2. Semiconductor EquipmentSemiconductor Equipment
Maintenance: Trial and ErrorMaintenance: Trial and Error
Semiconductor Equipment Maintenance routinely
experiences extensive equipment down time due to:
•Shotgunning. The act of replacing parts without proof orShotgunning. The act of replacing parts without proof or
understanding of the real failed component.understanding of the real failed component.
•Replacing components, because the symptoms are similar toReplacing components, because the symptoms are similar to
previous experience.previous experience.
•Incorrect or Inadequate collection of symptoms, caused by limitedIncorrect or Inadequate collection of symptoms, caused by limited
expertise in Semiconductor Equipment performance requirements.expertise in Semiconductor Equipment performance requirements.
•Failure to replace a failed component with a “Known Good”.Failure to replace a failed component with a “Known Good”.
•Failure to assign a root cause, thereby replacing the same part timeFailure to assign a root cause, thereby replacing the same part time
and again.and again.
•Added equipment failure, due to improper repair procedures.Added equipment failure, due to improper repair procedures.
•Ineptness in the use of test equipment.Ineptness in the use of test equipment.
•Ineptness in the use of schematics, and other documentation.Ineptness in the use of schematics, and other documentation.
•Poor record keeping and pass down.Poor record keeping and pass down.
3. Here are some examples:Here are some examples:
• Improper Helium Leak Checking method:Improper Helium Leak Checking method:
• An atmospheric pressure processing system was helium leakAn atmospheric pressure processing system was helium leak
checked using the common method of inboard leak checking.checked using the common method of inboard leak checking.
Atmospheric pressure assisted in the sealing of system components.Atmospheric pressure assisted in the sealing of system components.
When the system was operated at normal pressure, the seals failedWhen the system was operated at normal pressure, the seals failed
and allowed atmosphere to contaminate the process.and allowed atmosphere to contaminate the process.
• Outboard leak checking was not a method utilized at this facility, andOutboard leak checking was not a method utilized at this facility, and
still is not used, or even known, by many technicians throughout thestill is not used, or even known, by many technicians throughout the
industry.industry.
• Bypassing of critical interlocks:Bypassing of critical interlocks:
• A system experienced low water supply, due to a clogged in-lineA system experienced low water supply, due to a clogged in-line
water filter. The flow switch was bypassed to allow the system towater filter. The flow switch was bypassed to allow the system to
run. The low water flow caused the process chamber to berun. The low water flow caused the process chamber to be
destroyed, causing weeks of down time, and excessive costs.destroyed, causing weeks of down time, and excessive costs.
4. More Examples:More Examples:
• Maintenance of key critical wearMaintenance of key critical wear
components is ignored:components is ignored:
• A system intermittently faults, due to poor pressure control stability.A system intermittently faults, due to poor pressure control stability.
The throttle valve is the critical mechanical component with wearThe throttle valve is the critical mechanical component with wear
components. However, no preventive maintenance is specified forcomponents. However, no preventive maintenance is specified for
this component of this system.this component of this system.
• Equipment runs well for six months, thenEquipment runs well for six months, then
needs constant maintenance:needs constant maintenance:
• Overlooked items, like silver plated hardware, care of o-ring grooves,Overlooked items, like silver plated hardware, care of o-ring grooves,
proper lubrication on mechanical drives, care of electricalproper lubrication on mechanical drives, care of electrical
connections, and cable supports, will cause systems to degrade overconnections, and cable supports, will cause systems to degrade over
time, which will cause an increasing amount of unplannedtime, which will cause an increasing amount of unplanned
maintenance.maintenance.
5. Our Solution:Our Solution:
Provide the Semiconductor Industry withProvide the Semiconductor Industry with
Training in the Core Competencies ofTraining in the Core Competencies of
Semiconductor Equipment Maintenance.Semiconductor Equipment Maintenance.
• This training should be provided at the customer’s facility, onThis training should be provided at the customer’s facility, on
the customer’s equipment, using a combination of thethe customer’s equipment, using a combination of the
customer’s tools and documentation, and a package of coursecustomer’s tools and documentation, and a package of course
tools and hardware. For example, helium leak checkers aretools and hardware. For example, helium leak checkers are
impractical to transport to the customer for training, and theimpractical to transport to the customer for training, and the
customer should already have leak checkers in his facility.customer should already have leak checkers in his facility.
• All training includes three essential components:All training includes three essential components:
– What to do.What to do.
– How to do it.How to do it.
– Why to do it. Without the why, we cannot expect retentionWhy to do it. Without the why, we cannot expect retention
or performance.or performance.
