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Modeling Atmospheric-Pressure
 Plasma and Plasma Chemistry

   Fa-Gung Fan* and Santokh S. Badesha
            Xerox Corporation
                      5/21/2010

          * http://www.linkedin.com/in/fagungfan




                                        Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Outline

          DC Coaxial Wire-Cylinder Corona
          DC Needle-Plate Corona
          Coplanar Dielectric Barrier Discharge (DBD)
          – Streamer
          RF Plasma Needle (Plasma-induced Chemistry)




Fa-Gung Fan                             Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Positive and Negative
              DC Wire-Cylinder Corona




Fa-Gung Fan                  Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Positive DC Wire-Cylinder Corona
                                          Photoemission,
                                         Secondary emission


                                                                  Wire radius: 100 microns
    Photoionization
                                                                    Cylinder radius: 5 mm

                                                                                                                       Positive ion
                                                               wire
                                                              surface
                   Photoemission,                                               Number Density
                 Secondary emission




                                                                  Ionization                             Electron
               Model domain and       Ground                      boundary
                                                                 (E/N=120Td)
              computational mesh
 3500V
(at wire
surface)
                                                                                Negative ion




                                                                                                                                (m)
                                                                            r
                                                                                                                     cylinder wall



Fa-Gung Fan                                                             Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Number Density in Ionization Region

                   Present work                                     Chen and Davidson, Plasma Chem. Plasma
                                                 Positive ion           Process., 22, pp. 199-224, (2002)




                              Negative ion




                   Electron




              r                                         (m)               r                                                          (micron)

     wire                                     Ionization         wire
    surface                                   boundary          surface
                                             (E/N=120Td)



                  Note: The two are similar cases, but not identical.
                      (The model domain and the boundary conditions are different.)


Fa-Gung Fan                                                                   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Negative DC Wire-Cylinder Corona
                                                 Plasma
                                                boundary
                                               (E/N=80Td)




                                                                Negative ion


               Model domain and    Ground

              computational mesh
                                                                   Electron
  -3000V
 (at wire
                                               Ionization
 surface)
                                               boundary
                                              (E/N=120Td)



                                                            Positive ion




                                             wire
                                            surface




Fa-Gung Fan                                           Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Number Density in Ionization Region

                    Present work                                     Chen and Davidson, Plasma Chem. Plasma
                                                                        Process., 23(1), pp. 83-102, (2003)


              Positive ion
                                  Negative ion




                       Electron




                                                                              r
    wire                                         Ionization         wire
   surface                                       boundary          surface
                                                 (E/N=120Td)




                       Note: The two are similar cases, but not identical.
                             (The model domain and the boundary conditions are different.)


Fa-Gung Fan                                                                  Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Positive and Negative
              DC Needle-Plate Corona




Fa-Gung Fan                  Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Positive DC Needle-Plate Corona              (Axisymmetric model)
             Plate
          (grounded)




       Axis of            Electric Field Magnitude (surface)
      symmetry
                                Electric Field (arrows)
                          Electrical Potential (contour lines)


              Needle
              (900V)




                            Positive Ion Density (surface)
                              Positive Ion Flux (arrows)
                          Electrical Potential (contour lines)



Fa-Gung Fan                  Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Electron Density and Ionization Boundary




                            Ionization
                            boundary
                           (E/N=120Td)




Fa-Gung Fan                                 Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Negative DC Needle-Plate Corona      (Axisymmetric model)
           Plate
        (grounded)




       Axis of
      symmetry
                                 Electron Density (surface)
                                    Electron Flux (arrows)
                              Electrical Potential (contour lines)
              Needle
              (-900V)




                               Negative Ion Density (surface)
                                 Negative Ion Flux (arrows)
                              Electrical Potential (contour lines)




Fa-Gung Fan                    Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Electron Density, Ionization Boundary, and Plasma Boundary




                                       Plasma
                                      boundary
                                       (80Td)


