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Bro
1/10/09
Roughness and Form Measurement
by means of
Light Scattering
OptoSurf GmbH I Jagdrain 12 I 76316 Malsch I Germany I info@optosurf.com
Bro
1/10/09
Light scattering basics
Rough surface
φ
φ
I
Smooth surface
φ
I
scatt. angle φ
Intensity
I
Incoming light
distribution
Bro
1/10/09
Measurement of form and waviness
D
D
Waviness Angle D
D D D
y
x
Slope measurement and integration of the angles
D1 D2 D3 D4
 
D
 dx
y i
x
Bro
1/10/09
Sensor principle
Angular resolved measurement of
scattered light
Bro
1/10/09
System components
Sensor
System controller
Software
Bro
1/10/09
Statistical profile analysis
The scattering value So is a statistical
roughness parameter which is closely related
to the DIN EN ISO profile parameter Rdq
Rdq represents the distribution of the profile
angles; δ and S0 describe the distribution of
the scattering angles φ. (φ = 2 · δ)
I.e. So correlates best with Rdq.
If the machining process does not change,
So or Rdq correlates also with the
vertical parameters Rz or Ra
φ
δ
Probability
P
Scatt. angle φ
Probability
P
Profile angle δ
Rdq
So
φ = 2 ∙ δ
So ~ Σ (φ – φ)
2
· P(φ)
R2
dq ~ Σ (δ – δ)
2
· P(φ)
φ
δ
Bro
1/10/09
Comparison with stylus parameters
Profilometer
Light
scattering
Stylus
profilometer
Part Rz
(µm)
1 1,2
2 1,5
3 1,8
4 1,4
5 3,5
6 2,9
7 1,0
8 1,7
9 2,5
Part So
1 10,5
2 11.8
3 14,0
4 12,0
5 25,3
6 15,7
7 10,8
8 12,9
9 19,8
Correlation measurements to
calculate the curve fitting
parameters a,b
So
Rz
Rz = a·So+b
1 2 3
20
15
10
Samples from production
Rdq
(%)
1,5
1,9
2,1
1,7
7,3
5,1
0,9
2,5
4,7
Bro
1/10/09
Application: 100% in-line measurement
Schleif 5
ALARM
456
1500
So: 24,6
I : 450
M: 0,4
Go part
No go part
Go/No go Trigger
Alarm signal
Teile Nr.
Rz
Teile Nr.
Sigma
Rz
Teile Nr.
Intensität
So: 17,6
I: 456
M: 0,5
I.O. Alarm n.I.O.
So-values
Computer based roughness measurement
1. Sensor trigger detects the part and sends a Start/Stop signal for measurement reading
2. Sensor measures 1000 values/s and transfers So +/- σ value to the PC
3. PC calculates ISO-value (Rdq, Rz, ..) and checks the I/M value (sensor alignment)
4. Exceeding the limit starts the „no go – trigger“ or sends an alarm to realign the sensor
Bro
1/10/09
Application: Profile pattern inspection
Wrong dressing can cause different
surface profile patterns although the
vertical roughness value Rz remains
constant (see picture bottom)
The profile angle parameter Rdq
differentiates this change (see picture
middle)
Also the optical light scattering value
So is able to detect this change within
the same order of magnitude (see
picture top)
In a grinding process the pattern of a
surface profile should not change,
because the functional behaviour of the
surface will be influenced (e.g. wear).
With light scattering measurement this
can be detected easily.
So=9 So=17
Rdq=1,2 Rdq=2,2
Rz=0,5 Rz=0,5
Bro
1/10/09
Benefits
1. Measurement speed Up to 1000 roughness measurements per s
2. Sensor alignment Due to the specially designed OS 500 optics the So value
is hardly influenced by small misalignments of the sensor
(tolerance: working distance: ~ 1 mm, Tilt: ~ 2°)
3. Workpiece speed The workpiece speed does not affect the So value
4. Working distance The measurement distance (sensor – workpiece surface) is
3mm. (with a special light protection adapter, 50 mm is
possible)
5. Vibration Small vibrations do not disturb the measurement (see 3:)
6. Environment Even the harsh environment of the shop floor is acceptable
Bro
1/10/09
Applications
Surface
roughness
Ra << 1µm
Polishing
Grinding
Honing
Rolling
Bro
1/10/09
Form measurement
Absolute measurement of roundness by
means of profile angle technique
Intensity
I
Profile angle δ
Roundness profile
y=∫δ(x)∙dx
OptoSurf
OS
500
x
y
δ
Bro
1/10/09
Roundness measurement
Hommel Tester FMS 4310
Light scattering OptoSurf OS 500
mechanical probe
optical probe
piston pin
Comparison with contact roundness measurement
Bro
1/10/09
Results
(P+V)mech= 0,44µm (P+V)opt= 0,40µm
BoDL1 - Z=06
Profilvergleich FMS (oben) - RM500-03 (unten)
-0,3
-0,2
-0,1
0,0
0,1
0,2
0,3
0 45 90 1
35 1
80 225 270 31
5 360
Bro
1/10/09
Correlation P+V – value of 6 pins
Average of 10 measurements of P+V Values (µm)
0
0.5
1
1.5
2
2.5
3
3.5
4
4.5
5
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5
Mechanical (Hommel FMS 4310)
Optical
(RM
500)
Bro
1/10/09
Amplitude values averaged from 10 measurements (µm)
0
0.2
0.4
0.6
0.8
1
1.2
1.4
1.6
1.8
2
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2
mechanical (Hommel FMS 4310)
Optical
(RM
500)
Correlation of the Fourier components
Bro
1/10/09
Bo06 - Z=06 - RM500-03
Fourierspektrum 2. bis 50. Ordnung
0.074 0.080
0.141
1.000
0.0
0.2
0.4
0.6
0.8
1.0
1.2
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50
Ordnung [-]
Amplitude
[µm]
Example : chatter marks

