Replacement Parts for PacTec Photolithography Systems
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PacTec 2nd Source optical filter replacements used on Canon micro-photolithography equipment in the semiconductor industry
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Replacement Parts for PacTec Photolithography Systems
- 1. Model OEM Part Number Part Description Image PacTec Part Number 5500 iZ BN3-5564 i-line Filter Y60-1504 Y60-2229 Canon 71052 5500 IZ+ BN3-1395-000 018 ND Filter, T = 18% Canon 71046 5500 IZ+ BN3-1395-000 035 ND Filter, T = 35% Canon 71049 5500 IZ+ BN3-1395-000 070 ND Filter, T = 70% Canon 71050 5500 iZa BN3-1939 Glass, Dust Proof Canon 71051 5510 iZ BN3-5564 i-line Filter Y60-2229 71052 5550 iZ BN3-5564 i-line Filter Y60-2229 71052 5500 iZa, iZa+ BN3-5449 Exp Shutter Sub-Filter 74011 5500 iZ BF6-8188 Seal Glass 71058 5500 iZ Y60-2375 Sheet Glass 71059 Canon New Repalcement Parts Confidential Page 1 Ed West (360) 719-1822 10/12/2015
- 2. Model OEM Part Number Part Description Image PacTec Part Number 5500 iZ BN3-5349 Glass, Dust Proof 71060 5500 iZ GY1-0199 Lens Unit C-Type BG5-6227 BN3-2391 71081 ES3 BF6-5741 Lens Unit, Cover Glass, 100mm 74009 ES3 BN9-3914 Parallel Plain Plate, 65mm 74010 ES4 BN3-1668-000 Plane Parallel Plate 74007 ES4 BF6-8729-000 Convex Lens Unit 74008 ES6 Y60-1846 Parallel Plane Plate, Illumination System Cover Lens 71047 ES6 BF7-1810 Convex Lens Unit, Illumination Uniform System Guide Lens 71048 ES6 BN3-1993-000-007 ND Filter = 7% 71053 ES6 BN3-1993-000-012 ND Filter = 12% 71061 ES6 BN3-1993-000-017 ND Filter = 17% 71062 ES6 BN3-1993-000-025 ND Filter = 25% 71063 Confidential Page 2 Ed West (360) 719-1822 10/12/2015
- 3. Model OEM Part Number Part Description Image PacTec Part Number ES6 BN3-1993-000-029 ND Filter = 29% 71064 ES6 BN3-1993-000-034 ND Filter = 34% 71065 ES6 BN3-1993-000-040 ND Filter = 40% 71066 ES6 BN3-1993-000-047 ND Filter = 47% 71067 ES6 BN3-1993-000-055 ND Filter = 55% 71068 ES6 BN3-1993-000-065 ND Filter = 65% 71069 ES6 BN3-1993-000-085 ND Filter = 85% 71056 ES6 BN3-1993-000-100 ND Filter = 100% 71070 ES6 Y60-2293-000 Seal Glass Unit (40w) 74017 ES6a Y60-2293-000 Seal Glass Unit (40w) 74017 ES6a BN3-2002-000-007 ND Filter = 7% 71054 ES6a BN3-2002-000-012 ND Filter = 12% 71071 Confidential Page 3 Ed West (360) 719-1822 10/12/2015
- 4. Model OEM Part Number Part Description Image PacTec Part Number ES6a BN3-2002-000-017 ND Filter = 17% 71072 ES6a BN3-2002-000-025 ND Filter = 25% 71073 ES6a BN3-2002-000-029 ND Filter = 29% 71055 ES6a BN3-2002-000-034 ND Filter = 34% 71074 ES6a BN3-2002-000-040 ND Filter = 40% 71075 ES6a BN3-2002-000-047 ND Filter = 47% 71076 ES6a BN3-2002-000-055 ND Filter = 55% 71077 ES6a BN3-2002-000-065 ND Filter = 65% 71078 ES6a BN3-2002-000-085 ND Filter = 85% 71079 ES6a BN3-2002-000-100 ND Filter = 100% 71080 ES6a Y60-2559 Lens, Filter (4% Comp) 74012 ES6a Y60-2532 (Convex?) Lens, Window Used on Assy BN3-5594 74013 Confidential Page 4 Ed West (360) 719-1822 10/12/2015
