The document describes Core Wafer Systems' Apollo On-wafer Magnetic Test System for characterizing magnetic devices like MRAM on wafer. It provides uniform magnetic fields up to 100 Oersted continuous or 900 Oersted pulsed. Data can be analyzed instantly using ASUR RDA software. Test libraries are available for reliability measurements, magnetoresistance, non-volatile memory, and magnetic field calibration. The system uses a Suss Microtec 300mm prober for low-noise DC and high-frequency RF/microwave probing of devices.

1. Core Wafer Systems
Apollo On-wafer Magnetic Test System
• Magnetic fields in X and Y, optionally Z
• 100 Oersted continuous field
• 900 Oersted low-duty-cycle burst: triangle or pulse
• Uniformity better than 2% within 5 mm cube
surrounding probe contact
• Measurement libraries available
Magnetics: Quasi-static R-H, R-i
NVM: endurance, margin
Noise: 1/f, microwave
300 mm on-wafer DC and RF/Microwave test for
technology development and reliability characterization
of GMR, Spintronic, Ferrite magnetic technologies.
MRAM and Hall Effect magnetic devices

2. ASUR RDA Data Analysis
Using ASUR SDR’s data output for Core Wafer System’s ASUR RDA
data analysis software, data analysis for quality control, reliability
lifetime and wafermap analysis is available instantly.
Data is written in ASCII comma-separated format for easy access
and conversion to other data analysis systems you may already
use.
Core Wafer System’s Apollo On-wafer Magnetic Test System enables on-wafer magnetic
device characterization for technologies such as spintronic and GMR magneto-resistor cells, Hall-
effect magnetic field sensors and monolithic ferrite devices.
Süss Microtec ProbeShield® for DC and
RF/Microwave probing
The Core Wafer Systems Apollo Magnetic Test
System uses the Süss Microtec PA300PS 300 mm
Semiautomatic Probe System featuring
ProbeShield®
technology for truly convenient and
fully shielded measurements for low frequency dc
noise and high frequency RF/Microwave measure-
ments or fast rise-time pulse performance and
s-parameters.
High Performance DC and high frequency probing
RF/Microwave and DC pobing of the device is made using
special magnetically neutralized Süss Microtec Multi-Z
probes. This high performance probe technology allows for
impedance controlled measurements up to 26 GHz, at
temperature (-60C - 200C) with one million touchdown
lifetimes.
ASUR SDR:
The Industry Proven PC-based On-wafer Test Platform
ASUR SDR provides a robust PC-based testplan execution platform
with full prober automation to collect parametric technology devel-
opment data from your magnetic devices.

3. Parametric Test Structure Measurement Library
Parametric test library including 2-wire and 4-wire kelvin resistance,
basic diode and MOS measurements and other common parametric
measurements.
0.0 0.2 0.4 0.6 0.8 1.0
0.0000
0.0005
0.0010
0.0015
0.0020
0.0025
0.0030
General Microelectronic Reliability Library
JEDEC compliant reliability measurements based on CWS PDQ-WLR
including TDDB, EM and HCI measurement. Industry-standard
library for CMOS production WLR measurement.
Resistance, Ohms
-100 -80 -60 -40 -20 0 20 40 60 80 100
0
200
400
600
800
Magnetic Field, Gauss
Magnetoresistor Library
Quasistatic R-vs-H measurements using a variety of
magnetic field options including simple on-axis
(X,Y or Z), rotation in XY vector field.
Angular resolution of 1° allows magnetic anisotropy
to be characterized in any direction.
Test Libraries availble for Magnetic Devices on the Apollo test system
Libraries are available to address specific test needs involving your magnetic device technology
development. These include:
Magnetic Field Utility Library
Calibrate and map magnetic field pattern for
validation/calibration of magnetic bias. Supports
GMR 3-axis telsameter in 1, 2 or 3 simultaneous
axis measurement. Read-back validation of coil
drive current and voltage over time for validation of
field levels.

4. © Core Wafer Systems, Inc.
Product specifications and descrip-
tions in this document are subject to
change without notice
For more information contact
Core Wafer Systems at:
sales@corewafer.com
http://www.corewafer.com/
Windows and Windows XP are U.S.
registered trademarks of Microsoft
Corporation.
ProbeShield is a U.S. registered
Nanometer Era
Reliability and
Technology Development
Core Wafer Systems brings
advanced test hardware and
software to deep nanometer
device reliability and technology
development challenges to make
the next generations of electronic
devices technologically and
economically successful.
For test solutions for deep
nanometer CMOS to next
generation non-volatile memory
to the next technology, whatever
it may be, Core Wafer Systems
has the latest test technologies
for your challenge.
Nonvolatile Memory Library
Measure and characterize standard NVM
measurements including cell cycle endurance
and cell cycle level and width margin. Define
custom write/erase cycle pulse waveforms and
logic level measurements and threshold defini-
tions.
0 1 2 3 4 5 6 7 8 9 10
0.0
0.5
1.0
1.5
2.0
Log(cycles)
Threshold,Volts
Logic 1
Logic 0
Apollo Test System Package
Includes:
300 mm prober
Magnetic Bias System
DC Parametric Hardware
Optional:
Network Analyzer
Pulse Generators
Oscilloscope
Reliability Data Analysis
Software
Optional Test System Libraries:
Apollo Diagnostic Library
IC Parametric Library
IC Reliability Library
NVM Test Library