PacTec 2nd Source provides replacement JDS Uniphase and Spectra Physics lasers with new argon tubes used on KLA inspection systems. We provide argon lasers used on various KLA systems using 30mW and 75mW lasers.

1. Alternative for Consumables Used on Semiconductor Equipment
3/9/2017Pactec 2nd Source, Inc. - Confidential

2. Laser
Replacement
Consumables Metrology
Equipment
3/9/2017Pactec 2nd Source, Inc. - Confidential
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PacTec 2nd Source

3. PacTec 2nd Source
3/9/2017Pactec 2nd Source, Inc. - Confidential
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Rebuild of air cooled argon lasers for use in metrology systems.

4. JDS Uniphase and Spectra Physics:
 Lasers are rebuilt using a new laser plasma tube.
 The new plasma tubes are manufactured in a
controlled cleanroom environment using standards
commonly used in the semiconductor industry for
component manufacturing.
 Once built, the laser tube is tested to verify compliance
with manufacturer’s specifications.
 During the manufacturing process the tube
specifications are tracked and documented.
New Plasma Tube
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

5. Old Tube:
 The returned laser head assembly is inspected and
when possible tested to verify cause of failure.
 The laser head is disassembled and old tube removed.
 Laser head prepared for new tube installation.
New Tube:
 Several new optics are installed and aligned on new
tube.
 New tube is pressurized and tested.
 New tube is burned in for several hours.
 New tube is installed in laser head.
Laser Verification and Laser Tube Assembly
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

6. Several stages of alignment required during the
rebuild process of a replacement laser:
 New optics to laser tube.
 Laser body to laser head assembly.
 Alignment of beam for near field and far field for tube
to laser head positioning.
Laser Alignment
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

7. Laser stabilization and calibration:
 All final alignments are made once the laser is stabilized.
 Laser stability is achieved when the manufacturers system power
requirements and beam profile specifications are established.
 Calibration specification is started by verifying the power and voltage output
required by the system is correct.
 Final calibration is accomplished once the proper tube voltages, current and
power output of the laser head are obtained.
 Total burn-in time for tube as standalone and once installed in laser head is
over 24 hours.
Laser Final Test
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

8. Laser Certification 8
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

9. Protecting the alignment for both the optics in the laser, as well
as the tube alignment to the main body, is critical. The rebuilt
laser is shipped in a custom built box made specifically for the
JDS laser assembly.
Laser Packaging
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

10. PacTec warranty:
 Warranty terms cover all argon lasers we sell.
 Laser to be free from defects in materials or workmanship.
 Warranty period for 30mW laser is 5,000 (five thousand) hours or
12 (twelve) months from the date of shipment, whichever first
occurs.
 Warranty period for 75mW laser is 5,000 (five thousand) hours or
10 (ten) months from the date of shipment, whichever first occurs.
 Warranty returns for 2016 were <5% of total shipped.
Laser Warranty
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

11. Argon Laser Shipments
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

12. Laser support:
 PacTec has several model lasers available for exchange.
 Our spare lasers when available can ship ASAP.
 Our standard lead-time is 3-4 weeks.
 For quick turnaround, we have forecasted “on the shelf” laser tube
availability for both the 30mW and 75mW lasers. New tubes can
be installed in a customer owned laser and shipped within 5 days
once laser is received.
Laser Availability
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

13. Model OEM JDS KLA/Tencor
Part
Description
Part Number Part Number
2500
KT
JDSU
JDS Controller PS Controller
Surfscan 62XX
KT
JDSU
2214-30SLQT
2214-30SLQTA
2214-30SLQTC
0105128-000 30mw Laser
Surfscan 64XX
KT
JDSU
2214-30SLQT
2214-30SLQTA
2214-30SLQTC
0105128-000
0158290-000
30mw Laser
Surfscan 76XX
KT
JDSU
2214-30SLQTT 366153 30mw Laser
Surfscan 77XX
KT
JDSU
2214-30SLQTT 366153 30mw Laser
SP1
KT
JDSU
2214-30SLQTA
2214-30SLQTC
0224471-001
365998
30mw Laser
AIT 1
KT
JDSU
2214-30SLQRT 364479 30mw Laser
Laser: 30mW New Tube Rebuilds
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

14. Laser: 75mW New Tube Rebuilds
Model OEM JDS
AMAT or
KLA/Tencor
Part
Description
Part Number Part Number
AMAT
Orbot
WF 720
WF 736
AMAT
JDSU
2213-75SLRAM 21104844 75mW Laser
ADE CR KTTJDSU 2213-75SLT 75mW Laser
SP1 DLS
KT
JDSU
2213-75TSLKTB
With Rings
0278424-000 75mw Laser
SP1 DLS
KT
Spectra Physics
185P-F1209 0278424-000 75mW Laser
AIT,
AIT 2, XP
KT
JDSU
2213-75TSLKTA
2213-75TSLKTB
2213-75TSLKTD
0106301-001
21171804
75mw Laser
AIT 3
KT
JDSU
2213-75TSLKTB 0106301-001 75mw Laser
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

15. Various Laser Head New Tube Rebuilds
Model OEM
JDS
Part Number
Part Number
Part
Description
Thermawave
420
Thermawave
JDSU
2211-20SLAT 20mw Laser
Estek
Estek
JDSU
2214-20SL 20mw Laser
Ultrapointe
Ultrapointe
JDSU
2214-25MLUP 25mw Laser
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

16. ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT
Confidential: Internal Distribution Only
Repaired Argon Laser Power Supplies
Model OEM Model Number Part Number
Part
Description
KLA Tencor JDSU 2114B-30SLT 168807
30mW Laser
Power Supply
KLA Tencor JDSU 2113-75SLT
75mW Laser
Power Supply
KLA Tencor Spectra Physics 285-FA01 0029941-001
75mW Laser
Power Supply
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ALTERNATIVE FOR CONSUMABLES USED ON SEMICONDUCTOR EQUIPMENT

17. ALTERNATIVE FOR CONSUMABLES USED ON
SEMICONDUCTOR EQUIPMENT
Repaired Argon Laser Power Supplies
Confidential: Internal Distribution Only
Model OEM Model Number Part Number
Part
Description
KLA Tencor JDSU 2114B-30SLT 168807
30mW Laser
Power Supply
KLA Tencor JDSU 2113-75SLT
75mW Laser
Power Supply
KLA Tencor Spectra Physics 285-FA01 0029941-001
75mW Laser
Power Supply
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18. ALTERNATIVE FOR CONSUMABLES USED ON
SEMICONDUCTOR EQUIPMENT
Confidential: Internal Distribution Only
Thank you
Contact Information:
Ed West
PacTec 2nd Source, Inc.
cell: 949 735-2567
office: 360 719-1822
email to: EdWest@PacTec2ndSource.com
website: www.PacTec2ndSource.com
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