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Is there light outside the funnel? How synchrotron
light sources can help to overcome the major
limitations related to Heavy Ions Single Event
Effects testing in electronic circuits
07/06/2023 – RadHard symposium
Ennio Capria
Deputy Head of Business Development at the ESRF
Experiment Division
Image created with DALL-E
Is there light outside the funnel?
How synchrotron light sources can help to overcome the
major limitations related to Heavy Ions Single Event
Effects testing in electronic circuits
07/06/2023 – RadHard symposium
Ennio Capria
Deputy Head of Business Development at the ESRF
Experiment Division
The use of synchrotron X-rays to emulate the
interaction between heavy ions and electronic
devices for next generation space application
Ennio Capria
Deputy Head of Business Development at the ESRF
Experiment Division
07/06/2023 – RadHard symposium
• Increase of component
demands -> increase in
testing demand
• Increase of the use of COTS
in RadHard environment ->
increase in radiation
hardness performaces and
qualification of non-RadHard
components
• Increase in the complexity of
the components ->
innovating packaging
• Cost reduction -> always
Market trends in aerospace and automotive
sectors
• Larger capacity, instrument
availability -> qualification
• Possibility to have focused
beams -> debugging
• Higher energy
-> Simplified sample
preparation
-> Complex packaging
Heavy ions testing… a wish list
Photons vs HI
In both cases the result is the generation of a
Ionisation track -> generation of unbound electrons
HI: Coulombian interaction
Photon: Photoelectric absorption
In order to obtain a preliminary evaluation of components single events
sensitivity, before Heavy Ion qualification, the focused Laser is an alternative
which tends to be generalized.
• Larger capacity, instrument availability -> qualification
• Possibility to have focused beams -> debugging
• Higher energy -> Simplified sample preparation
-> Complex packaging
Addressed by lasers
Non addressed by lasers
Heavy ions emulation with lasers
X-Ray pulse to emulate HIs: carrier generation
7
Heavy ions have high LET
=>1 ion creates high density of
electron/hole-pairs along the path (∅ 100
nm), along a release time of 100fs.
•55 MeV Carbon: LET of 500 keV/µm
=> ≈ 100.000 electrons per µm
•2000 MeV Xenon: LET of 11.000 keV/µm
=> ≈ 2.000.000 electrons per µm = 3E8
electrons
X-Ray pulse to emulate His: carrier generation
8
X-ray
A 10 keV photon X-ray in Si produces photo
electron leading to carrier creation ≈ 2000 pairs
X-Ray pulse to emulate His: carrier generation
9
X-ray what is needed (ideal case)
50-1000 ph/pulse
100fs
Diam. < few nm
X-Ray pulse to emulate His: carrier generation
10
X-ray what needed (ideal case)
50-1000 ph/pulse
100fs < pulse duration < commuting time
Diam. < few nm
X-ray available on ID09 @ ESRF
4E9 ph/pulse
150ps < commuting time
Diam 35um
8E7 ph/pulse
150ps < commuting time
Diam 5um
- The energy of the pulse is 9.6 uJ
- The energy spectrum is half Lorentian with a
bandwidth of 3.2%
X-Ray pulse to emulate His: carrier generation
11
X-ray what needed
50-1000 ph/pulse
100fs < pulse duration < commuting time
Diam. < few nm
X-ray what may be available in the future
3E6 ph/pulse
150ps
Diam 1um
3E5 ph/pulse (assuming 10% efficiency) ->
150ps
Diam 100nm
6E8 electrons, compliant
with what is needed in the
case of complete
absorption with the highest
LET considered so far
X-Ray pulse to emulate His: State of the art
• X-rays can generate SEU
• An equivalent LET for X-rays can be calculated if ph E < 10keV, with a
precise correlation with the heavy ions probe
• Some R&D is still necessary to understand the correlation when ph E >
10keV
17/10/16
X-Ray pulse to emulate His: State of the art
SET Experiments with Si PIN diode at APS:
13
Source: D. Cardoza, et. al. “single Event Effects Testing with Short Pulsed X-rays“ presentation
9.April.2013
17/10/16
X-Ray pulse to emulate HI: sources
3rd gen synchrotrons
seems
the only candidates with
the right
brilliance
15
X-ray attenuation lengths of materials
commonly used in IC manufacturing
[7]. For comparison purpose, a 1064
nm laser beam in silicon having a
doping level of 2.1018cm has an
attenuation depth of 330 µm
X-ray transmission as a function of die
number
X-Ray pulse to emulate HI: penetration
17/10/16
X-Ray pulse to emulate HI: sources
Medium energy
synchrotron can be
promising up to 10keV
Logic and analog
• SET in Si, analong and digital, photodiodes, bipolar
systems
• SET in SiGe
• SET in AlGaN/GaN HEMT
• SET in GaAs transistors
Power devices
• SET SiC in power devices
• SET GaN in power devices
What do we know
References
K. L. Ryder et al., "Comparison of Single-Event Transients in an Epitaxial Silicon Diode Resulting From Heavy-Ion-, Focused X-Ray-, and Pulsed Laser-Induced Charge Generation," in
IEEE Transactions on Nuclear Science, vol. 68, no. 5, pp. 626-633, May 2021, doi: 10.1109/TNS.2021.3060339.