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OptoSurf Roundness.ppt

  • 1. Bro 1/10/09 Roughness and Form Measurement by means of Light Scattering OptoSurf GmbH I Jagdrain 12 I 76316 Malsch I Germany I info@optosurf.com
  • 2. Bro 1/10/09 Light scattering basics Rough surface φ φ I Smooth surface φ I scatt. angle φ Intensity I Incoming light distribution
  • 3. Bro 1/10/09 Measurement of form and waviness D D Waviness Angle D D D D y x Slope measurement and integration of the angles D1 D2 D3 D4   D  dx y i x
  • 4. Bro 1/10/09 Sensor principle Angular resolved measurement of scattered light
  • 6. Bro 1/10/09 Statistical profile analysis The scattering value So is a statistical roughness parameter which is closely related to the DIN EN ISO profile parameter Rdq Rdq represents the distribution of the profile angles; δ and S0 describe the distribution of the scattering angles φ. (φ = 2 · δ) I.e. So correlates best with Rdq. If the machining process does not change, So or Rdq correlates also with the vertical parameters Rz or Ra φ δ Probability P Scatt. angle φ Probability P Profile angle δ Rdq So φ = 2 ∙ δ So ~ Σ (φ – φ) 2 · P(φ) R2 dq ~ Σ (δ – δ) 2 · P(φ) φ δ
  • 7. Bro 1/10/09 Comparison with stylus parameters Profilometer Light scattering Stylus profilometer Part Rz (µm) 1 1,2 2 1,5 3 1,8 4 1,4 5 3,5 6 2,9 7 1,0 8 1,7 9 2,5 Part So 1 10,5 2 11.8 3 14,0 4 12,0 5 25,3 6 15,7 7 10,8 8 12,9 9 19,8 Correlation measurements to calculate the curve fitting parameters a,b So Rz Rz = a·So+b 1 2 3 20 15 10 Samples from production Rdq (%) 1,5 1,9 2,1 1,7 7,3 5,1 0,9 2,5 4,7
  • 8. Bro 1/10/09 Application: 100% in-line measurement Schleif 5 ALARM 456 1500 So: 24,6 I : 450 M: 0,4 Go part No go part Go/No go Trigger Alarm signal Teile Nr. Rz Teile Nr. Sigma Rz Teile Nr. Intensität So: 17,6 I: 456 M: 0,5 I.O. Alarm n.I.O. So-values Computer based roughness measurement 1. Sensor trigger detects the part and sends a Start/Stop signal for measurement reading 2. Sensor measures 1000 values/s and transfers So +/- σ value to the PC 3. PC calculates ISO-value (Rdq, Rz, ..) and checks the I/M value (sensor alignment) 4. Exceeding the limit starts the „no go – trigger“ or sends an alarm to realign the sensor
  • 9. Bro 1/10/09 Application: Profile pattern inspection Wrong dressing can cause different surface profile patterns although the vertical roughness value Rz remains constant (see picture bottom) The profile angle parameter Rdq differentiates this change (see picture middle) Also the optical light scattering value So is able to detect this change within the same order of magnitude (see picture top) In a grinding process the pattern of a surface profile should not change, because the functional behaviour of the surface will be influenced (e.g. wear). With light scattering measurement this can be detected easily. So=9 So=17 Rdq=1,2 Rdq=2,2 Rz=0,5 Rz=0,5
  • 10. Bro 1/10/09 Benefits 1. Measurement speed Up to 1000 roughness measurements per s 2. Sensor alignment Due to the specially designed OS 500 optics the So value is hardly influenced by small misalignments of the sensor (tolerance: working distance: ~ 1 mm, Tilt: ~ 2°) 3. Workpiece speed The workpiece speed does not affect the So value 4. Working distance The measurement distance (sensor – workpiece surface) is 3mm. (with a special light protection adapter, 50 mm is possible) 5. Vibration Small vibrations do not disturb the measurement (see 3:) 6. Environment Even the harsh environment of the shop floor is acceptable
  • 12. Bro 1/10/09 Form measurement Absolute measurement of roundness by means of profile angle technique Intensity I Profile angle δ Roundness profile y=∫δ(x)∙dx OptoSurf OS 500 x y δ
  • 13. Bro 1/10/09 Roundness measurement Hommel Tester FMS 4310 Light scattering OptoSurf OS 500 mechanical probe optical probe piston pin Comparison with contact roundness measurement
  • 14. Bro 1/10/09 Results (P+V)mech= 0,44µm (P+V)opt= 0,40µm BoDL1 - Z=06 Profilvergleich FMS (oben) - RM500-03 (unten) -0,3 -0,2 -0,1 0,0 0,1 0,2 0,3 0 45 90 1 35 1 80 225 270 31 5 360
  • 15. Bro 1/10/09 Correlation P+V – value of 6 pins Average of 10 measurements of P+V Values (µm) 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Mechanical (Hommel FMS 4310) Optical (RM 500)
  • 16. Bro 1/10/09 Amplitude values averaged from 10 measurements (µm) 0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2 0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2 mechanical (Hommel FMS 4310) Optical (RM 500) Correlation of the Fourier components
  • 17. Bro 1/10/09 Bo06 - Z=06 - RM500-03 Fourierspektrum 2. bis 50. Ordnung 0.074 0.080 0.141 1.000 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 Ordnung [-] Amplitude [µm] Example : chatter marks