning done during operation<br />・once per week/per month or semiannually<br />・done by service cleaners<br />・cleaning including moving the equipment <br />・done during shutdown<br />CLEANING THE Cleanroom<br />
  71. 71. ELECTROSTATIC DISCHARGE (esd)<br />What is STATIC ELECTRICITY?<br />- It is an electrical charge atREST.<br />
  72. 72. We generate static electricity when….<br />Electrical charge is created by changes in capacitance as follows;<br /><ul><li> When a footwear of a person separates from</li></ul> the floor, it creates friction which is a source <br /> of electrical charge.<br /><ul><li> When a person moves, clothing separates </li></ul> from body parts. This creates friction<br /> which is a source of electrical charge.<br /><ul><li> When a person moves, the body parts rub</li></ul> with the surrounding air. Friction caused by <br /> contact and separation generates electrical <br /> charge.<br />
  73. 73. 4 Principles of Maintaining Cleanliness<br />1. Prevent entry of dust.<br />Minimize sources that generate dust. <br />Remove the dust generated in the room before they spread. <br />4. Do not accumulate and scatter the dust.<br />
  74. 74. End of presentation<br />
  75. 75. <ul><li>Prepared for TI Construction Group</li></ul>By: Sid Calayag<br /><ul><li>References:
  76. 76. TI Cleanroom Basic Cleanroom Orientation
  77. 77. Basic Cleanroom Orientation</li>

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