A. Khachatrian et al., "Investigation of Single-Event Transients in AlGaN/GaN MIS-Gate HEMTs Using a Focused X-Ray Beam," in IEEE Transactions on Nuclear Science, vol. 66, no. 1,
pp. 368-375, Jan. 2019, doi: 10.1109/TNS.2018.2885824.
D. Nergui et al., "Single-Event Transients in SiGe HBTs Induced by Pulsed X-Ray Microbeam," in IEEE Transactions on Nuclear Science, vol. 67, no. 1, pp. 91-98, Jan. 2020, doi:
10.1109/TNS.2019.2959973.
S. D. Lalumondiere et al., "Application of a Focused, Pulsed X-ray Beam for Total Ionizing Dose Testing of Bipolar Linear Integrated Circuits," in IEEE Transactions on Nuclear Science,
vol. 65, no. 1, pp. 478-485, Jan. 2018, doi: 10.1109/TNS.2017.2780827.
A. Khachatrian et al., "Application of a Focused, Pulsed X-Ray Beam to the Investigation of Single-Event Transients in Al0.3Ga0.7N/GaN HEMTs," in IEEE Transactions on Nuclear
Science, vol. 64, no. 1, pp. 97-105, Jan. 2017, doi: 10.1109/TNS.2016.2641678.
A. Khachatrian, et al., “”Comparison of Single Event Transients in AlGaN/GaN Schottky-Gate HEMTs Using Four Sources for Charge Injection”, 17th European Conference on Radiation
and its Effects on Components and Systems (RADECS) OCT 02-06, 2017CL CERN, Geneva, SWITZERLAND
A. Khachatrian et al., Comparison of Single Event Transients in AlGaN/GaN Schottky-Gate and MIS-Gate HEMTs Using Single-Photon Absorption and Focused X-ray Techniques, 2016
16th European Conference on Radiation and its Effects on Components and Systems (RADECS), Bremen, GERMANY
D. Cardoza et al., "Investigating Pulsed X-ray Induced SEE in Analog Microelectronic Devices," in IEEE Transactions on Nuclear Science, vol. 62, no. 6, pp. 2458-2467, Dec. 2015, doi:
10.1109/TNS.2015.2498100.
D. Cardoza et al., "Comparison of Single Event Transients Generated by Short Pulsed X-Rays, Lasers and Heavy Ions," in IEEE Transactions on Nuclear Science, vol. 61, no. 6, pp.
3154-3162, Dec. 2014, doi: 10.1109/TNS.2014.2368057.
D. M. Cardoza et al., "Single Event Transients Induced by Picosecond Pulsed X-Ray Absorption in III–V Heterojunction Transistors," in IEEE Transactions on Nuclear Science, vol. 59,
no. 6, pp. 2729-2738, Dec. 2012, doi: 10.1109/TNS.2012.2224130.
D. Nergui et al., "Single-Event Transients in SiGe HBTs Induced by Pulsed X-Ray Microbeam," in IEEE Transactions on Nuclear Science, vol. 67, no. 1, pp. 91-98, Jan. 2020, doi:
10.1109/TNS.2019.2959973.