- 5. Model OEM Part Number Part Description Image PacTec Part Number ES6a GY1-0019 Cylindrical Concave Lens 74014 EX4 BN9-7939 (Assembly BG3- 2524) Image Shifter #1 Minor Wedge Filter 71006 EX4 BN9-7942 (Assembly BG3- 2525) Image Shifter #2 Major Wedge Filter 71007-01 EX4 BN9-2803 Laser Seal Glass 71011 EX4 Y60-1160 Main Seal Glass 71022-01 EX4 BN9-7943 Image Shifter #1 Exit Glass #3 71028 EX4 BN9-7941 Image Shifter #2 Exit Glass #6 71029 EX4 BN9-7940 Image Shifter #1 Entrance Glass #1 71030 EX4 BN9-7938 Image Shifter #2 Entrance Glass #4 71031 EX4 BN9-7939 BN9-7942 BN9-7943 BN9-7941 Image Shifter 1 and 2, Optics Package 71040 EX4 Y60-1156 Wedge Unit, 2 Pieces, (each mounted in separate disc) 71044 EX4 Olympus D.C. Motor BA524 L001 Confidential Page 5 Ed West (360) 719-1822 10/12/2015
- 6. Model OEM Part Number Part Description Image PacTec Part Number EX5 Used on Assembly BG3-2796 Image Shifter Optic 71012 EX5 Used on Assembly Y60-1275 Laser Seal Glass 71017-01 EX5 BN9-2948 Seal Glass 71057 FPA 1550 Mark IV Y60-0603-020 G-line 436nm bandpass filter 71045 FPA 1550 Mark IV Y60-0606-020 G-line 436nm bandpass filter 71003 FPA 2000 Y60-0771-000 1st Condenser Lens Assy, lower, 365.5nm 71015 FPA 2000 BN9-6210 FRA Sub Filter 71023 FPA 2000 BN9-6211 FRA I-line Filter 71039 FPA 2000 FPA 2500 Y60-0671-000 Bandpass Filter, i-line 125mm, FWHM 4.0 +/- 0.4 365.5 +/- 0.8nm 71001 FPA 2000 FPA 2500 Y60-0672-000 Bandpass Filter, i-line 125mm, FWHM 4.0 +/- 0.4 365.5 +/- 0.8nm 71001 FPA 2500 Y60-0794 1st Condenser Lens Assy (lower) 74003 FPA 2500 BN9-7269-000 Bandpass Filter, i-line 125mm, FWHM 4.0 +/- 0.4 365.5 +/- 0.8nm 71001 Confidential Page 6 Ed West (360) 719-1822 10/12/2015
- 7. Model OEM Part Number Part Description Image PacTec Part Number FPA 2500 FPA 3000 BN9-6634-000 FRA Sub-Filter 71008 FPA 2500 FPA 3000 BN9-6635-000 FRA i-Line filter 71009 FPA iW BN9-7513-000 Bandpass Filter, i-line 165mm, FWHM < 4.0nm 365.5 +/- 0.5nm 71002 FPA 3000 BN3-1845 Bandpass Filter, i-line 165mm, FWHM < 4.0nm 365.5 +/- 0.5nm 71002 FPA 3000 Y75-6039 Cold Mirror (edge bead removal) 71027 FPA 3000 Y60-0862 1st Condenser Lens Assy (lower) 71019 FPA 3000 Cover Glass (1st Condenser Lens Assy Upper, Y60-8063) 71020 FPA 3000 Cover Glass 3rd Condenser Lens Assy (Y60-1301) 74005 FPA 3000 BN9-7775 Upper Plate 71014 FPA 3000 BN9-7774 Lower Plate 71018 BN9-7069 A-Scope Sheet Glass 74015 FPA 3000 Cover Glass 3rd Condenser Lens Assy (Y60-1301) 74016 Confidential Page 7 Ed West (360) 719-1822 10/12/2015