6. Core Competencies ShortCore Competencies Short
List:List:
• Particle Contamination Source Isolation and removalParticle Contamination Source Isolation and removal
• Process Chamber Integrity Validation and MaintenanceProcess Chamber Integrity Validation and Maintenance
• Material Handling as it applies to Silicon WafersMaterial Handling as it applies to Silicon Wafers
• Material Handling as it applies to Semiconductor ChemicalsMaterial Handling as it applies to Semiconductor Chemicals
• Electronic/Electrical component and circuit recognitionElectronic/Electrical component and circuit recognition
• Electronic/Electrical subsystem/system fault isolation andElectronic/Electrical subsystem/system fault isolation and
repairrepair
• Process parameter evaluation for process stability andProcess parameter evaluation for process stability and
repeatabilityrepeatability
• Data Collection for continuous improvementData Collection for continuous improvement
• Root Cause AnalysisRoot Cause Analysis
7. Key Enabling Skills List:Key Enabling Skills List:
• Helium leak checker operation.Helium leak checker operation.
• Helium leak checking, inboard, and outboard.Helium leak checking, inboard, and outboard.
• Vacuum Fundamentals Theory and ApplicationVacuum Fundamentals Theory and Application
• Vacuum/Pressure Isolation methods, components and maintenance.Vacuum/Pressure Isolation methods, components and maintenance.
• Clean Room Contamination Control ProceduresClean Room Contamination Control Procedures
• Process Chamber Cleaning ProceduresProcess Chamber Cleaning Procedures
• Basic Electricity/Electronics TheoryBasic Electricity/Electronics Theory
• Semiconductor Processing MaterialsSemiconductor Processing Materials
• Semiconductor Equipment MaterialsSemiconductor Equipment Materials
• Statistical Process ControlStatistical Process Control
• Equipment Calibration PrinciplesEquipment Calibration Principles
• Principles of upstream/downstream pressure controlPrinciples of upstream/downstream pressure control
• Principles of Plasma Processing, Subsystems and componentsPrinciples of Plasma Processing, Subsystems and components
• Overview of the basic Semiconductor ProcessOverview of the basic Semiconductor Process
8. Target Groups:Target Groups:
There are at least three target groups forThere are at least three target groups for
maintenance training within anymaintenance training within any
Semiconductor Manufacturing facility:Semiconductor Manufacturing facility:
• Maintenance Managers:Maintenance Managers:
– Training is focused on how to get the best performance from theirTraining is focused on how to get the best performance from their
technical staff and the most benefit from the training we offer.technical staff and the most benefit from the training we offer.
• Maintenance Technicians:Maintenance Technicians:
– Training provides the tools, skills and techniques to attack anyTraining provides the tools, skills and techniques to attack any
maintenance event with confidence.maintenance event with confidence.
• Maintenance Trainers:Maintenance Trainers:
– Training provides the material and focus that will allow trainers toTraining provides the material and focus that will allow trainers to
sustain the maintenance staff with training they can use.sustain the maintenance staff with training they can use.
9. What do we do next?What do we do next?
• Develop Core Competency courseDevelop Core Competency course
syllabi.syllabi.
• Market Core Competency courses to theMarket Core Competency courses to the
Semiconductor Industry.Semiconductor Industry.
• Deliver Core Competency courses.Deliver Core Competency courses.
• Closely monitor and measureClosely monitor and measure
improvements gained in the industry.improvements gained in the industry.
10. What Benefits to theWhat Benefits to the
Customer?Customer?
• On-Site Maintenance TrainingOn-Site Maintenance Training
– Technicians get skills training on theTechnicians get skills training on the
equipment they already are working on.equipment they already are working on.
– Key issues that can solve current problemsKey issues that can solve current problems
can be addressed by the instructor and thecan be addressed by the instructor and the
class.class.
– Hands on training and procedures areHands on training and procedures are
retained for a long lasting benefit.retained for a long lasting benefit.
– No translation from class room to field isNo translation from class room to field is
required.required.
11. More Benefits to theMore Benefits to the
Customer:Customer:
• Transferable Core Competencies.Transferable Core Competencies.
– Technicians get skills training they canTechnicians get skills training they can
transfer to other equipment.transfer to other equipment.
– Solutions provided can and will be used toSolutions provided can and will be used to
address future equipment problems.address future equipment problems.
• Eliminate restricted growth flexibility dueEliminate restricted growth flexibility due
to a shortage of skilled technicians.to a shortage of skilled technicians.
• Predict equipment utilization throughPredict equipment utilization through
greater predictability of uptime.greater predictability of uptime.
12. More Benefits to theMore Benefits to the
Customer:Customer:
• Reduce production costs with greaterReduce production costs with greater
equipment process capability.equipment process capability.
• Reduce capital equipment costs withReduce capital equipment costs with
greater equipment utilization.greater equipment utilization.
• Reduce per wafer overhead costs withReduce per wafer overhead costs with
greater performance of existing staff.greater performance of existing staff.
13. The time is at hand. It is timeThe time is at hand. It is time
that we:that we:
• Query our customer base.Query our customer base.
• Queue up our course syllabi.Queue up our course syllabi.
• Offer solutions to existing problems.Offer solutions to existing problems.
• Deliver.Deliver.
• Deliver before the industry begins its next growthDeliver before the industry begins its next growth
ramp.ramp.
• Deliver a product the industry needs, and no oneDeliver a product the industry needs, and no one
currently offers.currently offers.
• Reap the rewards of a well executed plan andReap the rewards of a well executed plan and
outstanding product.outstanding product.