                         Ionization
                         boundary
                          (120Td)




Fa-Gung Fan                                           Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Number Density of Charge Species
                                    (Negative DC Needle-Plate Corona)

                                                                   Only the ionization region
      Ionization
      boundary
       (120Td)



                           Negative ion
                                                                                     Positive ion



                                                               Negative ion

                         Electron
         Plasma
        boundary
         (80Td)



                   Positive ion                                                 Electron



                                              (m)                                                                        (m)
              z                                                   z                                       Ionization
  Needle                                                                                                  boundary
                                                      Needle
    tip
                                                        tip                                                (120Td)


Fa-Gung Fan                                                           Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Negative Charge Density Profile                      Charging Profile
           at the Plate                       (Negative Charge Flux at the Plate)




                         Negative ion
                                                                     Electron




                                                     Negative ion
              Electron



                                        (m)                                                                    (m)


                  r                                        r
 Axis of                                       Axis of
symmetry                                      symmetry




Fa-Gung Fan                                                 Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Streamer in
              Coplanar Dielectric-Barrier-
               Discharge (DBD) Corona
                 Ref: Gibalov and Pietsch, J. Phys. D: Appl. Phys.,
                             37, pp. 2082–2092 (2004)




Fa-Gung Fan                                       Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Air




               electrode                  electrode




                           Dielectric




              Electrode Configuration in a Coplanar DBD
                             (2D Model)



Fa-Gung Fan                                     Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Electron Density on the Dielectric                Electrical Potential at the Dielectric
           Surface at Different Time                          Surface at Different Time
                                                                                                                  t (sec)
                                            t (sec)




              As the streamer propagating toward the cathode, the electrons generated
              by the ionization deposit on the dielectric surface at the location just
              above the anode (left figure). This charge build-up modifies the surface
              potential of the dielectric (right figure).
              The ions move slow, and the effect can be neglected in the time frame
              simulated.
Fa-Gung Fan                                                   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
RF Plasma Needle and
              Plasma-induced Chemistry
              Ref: Sakiyama and Graves, J. Phys. D: Appl. Phys.,
                         39(16), pp. 3644-3652 (2006)




Fa-Gung Fan                                   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Plasma Needle for Medical Application




13.56MHz




  Brok et al., J. Appl. Phys., 98, p. 013302 (2005)

 Fa-Gung Fan                                          Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Brok et al., J. Appl. Phys., 98, p. 013302 (2005)



Fa-Gung Fan                       Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Brok et al., J. Appl. Phys., 98, p. 013302 (2005)

Fa-Gung Fan                      Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Fa-Gung Fan   Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
Summary

          DC Coaxial Wire-Cylinder Corona
          DC Needle-Plate Corona
          Coplanar Dielectric Barrier Discharge (DBD)
          – Streamer
          RF Plasma Needle in He-N2 Mixture




Fa-Gung Fan                                Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010

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Modeling Atmospheric-Pressure Plasma and Plasma Chemistry (Fa-Gung Fan and Santokh Badesha)