G. Augustin, et al., “Pulsed X-rays Induced Single Effects in Si, SiC and GaN Technologies”, 22th European Conference on Radiation and its Effects on Components and Systems
(RADECS) OCT 02-06, 2022, Venice, ITALY
G. Augustin, et al., “Cross-Calibration of Various SEE Test Methods Including Pulsed X-rays and Application to SEL and SEU”, 19th European Conference on Radiation and its Effects
on Components and Systems (RADECS) OCT 02-06, 2019, Montpellier, FRANCE
What do we miss?
Modelling of the SEE
• High fidelity models are needed in order to predict SEE and understand the
interaction of X-ray pulses and correlate with NI LET.
• This model should take into account the characteristics of the material , the
quantum confinement effects of nanostructures and the stress.
• Dedicated experiments need to be designed, in case involving
pulsed/nanofocus beams
Understand TID
• Predict TID deposited; the complication is due to the extreme time and
space localisation condition of the energy deposited which could likely
trigger some non linear phenomena.
19
Access to the ESRF via RADNEXT
20
…and a bonus
21
Possibility to run high resolution 3D imaging non-destructive failure analysis
M. Holler et al., "Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom" in Nature Electronics, vol. 2, pp. 464-470, 2019
M. Holler et al., "High-resolution non-destructive three-dimensional imaging of integrated circuits" in Nature, vol. 543, pp. 402-406, 2017
More news soon…
22
More news soon…
23
A take away message
24
• The capacity is there
• Huge range of instruments capabilities and energy
• Time structure is rare
• Irradiation is not a strategic mission
• A community effort is needed
Many thanks to:
The ID09 team
Michael Wulff
Matteo Levantino
Mathias Sanders
The AIRBUS team
Cécile Weulersse
Christian Binois
Hagen Schmidt
The TRAD team
G. Augustin
M. Mauguet
N. Andrianjohany
N. Chatry
The CNES team
F. Bezerra
K-O. Voss
Ennio Capria
capria@esrf.fr

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Overcome Limitations of Heavy Ion Testing with Synchrotron Light

  • 1. Is there light outside the funnel? How synchrotron light sources can help to overcome the major limitations related to Heavy Ions Single Event Effects testing in electronic circuits 07/06/2023 – RadHard symposium Ennio Capria Deputy Head of Business Development at the ESRF Experiment Division Image created with DALL-E Is there light outside the funnel? How synchrotron light sources can help to overcome the major limitations related to Heavy Ions Single Event Effects testing in electronic circuits 07/06/2023 – RadHard symposium Ennio Capria Deputy Head of Business Development at the ESRF Experiment Division
  • 2. The use of synchrotron X-rays to emulate the interaction between heavy ions and electronic devices for next generation space application Ennio Capria Deputy Head of Business Development at the ESRF Experiment Division 07/06/2023 – RadHard symposium
  • 3. • Increase of component demands -> increase in testing demand • Increase of the use of COTS in RadHard environment -> increase in radiation hardness performaces and qualification of non-RadHard components • Increase in the complexity of the components -> innovating packaging • Cost reduction -> always Market trends in aerospace and automotive sectors
  • 4. • Larger capacity, instrument availability -> qualification • Possibility to have focused beams -> debugging • Higher energy -> Simplified sample preparation -> Complex packaging Heavy ions testing… a wish list
  • 5. Photons vs HI In both cases the result is the generation of a Ionisation track -> generation of unbound electrons HI: Coulombian interaction Photon: Photoelectric absorption In order to obtain a preliminary evaluation of components single events sensitivity, before Heavy Ion qualification, the focused Laser is an alternative which tends to be generalized.
