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SIA “NanoOptoMetrics”
Registration no.: 50103739091
VAT no.: LV50103739091
Legal address: Katoļu iela 35-1, Riga, LV-1003, Latvia
1
Nanooptometrics (NOM) optical profilometer technology SPECIFICATIONS
System
Measuring
Principle
Optical Imaging Profilometry (2D, 3D,
non-contact, non-destructive)
Measurement
technique
Broad-band (white light) interferometry
Measurement
modes
Scanning /Phase-Shifting
Maximum
Aperture Size
100mm (4”) available
200mm (8”)/300mm (12”) possible
Camera resolution Up to 12 Megapixels
Mounting Options Horizontal and Vertical
Performance
Step height std.
repeatability
λ/1’000
Step height
reproducibility
λ/700
Lateral Resolution
0.5 μm – 300 μm (depends on the FOV
and camera/lens resolution)
Z-feature height
capacity
Up to 100 mm
Surface Height
Resolution
λ/1’000
Vertical Scan
Speed
Up to 50 µm/sec
Data acquisition &
processing time
1-150 sec. (depends on camera
resolution) for the phase-shifting mode
0.2-30 sec. per μm for the scanning
mode
Digitization 8-12 bits
NOM profilometer configuration and industry-unique features
NOM Profilometer
Configuration
Field of View(FOV) NOM Industry-Unique Capabilities Concise Statement
Competitors
Evaluated
Small FOV
(Microscope-based)
0.5 mm to 10 mm
(competitors
typically <15 mm)
- Fizeau interferometer and plane
beam illumination enable better
capability to measure deep or high
aspect ratio structures
- Tolerant to vibration w/o vibro-
isolating table
NOM has industry-unique
measurement capability for
deep trench and high aspect
ratio stuctures, and built-in
vibration isolation algorithm.
Bruker, Zygo,
Taylor-Hobson,
Nikon, Leica
Large FOV
(Large aperture)
10 mm to 300 mm
(competitors
typically 100 mm
and greater)
- 100 mm feature height capacity
- Step height and complex
topography
- Discontinuous surfaces
- Optical thickness of films and plates
- Surface waviness measurement
NOM is only company that
combines large FOV with
capability to measure
complex and discontinuous
surface topography with
feature heights up to 100
mm.
4D Technology,
Zygo, KLA-
Tencor
NOM profilometer capabilities
 Step Height and Complex Topography Measurement  Roughness / Optical form measurement
 Discontinuous Surface Measurement  No Sample Size / Weight Limitation
 Measurement of optical thicknesses of films and plates  Integration into Production Line
 Tolerant to Vibration  Distance measurement
 Selectivity along the line of sight
SIA “NanoOptoMetrics”
Registration no.: 50103739091
VAT no.: LV50103739091
Legal address: Katoļu iela 35-1, Riga, LV-1003, Latvia
2
NOM profilometer limitations
a) The limitation of maximum tilt of a measured surface appears if the measured surface is smooth i.e. it
reflects the probing radiation without scattering it. The maximum tilt is in inverse proportion to lateral
resolution. For example, it is 1 degree for 14 μm lateral resolution and 10 degrees for 1.4 μm lateral
resolution.
b) The limitation of optical thickness of measured layers: the NOM Profilometer can measure multi-layer
structures (each layer can be measured independently) if optical thicknesses of these layers are not
less than 10 μm.
c) Reflectivity of measured surfaces from 0,1 to 100%.

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NOM_specifications

  • 1. SIA “NanoOptoMetrics” Registration no.: 50103739091 VAT no.: LV50103739091 Legal address: Katoļu iela 35-1, Riga, LV-1003, Latvia 1 Nanooptometrics (NOM) optical profilometer technology SPECIFICATIONS System Measuring Principle Optical Imaging Profilometry (2D, 3D, non-contact, non-destructive) Measurement technique Broad-band (white light) interferometry Measurement modes Scanning /Phase-Shifting Maximum Aperture Size 100mm (4”) available 200mm (8”)/300mm (12”) possible Camera resolution Up to 12 Megapixels Mounting Options Horizontal and Vertical Performance Step height std. repeatability λ/1’000 Step height reproducibility λ/700 Lateral Resolution 0.5 μm – 300 μm (depends on the FOV and camera/lens resolution) Z-feature height capacity Up to 100 mm Surface Height Resolution λ/1’000 Vertical Scan Speed Up to 50 µm/sec Data acquisition & processing time 1-150 sec. (depends on camera resolution) for the phase-shifting mode 0.2-30 sec. per μm for the scanning mode Digitization 8-12 bits NOM profilometer configuration and industry-unique features NOM Profilometer Configuration Field of View(FOV) NOM Industry-Unique Capabilities Concise Statement Competitors Evaluated Small FOV (Microscope-based) 0.5 mm to 10 mm (competitors typically <15 mm) - Fizeau interferometer and plane beam illumination enable better capability to measure deep or high aspect ratio structures - Tolerant to vibration w/o vibro- isolating table NOM has industry-unique measurement capability for deep trench and high aspect ratio stuctures, and built-in vibration isolation algorithm. Bruker, Zygo, Taylor-Hobson, Nikon, Leica Large FOV (Large aperture) 10 mm to 300 mm (competitors typically 100 mm and greater) - 100 mm feature height capacity - Step height and complex topography - Discontinuous surfaces - Optical thickness of films and plates - Surface waviness measurement NOM is only company that combines large FOV with capability to measure complex and discontinuous surface topography with feature heights up to 100 mm. 4D Technology, Zygo, KLA- Tencor NOM profilometer capabilities  Step Height and Complex Topography Measurement  Roughness / Optical form measurement  Discontinuous Surface Measurement  No Sample Size / Weight Limitation  Measurement of optical thicknesses of films and plates  Integration into Production Line  Tolerant to Vibration  Distance measurement  Selectivity along the line of sight
  • 2. SIA “NanoOptoMetrics” Registration no.: 50103739091 VAT no.: LV50103739091 Legal address: Katoļu iela 35-1, Riga, LV-1003, Latvia 2 NOM profilometer limitations a) The limitation of maximum tilt of a measured surface appears if the measured surface is smooth i.e. it reflects the probing radiation without scattering it. The maximum tilt is in inverse proportion to lateral resolution. For example, it is 1 degree for 14 μm lateral resolution and 10 degrees for 1.4 μm lateral resolution. b) The limitation of optical thickness of measured layers: the NOM Profilometer can measure multi-layer structures (each layer can be measured independently) if optical thicknesses of these layers are not less than 10 μm. c) Reflectivity of measured surfaces from 0,1 to 100%.