  • 1. Modeling Atmospheric-Pressure Plasma and Plasma Chemistry Fa-Gung Fan* and Santokh S. Badesha Xerox Corporation 5/21/2010 * http://www.linkedin.com/in/fagungfan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 2. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 3. Outline DC Coaxial Wire-Cylinder Corona DC Needle-Plate Corona Coplanar Dielectric Barrier Discharge (DBD) – Streamer RF Plasma Needle (Plasma-induced Chemistry) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 4. Positive and Negative DC Wire-Cylinder Corona Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 5. Positive DC Wire-Cylinder Corona Photoemission, Secondary emission Wire radius: 100 microns Photoionization Cylinder radius: 5 mm Positive ion wire surface Photoemission, Number Density Secondary emission Ionization Electron Model domain and Ground boundary (E/N=120Td) computational mesh 3500V (at wire surface) Negative ion (m) r cylinder wall Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 6. Number Density in Ionization Region Present work Chen and Davidson, Plasma Chem. Plasma Positive ion Process., 22, pp. 199-224, (2002) Negative ion Electron r (m) r (micron) wire Ionization wire surface boundary surface (E/N=120Td) Note: The two are similar cases, but not identical. (The model domain and the boundary conditions are different.) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 7. Negative DC Wire-Cylinder Corona Plasma boundary (E/N=80Td) Negative ion Model domain and Ground computational mesh Electron -3000V (at wire Ionization surface) boundary (E/N=120Td) Positive ion wire surface Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 8. Number Density in Ionization Region Present work Chen and Davidson, Plasma Chem. Plasma Process., 23(1), pp. 83-102, (2003) Positive ion Negative ion Electron r wire Ionization wire surface boundary surface (E/N=120Td) Note: The two are similar cases, but not identical. (The model domain and the boundary conditions are different.) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 9. Positive and Negative DC Needle-Plate Corona Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 10. Positive DC Needle-Plate Corona (Axisymmetric model) Plate (grounded) Axis of Electric Field Magnitude (surface) symmetry Electric Field (arrows) Electrical Potential (contour lines) Needle (900V) Positive Ion Density (surface) Positive Ion Flux (arrows) Electrical Potential (contour lines) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 11. Electron Density and Ionization Boundary Ionization boundary (E/N=120Td) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 12. Negative DC Needle-Plate Corona (Axisymmetric model) Plate (grounded) Axis of symmetry Electron Density (surface) Electron Flux (arrows) Electrical Potential (contour lines) Needle (-900V) Negative Ion Density (surface) Negative Ion Flux (arrows) Electrical Potential (contour lines) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 13. Electron Density, Ionization Boundary, and Plasma Boundary Plasma boundary (80Td) Ionization boundary (120Td) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 14. Number Density of Charge Species (Negative DC Needle-Plate Corona) Only the ionization region Ionization boundary (120Td) Negative ion Positive ion Negative ion Electron Plasma boundary (80Td) Positive ion Electron (m) (m) z z Ionization Needle boundary Needle tip tip (120Td) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 15. Negative Charge Density Profile Charging Profile at the Plate (Negative Charge Flux at the Plate) Negative ion Electron Negative ion Electron (m) (m) r r Axis of Axis of symmetry symmetry Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 16. Streamer in Coplanar Dielectric-Barrier- Discharge (DBD) Corona Ref: Gibalov and Pietsch, J. Phys. D: Appl. Phys., 37, pp. 2082–2092 (2004) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 17. Air electrode electrode Dielectric Electrode Configuration in a Coplanar DBD (2D Model) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 18. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 19. Electron Density on the Dielectric Electrical Potential at the Dielectric Surface at Different Time Surface at Different Time t (sec) t (sec) As the streamer propagating toward the cathode, the electrons generated by the ionization deposit on the dielectric surface at the location just above the anode (left figure). This charge build-up modifies the surface potential of the dielectric (right figure). The ions move slow, and the effect can be neglected in the time frame simulated. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 20. RF Plasma Needle and Plasma-induced Chemistry Ref: Sakiyama and Graves, J. Phys. D: Appl. Phys., 39(16), pp. 3644-3652 (2006) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 21. Plasma Needle for Medical Application 13.56MHz Brok et al., J. Appl. Phys., 98, p. 013302 (2005) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 22. Brok et al., J. Appl. Phys., 98, p. 013302 (2005) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 23. Brok et al., J. Appl. Phys., 98, p. 013302 (2005) Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 24. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 25. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 26. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 27. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 28. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 29. Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010
  • 30. Summary DC Coaxial Wire-Cylinder Corona DC Needle-Plate Corona Coplanar Dielectric Barrier Discharge (DBD) – Streamer RF Plasma Needle in He-N2 Mixture Fa-Gung Fan Annual CAMP Technical Meeting, Canandaigua, NY, 5/19-21, 2010