  • 6. • Larger capacity, instrument availability -> qualification • Possibility to have focused beams -> debugging • Higher energy -> Simplified sample preparation -> Complex packaging Addressed by lasers Non addressed by lasers Heavy ions emulation with lasers
  • 7. X-Ray pulse to emulate HIs: carrier generation 7 Heavy ions have high LET =>1 ion creates high density of electron/hole-pairs along the path (∅ 100 nm), along a release time of 100fs. •55 MeV Carbon: LET of 500 keV/µm => ≈ 100.000 electrons per µm •2000 MeV Xenon: LET of 11.000 keV/µm => ≈ 2.000.000 electrons per µm = 3E8 electrons
  • 8. X-Ray pulse to emulate His: carrier generation 8 X-ray A 10 keV photon X-ray in Si produces photo electron leading to carrier creation ≈ 2000 pairs
  • 9. X-Ray pulse to emulate His: carrier generation 9 X-ray what is needed (ideal case) 50-1000 ph/pulse 100fs Diam. < few nm
  • 10. X-Ray pulse to emulate His: carrier generation 10 X-ray what needed (ideal case) 50-1000 ph/pulse 100fs < pulse duration < commuting time Diam. < few nm X-ray available on ID09 @ ESRF 4E9 ph/pulse 150ps < commuting time Diam 35um 8E7 ph/pulse 150ps < commuting time Diam 5um - The energy of the pulse is 9.6 uJ - The energy spectrum is half Lorentian with a bandwidth of 3.2%
  • 11. X-Ray pulse to emulate His: carrier generation 11 X-ray what needed 50-1000 ph/pulse 100fs < pulse duration < commuting time Diam. < few nm X-ray what may be available in the future 3E6 ph/pulse 150ps Diam 1um 3E5 ph/pulse (assuming 10% efficiency) -> 150ps Diam 100nm 6E8 electrons, compliant with what is needed in the case of complete absorption with the highest LET considered so far
  • 12. X-Ray pulse to emulate His: State of the art • X-rays can generate SEU • An equivalent LET for X-rays can be calculated if ph E < 10keV, with a precise correlation with the heavy ions probe • Some R&D is still necessary to understand the correlation when ph E > 10keV 17/10/16
  • 13. X-Ray pulse to emulate His: State of the art SET Experiments with Si PIN diode at APS: 13 Source: D. Cardoza, et. al. “single Event Effects Testing with Short Pulsed X-rays“ presentation 9.April.2013
  • 14. 17/10/16 X-Ray pulse to emulate HI: sources 3rd gen synchrotrons seems the only candidates with the right brilliance
  • 15. 15 X-ray attenuation lengths of materials commonly used in IC manufacturing [7]. For comparison purpose, a 1064 nm laser beam in silicon having a doping level of 2.1018cm has an attenuation depth of 330 µm X-ray transmission as a function of die number X-Ray pulse to emulate HI: penetration
  • 16. 17/10/16 X-Ray pulse to emulate HI: sources Medium energy synchrotron can be promising up to 10keV
  • 17. Logic and analog • SET in Si, analong and digital, photodiodes, bipolar systems • SET in SiGe • SET in AlGaN/GaN HEMT • SET in GaAs transistors Power devices • SET SiC in power devices • SET GaN in power devices What do we know
  • 18. References K. L. Ryder et al., "Comparison of Single-Event Transients in an Epitaxial Silicon Diode Resulting From Heavy-Ion-, Focused X-Ray-, and Pulsed Laser-Induced Charge Generation," in IEEE Transactions on Nuclear Science, vol. 68, no. 5, pp. 626-633, May 2021, doi: 10.1109/TNS.2021.3060339. A. Khachatrian et al., "Investigation of Single-Event Transients in AlGaN/GaN MIS-Gate HEMTs Using a Focused X-Ray Beam," in IEEE Transactions on Nuclear Science, vol. 66, no. 1, pp. 368-375, Jan. 2019, doi: 10.1109/TNS.2018.2885824. D. Nergui et al., "Single-Event Transients in SiGe HBTs Induced by Pulsed X-Ray Microbeam," in IEEE Transactions on Nuclear Science, vol. 67, no. 1, pp. 91-98, Jan. 2020, doi: 10.1109/TNS.2019.2959973. S. D. Lalumondiere et al., "Application of a Focused, Pulsed X-ray Beam for Total Ionizing Dose Testing of Bipolar