1. ِ ِ ّ‫ِ ِنمْ ِ ِ ِحّ ِنمْ ِ ِح‬
‫بسما هللاا الَرحنمنا الَرحميم‬
Kingdom Of Saudi Arabia ‫المملكة العربية السعودية‬
Imam Mohammed Bin Saud
Islamic University ‫جايمعة اليمام يمحمد بن لسعود اللسليمية‬
Faculty of Sciences ‫كلية العلوم‬
Department of Physics ‫قسم الفيزياء‬
RF Discharge
PHYS 471
Dr.Nazir Mustapha
BY Students:
AHMED MUTLAQ ST ID#:429002715
MOHAMMED ASMRI ST ID#:429002676

2. Contnts:
 Introduction
 radio frequency(RF), discharges.
 RF discharges in history .
 RF discharges types.
 application of RF discharges.
 RF discharges important.
 RF Discharge example
 Summery/ Conclusion
 Refrence

3. :Introduction
Interest in the study of processes occurring in radio frequency,
or RF, discharges has increased significantly in the last decade.
this interest has been prompted by the broad.
Radio frequency power is the most common alternating current
(AC) discharge used in plasma technology. RF discharges
embody many of the same qualitative features of the DC glow
discharge, including sheath formation, which creates a strong
electric field resulting in the acceleration of ions and electrons.
At low frequencies both DC and
RF discharges behave similarly, but as frequency is increased,
they substantially differ from each other and a new
phenomenon is observed.
Radio-frequency discharges are of both practical and scientific
interest.

4. radio frequency(RF), discharges
Methods of obtaining plasmas with specific
desirable properties, from the viewpoint of
plasmas physics they are one from of the
nonlinear interaction of an electromagnetic field
and abounded plasma.

5. RF discharges in history
RF discharges attracted the attention of physicists
long before any of their practical applications in
technology were discovered. Thomson, of london's
imperial collage , is said to
Have first observed RF discharges at the turn of
the century lare 1920s, the first studied on RF
discharges appeared , including those of R.W.Wood
since then ,their unusual properties,as well as
their
extraordinary colors and forms ,have been A
constant fascination to researchers the world over.

6. RF discharges types
RF discharges may be divided into three types on
three basis of excitation method or, more
precisely the form of electromagnetic
field/plasma interaction .
1. H-type RF discharges ,corresponds to the
inductive RF.
2. E-type RF discharges ,which corresponds to the
capactiative discharges between RF electrodes.
3. Wave –type RF discharges ,which occurs the
opposite case.

7. application of RF discharges
made a significant contribution and promises
to guarantee further technological progress.
 science and technology.
 Plasma chemistry.
 laser engineering .
 microelectronic technology .
 modern technology .

8. RF discharges important
RF discharges are particularly
important in :
 ion generators for industrial accelerators
used in microelectronics .
 research accelerators used in
experimental nuclear physics.

9. RF Discharge Example
 The Experiment from Stanford
Plasma Physics Laboratory for Simple
RF Discharge
(Helicon Setup).

10. Simple RF Discharge

11. Running in Helicon Mode

14. Conclusion:
We have examined RF discharges an know
some information that We can Benefit From it
in Field of study, learning and scientific
progress.
in this research talk about Rf discharges In
general and The history of RF Discharges,
Types, application and we learn how is RF
Discharges is important in microelectronics.
and we took very good example Of some
pictures in Laboratory

15. Refrence:
 Radio Frequency Discharge - Valery
Godyak Book
 PLASMA AIDED FINISHING OF
TEXTILE MATERIALS By SUZANNE
RODDEN MATTHEWS
 Stanford Plasma Physics Laboratory

16. Thank You
...Questions Welcomed