The document discusses a thin film measurement solution for Indium Tin Oxide (ITO) using spectroscopic reflectance measurement systems. The mprobe UV-VIS-R system was utilized to measure the thickness and optical constants (n & k) of ITO films deposited on glass and silicon wafers, with results showing variance in optical constants based on deposition conditions. Results from the measurements included specific thickness values and optical dispersion using classical oscillator approximation.

1. Thin Film Measurement solution
Software, sensors, custom development
and integration
Spectroscopic Reflectance Measurement of ITO
ITO is widely used as a transparent contact in many applications. Optical
constants of the ITO frequently depend on the deposition conditions. But, for good
quality ITO, variations are relatively small
MProbe UVVisSR system (200-1000nm) can be successfully used to measure both
thickness and n & k of ITO.
ITO film was deposited on a float glass and on Si wafer. Measurement of the ITO film on
glass was done with the MProbe UVVisSR system, optical dispersion of the ITO was
represented using classical oscillator approximation and both thickness and n&k were
determined.
ITO film on Si was measured using MProbe Vis system (400-1000nm) and only
thickness was determined (n&k data was taken from the first measurement)
Fig. 1 ITO on glass measurement result: fit of the model to measured reflectance.
Thickness (193nm) and n&k were measured
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2. Fig, 2 ITO Measurement results: n&k spectrum (dispersion represented using classical
oscillator)
Fig, 3. ITO on Si measurement result: fit of the model to measured reflectance. Using
MProbe Vis system. Only thickness (124nm) was determined. n& k data was taken from
the previous measurement.
83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com