Linear Integrated Circuits," in IEEE Transactions on Nuclear Science, vol. 65, no. 1, pp. 478-485, Jan. 2018, doi: 10.1109/TNS.2017.2780827. A. Khachatrian et al., "Application of a Focused, Pulsed X-Ray Beam to the Investigation of Single-Event Transients in Al0.3Ga0.7N/GaN HEMTs," in IEEE Transactions on Nuclear Science, vol. 64, no. 1, pp. 97-105, Jan. 2017, doi: 10.1109/TNS.2016.2641678. A. Khachatrian, et al., “”Comparison of Single Event Transients in AlGaN/GaN Schottky-Gate HEMTs Using Four Sources for Charge Injection”, 17th European Conference on Radiation and its Effects on Components and Systems (RADECS) OCT 02-06, 2017CL CERN, Geneva, SWITZERLAND A. Khachatrian et al., Comparison of Single Event Transients in AlGaN/GaN Schottky-Gate and MIS-Gate HEMTs Using Single-Photon Absorption and Focused X-ray Techniques, 2016 16th European Conference on Radiation and its Effects on Components and Systems (RADECS), Bremen, GERMANY D. Cardoza et al., "Investigating Pulsed X-ray Induced SEE in Analog Microelectronic Devices," in IEEE Transactions on Nuclear Science, vol. 62, no. 6, pp. 2458-2467, Dec. 2015, doi: 10.1109/TNS.2015.2498100. D. Cardoza et al., "Comparison of Single Event Transients Generated by Short Pulsed X-Rays, Lasers and Heavy Ions," in IEEE Transactions on Nuclear Science, vol. 61, no. 6, pp. 3154-3162, Dec. 2014, doi: 10.1109/TNS.2014.2368057. D. M. Cardoza et al., "Single Event Transients Induced by Picosecond Pulsed X-Ray Absorption in III–V Heterojunction Transistors," in IEEE Transactions on Nuclear Science, vol. 59, no. 6, pp. 2729-2738, Dec. 2012, doi: 10.1109/TNS.2012.2224130. D. Nergui et al., "Single-Event Transients in SiGe HBTs Induced by Pulsed X-Ray Microbeam," in IEEE Transactions on Nuclear Science, vol. 67, no. 1, pp. 91-98, Jan. 2020, doi: 10.1109/TNS.2019.2959973. G. Augustin, et al., “Pulsed X-rays Induced Single Effects in Si, SiC and GaN Technologies”, 22th European Conference on Radiation and its Effects on Components and Systems (RADECS) OCT 02-06, 2022, Venice, ITALY G. Augustin, et al., “Cross-Calibration of Various SEE Test Methods Including Pulsed X-rays and Application to SEL and SEU”, 19th European Conference on Radiation and its Effects on Components and Systems (RADECS) OCT 02-06, 2019, Montpellier, FRANCE
  • 19. What do we miss? Modelling of the SEE • High fidelity models are needed in order to predict SEE and understand the interaction of X-ray pulses and correlate with NI LET. • This model should take into account the characteristics of the material , the quantum confinement effects of nanostructures and the stress. • Dedicated experiments need to be designed, in case involving pulsed/nanofocus beams Understand TID • Predict TID deposited; the complication is due to the extreme time and space localisation condition of the energy deposited which could likely trigger some non linear phenomena. 19
  • 20. Access to the ESRF via RADNEXT 20
  • 21. …and a bonus 21 Possibility to run high resolution 3D imaging non-destructive failure analysis M. Holler et al., "Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom" in Nature Electronics, vol. 2, pp. 464-470, 2019 M. Holler et al., "High-resolution non-destructive three-dimensional imaging of integrated circuits" in Nature, vol. 543, pp. 402-406, 2017
  • 24. A take away message 24 • The capacity is there • Huge range of instruments capabilities and energy • Time structure is rare • Irradiation is not a strategic mission • A community effort is needed
  • 25. Many thanks to: The ID09 team Michael Wulff Matteo Levantino Mathias Sanders The AIRBUS team Cécile Weulersse Christian Binois Hagen Schmidt The TRAD team G. Augustin M. Mauguet N. Andrianjohany N. Chatry The CNES team F. Bezerra K-O. Voss Ennio Capria capria@esrf.fr